JP6724299B2 - 感光性樹脂組成物及び感光性エレメント - Google Patents
感光性樹脂組成物及び感光性エレメント Download PDFInfo
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- JP6724299B2 JP6724299B2 JP2015122901A JP2015122901A JP6724299B2 JP 6724299 B2 JP6724299 B2 JP 6724299B2 JP 2015122901 A JP2015122901 A JP 2015122901A JP 2015122901 A JP2015122901 A JP 2015122901A JP 6724299 B2 JP6724299 B2 JP 6724299B2
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- 239000011342 resin composition Substances 0.000 title claims description 91
- -1 hydroxyl ethyl Chemical group 0.000 claims description 71
- 150000001875 compounds Chemical class 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 46
- 229920000642 polymer Polymers 0.000 claims description 43
- 239000002253 acid Substances 0.000 claims description 40
- 239000011230 binding agent Substances 0.000 claims description 35
- 238000002834 transmittance Methods 0.000 claims description 21
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 20
- 239000003999 initiator Substances 0.000 claims description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 5
- MPQXHAGKBWFSNV-UHFFFAOYSA-N oxidophosphanium Chemical class [PH3]=O MPQXHAGKBWFSNV-UHFFFAOYSA-N 0.000 claims description 4
- 229920001577 copolymer Polymers 0.000 claims description 3
- 239000004808 2-ethylhexylester Substances 0.000 claims description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N acrylic acid methyl ester Natural products COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 claims description 2
- 125000000524 functional group Chemical group 0.000 claims description 2
- 239000010408 film Substances 0.000 description 146
- 239000010410 layer Substances 0.000 description 85
- 125000004432 carbon atom Chemical group C* 0.000 description 43
- 238000012360 testing method Methods 0.000 description 36
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- 239000000463 material Substances 0.000 description 31
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- 125000000217 alkyl group Chemical group 0.000 description 26
- 239000002585 base Substances 0.000 description 25
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 21
- 239000010949 copper Substances 0.000 description 21
- 238000011161 development Methods 0.000 description 21
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- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 21
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 238000000576 coating method Methods 0.000 description 19
- 229910052802 copper Inorganic materials 0.000 description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 18
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 17
- 150000003839 salts Chemical class 0.000 description 17
- 239000002904 solvent Substances 0.000 description 17
- 239000007864 aqueous solution Substances 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 15
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000011156 evaluation Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000000178 monomer Substances 0.000 description 11
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- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 10
- 125000003118 aryl group Chemical group 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 10
- 238000005260 corrosion Methods 0.000 description 10
- 230000002265 prevention Effects 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 10
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 9
- 125000000753 cycloalkyl group Chemical group 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
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- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000001035 drying Methods 0.000 description 8
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 8
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- 239000000126 substance Substances 0.000 description 8
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 125000000962 organic group Chemical group 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 125000001424 substituent group Chemical group 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000005227 gel permeation chromatography Methods 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 6
- 229920002554 vinyl polymer Polymers 0.000 description 6
- 125000005396 acrylic acid ester group Chemical group 0.000 description 5
- 125000003277 amino group Chemical group 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
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- 238000007865 diluting Methods 0.000 description 5
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- 229940059574 pentaerithrityl Drugs 0.000 description 5
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 229920006254 polymer film Polymers 0.000 description 5
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- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- KJUGUADJHNHALS-UHFFFAOYSA-N 1H-tetrazole Chemical compound C=1N=NNN=1 KJUGUADJHNHALS-UHFFFAOYSA-N 0.000 description 4
- MWDGNKGKLOBESZ-UHFFFAOYSA-N 2-oxooctanal Chemical compound CCCCCCC(=O)C=O MWDGNKGKLOBESZ-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 125000005529 alkyleneoxy group Chemical group 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- KJFMBFZCATUALV-UHFFFAOYSA-N phenolphthalein Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C(=O)O1 KJFMBFZCATUALV-UHFFFAOYSA-N 0.000 description 4
- 238000000016 photochemical curing Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- YLLIGHVCTUPGEH-UHFFFAOYSA-M potassium;ethanol;hydroxide Chemical compound [OH-].[K+].CCO YLLIGHVCTUPGEH-UHFFFAOYSA-M 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- YIJYFLXQHDOQGW-UHFFFAOYSA-N 2-[2,4,6-trioxo-3,5-bis(2-prop-2-enoyloxyethyl)-1,3,5-triazinan-1-yl]ethyl prop-2-enoate Chemical class C=CC(=O)OCCN1C(=O)N(CCOC(=O)C=C)C(=O)N(CCOC(=O)C=C)C1=O YIJYFLXQHDOQGW-UHFFFAOYSA-N 0.000 description 3
- ULRPISSMEBPJLN-UHFFFAOYSA-N 2h-tetrazol-5-amine Chemical compound NC1=NN=NN1 ULRPISSMEBPJLN-UHFFFAOYSA-N 0.000 description 3
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 3
- 125000002252 acyl group Chemical group 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 230000001588 bifunctional effect Effects 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
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- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
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- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- OGMBXKYJNLWIIG-UHFFFAOYSA-N 1-aminotriazole-4-thiol Chemical compound NN1C=C(S)N=N1 OGMBXKYJNLWIIG-UHFFFAOYSA-N 0.000 description 2
- XOHZHMUQBFJTNH-UHFFFAOYSA-N 1-methyl-2h-tetrazole-5-thione Chemical compound CN1N=NN=C1S XOHZHMUQBFJTNH-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- GPNYZBKIGXGYNU-UHFFFAOYSA-N 2-tert-butyl-6-[(3-tert-butyl-5-ethyl-2-hydroxyphenyl)methyl]-4-ethylphenol Chemical compound CC(C)(C)C1=CC(CC)=CC(CC=2C(=C(C=C(CC)C=2)C(C)(C)C)O)=C1O GPNYZBKIGXGYNU-UHFFFAOYSA-N 0.000 description 2
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
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- NPKSPKHJBVJUKB-UHFFFAOYSA-N N-phenylglycine Chemical compound OC(=O)CNC1=CC=CC=C1 NPKSPKHJBVJUKB-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
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- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- BLAKAEFIFWAFGH-UHFFFAOYSA-N acetyl acetate;pyridine Chemical compound C1=CC=NC=C1.CC(=O)OC(C)=O BLAKAEFIFWAFGH-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000005037 alkyl phenyl group Chemical group 0.000 description 2
- 125000004414 alkyl thio group Chemical group 0.000 description 2
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- 230000001680 brushing effect Effects 0.000 description 2
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- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 125000004181 carboxyalkyl group Chemical group 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
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- PODOEQVNFJSWIK-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethoxyphenyl)methanone Chemical compound COC1=CC(OC)=CC(OC)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 PODOEQVNFJSWIK-UHFFFAOYSA-N 0.000 description 2
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
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- JZMPIUODFXBXSC-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.CCOC(N)=O JZMPIUODFXBXSC-UHFFFAOYSA-N 0.000 description 2
- 238000007756 gravure coating Methods 0.000 description 2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
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- WMFOQBRAJBCJND-UHFFFAOYSA-M lithium hydroxide Inorganic materials [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 2
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- 238000007760 metering rod coating Methods 0.000 description 2
- CKFGINPQOCXMAZ-UHFFFAOYSA-N methanediol Chemical compound OCO CKFGINPQOCXMAZ-UHFFFAOYSA-N 0.000 description 2
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- 125000006353 oxyethylene group Chemical group 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- 125000006678 phenoxycarbonyl group Chemical group 0.000 description 2
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- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- 235000011181 potassium carbonates Nutrition 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
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- 150000007934 α,β-unsaturated carboxylic acids Chemical class 0.000 description 2
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- 125000001196 nonadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 150000002923 oximes Chemical group 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 239000002304 perfume Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 229940048084 pyrophosphate Drugs 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000015424 sodium Nutrition 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- 150000004867 thiadiazoles Chemical class 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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Description
[一般式(1)中、nは3〜12の整数を示し、mは1〜4の整数を示す。]
[一般式(1)中、nは3〜12の整数を示し、mは1〜4の整数を示す。]
酸価=10×Vf×56.1/(Wp×I)
式中、VfはKOH水溶液の滴定量(mL)を示し、Wpは測定したポリマー溶液の重量(g)を示し、Iは測定したポリマー溶液中の不揮発分の割合(質量%)を示す。
水酸基価=(A−B)×f×28.05/試料(g)+酸価
式中、Aは空試験に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、Bは滴定に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、fはファクターを示す。
本実施形態に係る電子部品は、本実施形態に係る硬化膜付き透明基材を備える。硬化膜付き透明基材は、透明基材上に、本実施形態に係る感光性樹脂組成物の硬化物(硬化膜等)を備えている。本実施形態に係る電子部品において、硬化膜は、例えば、保護部材(保護膜等)、絶縁部材(絶縁膜等)などとして用いることもできる。
撹拌機、還流冷却機、不活性ガス導入口及び温度計を備えたフラスコに、表1に示す(1)を仕込み、窒素ガス雰囲気下で80℃に昇温し、反応温度を80℃±2℃に保ちながら、表1に示す(2)を4時間かけて均一に滴下した。(2)の滴下後、80℃±2℃で6時間撹拌を続けバインダーポリマーの溶液(固形分45質量%)(A1)を得た。(A1)の重量平均分子量、酸価、水酸基価、Tgを表1に示す。
上記(A1)と同様にし、バインダーポリマーの溶液(固形分45質量%)(A2)〜(A4)を得た。
<GPC条件>
ポンプ:日立 L−6000型((株)日立製作所製、商品名)
カラム:Gelpack GL−R420、Gelpack GL−R430、Gelpack GL−R440(以上、日立化成(株)製、商品名)
溶離液:テトラヒドロフラン
測定温度:40℃
流量:2.05mL/分
検出器:日立 L−3300型RI((株)日立製作所製、商品名)
酸価は、次のようにして測定した。まず、バインダーポリマーの溶液を、130℃で1時間加熱し、揮発分を除去して、固形分を得た。そして、酸価を測定すべきポリマー1gを精秤した後、このポリマーにアセトンを30g添加し、均一に溶解した。次いで、指示薬であるフェノールフタレインをその溶液に適量添加して、0.1NのKOH水溶液を用いて滴定を行った。そして、次式により酸価を算出した。
酸価=10×Vf×56.1/(Wp×I)
式中、VfはKOH水溶液の滴定量(mL)を示し、Wpは測定した樹脂溶液の質量(g)を示し、Iは測定した樹脂溶液中の不揮発分の割合(質量%)を示す。
水酸基は、次のようにして測定した。まず、バインダーポリマーの溶液を、130℃で1時間加熱し、揮発分を除去して、固形分を得た。そして、水酸基価を測定すべきポリマー1gを精秤した後、三角フラスコに入れ、10質量%の無水酢酸ピリジン溶液を10mL加えてこれを均一に溶解し、100℃で1時間加熱した。加熱後、水10mLとピリジン10mLを加えて100℃で10分間加熱後、自動滴定機(平沼産業(株)製、商品名:「COM−1700」を用いて、0.5mol/Lの水酸化カリウムのエタノール溶液により中和滴定することにより測定した。そして、次式により水酸基価を算出した。
水酸基価=(A−B)×f×28.05/試料(g)+酸価
式中、Aは空試験に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、Bは滴定に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、fはファクターを示す。
[硬化膜を形成するための感光性樹脂組成物溶液(V−1)の作製]
表2に示す材料を、攪拌機を用いて15分間混合し、硬化膜を形成するための感光性樹脂組成物溶液(V−1)を作製した。(A)成分の配合量は固形分量である。
・ε−カプロラクトン変性ジペンタエリスリトールのアクリル酸エステル:日本化薬(株)製、商品名「DPCA−20」
・2,4,6−トリメチルベンゾイル−ジフェニル−ホスフィンオキサイド:BASFジャパン(株)製、商品名「Lucirin−TPO」
・3−アミノ−5−メルカプトトリアゾール:和光純薬(株)製、商品名「AMT」
2,2’−メチレン−ビス(4−エチル−6−tert−ブチルフェノール):川口化学(株)製、商品名「Antage W−500」
メチルエチルケトン:和光純薬(株)製
透明電極を表面に有する基材上に、感光性樹脂組成物溶液(V−1)をスリットコーターを用いて均一に塗布し、90℃の熱風対流式乾燥機で1分間乾燥して溶剤を除去することで、感光性樹脂組成物からなる感光層(感光性樹脂組成物層)を形成した。得られた感光層の厚さは5μmであった。
厚さ1mmのガラス基板上に、感光性樹脂組成物溶液(V−1)をスリットコーターを用いて均一に塗布し、90℃の熱風対流式乾燥機で1分間乾燥して溶剤を除去することで、ガラス基板上に、感光層が積層された積層体を作製した。
感光性樹脂組成物溶液(V−1)をスパッタ銅付きポリイミドフィルム(東レフィルム加工(株)製)上にスリットコーターを用いて均一に塗布し、感光性樹脂組成物の積層体を得た。
A : 保護層表面にごくわずかな痕跡が見えるが、銅は変化なし。
B : 保護層表面に痕跡が見えるが、銅は変化なし。
C : 保護層表面に痕跡があり、かつ銅が変色する。
評価用試料の表面状態を観察したところ、保護層表面にごくわずかな痕跡が見えるが、銅は変化なく評価はAであった。
得られた感光性樹脂組成物をスパッタ銅付きポリイミドフィルム(東レフィルム加工(株)製)上に塗布し、感光性樹脂組成物の積層体を作製した。
A : 基材表面に全く変化なし。
B : 基材表面の銅がわずかに変色するが、現像残渣はない。
C : 基材表面の銅がわずかに変色し、現像残渣がわずかに発生する。
D : 現像残渣が発生する。
評価用試料の表面状態を観察したところ、基材表面の銅がわずかに変色し、現像残渣がわずかに発生し、評価はBであった。
得られた感光性樹脂組成物をスパッタ銅付きポリイミドフィルム(東レフィルム加工(株)製)上に塗布し、感光性樹脂組成物の積層体を作製した。
A : 全面積のほぼ100%が密着している。
B : 全面積のうち95%以上が密着し残っている。
C : 全面積のうち65〜95%が密着し残っている。
D : 全面積のうち35〜65%が密着し残っている。
E : 全面積のうち0〜35%が密着し残っている。
評価用試料の碁盤目の状態を観察したところ、スパッタ銅上に全面積のうちほぼ100%が密着し残っている状態で、評価はAであった。
得られた感光性樹脂組成物をスパッタ銅付きポリイミドフィルム(東レフィルム加工(株)製)上に塗布し、感光性樹脂組成物の積層体を得た。
A : 10回試験を行なっても全面積にひび・割れがない。
B : 6〜9回の試験で全面積にひびが1〜5本程度観察される。
C : 4〜5回の試験で全面積にひび・割れが観察される。
D : 1〜3回の試験で全面積にひび・割れが観察される。
評価用試料の表面を観察したが、ひび・割れはなく評価はAであった。
厚さ1mmのガラス基板上に、感光性樹脂組成物溶液(V−1)をスリットコーターを用いて均一に塗布し、ガラス基板上に、感光層が積層された積層体を作製した。
評価用試料の表面を観察したところ、3Hの鉛筆では傷がつかなかった。そのため、評価用試料の表面硬度は3Hであった。
表3(表中の数値の単位は質量部)に示す感光性樹脂組成物溶液を用いた以外は、実施例1と同様に感光性樹脂組成物を調製し、可視光透過率の測定、塩水噴霧試験、現像残渣試験、クロスカット密着性試験、フレキシブル性試験、表面硬度試験を行った。表4に示すように、実施例1及び参考例2〜8においては、透過率の測定、塩水噴霧耐性評価、クロスカット密着性、フレキシブル性試験、表面硬度試験のいずれも良好な結果であった。
・(A1):メタクリル酸/メタクリル酸メチル/アクリル酸エチル=12/58/30(質量比)、酸価78(mgKOH/g)
・(A2):メタクリル酸/メタクリル酸メチル/アクリル酸エチル=17.5/52.5/30(質量比)、酸価115(mgKOH/g)
・(A3):メタクリル酸/メタクリル酸メチル/アクリル酸ブチル/メタクリル酸ブチル=24/43.5/15/17.5(質量比)、酸価156(mgKOH/g)
(B)成分
・DPCA−20:ε−カプロラクトン変性ジペンタエリスリトールのアクリル酸エステル、日本化薬(株)製、商品名、上記一般式(3)において、Y1:Y2=2:4、p=1、酸価0.04mgKOH/g
・DPCA−60:ε−カプロラクトン変性ジペンタエリスリトールのアクリル酸エステル、日本化薬(株)製、商品名、上記一般式(3)において、Y1:Y2=6:0、p=1、酸価0.04mgKOH/g
・DPCA−120:ε−カプロラクトン変性ジペンタエリスリトールのアクリル酸エステル、日本化薬(株)製、商品名、上記一般式(3)において、Y1:Y2=6:0、p=2、酸価0.05mgKOH/g
・A−9300−3CL:カプロラクトン変性トリス−(2−アクリロキシエチル)イソシアヌレート、新中村化学工業(株)製、商品名
(その他の光重合性化合物)
・UA−11:ウレタンジアクリレート、新中村化学工業(株)製、商品名
・A−DPH:ジペンタエリスリトールヘキサアクリレート、日本化薬(株)製、商品名
・A−TMMT:ペンタエリスリトールテトラアクリレート、新中村化学工業(株)製、商品名
(C)成分
・OXE01:1,2−オクタンジオン,1−[4−(フェニルチオ)フェニル−,2−(O−ベンゾイルオキシム)]、BASFジャパン(株)製、商品名「Irgacure OXE01」
・TPO:2,4,6−トリメチルベンゾイル−ジフェニル−ホスフィンオキサイド、BASFジャパン(株)製、商品名「Lucirin TPO」
・Irg819:ビス(2,4,6−トリメチルベンゾイル)−フェニルホスフィンオキサイド、BASFジャパン(株)製、商品名「Irgacure 819」
(D)成分
・AMT:3−アミノ−5−メルカプトトリアゾール、和光純薬(株)製
・HAT:5−アミノ−1H−テトラゾール、東洋紡績(株)製
(その他)
・AW−500:2,2’−メチレン−ビス(4−エチル−6−Tert−ブチルフェノール)、川口化学(株)製、商品名「Antage W−500」
(溶媒)
・MEK:メチルエチルケトン、和光純薬(株)製
・PEGMA:酢酸2−メトキシ−1−メチルエチル、和光純薬(株)製
表5(表中の数値の単位は質量部)に示す感光性樹脂組成物溶液を用いた以外は、実施例1と同様に感光性樹脂組成物を調製し、可視光透過率の測定、b*の測定、塩水噴霧試験、現像残渣試験、クロスカット密着性試験、フレキシブル性試験、表面硬度試験を行った。
Claims (6)
- カルボキシル基を有するバインダーポリマーと、下記一般式(3)で示される光重合性化合物と、光重合開始剤と、を含有し、
前記バインダーポリマーが、(メタ)アクリル酸及び(メタ)アクリル酸アルキルエステルに由来する構造単位からなる共重合体であり、
前記(メタ)アクリル酸アルキルエステルは、(メタ)アクリル酸メチルエステル、(メタ)アクリル酸エチルエステル、(メタ)アクリル酸ブチルエステル、(メタ)アクリル酸2−エチルヘキシルエステル、及び(メタ)アクリル酸ヒドロキシルエチルエステルからなる群から選択される少なくとも1種であり、
前記バインダーポリマーの酸価が75〜120mgKOH/gであり、
前記バインダーポリマーの含有量が、前記バインダーポリマー及び前記光重合性化合物の合計量100質量部に対して、55〜65質量部であり、
前記光重合性化合物の含有量が、前記バインダーポリマー及び前記光重合性化合物の合計量100質量部に対して、35〜45質量部であり、
透明電極を有する基材上に硬化膜を形成するために用いられる、感光性樹脂組成物。
[一般式(3)中、Yは、それぞれ独立に下記のY1又はY2の官能基を示し、
前記Y1中、pは1又は2の整数を示し、一般式(3)中、前記Yとして、前記Y1及び前記Y2を含む。] - 400〜700nmの波長域における可視光透過率の最小値が90%以上である、請求項1に記載の感光性樹脂組成物。
- トリアゾール化合物、チアジアゾール化合物、及びテトラゾール化合物からなる群より選択される少なくとも1種の化合物を更に含有する、請求項1又は2に記載の感光性樹脂組成物。
- 前記光重合開始剤が、オキシムエステル化合物及びホスフィンオキサイド化合物からなる群より選択される少なくとも1種の化合物を含有する、請求項1〜3のいずれか一項に記載の感光性樹脂組成物。
- 支持フィルムと、該支持フィルム上に設けられた請求項1〜4のいずれか一項に記載の感光性樹脂組成物からなる感光層と、を備える、感光性エレメント。
- 前記感光層の厚みが20μm以下である、請求項5に記載の感光性エレメント。
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