JP6731409B2 - 光学測定システムのための展開機構 - Google Patents

光学測定システムのための展開機構 Download PDF

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Publication number
JP6731409B2
JP6731409B2 JP2017531500A JP2017531500A JP6731409B2 JP 6731409 B2 JP6731409 B2 JP 6731409B2 JP 2017531500 A JP2017531500 A JP 2017531500A JP 2017531500 A JP2017531500 A JP 2017531500A JP 6731409 B2 JP6731409 B2 JP 6731409B2
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JP
Japan
Prior art keywords
optical
measurement system
axis
secondary measurement
sensor assembly
Prior art date
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Expired - Fee Related
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JP2017531500A
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English (en)
Japanese (ja)
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JP2018506022A5 (enExample
JP2018506022A (ja
Inventor
フレデリック， ディー． シュワブ，
フレデリック， ディー． シュワブ，
エドワード， ティー． ポリドール，
エドワード， ティー． ポリドール，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quality Vision International Inc
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Quality Vision International Inc
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Publication date
Application filed by Quality Vision International Inc filed Critical Quality Vision International Inc
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Publication of JP2018506022A5 publication Critical patent/JP2018506022A5/ja
Application granted granted Critical
Publication of JP6731409B2 publication Critical patent/JP6731409B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G02B21/084—Condensers for incident illumination only having annular illumination around the objective

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2017531500A 2014-12-19 2015-11-23 光学測定システムのための展開機構 Expired - Fee Related JP6731409B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462094688P 2014-12-19 2014-12-19
US62/094,688 2014-12-19
PCT/US2015/062126 WO2016099815A1 (en) 2014-12-19 2015-11-23 Deployment mechanism for optical measurement system

Publications (3)

Publication Number Publication Date
JP2018506022A JP2018506022A (ja) 2018-03-01
JP2018506022A5 JP2018506022A5 (enExample) 2018-12-20
JP6731409B2 true JP6731409B2 (ja) 2020-07-29

Family

ID=56127300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017531500A Expired - Fee Related JP6731409B2 (ja) 2014-12-19 2015-11-23 光学測定システムのための展開機構

Country Status (4)

Country Link
US (1) US9784564B2 (enExample)
EP (1) EP3234682B1 (enExample)
JP (1) JP6731409B2 (enExample)
WO (1) WO2016099815A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110132141B (zh) * 2019-06-13 2021-07-23 上海电气集团股份有限公司 一种硅钢片测量的定位平台及方法
US12674658B2 (en) 2021-02-03 2026-07-07 Quality Vision International Inc. Partial coherence mitigation in video measurement systems via illumination apodization
US20230213330A2 (en) 2021-02-03 2023-07-06 Quality Vision International Inc. Partial coherence mitigation in video measurement systems via illumination apodization
WO2023230123A1 (en) * 2022-05-25 2023-11-30 Quality Vision International Inc. Method for field-dependent alignment of imaging optics to similar-aperture illumination system
US12504279B2 (en) 2024-02-28 2025-12-23 Quality Vision International Inc. Interposer tool for shaft measurement

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920642Y2 (ja) * 1979-08-28 1984-06-15 株式会社 三豊製作所 タツチ信号プロ−ブ
US4580900A (en) 1982-04-02 1986-04-08 Eaton Corporation Auto focus alignment and measurement system and method
WO1985004950A1 (fr) 1984-04-20 1985-11-07 Mitutoyo Mfg. Co., Ltd. Appareil de mesure tridimensionnel
DE4327250C5 (de) * 1992-09-25 2008-11-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Koordinatenmessung an Werkstücken
US5825666A (en) * 1995-06-07 1998-10-20 Freifeld; Daniel Optical coordinate measuring machines and optical touch probes
US6518996B1 (en) 1999-02-22 2003-02-11 Optical Gaging Products, Inc. Compact video inspection apparatus with Y, Z, X compounded measurement axes
US7420588B2 (en) * 1999-06-09 2008-09-02 Mitutoyo Corporation Measuring method, measuring system and storage medium
US20050259271A1 (en) * 2000-09-20 2005-11-24 Ralf Christoph Assembly and method for the optical-tactile measurement of a structure
DE10108774A1 (de) 2001-02-23 2002-09-05 Zeiss Carl Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes
JP4068371B2 (ja) * 2001-06-13 2008-03-26 株式会社トプコン 手術用顕微鏡
ATE314628T1 (de) * 2001-07-16 2006-01-15 Werth Messtechnik Gmbh Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät
US20040068881A1 (en) 2002-10-15 2004-04-15 Optical Gaging Products, Inc. Viscous coupled micro interposer
KR20060015557A (ko) * 2003-04-28 2006-02-17 스티븐 제임스 크램톤 외골격을 구비한 ｃｍｍ 암
US7538960B2 (en) 2006-03-14 2009-05-26 Quality Vision International, Inc. Air bearing guided zoom lens for metrological measurements
US7986473B2 (en) 2006-12-04 2011-07-26 Quality Vision International, Inc. System and method for focal length stabilization using active temperature control
GB0707720D0 (en) * 2007-04-23 2007-05-30 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
US7812971B2 (en) * 2007-06-28 2010-10-12 Quality Vision International, Inc. Multi color autofocus apparatus and method
DE102007042260B4 (de) 2007-09-06 2012-09-27 Leica Microsystems Cms Gmbh Objektivwechsler und ein Mikroskop
US7916398B2 (en) 2007-10-12 2011-03-29 Quality Vision International, Inc. High performance front objective for video metrological system
DE102008041284B4 (de) * 2008-05-07 2010-05-27 Carl Zeiss Surgical Gmbh Ophthalmo-Operationsmikroskopsystem mit OCT-Messeinrichtung
GB0809037D0 (en) * 2008-05-19 2008-06-25 Renishaw Plc Video Probe
US7905027B2 (en) * 2009-07-01 2011-03-15 Hexagon Metrology, Inc. Method and apparatus for probe tip diameter calibration
JP5378940B2 (ja) * 2009-10-13 2013-12-25 株式会社ミツトヨ 表面性状測定機および表面性状測定方法
US8366271B2 (en) 2010-01-20 2013-02-05 Duke University Systems and methods for surgical microscope and optical coherence tomography (OCT) imaging
US20140300729A1 (en) * 2010-05-03 2014-10-09 United Technologies Corporation Probe for Inspection System
DE102011002940B4 (de) * 2011-01-20 2016-06-23 Oculus Optikgeräte GmbH Positioniereinheit und Beobachtungsvorrichtung
KR101643113B1 (ko) 2012-11-30 2016-08-10 퀘드 테크놀러지즈 인터내셔날, 인크. 통합된 파면 센서 및 프로파일로미터
US9009985B2 (en) * 2013-04-30 2015-04-21 Quality Vision International, Inc. Probe deployment mechanism of measuring machine with isolated locator coupling
EP2977715B1 (en) * 2014-07-23 2017-12-06 Tesa Sa Probe holder for measuring system

Also Published As

Publication number Publication date
WO2016099815A1 (en) 2016-06-23
EP3234682A1 (en) 2017-10-25
US20160178350A1 (en) 2016-06-23
EP3234682B1 (en) 2020-10-21
EP3234682A4 (en) 2018-07-04
US9784564B2 (en) 2017-10-10
JP2018506022A (ja) 2018-03-01

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