JP6736374B2 - 液体吐出ヘッド用半導体チップの製造方法 - Google Patents

液体吐出ヘッド用半導体チップの製造方法 Download PDF

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Publication number
JP6736374B2
JP6736374B2 JP2016122469A JP2016122469A JP6736374B2 JP 6736374 B2 JP6736374 B2 JP 6736374B2 JP 2016122469 A JP2016122469 A JP 2016122469A JP 2016122469 A JP2016122469 A JP 2016122469A JP 6736374 B2 JP6736374 B2 JP 6736374B2
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Japan
Prior art keywords
substrate
groove
semiconductor chip
manufacturing
liquid
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JP2016122469A
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English (en)
Japanese (ja)
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JP2017228605A5 (https=
JP2017228605A (ja
Inventor
知広 高橋
知広 高橋
透 河口
透 河口
坂井　稔康
稔康 坂井
雅隆 加藤
雅隆 加藤
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2016122469A priority Critical patent/JP6736374B2/ja
Priority to US15/623,281 priority patent/US9925776B2/en
Publication of JP2017228605A publication Critical patent/JP2017228605A/ja
Publication of JP2017228605A5 publication Critical patent/JP2017228605A5/ja
Application granted granted Critical
Publication of JP6736374B2 publication Critical patent/JP6736374B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Dicing (AREA)
  • Laser Beam Processing (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2016122469A 2016-06-21 2016-06-21 液体吐出ヘッド用半導体チップの製造方法 Active JP6736374B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016122469A JP6736374B2 (ja) 2016-06-21 2016-06-21 液体吐出ヘッド用半導体チップの製造方法
US15/623,281 US9925776B2 (en) 2016-06-21 2017-06-14 Method of manufacturing semiconductor chips for liquid discharge head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016122469A JP6736374B2 (ja) 2016-06-21 2016-06-21 液体吐出ヘッド用半導体チップの製造方法

Publications (3)

Publication Number Publication Date
JP2017228605A JP2017228605A (ja) 2017-12-28
JP2017228605A5 JP2017228605A5 (https=) 2019-07-11
JP6736374B2 true JP6736374B2 (ja) 2020-08-05

Family

ID=60661611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016122469A Active JP6736374B2 (ja) 2016-06-21 2016-06-21 液体吐出ヘッド用半導体チップの製造方法

Country Status (2)

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US (1) US9925776B2 (https=)
JP (1) JP6736374B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024065616A (ja) * 2022-10-31 2024-05-15 キヤノン株式会社 ウエハのダイシング方法、及び、液体吐出ヘッド
JP2024081956A (ja) 2022-12-07 2024-06-19 キヤノン株式会社 ウエハ、液体吐出ヘッド、液体吐出チップおよび液体吐出チップの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268752A (ja) 2004-02-19 2005-09-29 Canon Inc レーザ割断方法、被割断部材および半導体素子チップ
JP4529692B2 (ja) * 2005-01-07 2010-08-25 セイコーエプソン株式会社 結晶性基材の分割方法、及び、液体噴射ヘッドの製造方法
JP2007194373A (ja) * 2006-01-18 2007-08-02 Seiko Epson Corp シリコンデバイスの製造方法及び液体噴射ヘッドの製造方法
JP5455461B2 (ja) * 2009-06-17 2014-03-26 キヤノン株式会社 シリコン基板の加工方法及び液体吐出ヘッド用基板の製造方法
JP5370262B2 (ja) * 2010-05-18 2013-12-18 豊田合成株式会社 半導体発光チップおよび基板の加工方法
JP6095320B2 (ja) * 2011-12-02 2017-03-15 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP2014220403A (ja) 2013-05-09 2014-11-20 浜松ホトニクス株式会社 半導体エネルギー線検出素子及び半導体エネルギー線検出素子の製造方法

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Publication number Publication date
US9925776B2 (en) 2018-03-27
JP2017228605A (ja) 2017-12-28
US20170361616A1 (en) 2017-12-21

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