JP6710773B2 - 硬質被膜および硬質被膜被覆部材 - Google Patents
硬質被膜および硬質被膜被覆部材 Download PDFInfo
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- 239000011248 coating agent Substances 0.000 title claims description 119
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- 239000002052 molecular layer Substances 0.000 claims description 159
- 239000000463 material Substances 0.000 claims description 70
- 239000000203 mixture Substances 0.000 claims description 52
- 150000004767 nitrides Chemical class 0.000 claims description 52
- 229910052721 tungsten Inorganic materials 0.000 claims description 27
- 229910052796 boron Inorganic materials 0.000 claims description 26
- 229910052735 hafnium Inorganic materials 0.000 claims description 26
- 229910052750 molybdenum Inorganic materials 0.000 claims description 26
- 229910052758 niobium Inorganic materials 0.000 claims description 26
- 229910052715 tantalum Inorganic materials 0.000 claims description 26
- 229910052720 vanadium Inorganic materials 0.000 claims description 26
- 229910052727 yttrium Inorganic materials 0.000 claims description 26
- 229910052726 zirconium Inorganic materials 0.000 claims description 26
- 239000002344 surface layer Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- 238000005240 physical vapour deposition Methods 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 238000012360 testing method Methods 0.000 description 84
- 239000010408 film Substances 0.000 description 48
- 238000005520 cutting process Methods 0.000 description 37
- 239000000654 additive Substances 0.000 description 28
- 230000000996 additive effect Effects 0.000 description 26
- 238000001704 evaporation Methods 0.000 description 20
- 230000008020 evaporation Effects 0.000 description 19
- 235000019589 hardness Nutrition 0.000 description 16
- 239000013078 crystal Substances 0.000 description 12
- 229910000975 Carbon steel Inorganic materials 0.000 description 11
- 229910000831 Steel Inorganic materials 0.000 description 11
- 239000010962 carbon steel Substances 0.000 description 11
- 239000010959 steel Substances 0.000 description 11
- 238000003466 welding Methods 0.000 description 11
- 229910000851 Alloy steel Inorganic materials 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
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- 229910001873 dinitrogen Inorganic materials 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910017150 AlTi Inorganic materials 0.000 description 1
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000007545 Vickers hardness test Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- 239000011247 coating layer Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
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- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/027—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal matrix material comprising a mixture of at least two metals or metal phases or metal matrix composites, e.g. metal matrix with embedded inorganic hard particles, CERMET, MMC.
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
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- Chemical Kinetics & Catalysis (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Drilling Tools (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
- Mounting, Exchange, And Manufacturing Of Dies (AREA)
Description
ビッカース硬さ試験法(JISG0202、Z2244)に従って、硬さ記号HV0.025で示される条件下で試験品1〜試験品50の硬質被膜のHV値(ビッカース硬さ)を測定した。
被削材:SKD11(60HRC)
切削速度:150.8m/min(8000min−1)
送り速度:0.1mm/t(1600mm/min)
切り込み:aa=0.2mm,pf=0.4mm
切削油:エアブロ
上記切削試験条件における加工深さ等と、エンドミルの工具寿命、すなわち、逃げ面摩耗幅が0.1mmに到達するまでの切削距離を図12の切削距離欄に示した。また、前記酸化層厚さの評価において、全酸化していないこと、および、前記切削距離が500m以上であれば合格判定として○印を、全酸化されている場合、あるいは、切削距離が500m未満である場合には、不合格判定として×印を、図12の判定欄に示した。
24:硬質被膜
30:工具母材(母材)
34:A層
36:B層
37:ナノレイヤーA層
38:ナノレイヤーB層
39:C層
40:ナノレイヤー交互層
Claims (6)
- 母材の表面に被覆される硬質被膜であって、
前記硬質被膜は、物理的蒸着法により、A層と、B層と、ナノレイヤー交互層とが交互に積層されて、0.5〜20μmの総膜厚となるように構成されたものであり、
前記A層は、組成式が(AlaTibCrcαd)Nであり、αはC,B,Si,V,Y,Zr,Nb,Mo,Hf,TaおよびWからなる群より選ばれる1種以上の元素であり、原子比a,b,c,dはそれぞれ、0.10≦a≦0.85、0.02≦b≦0.70、0.03≦c≦0.65、0≦d≦0.10、および、a+b+c+d=1を満たすAlTiCr窒化物であって、0.5〜1000nmの厚みを有するものであり、
前記B層は、組成式が(AleTifCrgβh)CXN1−Xであり、βはB,Si,V,Y,Zr,Nb,Mo,Hf,TaおよびWからなる群より選ばれる1種以上の元素であり、原子比e,f,g,hおよびXはそれぞれ、0.10≦e≦0.85、0.02≦f≦0.70、0.03≦g≦0.65、0≦h≦0.10、e+f+g+h=1、および、0≦X≦0.6を満たすAlTiCr窒化物もしくはAlTiCr炭窒化物であって、0.5〜1000nmの厚みを有するものであり、
前記ナノレイヤー交互層は、前記A層または前記B層と同一の組成を有するナノレイヤーA層またはナノレイヤーB層と、C層とが交互に積層されたものであって、1〜1000nmの厚みを有するものであり、
前記ナノレイヤーA層またはナノレイヤーB層は、それぞれ0.5〜500nmの厚みを有し、
前記C層は、組成式が[AliCrj(SiC)kγl]CYN1−Yであり、γはB,Ti,V,Y,Zr,Nb,Mo,Hf,TaおよびWからなる群より選ばれる1種以上の元素であり、原子比i,j,k,lおよびYはそれぞれ、0.20≦i≦0.85、0.05≦j≦0.50、0.01≦k≦0.45、0≦l≦0.10、i+j+k+l=1、および、0≦Y≦0.6を満たすAlCr(SiC)窒化物もしくはAlCr(SiC)炭窒化物であって、0.5〜500nmの厚みを有するものである
ことを特徴とする硬質被膜。 - 前記A層の膜厚TAと前記ナノレイヤー交互層の膜厚TNLの比の値TA/TNLは0.2〜10であり、前記B層の膜厚TBと前記ナノレイヤー交互層の膜厚TNLの比の値T B /TNLは0.2〜10である
ことを特徴とする請求項1の硬質被膜。 - 前記硬質被膜の外側に表層を有し、
該表層は、前記A層、前記B層、前記C層、または前記ナノレイヤー交互層と同様の材料から形成されている
ことを特徴とする請求項1または2に記載の硬質被膜。 - 前記硬質被膜は、前記母材に直接被覆されている
ことを特徴とする請求項1から3のいずれかに記載の硬質被膜。 - 前記硬質被膜は、界面層を介して前記母材に被覆され、
前記界面層は、前記A層、前記B層、前記C層、または前記ナノレイヤー交互層と同様の材料から20〜1000nmの厚みに形成されている
ことを特徴とする請求項1から4のいずれかに記載の硬質被膜。 - 請求項1から5のいずれかの硬質被膜によって前記母材の一部または全部が被覆された
ことを特徴とする硬質被膜被覆部材。
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PCT/JP2016/081647 WO2018078731A1 (ja) | 2016-10-25 | 2016-10-25 | 硬質被膜および硬質被膜被覆部材 |
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US (1) | US11028487B2 (ja) |
EP (1) | EP3533899B1 (ja) |
JP (1) | JP6710773B2 (ja) |
KR (1) | KR102144241B1 (ja) |
CN (1) | CN109937268B (ja) |
BR (1) | BR112019008376A2 (ja) |
TW (1) | TWI658161B (ja) |
WO (1) | WO2018078731A1 (ja) |
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EP3533899B1 (en) * | 2016-10-25 | 2024-05-01 | OSG Corporation | Hard coating and member coated with hard coating |
CN112888807B (zh) * | 2018-08-01 | 2023-08-04 | Osg株式会社 | 硬质被膜和硬质被膜被覆构件 |
JP6995202B2 (ja) | 2018-08-01 | 2022-01-14 | オーエスジー株式会社 | 硬質被膜および硬質被膜被覆部材 |
DE112018007872T5 (de) * | 2018-08-01 | 2021-04-15 | Osg Corporation | Hartbeschichtung und mit Hartbeschichtung bedecktes Element |
US11447873B2 (en) | 2018-08-01 | 2022-09-20 | Osg Corporation | Hard coating and hard-coating-covered member |
US20220154323A1 (en) | 2019-03-20 | 2022-05-19 | Hitachi Metals, Ltd. | Coated mold, method for manufacturing coated mold, and hard coat-forming target |
CN111321381B (zh) * | 2020-03-05 | 2021-01-01 | 武汉大学 | 一种硬质合金刀片的AlCrNbSiTiBN基纳米复合涂层及其制备方法 |
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TWI658161B (zh) | 2019-05-01 |
EP3533899B1 (en) | 2024-05-01 |
US20190249311A1 (en) | 2019-08-15 |
KR102144241B1 (ko) | 2020-08-12 |
CN109937268B (zh) | 2021-09-21 |
JPWO2018078731A1 (ja) | 2019-09-26 |
EP3533899A4 (en) | 2020-07-22 |
CN109937268A (zh) | 2019-06-25 |
WO2018078731A1 (ja) | 2018-05-03 |
TW201823489A (zh) | 2018-07-01 |
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