JP6784446B2 - 半導体用接着フィルムおよび半導体装置 - Google Patents
半導体用接着フィルムおよび半導体装置 Download PDFInfo
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- JP6784446B2 JP6784446B2 JP2018567832A JP2018567832A JP6784446B2 JP 6784446 B2 JP6784446 B2 JP 6784446B2 JP 2018567832 A JP2018567832 A JP 2018567832A JP 2018567832 A JP2018567832 A JP 2018567832A JP 6784446 B2 JP6784446 B2 JP 6784446B2
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Description
本出願は、2016年11月29日付の韓国特許出願第10−2016−0160379号に基づく優先権の利益を主張し、当
該韓国特許出願の文献に開示されたすべての内容は本明細書の一部として含まれる。
本発明は、半導体用接着フィルムおよび半導体装置に関する。
また、本発明は、前記半導体用接着フィルムを含む半導体装置に関する。
前記エポキシ樹脂のエポキシ当量は、100〜300g/eqであってもよい。
前記硬化触媒は、前記硬化剤の作用や前記接着層の硬化を促進させる役割を果たし、半導体接着フィルムなどの製造に使用されると知られた硬化触媒を大きな制限なく使用することができる。例えば、前記硬化触媒としては、リン系化合物、ホウ素系化合物、およびリン−ホウ素系化合物、およびイミダゾール系化合物からなる群より選択された1種以上を使用することができる。前記硬化触媒の使用量は、最終的に製造される接着フィルムの物性などを考慮して適切に選択することができ、例えば、前記液状および固状エポキシ樹脂、(メタ)アクリレート系樹脂、およびフェノール樹脂の総和100重量部を基準として0.5〜10重量部使用できる。
常温で前記接着層の引張率が300%以下であってもよい。
前記接着フィルムの最外角に位置する接着層は、前記半導体素子の一面に接着される。
また、前記接着フィルムの他の最外角に位置する他の接着層は、基板などの被着体に結合される。
前記FOW上に第2半導体素子302、第3半導体素子303、第4半導体素子304、第5半導体素子305が順次に積層され、前記第2半導体素子302、第3半導体素子303、第4半導体素子304、および第5半導体素子305の間には、それぞれ第1半導体接着フィルム310、第2半導体接着フィルム320、および第3半導体接着フィルム330が形成される。前記第2半導体素子302、第3半導体素子303、第4半導体素子304、および第5半導体素子305は、それぞれまたは同時に導電性ワイヤ307を介して接地部306に連結され、また、これらすべてがモールディング部材に埋め込まれる。
実施例1
(1)接着層溶液の製造
エポキシ樹脂の硬化剤であるフェノール樹脂KH−6021(DIC社製品、ビスフェノールAノボラック樹脂、水酸基当量121g/eq、軟化点:125℃)57g、エポキシ樹脂EOCN−104S(日本化薬製品、クレゾールノボラック型エポキシ樹脂、エポキシ当量214g/eq、軟化点:83℃)85g、アクリレート樹脂(KG−3015P)425g、R972 61.7g、DICY0.96g、および2MAOK0.11gをメチルエチルケトン溶媒に混合して、接着層溶液(固形分20重量%濃度)を得た。
前記製造された接着層溶液を離型処理されたポリエチレンテレフタレートフィルム(厚さ38μm)上に塗布した後、110℃で3分間乾燥して、約9μmの厚さの接着フィルムを得た。
そして、約2μmの厚さの銅foilの両面に前記接着フィルムをラミネートして、約20μmの厚さの半導体用接着フィルムを製造した。
アクリレート樹脂をKG−3015Pの代わりにKG−3082を用いた点を除けば、前記実施例1と同様の方法で接着層溶液(固形分20重量%濃度)を得て、これを用いて実施例1と同様の方法で約2μmの厚さの銅foilの両面に前記接着フィルムをラミネートして、約20μmの厚さの半導体用接着フィルムを製造した。
約2μmの厚さの銅foilの一面にスパッタリング蒸着法を利用して約0.05μmの厚さのニオブ(Nb)酸化物層を成膜した。そして、前記ニオブ(Nb)酸化物層上に、前記実施例1で得られた約9μmの厚さの接着フィルムをラミネートした。
そして、前記約2μmの厚さの銅foilの他の一面に同様にスパッタリング蒸着法を利用して約0.05μmの厚さのニオブ(Nb)酸化物層を成膜し、前記実施例1で得られた約9μmの厚さの接着フィルムをラミネートした。
前記実施例1で製造された接着層溶液を離型処理されたポリエチレンテレフタレートフィルム(厚さ38μm)上に塗布した後、110℃で3分間乾燥して、約20μmの厚さの接着フィルムを得た。
前記実施例1で得られた約9μmの厚さの接着フィルム上にスパッタリング蒸着法を利用して0.04μmの厚さの銅層を形成し、前記銅層上に前記約9μmの厚さの接着フィルムを再度ラミネートして、約18.4μmの厚さの半導体用接着フィルムを製造した。
EOCN−104S:クレゾールノボラックエポキシ(日本化薬(株)、エポキシ当量:180g/eq、軟化点:90℃)
<充填剤>
R972:エボニックインダストリーズ、ヒュームドシリカ、平均粒径17nm
<アクリレート樹脂>
KG−3015P:ブチルアクリレート:エチルアクリレート:アクリロニトリル:メチルメタクリレート;グリシジルメタクリレート=41:24:30:2:3の組成比で合成したアクリル樹脂(重量平均分子量約90万、ガラス転移温度17℃)
KG−3082:ブチルアクリレート:アクリロニトリル:グリシジルメタクリレート:ベンジルメタクリレート=46:20:6:28の組成比で合成したアクリル樹脂(重量平均分子量約66万、ガラス転移温度14℃、水酸基当量約0.05eq/kg)
<添加剤>
DICY:Dicyandiamide
2MAOK:Imidazole−based hardening accelerator
(1)半導体装置の製造
前記実施例および比較例それぞれから得られた半導体用接着フィルムを、温度70℃の条件下、一辺が10mmの四角形、厚さ80μmの第1半導体素子に付着させた。前記接着フィルムが付着した第1半導体素子を、温度125℃、圧力1kg、時間1秒の条件下、BGA基板に付着させた。
そして、前記第1半導体素子が接着されたBGA基板を、乾燥機で125℃、1時間熱処理して接着フィルムを熱硬化させた。続いて、ワイヤボンダ((株)新川、商品名「UTC−1000」)を用いて、以下の150℃の条件下、直径23μmのワイヤを100μmのピッチで第1半導体素子に対してワイヤボンディングを進行させた。
前記製造された半導体装置にSignal Sourceを介して電力を印加し、Near Field Antennaを半導体装置上に位置させた後、Spectrum Analyzerにより2Dスキャンで前記Antennaから得られる電磁波の量(dBm)を周波数約1MHz〜8GHzの範囲で測定した。測定結果は下記表3に記載した。
前記実施例1および3の半導体用接着フィルムを75μmの間隔をおいて設けられた2つの銅電極上にラミネートし、その状態で125℃で1時間熱処理して前記接着フィルムを熱硬化した。その後、85℃、相対湿度85RH%の条件下、銅電極に5.5Vの電圧を印加して水分の短時間に電気的抵抗値が急激に低下する時点(short発生)までの時間を測定した。
112:信号パッド
114:接地コンタクト
116:回路パターン
120:半導体素子
122:ボンディングパッド
125:導電性ワイヤ
130:モールディング部材
140:半導体接着フィルム
200:パッケージ基板
201:第1半導体素子
202:第2半導体素子
203:接地部
204:導電性ワイヤ
205:モールディング部材
210:第1半導体接着フィルム
220:第2半導体接着フィルム
300:パッケージ基板
301:第1半導体素子
302:第2半導体素子
303:第3半導体素子
304:第4半導体素子
305:第5半導体素子
306:接地部
307:導電性ワイヤ
308:FOW(Film Over Wire)
310:第1半導体接着フィルム
320:第2半導体接着フィルム
330:第3半導体接着フィルム
Claims (15)
- 銅、ニッケル、コバルト、鉄、ステンレススチール(SUS)、およびアルミニウムからなる群より選択された1種以上の金属を含み、0.05μm以上の厚さを有する導電性層;および
前記導電性層の少なくとも一面に形成され、(メタ)アクリレート系樹脂、硬化剤、およびエポキシ樹脂を含む接着層;を含み、
前記接着層は、エポキシ系官能基を含む(メタ)アクリレート系繰り返し単位および芳香族官能基を含む(メタ)アクリレート系繰り返し単位を含む(メタ)アクリレート系樹脂、フェノール樹脂を含む硬化剤、およびエポキシ樹脂を含む接着層;を含む、半導体用接着フィルム。 - 前記導電性層は、0.05μm〜10μmの厚さを有する、請求項1に記載の半導体用接着フィルム。
- 前記導電性層は、0.1μm〜10μmの銅層、0.1μm〜10μmのステンレススチール(SUS)層、0.1μm〜10μmのアルミニウム層、0.05μm〜10μmのニッケル層、0.05μm〜10μmのコバルト層、または0.05μm〜10μmの鉄(Fe)層である、請求項1に記載の半導体用接着フィルム。
- 前記導電性層および接着層の間に形成され、0.001μm〜1μmの厚さを有するバリア層をさらに含む、請求項1に記載の半導体用接着フィルム。
- 前記バリア層は、チタン(Ti)、ジルコニウム(Zr)、ハフニウム(Hf)、バナジウム(V)、ニオブ(Nb)、タンタル(Ta)、ステンレススチール(SUS)、ニッケル合金、および希土類金属からなる群より選択された1種以上、またはこれらの酸化物、これらの窒化物を含む、請求項4に記載の半導体用接着フィルム。
- 前記(メタ)アクリレート系樹脂の水酸基当量が0.15eq/kg以下である、請求項1に記載の半導体用接着フィルム。
- 前記(メタ)アクリレート系樹脂は、芳香族官能基を含む(メタ)アクリレート系繰り返し単位2〜40重量%を含む、請求項1に記載の半導体用接着フィルム。
- 前記(メタ)アクリレート系樹脂、エポキシ樹脂、およびフェノール樹脂の総重量対比、前記(メタ)アクリレート系樹脂の重量の比率が0.55〜0.95である、請求項1に記載の半導体用接着フィルム。
- 前記フェノール樹脂は、100℃以上の軟化点を有する、請求項1に記載の半導体用接着フィルム。
- 前記エポキシ樹脂の軟化点は、50℃〜120℃である、請求項1に記載の半導体用接着フィルム。
- 前記接着層は、0.1μm〜300μmの厚さを有し、
前記接着層対比の前記導電性層の厚さの比率は、0.001〜0.8である、請求項1に記載の半導体用接着フィルム。 - 請求項1に記載の半導体用接着フィルムと、前記接着フィルムの接着層の一面に接する半導体素子と;を含む半導体装置。
- 前記半導体装置は、ワイヤボンディングまたはフリップチップ方式により前記半導体素子と結合する被着体をさらに含む、請求項12に記載の半導体装置。
- 前記半導体用接着フィルムは、前記被着体および半導体素子の間に形成されるか、
前記半導体用接着フィルムは、前記半導体素子と前記被着体とが結合した面の反対面に形成される、請求項13に記載の半導体装置。 - 前記半導体装置は、2以上の半導体素子を含み、
前記2以上の半導体素子の少なくとも2つは、前記半導体用接着フィルムを介して結合される、請求項12に記載の半導体装置。
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