JP6735718B2 - 基板処理装置、基板処理方法およびプログラム - Google Patents
基板処理装置、基板処理方法およびプログラム Download PDFInfo
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Description
6 ロット処理部
8 基板
23 エッチング処理装置
27 エッチング用の処理槽
43 SiO2析出防止剤供給部
45 内槽(基板処理槽)
46 外槽
47 温調タンク
58 温度計
80 処理室
90 排気部
93 切替弁
94 酸系処理部
95 有機系処理部
100 制御部
Claims (8)
- 基板処理槽でエッチング処理を行うリン酸処理液に混合されるSiO2析出防止剤を供給するSiO2析出防止剤供給部と、
前記リン酸処理液の温度に基づいて前記リン酸処理液に含まれるSiO2析出防止剤濃度を設定し、設定した前記SiO2析出防止剤濃度となるように前記SiO2析出防止剤の供給量を制御する制御部と
を備えることを特徴とする基板処理装置。 - 前記制御部は、
前記SiO2析出防止剤が前記リン酸処理液に混合されていない状態で、前記リン酸処理液のシリコン濃度が所定シリコン濃度以上になると、前記SiO2析出防止剤を供給する
ことを特徴とする請求項1に記載の基板処理装置。 - 前記制御部は、
前記エッチング処理の処理時間に基づいて前記SiO2析出防止剤の供給量を制御する
ことを特徴とする請求項1または2に記載の基板処理装置。 - 前記制御部は、
前記リン酸処理液に含まれる前記SiO2析出防止剤濃度を検出し、
検出された前記SiO2析出防止剤濃度に基づいて前記SiO2析出防止剤の供給量を制御する
ことを特徴とする請求項1から3のいずれか一つに記載の基板処理装置。 - 前記基板処理槽から排出された排気ガス中の酸系物質を除去する酸系処理部と、
前記基板処理槽から排出された排気ガス中の有機系物質を除去する有機系処理部と
を備えることを特徴とする請求項1から4のいずれか一つに記載の基板処理装置。 - 並列に配設された前記酸系処理部または前記有機系処理部に、前記排気ガスを選択的に流入させる切替部
を備える
ことを特徴とする請求項5に記載の基板処理装置。 - 基板処理槽でエッチング処理を行うリン酸処理液に混合されるSiO2析出防止剤を供給する工程と、
前記リン酸処理液の温度に基づいて前記リン酸処理液に含まれるSiO2析出防止剤濃度を設定し、設定した前記SiO2析出防止剤濃度となるように前記SiO2析出防止剤の供給量を制御する工程と
を含むことを特徴とする基板処理方法。 - 請求項7に記載の基板処理方法をコンピュータに実行させる、プログラム。
Priority Applications (5)
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JP2017188573A JP6735718B2 (ja) | 2017-09-28 | 2017-09-28 | 基板処理装置、基板処理方法およびプログラム |
US16/143,918 US20190096710A1 (en) | 2017-09-28 | 2018-09-27 | Substrate processing apparatus, substrate processing method and recording medium |
KR1020180115030A KR102560934B1 (ko) | 2017-09-28 | 2018-09-27 | 기판 처리 장치, 기판 처리 방법 및 기억 매체 |
CN201811139670.6A CN109585337B (zh) | 2017-09-28 | 2018-09-28 | 基板处理装置、基板处理方法以及存储介质 |
JP2020119949A JP6896129B2 (ja) | 2017-09-28 | 2020-07-13 | 基板処理装置、基板処理方法およびプログラム |
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US (1) | US20190096710A1 (ja) |
JP (1) | JP6735718B2 (ja) |
KR (1) | KR102560934B1 (ja) |
CN (1) | CN109585337B (ja) |
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JP7190892B2 (ja) * | 2018-12-12 | 2022-12-16 | 東京エレクトロン株式会社 | 基板処理装置および処理液濃縮方法 |
Family Cites Families (22)
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JP2864617B2 (ja) * | 1990-02-08 | 1999-03-03 | 日産化学工業株式会社 | 珪弗化水素酸、珪弗化アンモニウム及び高純度シリカの製造法 |
JP3072876B2 (ja) * | 1993-09-17 | 2000-08-07 | 日曹エンジニアリング株式会社 | エッチング液の精製方法 |
US5472562A (en) * | 1994-08-05 | 1995-12-05 | At&T Corp. | Method of etching silicon nitride |
DE19840989A1 (de) * | 1997-09-09 | 1999-03-18 | Tokyo Electron Ltd | Reinigungsverfahren und Reinigungsgerät |
JP3891277B2 (ja) * | 2002-05-21 | 2007-03-14 | セイコーエプソン株式会社 | 処理装置および半導体装置の製造方法 |
JP2004301981A (ja) * | 2003-03-31 | 2004-10-28 | Seiichi Nagata | シリコン基板とその形成方法 |
JP5332197B2 (ja) * | 2007-01-12 | 2013-11-06 | 東ソー株式会社 | エッチング用組成物及びエッチング方法 |
US8211810B2 (en) * | 2007-09-21 | 2012-07-03 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus and substrate processing method for performing etching process with phosphoric acid solution |
JP4966223B2 (ja) * | 2008-02-29 | 2012-07-04 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP5829444B2 (ja) * | 2011-07-08 | 2015-12-09 | 株式会社Screenホールディングス | リン酸再生方法、リン酸再生装置および基板処理システム |
JP5752530B2 (ja) * | 2011-08-31 | 2015-07-22 | 倉敷紡績株式会社 | 基板処理装置 |
JP6087063B2 (ja) | 2012-05-01 | 2017-03-01 | 東京エレクトロン株式会社 | エッチング方法、エッチング装置および記憶媒体 |
JP6168709B2 (ja) * | 2012-08-03 | 2017-07-26 | Jfeスチール株式会社 | 晶析装置及び晶析方法 |
KR102204850B1 (ko) * | 2013-03-15 | 2021-01-18 | 티이엘 매뉴팩처링 앤드 엔지니어링 오브 아메리카, 인크. | 가열된 에칭 용액을 제공하기 위한 시스템 |
JP2015070119A (ja) * | 2013-09-30 | 2015-04-13 | 株式会社Screenホールディングス | 基板処理装置 |
JP6090184B2 (ja) * | 2014-01-27 | 2017-03-08 | 信越半導体株式会社 | 半導体ウェーハの洗浄槽及び貼り合わせウェーハの製造方法 |
JP2015195306A (ja) * | 2014-03-31 | 2015-11-05 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
JP6320868B2 (ja) * | 2014-07-29 | 2018-05-09 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6244277B2 (ja) * | 2014-08-11 | 2017-12-06 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法並びに基板液処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 |
JP6430784B2 (ja) * | 2014-10-31 | 2018-11-28 | 東京エレクトロン株式会社 | 基板液処理装置 |
JP6446003B2 (ja) * | 2015-08-27 | 2018-12-26 | 東芝メモリ株式会社 | 基板処理装置、基板処理方法およびエッチング液 |
US10147619B2 (en) * | 2015-08-27 | 2018-12-04 | Toshiba Memory Corporation | Substrate treatment apparatus, substrate treatment method, and etchant |
-
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- 2017-09-28 JP JP2017188573A patent/JP6735718B2/ja active Active
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2018
- 2018-09-27 KR KR1020180115030A patent/KR102560934B1/ko active IP Right Grant
- 2018-09-27 US US16/143,918 patent/US20190096710A1/en not_active Abandoned
- 2018-09-28 CN CN201811139670.6A patent/CN109585337B/zh active Active
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KR20190037151A (ko) | 2019-04-05 |
CN109585337B (zh) | 2023-11-28 |
CN109585337A (zh) | 2019-04-05 |
US20190096710A1 (en) | 2019-03-28 |
KR102560934B1 (ko) | 2023-07-28 |
JP2019067811A (ja) | 2019-04-25 |
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