JP6797132B2 - 流体導管が埋め込まれた半導体製造装置及び導管の形成方法 - Google Patents
流体導管が埋め込まれた半導体製造装置及び導管の形成方法 Download PDFInfo
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/171—Processes of additive manufacturing specially adapted for manufacturing multiple 3D objects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F2005/005—Article surface comprising protrusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/004—Charge control of objects or beams
- H01J2237/0041—Neutralising arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/061—Construction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Description
Claims (12)
- アディティブ製造処理を用いて半導体製造装置の管状の構成要素の側壁の内面と外面との間に埋め込まれる導管であって、この導管の内面上に形成された一組の均一にパターン化された隆起特徴部を有する当該導管を形成するステップを有し、前記一組の均一にパターン化された隆起特徴部が複数のリッジである方法。
- 請求項1に記載の方法において、前記一組の均一にパターン化された隆起特徴部は前記導管の内部領域内に延在させるようにする方法。
- 請求項1に記載の方法において、この方法が更に、前記導管を螺旋形態に形成するステップを有している方法。
- 請求項1に記載の方法において、前記構成要素が、イオン源、プラズマフラッドガン、冷却プレート、プラテン及びアークチャンバ基部のうちの少なくとも1つを有するようにする方法。
- 請求項1に記載の方法において、前記導管が多角形の断面を有するようにする方法。
- アディティブ製造処理を用いてイオン注入装置の管状の構成要素の側壁の内面と外面との間に埋め込まれる導管であって、この導管の内面上に形成された一組の均一にパターン化された隆起表面特徴部を有する当該導管を形成するステップを有し、前記一組の均一にパターン化された隆起表面特徴部は複数のリッジであり、前記導管の内部領域内に延在するようにする方法。
- 請求項6に記載の方法において、この方法が更に、前記導管を螺旋形態に形成するステップを有している方法。
- 請求項6に記載の方法において、前記構成要素が、イオン源、プラズマフラッドガン、冷却プレート、プラテン及びアークチャンバ基部のうちの少なくとも1つを有するようにする方法。
- 請求項6に記載の方法において、前記導管が多角形の断面を有するようにする方法。
- 半導体製造装置において、この半導体製造装置が、
この半導体製造装置の管状の構成要素の側壁の内面と外面との間に埋め込まれた導管であって、複数のうねりが形成されている当該導管と、
この導管の内面上に形成された一組の均一にパターン化された隆起表面特徴部であって、この導管の内部領域内に延在している複数のリッジである当該一組の均一にパターン化された隆起表面特徴部と
を具える半導体製造装置。 - 請求項10に記載の半導体製造装置において、前記構成要素が、イオン源、プラズマフラッドガン、冷却プレート、プラテン及びアークチャンバ基部のうちの少なくとも1つを有している半導体製造装置。
- 請求項10に記載の半導体製造装置において、前記導管が多角形の断面を有している半導体製造装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/692,189 | 2015-04-21 | ||
US14/692,189 US10486232B2 (en) | 2015-04-21 | 2015-04-21 | Semiconductor manufacturing device with embedded fluid conduits |
PCT/US2016/028076 WO2016172030A1 (en) | 2015-04-21 | 2016-04-18 | Semiconductor manufacturing device with embedded fluid conduits |
Publications (3)
Publication Number | Publication Date |
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JP2018518013A JP2018518013A (ja) | 2018-07-05 |
JP2018518013A5 JP2018518013A5 (ja) | 2019-01-10 |
JP6797132B2 true JP6797132B2 (ja) | 2020-12-09 |
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JP2017554453A Active JP6797132B2 (ja) | 2015-04-21 | 2016-04-18 | 流体導管が埋め込まれた半導体製造装置及び導管の形成方法 |
Country Status (6)
Country | Link |
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US (3) | US10486232B2 (ja) |
JP (1) | JP6797132B2 (ja) |
KR (1) | KR102550449B1 (ja) |
CN (1) | CN107530775B (ja) |
TW (1) | TWI680817B (ja) |
WO (1) | WO2016172030A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201703137D0 (en) * | 2017-02-27 | 2017-04-12 | Univ Sheffield | Methods and systems for producing three dimensional objects |
WO2019006168A1 (en) * | 2017-06-28 | 2019-01-03 | Evapco, Inc | COLLECTOR FOR HEAT EXCHANGERS MADE BY ADDITIVE MANUFACTURING |
EP3563962B1 (en) * | 2018-05-01 | 2021-12-08 | Hamilton Sundstrand Corporation | Duct manufacturing method |
JP7267307B2 (ja) * | 2018-05-24 | 2023-05-01 | ゲーカーエン ドライブライン インターナショナル ゲゼルシャフト ミト ベシュレンクテル ハフツング | 配管路器のブランク、特に電気インダクタのブランク |
KR20210007032A (ko) * | 2018-06-08 | 2021-01-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 플라즈마 강화 화학 기상 증착 챔버에서 기생 플라즈마를 억제하기 위한 장치 |
US11426818B2 (en) | 2018-08-10 | 2022-08-30 | The Research Foundation for the State University | Additive manufacturing processes and additively manufactured products |
CN109285752A (zh) * | 2018-10-16 | 2019-01-29 | 中国工程物理研究院核物理与化学研究所 | 一种用于离子源束流的冷却装置 |
US11075062B2 (en) * | 2018-11-15 | 2021-07-27 | Tokyo Electron Limited | Vacuum processing apparatus |
US11761855B2 (en) * | 2019-07-03 | 2023-09-19 | Rtx Corporation | Apparatus and method for testing additively manufactured engine components |
CN115362538A (zh) * | 2020-04-06 | 2022-11-18 | 朗姆研究公司 | 气体注射器的陶瓷增材制造技术 |
US11404351B2 (en) | 2020-04-21 | 2022-08-02 | Toyota Motor Engineering & Manufacturing North America, Inc. | Chip-on-chip power card with embedded direct liquid cooling |
US20230019430A1 (en) * | 2021-07-13 | 2023-01-19 | Changxin Memory Technologies, Inc. | Gas injector and diffusion furnace device |
CN114433878B (zh) * | 2022-01-17 | 2023-04-07 | 成都飞机工业(集团)有限责任公司 | 一种含内流体通道的管道及其加工方法 |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3056071A (en) * | 1959-02-12 | 1962-09-25 | William R Baker | Electrical coil structure |
NL145716B (nl) * | 1964-06-06 | 1975-04-15 | Philips Nv | Elektronenstraalapparaat. |
GB1234183A (ja) * | 1967-08-18 | 1971-06-03 | ||
JPS6223014Y2 (ja) * | 1980-11-20 | 1987-06-11 | ||
DE3404457A1 (de) * | 1984-02-08 | 1985-08-08 | Siemens AG, 1000 Berlin und 8000 München | Einrichtung zur kuehlung eines magnetsystems |
US4896130A (en) * | 1987-11-16 | 1990-01-23 | Ermilov Igor V | Magnetic system |
US5012104A (en) * | 1990-05-17 | 1991-04-30 | Etec Systems, Inc. | Thermally stable magnetic deflection assembly and method of making same |
US5136166A (en) * | 1990-05-17 | 1992-08-04 | Etec Systems, Inc. | Temperature stable magnetic deflection assembly |
US5289009A (en) * | 1990-08-02 | 1994-02-22 | U.S. Philips Corporation | Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system |
JP2809917B2 (ja) * | 1992-01-13 | 1998-10-15 | 富士通株式会社 | 荷電粒子ビーム露光方法および装置 |
JPH1012180A (ja) * | 1996-06-17 | 1998-01-16 | Nissin Electric Co Ltd | イオン注入装置のファラディ |
JP3352362B2 (ja) | 1997-07-14 | 2002-12-03 | 三菱電機株式会社 | 放熱板 |
US6053241A (en) * | 1998-09-17 | 2000-04-25 | Nikon Corporation | Cooling method and apparatus for charged particle lenses and deflectors |
JP2000223494A (ja) * | 1999-02-01 | 2000-08-11 | Komatsu Ltd | 基板の温度調節用ステージ |
US6163241A (en) * | 1999-08-31 | 2000-12-19 | Stupak, Jr.; Joseph J. | Coil and method for magnetizing an article |
US20040040664A1 (en) * | 2002-06-03 | 2004-03-04 | Yang Jang Gyoo | Cathode pedestal for a plasma etch reactor |
GB2397691B (en) * | 2003-01-24 | 2005-08-10 | Leica Microsys Lithography Ltd | Cooling of a device for influencing an electron beam |
JP2005291599A (ja) * | 2004-03-31 | 2005-10-20 | Kobelco & Materials Copper Tube Inc | ヒートパイプ用内面溝付管およびヒートパイプ |
US7345287B2 (en) * | 2005-09-30 | 2008-03-18 | Applied Materials, Inc. | Cooling module for charged particle beam column elements |
CN100581333C (zh) | 2006-11-21 | 2010-01-13 | 中山大学 | 一种微热管散热基板 |
JP5050241B2 (ja) * | 2007-01-29 | 2012-10-17 | 株式会社Kelk | 流体温調装置 |
EP1970935B1 (en) * | 2007-03-14 | 2011-01-12 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Lens coil cooling of a magnetic lens |
US20110036538A1 (en) | 2007-09-07 | 2011-02-17 | International Business Machines Corporation | Method and device for cooling a heat generating component |
US8558196B2 (en) * | 2010-11-13 | 2013-10-15 | Mapper Lithography Ip B.V. | Charged particle lithography system with aperture array cooling |
GB201019287D0 (en) * | 2010-11-15 | 2010-12-29 | Heat engine | |
CN102069172B (zh) | 2011-02-17 | 2012-12-26 | 北京科技大学 | 一种铝冷却板的复合铸造方法 |
WO2013019129A2 (en) * | 2011-08-03 | 2013-02-07 | Institute Of Geological And Nuclear Sciences Limited | Ion source |
US8292524B1 (en) | 2011-08-05 | 2012-10-23 | Hon Hai Precision Industry Co., Ltd. | Lens module and camera module having same |
US9171746B2 (en) | 2011-09-06 | 2015-10-27 | Arsalan Emami | Heater elements with enhanced cooling |
EP2772717B1 (en) * | 2011-10-28 | 2019-02-27 | Kyocera Corporation | Channel member, heat exchanger, and semiconductor unit including the same |
EP2815638B1 (de) * | 2012-04-03 | 2016-08-24 | Siemens Aktiengesellschaft | Kühlvorrichtung |
US9863710B2 (en) * | 2012-05-11 | 2018-01-09 | Mitsubishi Electric Corporation | Laminated total heat exchange element |
EP2850635B1 (en) * | 2012-05-14 | 2016-04-27 | Mapper Lithography IP B.V. | Charged particle multi-beamlet lithography system and cooling arrangement manufacturing method |
WO2013179936A1 (ja) * | 2012-05-30 | 2013-12-05 | 京セラ株式会社 | 流路部材ならびにこれを用いた吸着装置および冷却装置 |
JP5981245B2 (ja) | 2012-06-29 | 2016-08-31 | 京セラ株式会社 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
US10900537B2 (en) * | 2012-07-02 | 2021-01-26 | Honeywell International Inc. | Vibration isolator assemblies and methods for the manufacture thereof |
US8796649B2 (en) * | 2012-11-29 | 2014-08-05 | Ion Technology Solutions, Llc | Ion implanter |
JP6417390B2 (ja) * | 2013-03-15 | 2018-11-07 | プラズマビリティー, エルエルシー | Cvdプラズマ処理の方法 |
CN104078300A (zh) | 2013-03-28 | 2014-10-01 | 中微半导体设备(上海)有限公司 | 一种等离子处理腔室及其基台 |
EP2808986B1 (de) | 2013-05-27 | 2016-03-09 | Etel S. A.. | Kühlkörper für einen Linearmotor |
US9177708B2 (en) * | 2013-06-14 | 2015-11-03 | Varian Semiconductor Equipment Associates, Inc. | Annular cooling fluid passage for magnets |
CN203509037U (zh) * | 2013-09-03 | 2014-04-02 | 广州中国科学院先进技术研究所 | 一种基于3d打印技术具有环形水路的冷却装置 |
CN103495734B (zh) | 2013-09-03 | 2015-07-22 | 广州中国科学院先进技术研究所 | 一种基于3d打印技术具有环形水路的冷却装置 |
CN104089300A (zh) | 2014-07-09 | 2014-10-08 | 江苏永钢集团有限公司 | 一种防止燃气锅炉回火爆炸的安全控制方法 |
US11045912B2 (en) * | 2019-06-18 | 2021-06-29 | Hamilton Sundstrand Corporation | Method of fabricating an oscillating heat pipe |
US11397059B2 (en) * | 2019-09-17 | 2022-07-26 | General Electric Company | Asymmetric flow path topology |
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JP2018518013A (ja) | 2018-07-05 |
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US20190366436A1 (en) | 2019-12-05 |
US11213891B2 (en) | 2022-01-04 |
CN107530775A (zh) | 2018-01-02 |
US10486232B2 (en) | 2019-11-26 |
WO2016172030A1 (en) | 2016-10-27 |
TW201707818A (zh) | 2017-03-01 |
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