CN107871694A - Applying device, coating method and organic el display - Google Patents

Applying device, coating method and organic el display Download PDF

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Publication number
CN107871694A
CN107871694A CN201710864656.1A CN201710864656A CN107871694A CN 107871694 A CN107871694 A CN 107871694A CN 201710864656 A CN201710864656 A CN 201710864656A CN 107871694 A CN107871694 A CN 107871694A
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China
Prior art keywords
light
emitting zone
emitting
color
spaced intervals
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Chinese (zh)
Inventor
篠木武虎
林辉幸
大岛澄美
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention provides a kind of applying device for the admissible error that can relax the landing positions of drop in a scanning direction.The applying device has：The deliverying unit of multiple shower nozzles is included, the shower nozzle is disposed with multiple nozzles in a first direction；Keep the board holder of substrate；With the travel mechanism for relatively moving deliverying unit and board holder in the second direction intersected with first direction, deliverying unit discharges the drop for forming luminescent layer from nozzle to each opening portion for the separation levee being previously formed on the substrate kept by board holder, luminescent layer has the light-emitting zone group arranged at spaced intervals in a second direction by regulation order by the multiple light-emitting zones for the light for sending different colours, multiple light-emitting zones of at least one opening portion across light that is adjacent in a second direction at spaced intervals and sending same color.

Description

Applying device, coating method and organic el display
Technical field
The present invention relates to applying device, coating method and organic el display.
Background technology
In the prior art, it is known that have using organic EL (Electroluminescence) luminous light emitting diode Machine light emitting diode (OLED：Organic Light Emitting Diode).Shown using organic EL of Organic Light Emitting Diode Show device, it is thin, light and power consumption is low, and with outstanding in terms of response speed or angle of visibility, contrast the advantages of.Cause This, it is noticeable in recent years as flat-panel monitor of future generation (FPD).
Organic Light Emitting Diode includes：Form the anode on substrate；On the basis of anode, opposite with substrate one is arranged on The negative electrode of side；With the organic layer of setting between the anode and the cathode.Organic layer, such as go that from anode to negative electrode there is hole successively Implanted layer, hole transporting layer, luminescent layer, electron supplying layer and electron injecting layer.In the formation of luminescent layer etc., using spraying side The applying device of formula.The applying device is by the droplet applying of the coating liquid comprising luminescent material on substrate.Pass through drying, sintering The overlay and form luminescent layer (for example, referring to patent document 1).
Luminescent layer for example formed with：Include the red light emitting layer for the red illuminating material for sending red light；It is green comprising sending The green light emitting layer of the green luminescent material of coloured light；With the blue light-emitting layer for including the blue emitting material for sending blue light.Shape The opening portion of preformed separation levee is applied into coating liquid used in these luminescent layers.Separation levee is for example using photoresist Dosage form by photoetching treatment into forming defined pattern.Separation levee is by the way that the coating liquid of red light emitting layer, green light emitting layer are used Coating liquid and the coating liquid of blue light-emitting layer separate, to prevent above-mentioned coating liquid from mixing.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2016-77966 publications
Invention technical problems to be solved
The top view to draw a design that Fig. 1 is described for the applying device in the example of expression prior art.It is right in Fig. 1 Luminescent material identical region imposes identical filling pattern.In addition, in Fig. 1, X-direction and Y-direction are orthogonal level Direction, Z-direction are the vertical orthogonal with X-direction and Y-direction.Y-direction is the multiple sprays for the drop for discharging identical coating liquid The column direction of mouth arrangement.On the other hand, X-direction is the scanning direction orthogonal with Y-direction.In addition, column direction and scanning direction can , can also be non-orthogonal to intersect.
Organic el display is in each pixel for example with sending the red light-emitting area 2R of red light, send green light Green light-emitting area 2G and send the blue light-emitting area 2B of blue light.Adjacent light-emitting zone is separated by separation levee 5, separation levee 5 Whole light-emitting zones are surrounded one by one.
Red light-emitting area 2R, green light-emitting area 2G and blue light-emitting area 2B, with this sequentially in X-direction interval Ground arranges repeatedly, so as to form light-emitting zone group 3.The light-emitting zone group 3 in the Y-direction intersected with X-direction at spaced intervals Arrangement.Therefore, in the Y direction, the light-emitting zone for sending the light of same color arranges repeatedly.
Applying device is while change the position relative to multiple nozzles, substrate the X-directions arranged in Y-direction, on one side Drop is discharged from nozzle to the opening portion of separation levee 5.
In recent years, in order that the picture element density of organic el display becomes big, it is desirable to reduce the area of the light-emitting zone of sub-pixel. Therefore, the size of the X-direction of light-emitting zone becomes closer to the diameter of the drop from nozzle discharge.
In the prior art, the admissible error of the landing positions of drop in the X direction is small, if drop is in the land of X-direction Position is from target location slightly offset from then coating liquid can overflow from the opening portion of separation levee 5, different types of coating liquid mixing be present Situation.
The content of the invention
The present invention is to complete in view of the above problems, and its main purpose is, there is provided one kind can relax drop and scan The applying device of the admissible error of landing positions on direction.
For solving the technological means of problem
To solve the above problems, the mode of the present invention provides a kind of applying device, it has：Include multiple shower nozzles Deliverying unit, above-mentioned shower nozzle are disposed with multiple nozzles in a first direction；Keep the board holder of substrate；With with it is upper Stating makes the travel mechanism of above-mentioned deliverying unit and aforesaid substrate maintaining part relative movement in the second direction of first direction intersection, on State deliverying unit respectively opening from said nozzle to the separation levee being previously formed on the aforesaid substrate kept by aforesaid substrate maintaining part Oral area discharges the drop for forming luminescent layer, above-mentioned luminescent layer have by send multiple light-emitting zones of the light of different colours by The light-emitting zone group that is arranged at spaced intervals in above-mentioned second direction of regulation order, at least one above-mentioned opening portion across every It is adjacent in above-mentioned second direction and send multiple light-emitting zones of the light of same color to open compartment of terrain.
Invention effect
According to mode of the present invention, there is provided a kind of landing positions that can relax in scanning direction drop allow to miss The applying device of difference.
Brief description of the drawings
Fig. 1 represents the top view to draw a design that the applying device in the example of prior art is described.
Fig. 2 is the top view for representing the organic el display in an embodiment.
Fig. 3 is the sectional view for the major part for representing the organic el display in an embodiment.
Fig. 4 is the flow chart for the manufacture method for representing the Organic Light Emitting Diode in an embodiment.
Fig. 5 is the sectional view for representing the substrate of overlay formed in an embodiment.
Fig. 6 is to represent the sectional view of Fig. 5 overlay decompression, dried substrate.
Fig. 7 is the top view for representing the base plate processing system in an embodiment.
Fig. 8 is the top view for representing the applying device in an embodiment.
Fig. 9 is the side view for representing the applying device in an embodiment.
The top view to draw a design that Figure 10 is described by the applying device in one embodiment of expression.
Figure 11 is to represent the top view to draw a design in the first variation.
Figure 12 is to represent the top view to draw a design in the second variation.
Description of reference numerals
10 substrates
13 Organic Light Emitting Diodes
21 anodes
22 negative electrodes
23 organic layers
26 luminescent layers
26R red light emitting layers
26G green light emitting layers
26B blue light-emitting layers
261R red light-emitting areas
261G green light-emitting areas
261B blue light-emitting areas
262 light-emitting zone groups
31 opening portions
31R red opening portion
31G greens opening portion
31B bluenesss opening portion
100 base plate processing systems
123a applying devices
151 chucks
152 chuck drive portions
160 drop deliverying units
161 bearing supports
162 shower nozzles
163 nozzles.
Embodiment
Hereinafter, referring to the drawings, the mode for implementing the present invention is illustrated.In the drawings, for identical or corresponding Structure, be accompanied by identical or corresponding symbol, and omit the description.
<Organic el display>
Fig. 2 is the top view for representing the organic el display in an embodiment.One unit of enlarged representation in Fig. 2 The circuit of circuit 11.
Organic el display has：Substrate 10；The multiple unit circuits 11 arranged on the substrate 10；Set on the substrate 10 Scan line drive circuit 14；The data line drive circuit set on the substrate 10.By connecting with scan line drive circuit 14 In the region that the multiple scan lines 16 connect and the multiple data wires 17 being connected with data line drive circuit 15 surround, setting unit electricity Road 11.Unity loop 11 includes TFT layer 12 and Organic Light Emitting Diode 13.
TFT layer 12 has multiple TFT (Thin Film Transistor：Thin film transistor (TFT)).A kind of TFT has switch member The function of part, another TFT have the work(of the current control element of the magnitude of current flowed through in control Organic Light Emitting Diode 13 Energy.TFT layer 12 is worked by scan line drive circuit 14 and data line drive circuit 15, is supplied to Organic Light Emitting Diode 13 Electric current.TFT layer 12 is arranged at each unity loop, and multiple unity loops 11 can be controlled independently.In addition, TFT layer 12 can be with For in general structure, the structure shown in Fig. 2 is not limited to.
In addition, the type of drive on organic el display, is in the present embodiment active matrix mode, but can also For passive matrix mode.
Fig. 3 is the sectional view for the major part for representing the organic el display in an embodiment.As substrate 10, adopt With transparency carriers such as glass substrate or resin substrates.On the substrate 10 formed with TFT layer 12.Formed with making on TFT layer 12 The planarization layer 18 that the difference of height formed by TFT layer 12 planarizes.
Planarization layer 18 has insulating properties.Formed with contact head 19 in the contact hole of insertion planarization layer 18.Contact head 19 anodes 21 as pixel electrode that will be formed on the tabular surface of planarization layer 18 electrically connect with TFT layer 12.Contact head 19 It can be formed with anode 21 using identical material and simultaneously.
Organic Light Emitting Diode 13 is formed on the tabular surface of planarization layer 18.Organic Light Emitting Diode 13 has：As The anode 21 of pixel electrode；On the basis of pixel electrode, the moon as comparative electrode of the side opposite with substrate 10 is arranged on Pole 22；And the organic layer 23 formed between anode 21 and negative electrode 22.By making TFT layer 12 work, voltage is applied in anode Between 21 and negative electrode 22, organic layer lights.
Anode 21, such as by ITO (Indium Tin Oxide：Tin indium oxide) etc. formed, can make to come from organic layer 23 Light pass through.Through the light of anode 21, through substrate 10, outside is fetched to.Anode 21 is arranged at each unit circuit 11.
Negative electrode 22, such as formed by aluminium etc., the light from organic layer 23 is reflected towards organic layer 23.What negative electrode 22 reflected Light, through organic layer 23 or anode 21, substrate 10, it is fetched to outside.Negative electrode 22 is the shared portion of multiple unit circuits 11 Part.
Organic layer 23, such as there is hole injection layer 24, hole transporting layer 25, hair successively to the side of negative electrode 22 from the side of anode 21 Photosphere 26, electron supplying layer 27 and electron injecting layer 28.When to applying voltage between anode 21 and negative electrode 22, hole is from anode 21 are injected into hole injection layer 24, and electronics is injected into electron injecting layer 28 from negative electrode 22.It is injected into hole injection The hole of layer 24, is conveyed by hole transporting layer 25 to luminescent layer 26.In addition, being injected into the electronics of electron injecting layer 28, lead to Electron supplying layer 27 is crossed to convey to luminescent layer 26.Thus, in luminescent layer 26, hole and electronics are compound, excitation luminescent layer 26 Luminescent material, luminescent layer 26 are luminous.
As luminescent layer 26, such as shown in Figure 10, formed with red light emitting layer 26R, green light emitting layer 26G and blueness hair Photosphere 26B.Red light emitting layer 26R is formed by the red illuminating material for sending the light of red, and green light emitting layer 26G is by sending green The green luminescent material of light formed, blue light-emitting layer 26B is formed by the blue emitting material for sending the light of blueness.Emitting red light Layer 26R, green light emitting layer 26G and blue light-emitting layer 26B are formed at the opening portion 31 of separation levee 30.
Separation levee 30 is by red light emitting layer 26R coating liquid, green light emitting layer 26G coating liquid and blue light-emitting layer 26B coating liquid separates, so as to prevent the mixing of above-mentioned coating liquid.Separation levee 30 has insulating properties, and it is flat to fill insertion Change the contact hole of layer 18.
<The manufacture method of Organic Light Emitting Diode>
Fig. 4 is the flow chart for the manufacture method for representing the Organic Light Emitting Diode in an embodiment.
First, in step S101, the formation of the anode 21 as pixel electrode is carried out.In the formation of anode 21, such as adopt Use vapour deposition method.Anode 21 is formed at each unit circuit 11 in the tabular surface of planarization layer 18.Contact head 19 can be with anode 21 together form.
Then, in step s 102, the formation of separation levee 30 is carried out.Separation levee 30 is for example formed by photoresist, passes through light Carve pattern as defined in processing drafting.Expose anode 21 in the opening portion 31 of separation levee 30.
Then, in step s 103, the formation of hole injection layer 24 is carried out.When forming hole injection layer 24, using spraying Method etc..The coating liquid of hole injection layer 24 is applied on anode 21 by spraying process, is consequently formed the overlay L shown in Fig. 5. By being dried, sintering to overlay L, the hole injection layer 24 shown in Fig. 6 is formed.
Then, in step S104, the formation of hole transporting layer 25 is carried out.When forming hole transporting layer 25, noted with hole Enter the formation of layer 24 similarly using spraying process etc..Hole transporting layer 25 is applied on hole injection layer 24 by spraying process Coating liquid, it is consequently formed overlay.By being dried, sintering to the overlay, hole transporting layer 25 is formed.
Then, in step S105, the formation of luminescent layer 26 is carried out.Formed luminescent layer 26 when, with hole injection layer 24 and The formation of hole transporting layer 25 is similarly using spraying process etc..Luminescent layer 26 is applied by spraying process on hole transporting layer 25 to use Coating liquid, be consequently formed overlay.By being dried, sintering to the overlay, luminescent layer 26 is formed.
As luminescent layer 26, such as formed with red light emitting layer 26R, green light emitting layer 26G and blue light-emitting layer 26B.It is red Color luminescent layer 26R, green light emitting layer 26G and blue light-emitting layer 26B, it is formed at the opening portion 31 of separation levee 30.Separation levee 30 is by red Luminescent layer 26R coating liquid, the coating liquid of green light emitting layer 26G coating liquid and blue light-emitting layer 26B separate, so as to Prevent the mixing of above-mentioned coating liquid.
Then, in step s 106, the formation of electron supplying layer 27 is carried out.When forming electron supplying layer 27, for example with Vapour deposition method etc..Electron supplying layer 27 can be the part that multiple unit circuits 11 share, and therefore, can not only be formed in separation levee 30 Opening portion 31 in luminescent layer 26 on, can also be formed on separation levee 30.
Then, in step s 107, the formation of electron injecting layer 28 is carried out.When forming electron injecting layer 28, for example with Vapour deposition method etc..Electron injecting layer 28 is formed on electron supplying layer 27.Electron injecting layer 28 can be that multiple unit circuits 11 are common Part.
Then, in step S108, the formation of negative electrode 22 is carried out.When forming negative electrode 22, for example with vapour deposition method etc..Negative electrode 22 form on electron injecting layer 28.Negative electrode 22 can be the part that multiple unit circuits 11 share.
In addition, the type of drive in organic el display is not active matrix mode, but the situation of passive matrix mode Under, negative electrode 22 is formed as predetermined pattern.
By above step, Organic Light Emitting Diode 13 is manufactured.In organic layer 23, in hole injection layer 24, cavity conveying In the formation of layer 25 and luminescent layer 26, using base plate processing system 100.
<Base plate processing system>
Fig. 7 is the top view for representing the base plate processing system in an embodiment.Base plate processing system 100, carry out with Each processing suitable Fig. 4 step S103~S105, hole injection layer 24, hole transporting layer 25 are formed on anode 21 and is lighted Layer 26.Base plate processing system 100, which has, to be moved into station 110, treating stations 120, takes out of station 130 and control device 140.
Station 110 is moved into, the box C for storing multiple substrates 10 is moved into from outside, and take successively from box C by multiple substrates 10 Go out.TFT layer 12, planarization layer 18, anode 21, separation levee 30 etc. are pre-formed in each substrate 10.
Moving into station 110 includes：Load box C box mounting table 111；It is arranged on box mounting table 111 and treating stations 120 Between carrying path 112；With the board carrying body 113 for being arranged at carrying path 112.Board carrying body 113 is being placed in box Carrying substrate 10 between the box C and treating stations 120 of sub- mounting table 111.
Treating stations 120 form hole injection layer 24, hole transporting layer 25 and luminescent layer 26 on anode 21.Treating stations 120 Including：Form the hole injection layer forming portion 121 of hole injection layer 24；Form the hole transporting layer forming portion of hole transporting layer 24 122；With the luminescent layer forming portion 123 for forming luminescent layer 26.
Hole injection layer forming portion 121 applies the coating liquid of hole injection layer 24 on anode and forms overlay, leads to Cross and the overlay is dried, sintered, form hole injection layer 24.The coating liquid of hole injection layer 24 includes organic material And solvent.The organic material can be any of polymer and monomer.In the case of for monomer, sintering can also be passed through And polymerize, so as to turn into polymer.
Hole injection layer forming portion 121 includes applying device 121a, buffer unit 121b, decompression dry device 121c, heat Processing unit 121d and temperature-adjusting device 121e.Applying device 121a discharges hole injection layer 24 to the opening portion 31 of separation levee 30 The drop of coating liquid.The pending substrates 10 such as the temporary transient storages of buffer unit 121b.Decompression dry device 121c is to by applying The overlay of coating apparatus 121a coatings is depressurized, dried, and removes the solvent contained in overlay.Annealing device 121d to by The dried overlays of decompression dry device 121c are heated.Temperature-adjusting device 121e will be by annealing device 121d The temperature adjustment of substrate 10 after heating is set point of temperature, such as normal temperature.
Applying device 121a, buffer unit 121b, annealing device 121d and temperature-adjusting device 121e inside maintain For air atmosphere.The atmosphere of decompression dry device 121c inside switches between air atmosphere and reduced atmosphere.
In addition, in hole injection layer forming portion 121, applying device 121a, buffer unit 121b, decompression dry device 121c, annealing device 121d and temperature-adjusting device 121e configuration or number, the atmosphere of inside can be selected arbitrarily.
In addition, hole injection layer forming portion 121 includes substrate transfer apparatus CR1~CR3 and connection device TR1~TR3.Base Plate handling device CR1~CR3 is respectively to adjacent each device carrying substrate 10.For example, substrate transfer apparatus CR1 is to adjacent painting Coating apparatus 121a and buffer unit 121b carrying substrates 10.Substrate transfer apparatus CR2 removes to adjacent decompression dry device 121c Transport substrate 10.Substrate transfer apparatus CR3 is to adjacent annealing device 121d and temperature-adjusting device 121e carrying substrates 10.Hand over Connection device TR1~TR3 be set in turn in respectively move into station 110 and substrate transfer apparatus CR1 between, substrate transfer apparatus CR1 with Between substrate transfer apparatus CR2, between substrate transfer apparatus CR2 and substrate transfer apparatus CR3, join substrate between them 10.Air atmosphere is maintained inside substrate transfer apparatus CR1~CR3, connection device TR1~TR3.
In the substrate transfer apparatus CR3 and the board carrying of hole transporting layer forming portion 122 of hole injection layer forming portion 121 The connection device TR4 for joining substrate 10 between them is provided between device CR4.Air is maintained inside connection device TR4 Atmosphere.
Hole transporting layer forming portion 122 applies the coating liquid of hole transporting layer 25 on hole injection layer 24 and forms painting Coating, by being dried, sintering to the overlay, form hole transporting layer 25.The coating liquid of hole transporting layer 25 includes Organic material and solvent.The organic material can be any of polymer and monomer., can also in the case of for monomer It is polymerize by sintering, so as to turn into polymer.
Hole injection layer forming portion 122 includes applying device 122a, buffer unit 122b, decompression dry device 122c, heat Processing unit 122d and temperature-adjusting device 122e.Applying device 122a discharges hole transporting layer 25 to the opening portion 31 of separation levee 30 The drop of coating liquid.The pending substrates 10 such as the temporary transient storages of buffer unit 122b.Decompression dry device 122c is to by applying The overlay of coating apparatus 122a coatings is depressurized, dried, and removes the solvent contained in overlay.Annealing device 122d to by The dried overlays of decompression dry device 122c are heated.Temperature-adjusting device 122e will be by annealing device 122d The temperature adjustment of substrate 10 after heating is set point of temperature, such as normal temperature.
Applying device 122a and buffer unit 122b inside are maintained air atmosphere.On the other hand, in order to suppress hole The deterioration of the organic material of transfer layer 25, annealing device 122d and temperature-adjusting device 122e inside are maintained hypoxemia and low The atmosphere of dew point.The atmosphere of decompression dry device 122c inside is carried out between the atmosphere and reduced atmosphere of hypoxemia and low dew point Switching.
Here, the atmosphere of hypoxemia refers to, the oxygen concentration atmosphere lower than air, such as oxygen concentration is in below 10ppm atmosphere. In addition, the atmosphere of low dew point refers to, the dew-point temperature atmosphere lower than air, such as atmosphere of the dew-point temperature below -10 DEG C.It is low The atmosphere of oxygen and low dew point is formed such as the inactive gas as nitrogen.
In addition, in hole transporting layer forming portion 122, applying device 122a, buffer unit 122b, decompression dry device 122c, annealing device 122d and temperature-adjusting device 122e configuration or number, the atmosphere of inside can be selected arbitrarily.
In addition, hole transporting layer forming portion 122 includes substrate transfer apparatus CR4~CR6 and connection device TR5~TR6.Base Plate handling device CR4~CR6 is respectively to adjacent each device carrying substrate 10.Connection device TR5~TR6 is set in turn in respectively Between substrate transfer apparatus CR4 and substrate transfer apparatus CR5, between substrate transfer apparatus CR5 and substrate transfer apparatus CR6, Join substrate 10 between they are above-mentioned.
Substrate transfer apparatus CR4 inside is maintained air atmosphere.On the other hand, substrate transfer apparatus CR5~CR6's is interior Portion is maintained the atmosphere of hypoxemia and low dew point.Because the decompression dry device 122c adjacent with substrate transfer apparatus CR5 Inside carries out hypoxemia and the switching between the atmosphere and reduced atmosphere of low dew point.In addition, also as with substrate transfer apparatus CR6 phases Annealing device 122d or temperature-adjusting device 122e inside that neighbour is set are maintained the atmosphere of hypoxemia and low dew point.
Connection device TR5 is configured to carry out its internal atmosphere between the atmosphere and air atmosphere of hypoxemia and low dew point The load lock chamber of switching.Because decompression dry device 122c has been disposed adjacent it in connection device TR5 downstream.It is another Aspect, connection device TR6 inside are maintained the atmosphere of hypoxemia and low dew point.
In the substrate transfer apparatus CR6 and the substrate transfer apparatus of luminescent layer forming portion 123 of hole transporting layer forming portion 122 Between CR7, the connection device TR7 for joining substrate 10 between them is provided with.Substrate transfer apparatus CR6 inside is maintained low The atmosphere of oxygen and low dew point, substrate transfer apparatus CR7 inside are maintained air atmosphere.Therefore, connection device TR7 be configured to by The load lock chamber that its internal atmosphere switches between the atmosphere and air atmosphere of hypoxemia and low dew point.
Luminescent layer forming portion 123 applies the coating liquid of luminescent layer 26 on hole transporting layer 25 and forms overlay, leads to Cross and the overlay formd is dried, sintered, form luminescent layer 26.The coating liquid of luminescent layer 26 include organic material and Solvent.The organic material can be any of polymer and monomer.In the case of for monomer, can also by sintering and Polymerization, so as to turn into polymer.
Luminescent layer forming portion 123 includes applying device 123a, buffer unit 123b, decompression dry device 123c, heat treatment Device 123d and temperature-adjusting device 123e.Applying device 123a discharges the coating of luminescent layer 26 to the opening portion 31 of separation levee 30 The drop of liquid.The pending substrates 10 such as the temporary transient storages of buffer unit 123b.Decompression dry device 123c is to by applying device The overlay of 123a coatings is depressurized, dried, and removes the solvent contained in overlay.Annealing device 123d is to dry by depressurizing The dry dried overlays of device 123c are heated.Temperature-adjusting device 123e will be by annealing device 123d heating The temperature adjustment of substrate 10 after reason is set point of temperature, such as normal temperature.
Applying device 123a and buffer unit 123b inside are maintained air atmosphere.On the other hand, in order to suppress luminous The deterioration of the organic material of layer 26, annealing device 123d and temperature-adjusting device 123e inside are maintained hypoxemia and low dew point Atmosphere.The atmosphere of decompression dry device 123c inside switches between air atmosphere and reduced atmosphere.
In addition, in luminescent layer forming portion 123, applying device 123a, buffer unit 123b, decompression dry device 123c, Annealing device 123d and temperature-adjusting device 123e configuration or number, the atmosphere of inside can be selected arbitrarily.
In addition, luminescent layer forming portion 123 includes substrate transfer apparatus CR7~CR9 and connection device TR8~TR9.Substrate is removed Shipping unit CR7~CR9 is respectively to adjacent each device carrying substrate 10.Connection device TR8~TR9 is set in turn in substrate respectively Between handling device CR7 and substrate transfer apparatus CR8, between substrate transfer apparatus CR8 and substrate transfer apparatus CR9, at them Between join substrate 10.
Substrate transfer apparatus CR7 inside is maintained air atmosphere.On the other hand, substrate transfer apparatus CR8~CR9's is interior Portion is maintained the atmosphere of hypoxemia and low dew point.Because the decompression dry device 123c adjacent with substrate transfer apparatus CR8 Inside switches between the atmosphere and reduced atmosphere of hypoxemia and low dew point.In addition, also as with substrate transfer apparatus CR9 phases Adjacent annealing device 123d or temperature-adjusting device 123e inside are maintained the atmosphere of hypoxemia and low dew point.
Connection device TR8 is configured to carry out its internal atmosphere between the atmosphere of air atmosphere and hypoxemia and low dew point The load lock chamber of switching.Decompression dry device 123c has been disposed adjacent because being surveyed in connection device TR8 downstream.Handing-over Device TR9 inside is maintained the atmosphere of hypoxemia and low dew point.
Luminescent layer forming portion 123 substrate transfer apparatus CR9 and take out of station 130 between, be provided with and hand between them Meet the connection device TR10 of substrate 10.Substrate transfer apparatus CR9 inside is maintained the atmosphere of hypoxemia and low dew point, takes out of station 130 inside is maintained air atmosphere.Therefore, connection device TR10 is configured to its internal atmosphere in hypoxemia and low dew point The load lock chamber switched between atmosphere and air atmosphere.
Take out of station 130 multiple substrates 10 are accommodated in box C successively, and box C is taken out of to outside.Take out of the bag of station 130 Include：Load box C mounting table 131；The carrying path 132 being arranged between box mounting table 131 and treating stations 120；With set It is placed in the board carrying body 133 for carrying path 132.Board carrying body 133 is in treating stations 120 and is placed in box mounting table 131 Box C between carrying substrate 10.
Control device 140 is by including CPU (Central Processing Unit：CPU) 141 and memory Computer etc. storage medium 142 is formed, and by performing the program stored in storage medium 142 in CPU141 (also referred to as Scheme), to realize various processing.
The program storage of control device 140 can be installed in information storage medium from information storage medium.Information storage medium Such as hard disk (HD), floppy disk (FD), CD (CD), magneto-optic disk (MO), storage card etc. can be enumerated.In addition, program can pass through Download and install from server in internet.
Then, the substrate processing method using same of the base plate processing system 100 using said structure is illustrated.It is multiple when storing When the box C of substrate 10 is placed in box mounting table 111, board carrying body 113 from the box C in box mounting table 111 according to Secondary taking-up substrate 10, and carried to hole injection layer forming portion 121.
Hole injection layer forming portion 121 applies the coating liquid of hole injection layer 24 on anode 21 and forms overlay, By being dried, sintering to the overlay after formation, hole injection layer 24 is formed.Substrate formed with hole injection layer 24 10, by connection device TR4, hole transporting layer forming portion 122 is handed off to from hole injection layer forming portion 121.
Hole transporting layer forming portion 122 applies the coating liquid of hole transporting layer 25 on hole injection layer 24 and forms painting Coating, by being dried, sintering to the overlay after formation, form hole transporting layer 25.Formed with hole transporting layer 25 Substrate 10, by connection device TR7, luminescent layer forming portion 123 is handed off to from hole transporting layer forming portion 122.
Luminescent layer forming portion 123 applies the coating liquid of luminescent layer 26 on hole transporting layer 25 and forms overlay, leads to Cross and the overlay after formation is dried, sintered, form luminescent layer 26.Substrate 10 formed with luminescent layer 26, passes through handing-over Device TR10, it is handed off to from luminescent layer forming portion 123 and takes out of station 130.
The substrate 10 received from connection device TR10 is accommodated in box mounting by the board carrying body 133 for taking out of station 130 In defined box C on platform 131.Thus, the processing of a series of substrate 10 in base plate processing system 100 is terminated.
State of the substrate 10 to be accommodated in box C, taken out of from station 130 is taken out of to outside.It is being moved to outside Electron supplying layer 27 or electron injecting layer 28, negative electrode 22 etc. are formed on substrate 10.
<Applying device and coating method>
Then, 8~Fig. 9 of reference picture, the applying device 123a of luminescent layer forming portion 123 is illustrated.Fig. 8 is expression one The top view of applying device in individual embodiment.Fig. 9 is the side view for representing the applying device in an embodiment.With Under accompanying drawing in, X-direction and Y-direction are mutually orthogonal horizontal direction, and Z-direction is the vertical side orthogonal with X-direction and Y-direction To.Y-direction is discharges the column direction that is arranged of multiple nozzles of the drop of identical coating liquid, corresponding to remembering in claims The first direction of load.On the other hand, X-direction is the scanning direction orthogonal with Y-direction, corresponding to described in claims Two directions.In addition, column direction can intersect with scanning direction, can also be non-orthogonal.
Applying device 123a for example with：Keep the XY θ platforms 150 of substrate 10；The drop that drop is discharged to substrate 10 is discharged Unit 160；Maintain the maintenance unit 170 of the function of drop deliverying unit 160.XY θ platforms 150 and maintenance unit 170 are in the Y direction Spread configuration.Between the top of XY θ platforms 150 and the top of maintenance unit 170, Y-axis guide rail 180 is set up.Along Y-axis guide rail 180, drop deliverying unit 160 moves freely in the Y direction.As the driving for making drop deliverying unit 160 move in the Y direction Portion, using linear electric machine etc..
The chuck drive portion 152 that XY θ platforms 150 have the chuck 151 for keeping substrate 10 and move chuck 151.Chuck 151 Substrate 10 is kept in a manner of making the applicator surface of coating drop of substrate 10 upward.As chuck 151, such as can use Vacuum chuck, but electrostatic chuck etc. can also be used.Chuck 151 corresponds to the board holder described in claims.Card Dish driving portion 152 has：Make the X-direction drive division 153 that chuck 151 moves in the X direction；Chuck 151 is set to move in the Y direction Y-direction drive division 154；The rotary driving part 155 for making chuck 151 be rotated around Z-direction.Chuck drive portion 152 corresponds to right Travel mechanism described in claim.
Drop deliverying unit 160 is discharging the position of drop with receiving by tieing up in the top of XY θ platforms 150 to substrate 10 Moved freely between the position of the processing for the maintenance function that shield unit 170 is carried out.Drop deliverying unit 160 arranges in the Y direction Have multiple (for example, being 10 in Fig. 8).Multiple drop deliverying units 160 can independently move in the Y direction, can also be in Y Moved together on direction.
Each drop deliverying unit 160 has bearing support 161 and is arranged at multiple shower nozzles 162 of the lower surface of bearing support 161. In the nozzle rows that each shower nozzle 162 is made up of at least provided with 1 row the multiple nozzles 163 arranged in the Y direction.It is arranged at identical shower nozzle 162 multiple nozzles 163 discharge the drop of identical coating liquid.Discharge the spray of the drop of red light emitting layer 26R coating liquid Mouth 163, discharge green light emitting layer 26G coating liquid the nozzle 163 of drop and discharge blue light-emitting layer 26B coating liquid The nozzle 163 of drop be respectively arranged at different shower nozzles 162.
Maintenance unit 170 maintain the processing of the function of drop deliverying unit 160, eliminates drop deliverying unit 160 Bad discharge.There is maintenance unit 170 wiper unit 171 around the outlet for wiping nozzle and the outlet from nozzle to attract The attraction unit 172 of drop.Attract unit 172 to play to suppress caused by the outlet of the nozzle of halted state is blocked, dried The function of obstruction.
Then, the coating method of the applying device 123a using said structure is illustrated.Under applying device 123a Action is stated to be controlled by control device 140.Control device 140 is provided separately with applying device 123a in the figure 7, but can also Set as an applying device 123a part.
First, when the substrate 10 that inside is moved to from applying device 123a outside is placed in into chuck 151, chuck 151 keep substrate 10.Then, the image according to obtained by the calibration marker of shooting substrate 10, is blocked by chuck drive portion 152 The calibration of the position of disk 151.Then, chuck drive portion 152 makes chuck 151 move in the X direction, and passes through drop deliverying unit 160 lower section.Therebetween, drop deliverying unit 160 discharges drop to substrate 10.By the way that the operation, applying device is repeated 123a describes predetermined pattern on the substrate 10.Substrate 10 after the completion of description, is removed from chuck 151, from applying device 123a Inside be moved to outside.Then, next substrate 10 is moved to inside, applying device from applying device 123a outside 123a describes defined pattern on the substrate 10.In addition, the function of drop deliverying unit 160 is maintained by maintenance unit 170 Processing, suitably changing the progress such as interval of substrate 10.
In addition, in order to describe defined pattern on the substrate 10, the applying device 123a of said structure makes holding substrate 10 Chuck 151 move, but the drop deliverying unit 160 of discharge drop can also be made to be moved to substrate 10, or chuck can also be made 151 and the both sides of drop deliverying unit 160 movement.As long as applying device 123a can make chuck 151 and the phase of drop deliverying unit 160 To movement.
<What applying device was described draws a design>
Then, reference picture 10, drawing a design for describing to applying device 123a illustrate.Figure 10 is one implementation of expression The top view to draw a design that applying device in mode is described.In Fig. 10, luminescent material identical region is imposed identical Filling pattern.
The luminescent layer 26 of organic el display is for example with red light emitting layer 26R, green light emitting layer 26G and blue light-emitting layer 26B.Red light emitting layer 26R is formed by the red illuminating material for sending the light of red, and green light emitting layer 26G is by sending green light Green luminescent material formed, blue light-emitting layer 26B is formed by the blue emitting material of light for sending blueness.
Red light emitting layer 26R is sent from the hole that anode 21 supplies and from the compound region of the electronics of the supply of negative electrode 22 Red light.The region for sending red light is referred to as red light-emitting area 261R.With being used as pixel when red light-emitting area 261R is overlooked The anode 21 of electrode is substantially overlapping.
Similarly, green light emitting layer 26R is from the hole that anode 21 supplies and from the compound area of electronics that negative electrode 22 supplies Domain, send green light.The region for sending green light is referred to as green light-emitting area 261G.With making when green light-emitting area 261G is overlooked It is substantially overlapping for the anode 21 of pixel electrode.
In addition, blue light-emitting layer 26R is from the hole that anode 21 supplies and from the compound region of electronics that negative electrode 22 supplies, Send blue light.The region for sending blue light is referred to as blue light-emitting area 261B.Blue light-emitting area 261B overlook when and conduct The anode 21 of pixel electrode is substantially overlapping.
Organic el display is in each pixel for example with red light-emitting area 261R, green light-emitting area 261G and blueness Light-emitting zone 261B.These light-emitting zones are independent luminous by each anode 21.Its luminous quantity passes through between anode 21 and negative electrode 22 Voltage be adjusted.
Between red light-emitting area 261R, green light-emitting area 261G and blue light-emitting area 261B are separated with defined order Every ground arrangement in the X direction, it is consequently formed light-emitting zone group 262.The light-emitting zone group 262 is in the Y-direction intersected with X-direction Arrange at spaced intervals.Therefore, the multiple light-emitting zones for the light for sending same color are arranged in the Y direction.
In order to arranging at spaced intervals in the Y direction and send multiple light-emitting zones of the light of same color simultaneously The drop of identical coating liquid is discharged on ground, in each shower nozzle 162 of drop deliverying unit 160, is disposed with the Y direction multiple Nozzle 163.The multiple nozzles 163 for being arranged on identical shower nozzle 162 discharge the drop of identical coating liquid.
Applying device 123a makes drop deliverying unit 160 and chuck 151 relatively move in the X direction, and from nozzle 163 Drop is applied to the opening portion 31 of the preformed separation levee 30 on the substrate 10 kept by chuck 151.Applying device 123a is Drop deliverying unit 160 and the chuck 151 is moved and is moved chuck 151, but can also move drop deliverying unit 160 It is dynamic, or can also move both.
There is red opening portion 31R, green to use opening portion 31B with opening portion 31G and blueness for the opening portion 31 of separation levee 30. Red light emitting layer 26R is formed with opening portion 31R in red, green light emitting layer 26G is formed with opening portion 31G in green, in blueness Blue light-emitting layer 26B is formed with opening portion 31B.Red opening portion 31R, green use opening portion 31B with opening portion 31G and blueness Arranged at spaced intervals in the X direction with regulation order.
In addition, red light-emitting area 261R, green light-emitting area 261G and blue light-emitting area 261B area ratio, can root Suitably set according to the respective characteristics of luminescence or luminescent lifetime etc..For example, luminous efficiency is excellent, the luminosity of unit area is high Region there is small area.
In Fig. 10, red light-emitting area 261R area is minimum, and green light-emitting area 261G area second is small, blueness Light-emitting zone 261B area is maximum.Size YR, YG, YB in the Y-direction of these light-emitting zones is identical, but the chi in X-direction Very little XR, XG, XB are different.
Here, YR represents the size in red light-emitting area 261R Y-direction, YG represents green light-emitting area 261G Y Size on direction, YB represent the size in blue light-emitting area 261B Y-direction.YR, YG, YB are identicals.
In addition, XR represents the size in red light-emitting area 261R X-direction, XG represents green light-emitting area 261G X Size on direction, XB represent the size in blue light-emitting area 261B X-direction.XR is less than XG, and XG is less than XB.
Therefore, in Fig. 10, red light-emitting area 261R, blue light-emitting area 261B, green light-emitting area 261G, green Light-emitting zone 261G, blue light-emitting area 261B, red light-emitting area 261R, repeatedly with the order interval in the X direction Ground arranges, so as to form light-emitting zone group 262.In 2 adjacent pixels of X-direction, red light-emitting area 261R, blue-light-emitting Putting in order for region 261B and green light-emitting area 261G is opposite.Each blue light-emitting area 261B is in the X direction by red Color light-emitting zone 261R and green light-emitting area 261G are clipped.
Separation levee 30 is included across adjacent multiple red light-emitting area 261R red opening in the X direction at spaced intervals Portion 31R.Therefore, easily while making drop deliverying unit 160 and chuck 151 relatively move in the X direction, while making drop land In red uses opening portion 31R.Therefore, compared with prior art, in the X direction, red light emitting layer 26R painting can be relaxed Apply the admissible error of the landing positions of the drop of liquid.
In addition, separation levee 30 is included across adjacent multiple green light-emitting area 261G green in the X direction at spaced intervals With opening portion 31G.Therefore, easily while making drop deliverying unit 160 and chuck 151 relatively move in the X direction, while making liquid Land are dripped in green uses opening portion 31G.Therefore, compared with prior art, in the X direction, green light emitting layer 26G can be relaxed The admissible error of the landing positions of the drop of coating liquid.
From the description above, the separation levee 30 of present embodiment is included across adjacent in the X direction at spaced intervals and send phase With the opening portion 31 of multiple light-emitting zones of the light of color.Therefore, easily while making drop deliverying unit 160 and chuck 151 in X Relatively moved on direction, while making drop land in opening portion 31.Therefore, compared with prior art, in the X direction, can Relax the admissible error of the landing positions of drop.
In addition, the red light-emitting area 261R of present embodiment, because the size in its X-direction compares green light-emitting area 261G is small, so adjacent in the X direction at spaced intervals.And then formed across adjacent multiple red in the X direction at spaced intervals Color light-emitting zone 261R red opening portion 31R.Therefore, in the X direction, the landing positions of drop can be relaxed to allow to miss Difference.
Also, the green light-emitting area 261G of present embodiment, because the size in its X-direction compares blue light-emitting area 261B is small, so adjacent in the X direction at spaced intervals.And then formed across adjacent multiple green in the X direction at spaced intervals Color light-emitting zone 261G green opening portion 31G.In the X direction, the admissible error of the landing positions of drop can be relaxed.
In addition, blue light-emitting area 261B, because compared to red light-emitting area 261R or green light-emitting area 261G, It is big in the X direction, so easily while making drop deliverying unit 160 and chuck 151 relatively move in the X direction, while making liquid The land of drop are inside it.Therefore, multiple blue light-emitting area 261B can not be adjacent in the X direction at spaced intervals.Each indigo plant Color light-emitting zone 261B is clipped by red light-emitting area 261R and green light-emitting area 261G in the X direction.
<Drawing a design in the first variation>
Figure 11 is to represent the top view to draw a design in the first variation.In fig. 11, to luminescent material identical area Domain imposes identical filling pattern.In this variation, formed across adjacent in the X direction at spaced intervals and send same color Light multiple light-emitting zones, and across multiple hairs of light that is adjacent in the Y direction at spaced intervals and sending same color The opening portion in light region, this is different from the embodiment described above.Hereinafter, mainly difference is illustrated.
Red is with opening portion 31R across adjacent multiple red light-emitting area 261R in the X direction at spaced intervals.Therefore, In the same manner as above-mentioned embodiment, compared with prior art, in the X direction, red light emitting layer 26R coating liquid can be relaxed Drop landing positions admissible error.
In addition, the nozzle 163 of the drop of discharge red light emitting layer 26R coating liquid arranges in the Y direction.
Therefore, in this variation, red is with opening portion 31R also across adjacent multiple red in the Y direction at spaced intervals Light-emitting zone 261R.Compared with prior art, it is more that the number of the nozzle 163 of drop is discharged with opening portion 31R to a red, because This, makes the error diffusion of the discharge rate of each nozzle 163, easily makes the total amount of discharge rate become identical every time.It is in addition, red to one Color discharges the selection increase of the nozzle 163 of drop with opening portion 31R, can select using the excellent nozzle of the controlling of discharge rate 163.In accordance with the above, multiple red light emitting layer 26R thickness equalization can be made.
In addition, green uses opening portion 31G, across adjacent multiple green light-emitting area 261G in the X direction at spaced intervals. Therefore, in the same manner as above-mentioned embodiment, compared with prior art, in the X direction, it can relax green light emitting layer 26G's The admissible error of the landing positions of the drop of coating liquid.
In addition, the nozzle 163 of the drop of discharge green light emitting layer 26G coating liquid arranges in the Y direction.
Therefore, in this variation, green is with opening portion 31G also across adjacent multiple greens in the Y direction at spaced intervals Light-emitting zone 261G.Compared with prior art, it is more that the number of the nozzle 163 of drop is discharged with opening portion 31G to a green, because This, makes the error diffusion of the discharge rate of each nozzle 163, easily makes the total amount of discharge rate become identical every time.It is in addition, green to one Color discharges the selection increase of the nozzle 163 of drop with opening portion 31G, can select using the excellent nozzle of the controlling of discharge rate 163.In accordance with the above, multiple green light emitting layer 26G thickness equalization can be made.
In addition, in this variation, blueness is with opening portion 31B also across adjacent multiple bluenesss in the Y direction at spaced intervals Light-emitting zone 261B.Compared with prior art, it is more that the number of the nozzle 163 of drop is discharged with opening portion 31B to a blueness, because This, makes the error diffusion of the discharge rate of each nozzle 163, easily makes the total amount of discharge rate become identical every time.In addition, to an indigo plant Color discharges the selection increase of the nozzle 163 of drop with opening portion 31B, can select using the excellent nozzle of the controlling of discharge rate 163.In accordance with the above, multiple blue light-emitting layer 26B thickness equalization can be made.
<Drawing a design in the second variation>
Figure 12 is to represent the top view to draw a design in the second variation.In fig. 12, to luminescent material identical area Domain imposes identical filling pattern.In this variation, multiple opening portions are formed as striated, and this is different from the embodiment described above. Hereinafter, mainly difference is illustrated.
In this variation, red is with opening portion 31R across adjacent multiple red light-emitting areas in the Y direction at spaced intervals 261R, and it is cross over from the red light-emitting area 261R of one end in Y-direction the red light-emitting area of the other end in Y-direction 261R.Multiple red light emitting layer 26R thickness equalization can be made.
In addition, in this variation, green is with opening portion 31G across adjacent multiple greens in the Y direction at spaced intervals Light-emitting zone 261G, and the green for the other end being cross over from the green light-emitting area 261G of one end in Y-direction in Y-direction is sent out Light region 261G.Multiple green light emitting layer 26G thickness equalization can be made.
Further, in this variation, blueness is with opening portion 31B across adjacent multiple indigo plants in the Y direction at spaced intervals Color light-emitting zone 261B, and it is cross over from the blue light-emitting area 261B of one end in Y-direction the blueness of the other end in Y-direction Light-emitting zone 261B.Multiple blue light-emitting layer 26B thickness equalization can be made.
In above-mentioned embodiment or above-mentioned first variation, above-mentioned second variation, red corresponds to claims Described in the first color, green correspond to claims described in the second color, blueness correspond to claims in The 3rd color recorded.
Similarly, in above-mentioned embodiment or above-mentioned first variation, above-mentioned second variation, red light-emitting area 261R corresponds to the first light-emitting zone described in claims, and green light-emitting area 261G, which corresponds in claims, to be remembered The second light-emitting zone carried, blue light-emitting area 261B correspond to the 3rd light-emitting zone described in claims.
In addition, as described above, red light-emitting area 261R, green light-emitting area 261G, blue light-emitting area 261B face Product ratio, can suitably set according to the respective characteristics of luminescence or luminescent lifetime etc..Therefore, the X-direction of these light-emitting zones Size XR, XG, XB magnitude relationship are not particularly limited, and XR, XG, XB can be with identical.
But for each light-emitting zone, size XR, XG, XB of X-direction can be smaller than size YR, YG, YB of Y-direction. That is XR can be smaller than YR, XG can be smaller than YG, and XB can be smaller than YB.In this case, chi of the size of X-direction than Y-direction Very little small, therefore, the meaning for relaxing the admissible error of the landing positions of X-direction is big.
Red light-emitting area 261R, green light-emitting area 261G, the arrangements of blue light-emitting area 261B in the X direction are suitable Sequence, it is not limited to Figure 10~Figure 12 order.It is adjacent to each other at spaced intervals in the X direction and send the light of same color Light-emitting zone is at least 1.
The combination of glow color is not limited to red, green, blue three primary colors.It is for instance possible to use added in the three primary colors As the red cyan with the yellow of the Neutral colour of green and/or as green and the Neutral colour of blueness.The combination of illuminant colour Number is bigger, and the scope for the color coordinates that can be represented is wider.
More than, the embodiment of applying device etc. is illustrated, but the invention is not restricted to above-mentioned embodiment Deng, claims record purport of the invention in the range of can have various modifications, improvement.
For example, organic el display, goes out for the light of light emitting layer in future 26 from the side draw of substrate 10 in the above-described embodiment Bottom emission mode, but can also be the top hair that is taken out from the side opposite with substrate 10 of light of light emitting layer 26 in future The mode penetrated.
In the case of the mode for top-emission, substrate 10 can be not only transparency carrier or opaque base Plate.Because the light for carrying out light emitting layer 26 takes out from the side opposite with substrate 10.
In the case of the mode for top-emission, the anode 21 as transparency electrode can act as comparative electrode, negative electrode 22 can act as being arranged at the pixel electrode of each unit circuit 11.In this case, the configuration of anode 21 and negative electrode 22 on the contrary, because This, sequentially forms electron injecting layer 28, electron supplying layer 27, luminescent layer 26, hole input layer 25 and hole note on negative electrode 22 Enter layer 24.
In the above-described embodiment, organic layer 23 from the lateral side of negative electrode 22 of anode 21 go successively have hole injection layer 24, Hole input layer 25, luminescent layer 26, electron supplying layer 27, electron injecting layer 28, but at least there is luminescent layer 26.Organic layer 23 are not limited to the structure shown in Fig. 3.
In addition, in Figure 10~Figure 12, although the red light-emitting area 261R of left end area shows to be less than others Red light-emitting area 261R area, it is preferred that the red light-emitting area 261R of left end area and other emitting red light areas Domain 261R area is identical.

Claims (12)

  1. A kind of 1. applying device, it is characterised in that
    Have：The deliverying unit of multiple shower nozzles is included, the shower nozzle is disposed with multiple nozzles in a first direction；Keep base The board holder of plate；With keep the deliverying unit and the substrate in the second direction intersected with the first direction The travel mechanism of portion's relative movement,
    The deliverying unit is from the nozzle to the separation levee being previously formed on the substrate kept by the board holder Each opening portion discharge drop for forming luminescent layer,
    The luminescent layer have by send different colours light multiple light-emitting zones by regulation order in this second direction The light-emitting zone group arranged at spaced intervals,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual light-emitting zone.
  2. 2. applying device as claimed in claim 1, it is characterised in that：
    The first light-emitting zone and send different from first color that the light-emitting zone group includes the light for sending the first color The second color light the second light-emitting zone,
    Size in the second direction of first light-emitting zone is less than the second direction of second light-emitting zone On size,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual first light-emitting zone.
  3. 3. applying device as claimed in claim 2, it is characterised in that：
    The light-emitting zone group is also comprising the light for sending threeth color different from first color and second color 3rd light-emitting zone,
    Size in the second direction of second light-emitting zone is less than the second direction of the 3rd light-emitting zone On size,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual second light-emitting zone.
  4. 4. such as applying device according to any one of claims 1 to 3, it is characterised in that：
    The light-emitting zone group be arranged with spaced intervals in said first direction it is multiple,
    At least one opening portion, across the more of light that is adjacent in this second direction at spaced intervals and sending same color The individual light-emitting zone, and across multiple institutes of light that is adjacent in said first direction at spaced intervals and sending same color State light-emitting zone.
  5. 5. a kind of coating method, it is characterised in that have steps of：
    Make the deliverying unit comprising multiple shower nozzles and keep the board holder of substrate in the second direction intersected with first direction Upper relative movement, wherein, the shower nozzle is disposed with multiple nozzles in said first direction,
    From the nozzle to each opening portion for the separation levee being previously formed on the substrate kept by the board holder, row Go out the drop for forming luminescent layer,
    The luminescent layer have by send different colours light multiple light-emitting zones by regulation order in this second direction The light-emitting zone group arranged at spaced intervals,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual light-emitting zone.
  6. 6. coating method as claimed in claim 5, it is characterised in that：
    The first light-emitting zone and send different from first color that the light-emitting zone group includes the light for sending the first color The second color light the second light-emitting zone,
    Size in the second direction of first light-emitting zone is less than the second direction of second light-emitting zone On size,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual first light-emitting zone.
  7. 7. coating method as claimed in claim 6, it is characterised in that：
    The light-emitting zone group is also comprising the light for sending threeth color different from first color and second color 3rd light-emitting zone,
    Size in the second direction of second light-emitting zone is less than the second direction of the 3rd light-emitting zone On size,
    At least one opening portion is more across light that is adjacent in this second direction at spaced intervals and sending same color Individual second light-emitting zone.
  8. 8. the coating method as any one of claim 5~7, it is characterised in that：
    The light-emitting zone group be arranged with spaced intervals in said first direction it is multiple,
    At least one opening portion, across the more of light that is adjacent in this second direction at spaced intervals and sending same color The individual light-emitting zone, and across multiple institutes of light that is adjacent in said first direction at spaced intervals and sending same color State light-emitting zone.
  9. 9. a kind of organic el display, it is characterised in that have：
    Substrate；
    Pixel electrode on the substrate is set；
    It is arranged on the comparative electrode with the substrate opposite side of the pixel electrode；
    The luminescent layer being arranged between the pixel electrode and the comparative electrode；With
    The separation levee of the opening portion for forming the luminescent layer is included,
    The luminescent layer has to be separated in the prescribed direction by the multiple light-emitting zones for the light for sending different colours by regulation order The light-emitting zone group that compartment of terrain arrangement forms,
    At least one opening portion is more across light that is adjacent in the prescribed direction at spaced intervals and sending same color Individual light-emitting zone.
  10. 10. organic el display as claimed in claim 9, it is characterised in that：
    The first light-emitting zone and send different from first color that the light-emitting zone group includes the light for sending the first color The second color light the second light-emitting zone,
    Size in the prescribed direction of first light-emitting zone is less than the prescribed direction of the regulation light-emitting zone On size,
    At least one opening portion is multiple across light that is adjacent in the prescribed direction at spaced intervals and sending same color First light-emitting zone.
  11. 11. organic el display as claimed in claim 10, it is characterised in that：
    The light-emitting zone group is also comprising the light for sending threeth color different from first color and second color 3rd light-emitting zone,
    Size in the prescribed direction of second light-emitting zone is less than the prescribed direction of the 3rd light-emitting zone On size,
    At least one opening portion is more across light that is adjacent in the prescribed direction at spaced intervals and sending same color Individual second light-emitting zone.
  12. 12. the organic el display as any one of claim 9~11, it is characterised in that：
    The light-emitting zone group be arranged with spaced intervals on the direction intersected with the prescribed direction it is multiple,
    At least one opening portion, across the more of light that is adjacent in the prescribed direction at spaced intervals and sending same color The individual light-emitting zone, and across adjacent on the direction intersected with the prescribed direction at spaced intervals and send same color Light multiple light-emitting zones.
CN201710864656.1A 2016-09-23 2017-09-22 Applying device, coating method and organic el display Pending CN107871694A (en)

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