JP6764578B2 - 積層レンズ構造体およびその製造方法、並びに電子機器 - Google Patents
積層レンズ構造体およびその製造方法、並びに電子機器 Download PDFInfo
- Publication number
- JP6764578B2 JP6764578B2 JP2018524588A JP2018524588A JP6764578B2 JP 6764578 B2 JP6764578 B2 JP 6764578B2 JP 2018524588 A JP2018524588 A JP 2018524588A JP 2018524588 A JP2018524588 A JP 2018524588A JP 6764578 B2 JP6764578 B2 JP 6764578B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- substrate
- hole
- laminated
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
- B29D11/00375—Production of microlenses by moulding lenses in holes through a substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/026—Wafer-level processing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Lens Barrels (AREA)
- Studio Devices (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Cameras In General (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015152921 | 2015-07-31 | ||
| JP2015152921 | 2015-07-31 | ||
| PCT/JP2016/003350 WO2017022188A1 (en) | 2015-07-31 | 2016-07-15 | Stacked lens structure, method of manufacturing the same, and electronic apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018525684A JP2018525684A (ja) | 2018-09-06 |
| JP2018525684A5 JP2018525684A5 (enExample) | 2019-08-08 |
| JP6764578B2 true JP6764578B2 (ja) | 2020-10-07 |
Family
ID=56684204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018524588A Active JP6764578B2 (ja) | 2015-07-31 | 2016-07-15 | 積層レンズ構造体およびその製造方法、並びに電子機器 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US10431618B2 (enExample) |
| EP (1) | EP3329314B1 (enExample) |
| JP (1) | JP6764578B2 (enExample) |
| KR (1) | KR20180033167A (enExample) |
| CN (1) | CN107771357B (enExample) |
| TW (1) | TWI741988B (enExample) |
| WO (1) | WO2017022188A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI781085B (zh) * | 2015-11-24 | 2022-10-21 | 日商索尼半導體解決方案公司 | 複眼透鏡模組及複眼相機模組 |
| KR20190104381A (ko) * | 2017-01-06 | 2019-09-09 | 어비디티 바이오사이언시스 엘엘씨 | 핵산-폴리펩티드 조성물 및 엑손 스키핑을 유도하는 방법 |
| US10222555B2 (en) * | 2017-01-10 | 2019-03-05 | International Business Machines Corporation | Integrated optoelectronic chip and lens array |
| JP6949515B2 (ja) * | 2017-03-15 | 2021-10-13 | ソニーセミコンダクタソリューションズ株式会社 | カメラモジュール及びその製造方法、並びに、電子機器 |
| US10852460B2 (en) * | 2017-08-04 | 2020-12-01 | Canon Kabushiki Kaisha | Diffraction optical element, manufacturing method thereof, and optical apparatus |
| JP7032103B2 (ja) * | 2017-10-27 | 2022-03-08 | 日本電産コパル株式会社 | 撮像装置 |
| KR101855274B1 (ko) * | 2017-11-02 | 2018-05-08 | 에스케이씨 주식회사 | 플라스틱 렌즈의 이형 방법 및 이형 장치 |
| US10818778B2 (en) * | 2017-11-27 | 2020-10-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Heterogeneous semiconductor device substrates with high quality epitaxy |
| JP2019184719A (ja) | 2018-04-05 | 2019-10-24 | ソニーセミコンダクタソリューションズ株式会社 | 積層レンズ構造体およびその製造方法、並びに、電子機器 |
| WO2019227033A1 (en) * | 2018-05-24 | 2019-11-28 | International Electronic Machines Corp. | Sensitive area management |
| JP7206475B2 (ja) | 2018-08-31 | 2023-01-18 | 日亜化学工業株式会社 | レンズ及び発光装置並びにそれらの製造方法 |
| JP7239804B2 (ja) * | 2018-08-31 | 2023-03-15 | 日亜化学工業株式会社 | レンズ及び発光装置並びにそれらの製造方法 |
| JP6897641B2 (ja) | 2018-08-31 | 2021-07-07 | 日亜化学工業株式会社 | レンズ及び発光装置並びにそれらの製造方法 |
| JP2020136545A (ja) * | 2019-02-21 | 2020-08-31 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置及び電子機器 |
| DE102019107075A1 (de) * | 2019-03-20 | 2020-09-24 | HELLA GmbH & Co. KGaA | Beleuchtungsvorrichtung für Fahrzeuge |
| TWI701127B (zh) * | 2019-05-16 | 2020-08-11 | 趙崇禮 | 透鏡陣列的模具設備 |
| CN112582803B (zh) * | 2019-09-30 | 2022-08-12 | Oppo广东移动通信有限公司 | 阵列透镜、透镜天线和电子设备 |
| TWI748791B (zh) * | 2020-07-31 | 2021-12-01 | 友達光電股份有限公司 | 光感測器及其製造方法 |
| TWI752802B (zh) * | 2020-08-17 | 2022-01-11 | 友達光電股份有限公司 | 指紋感測模組及指紋辨識裝置 |
| US12052484B2 (en) | 2021-04-27 | 2024-07-30 | Apple Inc. | Camera integration for portable electronic devices |
| JP7610464B2 (ja) * | 2021-04-28 | 2025-01-08 | 株式会社ジャパンディスプレイ | 検出装置 |
| TWI769814B (zh) * | 2021-05-14 | 2022-07-01 | 聯華電子股份有限公司 | 改善半導體鍵合品質的方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08199118A (ja) * | 1995-01-19 | 1996-08-06 | Mitsubishi Materials Corp | シリコン―シリコン接合方法 |
| US7564496B2 (en) * | 2002-09-17 | 2009-07-21 | Anteryon B.V. | Camera device, method of manufacturing a camera device, wafer scale package |
| TWI289352B (en) * | 2005-07-06 | 2007-11-01 | Asia Optical Co Inc | Micro lens and its manufacturing method |
| US20080181558A1 (en) * | 2007-01-31 | 2008-07-31 | Hartwell Peter G | Electronic and optical circuit integration through wafer bonding |
| CN101269917B (zh) * | 2007-03-21 | 2011-11-30 | 鸿富锦精密工业(深圳)有限公司 | 低辐射玻璃 |
| KR100969987B1 (ko) * | 2008-01-10 | 2010-07-15 | 연세대학교 산학협력단 | 광학패키지 웨이퍼스케일 어레이 및 그 제조방법 |
| JP2009279790A (ja) | 2008-05-20 | 2009-12-03 | Sharp Corp | レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器 |
| FR2931585B1 (fr) * | 2008-05-26 | 2010-09-03 | Commissariat Energie Atomique | Traitement de surface par plasma d'azote dans un procede de collage direct |
| WO2010006219A2 (en) * | 2008-07-09 | 2010-01-14 | Baxter International Inc. | Use of scaffold comprising fibrin for delivery of stem cells |
| GB2465607A (en) * | 2008-11-25 | 2010-05-26 | St Microelectronics | CMOS imager structures |
| JP2010204632A (ja) | 2009-02-06 | 2010-09-16 | Fujifilm Corp | ウェハレベルレンズアレイの製造方法、ウェハレンズアレイ、レンズモジュール及び撮像ユニット |
| US8184195B2 (en) | 2009-04-01 | 2012-05-22 | Aptina Imaging Corporation | Lens shielding structures for digital image sensors |
| JP2010256563A (ja) | 2009-04-23 | 2010-11-11 | Sharp Corp | レンズアレイおよび当該レンズアレイの製造方法、並びに、その利用 |
| JP2011138089A (ja) | 2010-01-04 | 2011-07-14 | Fujifilm Corp | ウェハレベルレンズアレイ、レンズモジュール及び撮像ユニット |
| JP2011186306A (ja) * | 2010-03-10 | 2011-09-22 | Fujifilm Corp | ウェハレンズユニットおよびウェハレンズユニットの製造方法 |
| US8194335B2 (en) * | 2010-04-13 | 2012-06-05 | Himax Technologies Limited | Optical lens on wafer level and related method for forming the optical lens one wafer level |
| US8557679B2 (en) * | 2010-06-30 | 2013-10-15 | Corning Incorporated | Oxygen plasma conversion process for preparing a surface for bonding |
| TWI547730B (zh) * | 2010-08-17 | 2016-09-01 | 新加坡恒立私人有限公司 | 製造用於攝像機之複數光學裝置的方法、包括複數光學裝置之總成及包括複數具有光學裝置的攝像機之總成 |
| JP2012084608A (ja) * | 2010-10-07 | 2012-04-26 | Sony Corp | 固体撮像装置とその製造方法、並びに電子機器 |
| CN103314313B (zh) * | 2011-01-21 | 2014-08-06 | 富士胶片株式会社 | 堆叠型透镜阵列、透镜模块及摄像单元 |
| JP5401628B2 (ja) * | 2011-03-01 | 2014-01-29 | 富士フイルム株式会社 | レンズモジュールの製造方法、及びレンズモジュール |
| JP2014112116A (ja) * | 2011-03-14 | 2014-06-19 | Fujifilm Corp | 反射防止テープ及びウェハレベルレンズ並びに撮像装置 |
| JP2013001091A (ja) | 2011-06-21 | 2013-01-07 | Konica Minolta Advanced Layers Inc | 光学素子の製造方法 |
| US8388793B1 (en) * | 2011-08-29 | 2013-03-05 | Visera Technologies Company Limited | Method for fabricating camera module |
| TWI509292B (zh) * | 2011-09-07 | 2015-11-21 | Hon Hai Prec Ind Co Ltd | 鏡片及具有該鏡片的鏡頭模組 |
| KR101262597B1 (ko) * | 2011-09-28 | 2013-05-09 | 엘지이노텍 주식회사 | 카메라 모듈 |
| JP6257285B2 (ja) | 2013-11-27 | 2018-01-10 | キヤノン株式会社 | 複眼撮像装置 |
-
2016
- 2016-07-07 TW TW105121638A patent/TWI741988B/zh active
- 2016-07-15 JP JP2018524588A patent/JP6764578B2/ja active Active
- 2016-07-15 WO PCT/JP2016/003350 patent/WO2017022188A1/en not_active Ceased
- 2016-07-15 KR KR1020187000558A patent/KR20180033167A/ko not_active Abandoned
- 2016-07-15 US US15/567,289 patent/US10431618B2/en active Active
- 2016-07-15 CN CN201680035947.3A patent/CN107771357B/zh active Active
- 2016-07-15 EP EP16751017.1A patent/EP3329314B1/en active Active
-
2019
- 2019-09-09 US US16/564,444 patent/US10818717B2/en active Active
-
2020
- 2020-07-31 US US16/945,247 patent/US11342371B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20200365639A1 (en) | 2020-11-19 |
| US11342371B2 (en) | 2022-05-24 |
| US10431618B2 (en) | 2019-10-01 |
| US20180108697A1 (en) | 2018-04-19 |
| CN107771357A (zh) | 2018-03-06 |
| WO2017022188A1 (en) | 2017-02-09 |
| CN107771357B (zh) | 2022-01-14 |
| US10818717B2 (en) | 2020-10-27 |
| EP3329314B1 (en) | 2022-04-20 |
| JP2018525684A (ja) | 2018-09-06 |
| EP3329314A1 (en) | 2018-06-06 |
| US20200006415A1 (en) | 2020-01-02 |
| KR20180033167A (ko) | 2018-04-02 |
| TWI741988B (zh) | 2021-10-11 |
| TW201710726A (zh) | 2017-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6764578B2 (ja) | 積層レンズ構造体およびその製造方法、並びに電子機器 | |
| JP6859263B2 (ja) | カメラモジュールおよび電子機器 | |
| CN110235041B (zh) | 相机模块和电子装置 | |
| KR102511467B1 (ko) | 카메라 모듈 및 그 제조 방법, 및 전자기기 | |
| JP6976688B2 (ja) | カメラモジュールおよびその製造方法、並びに電子機器 | |
| CN110431666A (zh) | 相机模块及其制造方法以及电子装置 | |
| CN108025515B (zh) | 透镜基板、半导体装置的制造方法以及电子设备 | |
| WO2017022192A1 (en) | Stacked lens structure, method of manufacturing the same, and electronic apparatus | |
| KR102508561B1 (ko) | 적층 렌즈 구조체, 카메라 모듈, 및, 전자 기기 | |
| CN107850757A (zh) | 层叠透镜结构及其制造方法、电子设备、模具及其制造方法和基板 | |
| CN107850750B (zh) | 透镜安装基板、层叠透镜结构、其制造方法以及电子设备 | |
| KR20190098988A (ko) | 렌즈 모듈 및 렌즈 모듈의 제조 방법 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190621 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190621 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190621 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200602 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200713 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200813 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200826 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 6764578 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |