JP6803018B2 - ガラス用エッチング液およびガラス基板製造方法 - Google Patents

ガラス用エッチング液およびガラス基板製造方法 Download PDF

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Publication number
JP6803018B2
JP6803018B2 JP2019039390A JP2019039390A JP6803018B2 JP 6803018 B2 JP6803018 B2 JP 6803018B2 JP 2019039390 A JP2019039390 A JP 2019039390A JP 2019039390 A JP2019039390 A JP 2019039390A JP 6803018 B2 JP6803018 B2 JP 6803018B2
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JP
Japan
Prior art keywords
etching
glass
glass substrate
etching solution
planned
Prior art date
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Active
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JP2019039390A
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English (en)
Japanese (ja)
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JP2020142941A (ja
Inventor
晴香 西川
晴香 西川
和哉 島田
和哉 島田
忠 永井
忠 永井
雄三 三好
雄三 三好
夏樹 冨家
夏樹 冨家
健太 大小田
健太 大小田
康宏 柏原
康宏 柏原
俊介 齊藤
俊介 齊藤
陽照 大山
陽照 大山
篤嗣 林
篤嗣 林
良介 福成
良介 福成
暢規 石垣
暢規 石垣
健 元持
健 元持
貴大 久米
貴大 久米
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
NSC Co Ltd
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
NSC Co Ltd
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, NSC Co Ltd, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2019039390A priority Critical patent/JP6803018B2/ja
Priority to PCT/JP2020/003902 priority patent/WO2020179312A1/ja
Priority to CN202080032093.XA priority patent/CN113767075B/zh
Priority to TW109104688A priority patent/TWI832970B/zh
Publication of JP2020142941A publication Critical patent/JP2020142941A/ja
Application granted granted Critical
Publication of JP6803018B2 publication Critical patent/JP6803018B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)
JP2019039390A 2019-03-05 2019-03-05 ガラス用エッチング液およびガラス基板製造方法 Active JP6803018B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019039390A JP6803018B2 (ja) 2019-03-05 2019-03-05 ガラス用エッチング液およびガラス基板製造方法
PCT/JP2020/003902 WO2020179312A1 (ja) 2019-03-05 2020-02-03 ガラス用エッチング液およびガラス基板製造方法
CN202080032093.XA CN113767075B (zh) 2019-03-05 2020-02-03 玻璃用蚀刻液及玻璃基板制造方法
TW109104688A TWI832970B (zh) 2019-03-05 2020-02-14 玻璃用蝕刻液及玻璃基板製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019039390A JP6803018B2 (ja) 2019-03-05 2019-03-05 ガラス用エッチング液およびガラス基板製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020155033A Division JP7251704B2 (ja) 2020-09-16 2020-09-16 ガラス用エッチング液およびガラス基板製造方法

Publications (2)

Publication Number Publication Date
JP2020142941A JP2020142941A (ja) 2020-09-10
JP6803018B2 true JP6803018B2 (ja) 2020-12-23

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JP2019039390A Active JP6803018B2 (ja) 2019-03-05 2019-03-05 ガラス用エッチング液およびガラス基板製造方法

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Country Link
JP (1) JP6803018B2 (zh)
CN (1) CN113767075B (zh)
TW (1) TWI832970B (zh)
WO (1) WO2020179312A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6840403B2 (ja) * 2019-05-24 2021-03-10 株式会社Ｎｓｃ 平面ガラスアンテナおよびその製造方法
CN112777941A (zh) * 2021-01-13 2021-05-11 赣州帝晶光电科技有限公司 一种ag防眩玻璃蚀刻工艺制备方法
KR102596623B1 (ko) * 2021-10-01 2023-11-01 주식회사 에스이에이 반응 속도 조절이 가능한 기판 식각 장치
CN115432919A (zh) * 2022-10-25 2022-12-06 深圳市益铂晶科技有限公司 一种玻璃激光切割的浸蚀裂片方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW434196B (en) * 1997-06-25 2001-05-16 Ibm Selective etching of silicate
FR2832706B1 (fr) * 2001-11-28 2004-07-23 Saint Gobain Substrat transparent muni d'une electrode
JP2005179132A (ja) * 2003-12-22 2005-07-07 Nishiyama Stainless Chem Kk ガラスエッチング液、ガラスエッチング方法、フラットパネルディスプレイ用ガラス基板及びフラットパネルディスプレイ
US20070256703A1 (en) * 2006-05-03 2007-11-08 Asahi Glass Company, Limited Method for removing contaminant from surface of glass substrate
JP2008041676A (ja) * 2006-08-01 2008-02-21 Fuji Electric Holdings Co Ltd シリコン半導体基板のエッチング方法とこの方法に用いるエッチング装置
JP2011178642A (ja) * 2010-03-03 2011-09-15 Nippon Sheet Glass Co Ltd 貫通電極付きガラス板の製造方法および電子部品
JP6077756B2 (ja) * 2012-04-06 2017-02-08 株式会社フジクラ 微細構造体の形成方法
KR101908575B1 (ko) * 2013-04-01 2018-10-17 호야 칸데오 옵트로닉스 가부시키가이샤 근적외선 흡수 유리 및 그 제조 방법
TWI705946B (zh) * 2014-09-05 2020-10-01 美商康寧公司 玻璃物品及改善玻璃物品可靠性的方法
TW201704177A (zh) * 2015-06-10 2017-02-01 康寧公司 蝕刻玻璃基板的方法及玻璃基板
JP2018049199A (ja) * 2016-09-23 2018-03-29 Hoya株式会社 局所ウェットエッチング装置及びフォトマスク用基板の製造方法
JP6519045B2 (ja) * 2017-05-24 2019-05-29 株式会社Ｎｓｃ ガラスパネル製造方法および液晶パネル製造方法
WO2018216712A1 (ja) * 2017-05-24 2018-11-29 株式会社Ｎｓｃ 透明性薄膜付ガラスパネル製造方法、透明性薄膜付液晶パネル製造方法、ガラスパネル製造方法、および液晶パネル製造方法

Also Published As

Publication number Publication date
WO2020179312A1 (ja) 2020-09-10
CN113767075B (zh) 2023-11-03
JP2020142941A (ja) 2020-09-10
TW202043441A (zh) 2020-12-01
CN113767075A (zh) 2021-12-07
TWI832970B (zh) 2024-02-21

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