CN107771357B - 层叠透镜结构、其制造方法以及电子设备 - Google Patents

层叠透镜结构、其制造方法以及电子设备 Download PDF

Info

Publication number
CN107771357B
CN107771357B CN201680035947.3A CN201680035947A CN107771357B CN 107771357 B CN107771357 B CN 107771357B CN 201680035947 A CN201680035947 A CN 201680035947A CN 107771357 B CN107771357 B CN 107771357B
Authority
CN
China
Prior art keywords
substrate
lens
hole
laminated
lens structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201680035947.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN107771357A (zh
Inventor
松谷弘康
伊藤启之
斋藤卓
大岛启示
岩崎正则
林利彦
佐藤修三
藤井宣年
田泽洋志
白岩利章
石田実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of CN107771357A publication Critical patent/CN107771357A/zh
Application granted granted Critical
Publication of CN107771357B publication Critical patent/CN107771357B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00365Production of microlenses
    • B29D11/00375Production of microlenses by moulding lenses in holes through a substrate
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/001Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0085Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026Wafer-level processing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Lens Barrels (AREA)
  • Studio Devices (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Cameras In General (AREA)
CN201680035947.3A 2015-07-31 2016-07-15 层叠透镜结构、其制造方法以及电子设备 Active CN107771357B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015-152921 2015-07-31
JP2015152921 2015-07-31
PCT/JP2016/003350 WO2017022188A1 (en) 2015-07-31 2016-07-15 Stacked lens structure, method of manufacturing the same, and electronic apparatus

Publications (2)

Publication Number Publication Date
CN107771357A CN107771357A (zh) 2018-03-06
CN107771357B true CN107771357B (zh) 2022-01-14

Family

ID=56684204

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680035947.3A Active CN107771357B (zh) 2015-07-31 2016-07-15 层叠透镜结构、其制造方法以及电子设备

Country Status (7)

Country Link
US (3) US10431618B2 (enExample)
EP (1) EP3329314B1 (enExample)
JP (1) JP6764578B2 (enExample)
KR (1) KR20180033167A (enExample)
CN (1) CN107771357B (enExample)
TW (1) TWI741988B (enExample)
WO (1) WO2017022188A1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI781085B (zh) * 2015-11-24 2022-10-21 日商索尼半導體解決方案公司 複眼透鏡模組及複眼相機模組
SG10202107429WA (en) * 2017-01-06 2021-08-30 Avidity Biosciences Inc Nucleic acid-polypeptide compositions and methods of inducing exon skipping
US10222555B2 (en) * 2017-01-10 2019-03-05 International Business Machines Corporation Integrated optoelectronic chip and lens array
JP6949515B2 (ja) 2017-03-15 2021-10-13 ソニーセミコンダクタソリューションズ株式会社 カメラモジュール及びその製造方法、並びに、電子機器
US10852460B2 (en) * 2017-08-04 2020-12-01 Canon Kabushiki Kaisha Diffraction optical element, manufacturing method thereof, and optical apparatus
JP7032103B2 (ja) * 2017-10-27 2022-03-08 日本電産コパル株式会社 撮像装置
KR101855274B1 (ko) * 2017-11-02 2018-05-08 에스케이씨 주식회사 플라스틱 렌즈의 이형 방법 및 이형 장치
US10818778B2 (en) 2017-11-27 2020-10-27 Taiwan Semiconductor Manufacturing Co., Ltd. Heterogeneous semiconductor device substrates with high quality epitaxy
JP2019184719A (ja) 2018-04-05 2019-10-24 ソニーセミコンダクタソリューションズ株式会社 積層レンズ構造体およびその製造方法、並びに、電子機器
EP3803773B1 (en) * 2018-05-24 2024-09-04 International Electronic Machines Corp. Sensitive area management
JP6897641B2 (ja) 2018-08-31 2021-07-07 日亜化学工業株式会社 レンズ及び発光装置並びにそれらの製造方法
JP7239804B2 (ja) * 2018-08-31 2023-03-15 日亜化学工業株式会社 レンズ及び発光装置並びにそれらの製造方法
JP7206475B2 (ja) 2018-08-31 2023-01-18 日亜化学工業株式会社 レンズ及び発光装置並びにそれらの製造方法
JP2020136545A (ja) * 2019-02-21 2020-08-31 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置及び電子機器
DE102019107075A1 (de) * 2019-03-20 2020-09-24 HELLA GmbH & Co. KGaA Beleuchtungsvorrichtung für Fahrzeuge
TWI701127B (zh) * 2019-05-16 2020-08-11 趙崇禮 透鏡陣列的模具設備
CN112582803B (zh) * 2019-09-30 2022-08-12 Oppo广东移动通信有限公司 阵列透镜、透镜天线和电子设备
TWI748791B (zh) * 2020-07-31 2021-12-01 友達光電股份有限公司 光感測器及其製造方法
TWI752802B (zh) * 2020-08-17 2022-01-11 友達光電股份有限公司 指紋感測模組及指紋辨識裝置
US12052484B2 (en) * 2021-04-27 2024-07-30 Apple Inc. Camera integration for portable electronic devices
JP7610464B2 (ja) * 2021-04-28 2025-01-08 株式会社ジャパンディスプレイ 検出装置
TWI769814B (zh) * 2021-05-14 2022-07-01 聯華電子股份有限公司 改善半導體鍵合品質的方法
JP7627764B2 (ja) * 2021-07-19 2025-02-06 オリンパス株式会社 撮像装置、および、内視鏡
CN116203657A (zh) * 2023-02-10 2023-06-02 安徽省东超科技有限公司 等效负折射率平板透镜及其制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014112116A (ja) * 2011-03-14 2014-06-19 Fujifilm Corp 反射防止テープ及びウェハレベルレンズ並びに撮像装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08199118A (ja) * 1995-01-19 1996-08-06 Mitsubishi Materials Corp シリコン―シリコン接合方法
EP1543564A2 (en) * 2002-09-17 2005-06-22 Koninklijke Philips Electronics N.V. Camera device, method of manufacturing a camera device, wafer scale package
TWI289352B (en) * 2005-07-06 2007-11-01 Asia Optical Co Inc Micro lens and its manufacturing method
US20080181558A1 (en) * 2007-01-31 2008-07-31 Hartwell Peter G Electronic and optical circuit integration through wafer bonding
CN101269917B (zh) * 2007-03-21 2011-11-30 鸿富锦精密工业(深圳)有限公司 低辐射玻璃
KR100969987B1 (ko) * 2008-01-10 2010-07-15 연세대학교 산학협력단 광학패키지 웨이퍼스케일 어레이 및 그 제조방법
JP2009279790A (ja) 2008-05-20 2009-12-03 Sharp Corp レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器
FR2931585B1 (fr) * 2008-05-26 2010-09-03 Commissariat Energie Atomique Traitement de surface par plasma d'azote dans un procede de collage direct
US20100028311A1 (en) * 2008-07-09 2010-02-04 Baxter International Inc. Using of scaffold comprising fibrin for delivery of stem cells
GB2465607A (en) 2008-11-25 2010-05-26 St Microelectronics CMOS imager structures
JP2010204632A (ja) 2009-02-06 2010-09-16 Fujifilm Corp ウェハレベルレンズアレイの製造方法、ウェハレンズアレイ、レンズモジュール及び撮像ユニット
US8184195B2 (en) * 2009-04-01 2012-05-22 Aptina Imaging Corporation Lens shielding structures for digital image sensors
JP2010256563A (ja) 2009-04-23 2010-11-11 Sharp Corp レンズアレイおよび当該レンズアレイの製造方法、並びに、その利用
JP2011138089A (ja) 2010-01-04 2011-07-14 Fujifilm Corp ウェハレベルレンズアレイ、レンズモジュール及び撮像ユニット
JP2011186306A (ja) * 2010-03-10 2011-09-22 Fujifilm Corp ウェハレンズユニットおよびウェハレンズユニットの製造方法
US8194335B2 (en) * 2010-04-13 2012-06-05 Himax Technologies Limited Optical lens on wafer level and related method for forming the optical lens one wafer level
US8557679B2 (en) * 2010-06-30 2013-10-15 Corning Incorporated Oxygen plasma conversion process for preparing a surface for bonding
SG187643A1 (en) * 2010-08-17 2013-03-28 Heptagon Micro Optics Pte Ltd Method of manufacturing a plurality of optical devices for cameras
JP2012084608A (ja) * 2010-10-07 2012-04-26 Sony Corp 固体撮像装置とその製造方法、並びに電子機器
EP2667225A4 (en) * 2011-01-21 2014-07-09 Fujifilm Corp STACKING LINE ARRANGEMENT AND LENS MODULE
EP2682797B1 (en) * 2011-03-01 2015-11-25 FUJIFILM Corporation Method for manufacturing lens module, and lens module
JP2013001091A (ja) 2011-06-21 2013-01-07 Konica Minolta Advanced Layers Inc 光学素子の製造方法
US8388793B1 (en) * 2011-08-29 2013-03-05 Visera Technologies Company Limited Method for fabricating camera module
TWI509292B (zh) * 2011-09-07 2015-11-21 Hon Hai Prec Ind Co Ltd 鏡片及具有該鏡片的鏡頭模組
KR101262597B1 (ko) * 2011-09-28 2013-05-09 엘지이노텍 주식회사 카메라 모듈
JP6257285B2 (ja) 2013-11-27 2018-01-10 キヤノン株式会社 複眼撮像装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014112116A (ja) * 2011-03-14 2014-06-19 Fujifilm Corp 反射防止テープ及びウェハレベルレンズ並びに撮像装置

Also Published As

Publication number Publication date
EP3329314A1 (en) 2018-06-06
US11342371B2 (en) 2022-05-24
US20180108697A1 (en) 2018-04-19
KR20180033167A (ko) 2018-04-02
JP2018525684A (ja) 2018-09-06
US20200365639A1 (en) 2020-11-19
US20200006415A1 (en) 2020-01-02
EP3329314B1 (en) 2022-04-20
CN107771357A (zh) 2018-03-06
JP6764578B2 (ja) 2020-10-07
TW201710726A (zh) 2017-03-16
WO2017022188A1 (en) 2017-02-09
US10431618B2 (en) 2019-10-01
TWI741988B (zh) 2021-10-11
US10818717B2 (en) 2020-10-27

Similar Documents

Publication Publication Date Title
CN107771357B (zh) 层叠透镜结构、其制造方法以及电子设备
CN107431746B (zh) 相机模块和电子设备
CN107430216B (zh) 带透镜的基板、层叠透镜结构、相机模块、制造装置和制造方法
CN110235030B (zh) 相机模块及其制造方法以及电子装置
CN110431460B (zh) 层叠透镜结构、层叠透镜结构的制造方法和电子设备
CN108025515B (zh) 透镜基板、半导体装置的制造方法以及电子设备
EP3329315B1 (en) Stacked lens structure, method of manufacturing the same, and electronic apparatus
CN107735246B (zh) 透镜基板的制造方法
CN110199215B (zh) 堆叠透镜结构、相机模块和电子装置
CN107850757B (zh) 层叠透镜结构及其制造方法、电子设备、模具及其制造方法和基板
JP2018109716A (ja) レンズモジュールおよびレンズモジュールの製造方法、撮像装置、並びに電子機器
CN107850750A (zh) 透镜安装基板、层叠透镜结构、其制造方法以及电子设备

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant