JP6778184B2 - 低粗度金属層を介した直接接着のための方法 - Google Patents
低粗度金属層を介した直接接着のための方法 Download PDFInfo
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- JP6778184B2 JP6778184B2 JP2017519514A JP2017519514A JP6778184B2 JP 6778184 B2 JP6778184 B2 JP 6778184B2 JP 2017519514 A JP2017519514 A JP 2017519514A JP 2017519514 A JP2017519514 A JP 2017519514A JP 6778184 B2 JP6778184 B2 JP 6778184B2
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- 229910052802 copper Inorganic materials 0.000 claims description 7
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- 229910017305 Mo—Si Inorganic materials 0.000 description 1
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Description
− 第1および第2の基板の各々の表面上に、被着された金属層の各々の表面粗さを粗さ閾値未満に制限するべく厚さコントロールされた金属層を被着させる工程と、
− 第1および第2の基板の表面上に被着された金属層を、空気に暴露する工程と、
− 被着された金属接合層を接触させることにより、第1および第2の基板を直接接合する工程とを含み、接触された層の表面粗さが被着工程の最後に得られたものである方法を提供する。
− 接合工程は、被着金属層の最大空気暴露時間の後に、30分未満の、好ましくは20分未満の前記空気暴露に続いて実行される;
− 接合工程は、50℃未満の温度において、好ましくは常温で、例えば10℃と30℃の間において行われる;
− 接合工程は、大気圧下で行われる;
− 接合工程は、空気中で行なわれる;
− 接合工程は、金属接合層を接触させた結果として生じる第1および第2の基板のアセンブリに対し、圧力を印加することなく行われる;
− それは、第1の基板の表面上への金属層の被着の前に、前記第1の基板上に表層を形成する工程を含む;
− 表層は、金属層の物質の、第1の基板中への拡散に対するバリア層、例えば窒化チタンまたは窒化タンタルの表層である;
− 表層は、誘電体、窒化物、または金属から選択される物質の層であり、その表面粗さは、第1および第2の基板の直接接合を可能にするものではない;
− 第1および第2の基板は、異なる熱膨張係数をもつ;
− 金属層は、物理蒸着によって被着される;
− 金属層は、1×1μm2の面積を走査する原子間力顕微鏡を用いて測定されたとき、その表面粗さを1.0nm RMS未満に制限するべく厚さコントロールされた銅層である;
− 金属層は、1×1μm2の面積を走査する原子間力顕微鏡を用いて測定されたとき、その表面粗さを1.2nm RMS未満に制限するべく厚さコントロールされた金層である;
− それは接合の前に原子種を注入することにより、第1の基板内に脆化ゾーンを形成すること、および接合に続き、前記第1の基板を脆化ゾーンにおいて分離することにより、第1の基板の一部を除去することを含む。
− 薄い金属層の被着、空気暴露、および表面の接触を相次いで実施することは、金属酸化物の層または表面吸着炭化水素の層の形成を防止または制限し、このことが常温で金属結合を生じる可能性を残す。この仮説は、特に、高い接着作用の測定によって支持され、接着レジメン(adhesion regimen)の変更が指示される。関与する引力は、それ故、ファンデルワールス力が接着を支配する通常の場合におけるよりも強い。
− 本発明の方法において使用される双方の金属の性質は特殊である:これらは延性材料(ductile materials)である。それ故、接着メカニズムにおいては、斥力(repulsive forces)が凹凸(asperities)の機械的応答に関係づけられることから、これらの材料は引力の作用下ではより変形する傾向がある。したがって、この変形の容易さと、関与する強い力との複合作用が、これらの表面の直接接合に適合する粗許容限度のさらなる拡張をもたらす。
Claims (11)
- 第1の基板(1)と第2の基板(3)とを金属接合層(2、4)を介してアセンブルするための方法であって、
− 前記第1および第2の基板(1、3)の各々の表面上に、被着された金属層の各々の表面粗さを粗さ閾値未満に制限するべく厚さコントロールされた金属層(2、4)を被着させる工程と、
− 前記第1および第2の基板の表面上に被着された前記金属層を、空気に暴露する工程と、
− 被着された前記金属接合層を接触させることにより、前記第1および第2の基板を直接接合する工程とを含み、接触された層の表面粗さが被着工程の最後に得られたものであり、
前記接合する工程が、前記金属接合層を接触させた結果として生じる前記第1および第2の基板のアセンブリに対し、圧力を印加することなく行われ、
前記第1の基板の表面上への金属層の被着の前に、前記第1の基板上に表層を形成する工程をさらに含み、前記表層が、誘電体、窒化物、または金属から選択される物質の層であり、その表面粗さが、前記第1および第2の基板の直接接合を可能にするものではない、方法。 - 前記接合する工程が、30分未満の前記金属層の最大空気暴露時間の後に、実行される、請求項1に記載の方法。
- 前記接合する工程が、50℃未満の温度において行われる、請求項1および2のいずれか1項に記載の方法。
- 前記接合する工程が、大気圧下で行われる、請求項1〜3のいずれか1項に記載の方法。
- 前記接合する工程は、空気中で行なわれる、請求項1〜4のいずれか1項に記載の方法。
- 前記表層が、前記金属層の物質の、前記第1の基板中への拡散に対するバリア層、例えば窒化チタンまたは窒化タンタルの表層である、請求項1〜5のいずれか1項に記載の方法。
- 前記第1および第2の基板が、異なる熱膨張係数をもつ、請求項1〜6のいずれか1項に記載の方法。
- 前記金属層が、物理蒸着によって被着される、請求項1〜7のいずれか1項に記載の方法。
- 前記金属層が、1×1μm2の面積を走査する原子間力顕微鏡を用いて測定されたとき、その表面粗さを1.0nm RMS未満に制限するべく厚さコントロールされた銅層である、請求項1〜8のいずれか1項に記載の方法。
- 前記金属層が、1×1μm2の面積を走査する原子間力顕微鏡を用いて測定されたとき、その表面粗さを1.2nm RMS未満に制限するべく厚さコントロールされた金層である、請求項1〜9のいずれか1項に記載の方法。
- 接合に先立ち、原子種を注入することにより前記第1の基板内に脆化ゾーンを形成すること、および接合に続き、前記第1の基板を前記脆化ゾーンにおいて分離することにより、前記第1の基板の一部を除去することを含む、請求項1〜10のいずれか1項に記載の方法。
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PCT/EP2015/073746 WO2016059094A1 (fr) | 2014-10-17 | 2015-10-14 | Procédé de collage direct via des couches métalliques peu rugueuses |
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