JP6736795B2 - 電気光学素子のための複合基板 - Google Patents

電気光学素子のための複合基板 Download PDF

Info

Publication number
JP6736795B2
JP6736795B2 JP2020507295A JP2020507295A JP6736795B2 JP 6736795 B2 JP6736795 B2 JP 6736795B2 JP 2020507295 A JP2020507295 A JP 2020507295A JP 2020507295 A JP2020507295 A JP 2020507295A JP 6736795 B2 JP6736795 B2 JP 6736795B2
Authority
JP
Japan
Prior art keywords
electro
substrate
optic crystal
layer
crystal substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020507295A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2019180979A1 (ja
Inventor
近藤　順悟
順悟 近藤
哲也 江尻
哲也 江尻
山口　省一郎
省一郎 山口
知義 多井
知義 多井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of JPWO2019180979A1 publication Critical patent/JPWO2019180979A1/ja
Application granted granted Critical
Publication of JP6736795B2 publication Critical patent/JP6736795B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2020507295A 2018-03-23 2018-05-22 電気光学素子のための複合基板 Active JP6736795B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2018/011764 2018-03-23
PCT/JP2018/011764 WO2019180922A1 (ja) 2018-03-23 2018-03-23 電気光学素子のための複合基板
PCT/JP2018/019658 WO2019180979A1 (ja) 2018-03-23 2018-05-22 電気光学素子のための複合基板

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020121585A Division JP7075448B2 (ja) 2018-03-23 2020-07-15 電気光学素子のための複合基板

Publications (2)

Publication Number Publication Date
JPWO2019180979A1 JPWO2019180979A1 (ja) 2020-06-11
JP6736795B2 true JP6736795B2 (ja) 2020-08-05

Family

ID=67986067

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2020507295A Active JP6736795B2 (ja) 2018-03-23 2018-05-22 電気光学素子のための複合基板
JP2020121585A Active JP7075448B2 (ja) 2018-03-23 2020-07-15 電気光学素子のための複合基板

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2020121585A Active JP7075448B2 (ja) 2018-03-23 2020-07-15 電気光学素子のための複合基板

Country Status (2)

Country Link
JP (2) JP6736795B2 (https=)
WO (2) WO2019180922A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
US11664357B2 (en) 2018-07-03 2023-05-30 Adeia Semiconductor Bonding Technologies Inc. Techniques for joining dissimilar materials in microelectronics
JP7343347B2 (ja) * 2019-10-04 2023-09-12 日本碍子株式会社 光変調器用接合体、光変調器および光変調器用接合体の製造方法
WO2021095090A1 (ja) * 2019-11-11 2021-05-20 オリンパス株式会社 対物光学系、撮像装置、内視鏡及び対物光学系の製造方法
US12601938B2 (en) 2019-11-27 2026-04-14 HyperLight Corporation Electro-optic devices having closely spaced engineered electrodes
US12282214B2 (en) 2019-11-27 2025-04-22 HyperLight Corporation Thin film lithium niobate optical device having an engineered substrate for heterogeneous integration
CN114981694B (zh) * 2019-11-27 2025-09-16 超光公司 具有工程化电极的电光器件
JP7410068B2 (ja) * 2020-03-16 2024-01-09 日本碍子株式会社 接合体、光導波路基板および光変調器
CN115943489A (zh) 2020-03-19 2023-04-07 隔热半导体粘合技术公司 用于直接键合结构的尺寸补偿控制
CN115885208A (zh) 2020-06-02 2023-03-31 超光公司 高性能光调制器和驱动器
JP7526610B2 (ja) 2020-08-13 2024-08-01 富士通オプティカルコンポーネンツ株式会社 光導波路デバイス
JP7484631B2 (ja) * 2020-09-30 2024-05-16 住友大阪セメント株式会社 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置
JP7752649B2 (ja) * 2023-01-27 2025-10-10 日本碍子株式会社 複合基板

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574606B2 (ja) * 1992-09-01 1997-01-22 松下電器産業株式会社 誘電体光導波路素子およびその製造方法
US6593212B1 (en) * 2001-10-29 2003-07-15 The United States Of America As Represented By The Secretary Of The Navy Method for making electro-optical devices using a hydrogenion splitting technique
JP4174377B2 (ja) * 2002-05-31 2008-10-29 松下電器産業株式会社 光学素子
JP4851122B2 (ja) * 2005-06-13 2012-01-11 住友大阪セメント株式会社 光学素子及びその製造方法
WO2007114367A1 (ja) * 2006-03-31 2007-10-11 Sumitomo Osaka Cement Co., Ltd. 光制御素子
US20070297732A1 (en) * 2006-06-07 2007-12-27 Collinear Corporation Efficient nonlinear optical waveguide using single-mode, high v-number structure
JP2012078375A (ja) * 2010-09-30 2012-04-19 Sumitomo Osaka Cement Co Ltd 光導波路素子
EP3483650B1 (en) * 2016-07-07 2021-06-30 NGK Insulators, Ltd. Optical scanning element
JP6245587B1 (ja) * 2016-10-28 2017-12-13 大学共同利用機関法人自然科学研究機構 レーザー部品

Also Published As

Publication number Publication date
JP2020173479A (ja) 2020-10-22
JPWO2019180979A1 (ja) 2020-06-11
JP7075448B2 (ja) 2022-05-25
WO2019180922A1 (ja) 2019-09-26
WO2019180979A1 (ja) 2019-09-26

Similar Documents

Publication Publication Date Title
JP6736795B2 (ja) 電気光学素子のための複合基板
JP6650551B1 (ja) 電気光学素子のための複合基板とその製造方法
US12025864B2 (en) Composite substrate for electro-optic element and method for manufacturing the same
JP7401639B2 (ja) 電気光学素子用複合基板
JP7098666B2 (ja) 電気光学素子のための複合基板とその製造方法
JP7331208B2 (ja) 電気光学素子のための複合基板とその製造方法
CN120266046A (zh) 光波导元件、光调制器及光发送装置
US20250013085A1 (en) Optical waveguide device, and optical modulation device and optical transmission apparatus using same
US20230061055A1 (en) Composite substrate for photonic crystal element, and photonic crystal element
CN120051719A (zh) 光波导元件、使用光波导元件的光调制器件及光发送装置
JPS6060622A (ja) 光導波路

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200303

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200303

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20200303

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20200323

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200331

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200707

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200715

R150 Certificate of patent or registration of utility model

Ref document number: 6736795

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150