JP6707546B2 - 半導体基板からフォトレジストを除去するための剥離組成物 - Google Patents
半導体基板からフォトレジストを除去するための剥離組成物 Download PDFInfo
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- JP6707546B2 JP6707546B2 JP2017535384A JP2017535384A JP6707546B2 JP 6707546 B2 JP6707546 B2 JP 6707546B2 JP 2017535384 A JP2017535384 A JP 2017535384A JP 2017535384 A JP2017535384 A JP 2017535384A JP 6707546 B2 JP6707546 B2 JP 6707546B2
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- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- ZNEOHLHCKGUAEB-UHFFFAOYSA-N trimethylphenylammonium Chemical compound C[N+](C)(C)C1=CC=CC=C1 ZNEOHLHCKGUAEB-UHFFFAOYSA-N 0.000 description 1
- HADKRTWCOYPCPH-UHFFFAOYSA-M trimethylphenylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C1=CC=CC=C1 HADKRTWCOYPCPH-UHFFFAOYSA-M 0.000 description 1
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0026—Low foaming or foam regulating compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2006—Monohydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/28—Heterocyclic compounds containing nitrogen in the ring
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
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Description
本願は、全体が参照により本明細書に組み込まれる、2014年12月30日に提出された米国仮特許出願第62/097,747号への優先権を主張する。
a)約30%〜約90%の少なくとも1種の水溶性極性非プロトン性有機溶媒と;
b)約5%〜約60%の少なくとも1種のアルコール溶媒と;
c)約0.1%〜約10%の少なくとも1種の水酸化第4級アンモニウムと;
d)約2.5%〜約25%の水と;
e)約0.1%〜約10%の6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と;
f)場合により、リン酸類、リン酸類の塩、塩基性条件下で電子供与基である基によって置換されている1,2,3−トリアゾールカルボン酸化合物、および塩基性条件下で電子供与基である基によって置換されている1,2,4−トリアゾールカルボン酸化合物からなる群から選択される約0.1%〜約10%の少なくとも1種のAl腐食抑制剤、ただし、トリアゾールカルボン酸化合物が、1,2,3−または1,2,4−トリアゾール環において1つのNH部位を含有することとする、上記Al腐食抑制剤と;
g)場合により、約0.01%〜約3%の少なくとも1種の脱泡界面活性剤と
を含有するアルカリフォトレジスト剥離組成物に関する。
a)約30%〜約90%の少なくとも1種の水溶性極性非プロトン性有機溶媒と;
b)約5%〜約60%の少なくとも1種のアルコール溶媒と;
c)約0.1%〜約10%の少なくとも1種の水酸化第4級アンモニウムと;
d)約2.5%〜約25%の水と;
e)約0.1%〜約10%の6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と;場合により
f)約0.01%〜約3%の少なくとも1種の脱泡界面活性剤と
を含有するアルカリフォトレジスト剥離組成物に関する。
本明細書において使用されているとき、別途記述されていない限り、表示されている全ての百分率は、剥離組成物の合計重量に対する重量百分率であると理解されるべきである。別途記述されていない限り、周囲温度は、約16および約27セ氏温度(℃)の間であると定義される。
a)約30%〜約90%の少なくとも1種の水溶性極性非プロトン性有機溶媒と;
b)約5%〜約60%の少なくとも1種のアルコール溶媒と;
c)約0.1%〜約10%の少なくとも1種の水酸化第4級アンモニウムと;
d)約2.5%〜約25%の水と;
e)約0.1%〜約10%の6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と;場合により、
f)約0.01%〜約3%の少なくとも1種の脱泡界面活性剤と
を含有するアルカリフォトレジスト剥離組成物に関する。
a)約30%〜約90%の少なくとも1種の水溶性極性非プロトン性有機溶媒と;
b)約5%〜約60%の少なくとも1種のアルコール溶媒と;
c)約0.1%〜約10%の少なくとも1種の水酸化第4級アンモニウムと;
d)約2.5%〜約25%の水と;
e)約0.1%〜約10%の6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と;
f)リン酸類、リン酸類の塩、塩基性条件下で電子供与基である基によって置換されている1,2,3−トリアゾールカルボン酸化合物、および塩基性条件下で電子供与基である基によって置換されている1,2,4−トリアゾールカルボン酸化合物から選択される約0.1%〜約10%の少なくとも1種のAl腐食抑制剤、ただし、トリアゾールカルボン酸化合物が、1,2,3−または1,2,4−トリアゾール環において1つのNH部位を含有することとする、上記Al腐食抑制剤と、場合により、
g)約0.01%〜約3%の少なくとも1種の脱泡界面活性剤と
を含有する。
(A)フォトレジストコーティングを有する半導体基板を付与するステップと;
(B)上記フォトレジストコーティングを有する半導体基板を、本明細書において記載されている剥離組成物と接触させて、フォトレジストを除去するステップと;
(C)上記半導体基板を好適なリンス溶媒によってリンスするステップと;
(D)場合により、上記リンス溶媒を除去しかつ上記半導体基板の完全性を損なわないいずれかの手段で上記半導体基板を乾燥するステップとを含む。いくつかの実施形態において、剥離方法は、上記の方法によって得られる半導体基板から半導体デバイス(例えば、集積回路デバイス、例えば、半導体チップ)を形成することをさらに含む。
一般手順1(剥離剤配合物)
一般手順2(剥離試験)
一般手順3(エッチングレート測定)
一般手順4(消泡試験)
実施例1〜2および比較例CE−1〜CE−13
Cu腐食抑制剤のスクリーニング
実施例3〜6
抑制された水酸化第4級アンモニウム/極性溶媒系剥離剤におけるCuエッチングレートに対する水濃度の影響
実施例7〜15
ジ(エチレングリコール)エチルエーテルはまた、ジエチレングリコールモノエチルエーテルおよびエチルジグリコールとしても知られている。
実施例16〜17
Cuエッチングレートに対する界面活性剤の影響
実施例18〜34
厚膜レジスト剥離試験
表5において、3M3MBuは3−メトキシ−3−メチルブタノールを、DEGEEはジ(エチレングリコール)エチルエーテルを表わす。
実施例35〜43
さらなる厚膜レジスト剥離試験
実施例44〜49
さらなる厚膜レジスト剥離試験
実施例50〜52
発泡抑制
実施例53〜64および84ならびに比較例CEx14〜CEx38およびCEx40〜CEx55
アルミニウムエッチングの抑制に関する添加剤のスクリーニング
実施例66〜77
Al抑制剤の濃度研究
実施例79、80、85、および86、ならびに比較例CEx56〜CEx67
アルミニウムエッチング抑制に関する他のトリアゾール類のスクリーニング
実施例81〜83
他の金属のエッチングレートに対するアルミニウム抑制剤の影響
配合例51〜72
Claims (49)
- 1)30%〜90%の少なくとも1種の水溶性極性非プロトン性有機溶媒と、
2)少なくとも1種のアルコール溶媒と、
3)少なくとも1種の水酸化第4級アンモニウムと、
4)水と、
5)6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と、
6)所望により、少なくとも1種の脱泡界面活性剤と、
を含むフォトレジスト剥離用の組成物。 - 前記少なくとも1種の水酸化第4級アンモニウムが、式[NR1R2R3R4]+OHの化合物を含み、式中、R1、R2、R3、およびR4の各々が、独立して、ヒドロキシによって場合により置換されている線状、分岐状、もしくは環状アルキル基、置換もしくは非置換のフェニル基、または置換もしくは非置換のベンジル基である、請求項1に記載の組成物。
- R1、R2、R3、およびR4の各々が、独立して、C1〜C4アルキル基、ヒドロキシエチル基、フェニル基、またはベンジル基である、請求項2に記載の組成物。
- 0.1%〜10%の前記少なくとも1種の水酸化第4級アンモニウムを含む、請求項1に記載の組成物。
- 前記少なくとも1種の銅腐食抑制剤が、6−置換−2,4−ジアミノ−1,3,5−トリアジンを含み、6位の置換基は、線状もしくは分岐状の置換もしくは非置換のC1〜C12アルキル基、置換もしくは非置換のC3〜C12シクロアルキル基、置換もしくは非置換のアリール基、−SCH2R100、−N(R100R101)、またはイミジルであり、ここで、R100およびR101の各々が、独立して、アルキル鎖中に窒素または酸素原子を含有してもよい線状もしくは分岐状の置換もしくは非置換のC1〜C12アルキル基、シクロアルキル環中に窒素または酸素原子を含有してもよい置換もしくは非置換のC3〜C12シクロアルキル基、もしくは置換もしくは非置換のアリール基であるか、またはR100およびR101はそれらが結合する原子と共に環を形成する、請求項1に記載の組成物。
- 前記少なくとも1種の銅腐食抑制剤が、6−フェニル−2,4−ジアミノ−1,3,5−トリアジンまたは6−メチル−2,4−ジアミノ−1,3,5−トリアジンを含む、請求項1に記載の組成物。
- 0.1%〜10%の前記少なくとも1種の銅腐食抑制剤を含む、請求項1に記載の組成物。
- 前記少なくとも1種の水溶性極性非プロトン性有機溶媒が、ジメチルスルホキシド、スルホラン、ジメチルスルホン、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド、N−メチルピロリドン、ガンマ−ブチロラクトン、プロピレンカーボネート、1,3−ジメチル−2−イミダゾリジノン、またはこれらの混合物を含む、請求項1に記載の組成物。
1に記載の組成物。 - 40%〜90%の前記少なくとも1種の水溶性極性非プロトン性有機溶媒を含む、請求項1に記載の組成物。
- 前記少なくとも1種のアルコール溶媒が、アルカンジオール、グリコール、アルコキシアルコール、飽和脂肪族一価アルコール、不飽和非芳香族一価アルコール、環構造を含有するアルコール、またはこれらの混合物を含む、請求項1に記載の組成物。
- 5%〜60%の前記少なくとも1種のアルコール溶媒を含む、請求項1に記載の組成物。
- 2.5%〜25%の水を含む、請求項1に記載の組成物。
- 0.01%〜3%の前記少なくとも1種の脱泡界面活性剤を含む、請求項1に記載の組成物。
- 少なくとも1種のアルミニウム腐食抑制剤をさらに含む、請求項1に記載の組成物。
- 前記少なくとも1種のアルミニウム腐食抑制剤が、リン酸類およびリン酸類の塩からなる群から選択される化合物を含む、請求項14に記載の組成物。
- 前記少なくとも1種のアルミニウム腐食抑制剤が、一リン酸、ポリリン酸、無水リン酸、またはその塩を含む、請求項15に記載の組成物。
- 前記少なくとも1種のアルミニウム腐食抑制剤が、第1および第2成分を含み、第1成分が、II族金属カチオンを含み、第2成分が、前記II族金属カチオンを可溶化することが可能である剤を含む、請求項14に記載の組成物。
- 前記第1成分が、Ca2+、Mg2+、Sr2+、またはBa2+を含む、請求項17に記載の組成物。
- 前記剤が、塩基性条件下で電子供与基である基によって置換されている1,2,3−トリアゾールカルボン酸化合物、および塩基性条件下で電子供与基である基によって置換されている1,2,4−トリアゾールカルボン酸化合物からなる群から選択される、請求項17に記載の組成物。
- 前記電子供与基が、カルボキシル、メルカプト、ヒドロキシフェニル、アミノ、アルキルアミノ、またはジアルキルアミノである、請求項19に記載の組成物。
- 前記剤が、3−アミノ−1,2,4−トリアゾール−5−カルボン酸である、請求項20に記載の組成物。
- 0.1%〜10%の前記少なくとも1種のアルミニウム腐食抑制剤を含む、請求項14に記載の組成物。
- 13以上のpHを有する、請求項1に記載の組成物。
- フォトレジストまたはフォトレジスト残渣を含有する半導体基板を、請求項1〜請求項23のいずれかに記載の組成物と接触させて、前記フォトレジストまたはフォトレジスト残渣を除去すること、を含む方法。
- 前記接触ステップの後、前記半導体基板をリンス溶媒でリンスすることをさらに含む、請求項24に記載の方法。
- 前記リンスステップの後、前記半導体基板を乾燥することをさらに含む、請求項25に記載の方法。
- 前記半導体基板中のCuまたはAlを実質的に除去しない、請求項24に記載の方法。
- 1)少なくとも1種の水溶性極性非プロトン性有機溶媒と、
2)少なくとも1種のアルコール溶媒と、
3)少なくとも1種の水酸化第4級アンモニウムと、
4)水と、
5)6−置換−2,4−ジアミノ−1,3,5−トリアジン類から選択される少なくとも1種の銅腐食抑制剤と、
6)少なくとも1種のアルミニウム腐食抑制剤と、及び
7)所望により、少なくとも1種の脱泡界面活性剤と、
を含むフォトレジスト剥離用の組成物であって、
前記少なくとも1種のアルミニウム腐食抑制剤が、第1および第2成分を含み、第1成分が、II族金属カチオンを含み、第2成分が、前記II族金属カチオンを可溶化することが可能である剤を含む、組成物。 - 前記少なくとも1種の水酸化第4級アンモニウムが、式[NR 1 R 2 R 3 R 4 ] + OHの化合物を含み、式中、R 1 、R 2 、R 3 、およびR 4 の各々が、独立して、ヒドロキシによって場合により置換されている線状、分岐状、もしくは環状アルキル基、置換もしくは非置換のフェニル基、または置換もしくは非置換のベンジル基である、請求項28に記載の組成物。
- R 1 、R 2 、R 3 、およびR 4 の各々が、独立して、C 1 〜C 4 アルキル基、ヒドロキシエチル基、フェニル基、またはベンジル基である、請求項29に記載の組成物。
- 0.1%〜10%の前記少なくとも1種の水酸化第4級アンモニウムを含む、請求項28に記載の組成物。
- 前記少なくとも1種の銅腐食抑制剤が、6−置換−2,4−ジアミノ−1,3,5−トリアジンを含み、6位の置換基は、線状もしくは分岐状の置換もしくは非置換のC 1 〜C 12 アルキル基、置換もしくは非置換のC 3 〜C 12 シクロアルキル基、置換もしくは非置換のアリール基、−SCH 2 R 100 、−N(R 100 R 101 )、またはイミジルであり、ここで、R 100 およびR 101 の各々が、独立して、アルキル鎖中に窒素または酸素原子を含有してもよい線状もしくは分岐状の置換もしくは非置換のC 1 〜C 12 アルキル基、シクロアルキル環中に窒素または酸素原子を含有してもよい置換もしくは非置換のC 3 〜C 12 シクロアルキル基、もしくは置換もしくは非置換のアリール基であるか、またはR 100 およびR 101 はそれらが結合する原子と共に環を形成する、請求項28に記載の組成物。
- 前記少なくとも1種の銅腐食抑制剤が、6−フェニル−2,4−ジアミノ−1,3,5−トリアジンまたは6−メチル−2,4−ジアミノ−1,3,5−トリアジンを含む、請求項28に記載の組成物。
- 0.1%〜10%の前記少なくとも1種の銅腐食抑制剤を含む、請求項28に記載の組成物。
- 前記少なくとも1種の水溶性極性非プロトン性有機溶媒が、ジメチルスルホキシド、スルホラン、ジメチルスルホン、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド、N−メチルピロリドン、ガンマ−ブチロラクトン、プロピレンカーボネート、1,3−ジメチル−2−イミダゾリジノン、またはこれらの混合物を含む、請求項28に記載の組成物。
- 30%〜90%の前記少なくとも1種の水溶性極性非プロトン性有機溶媒を含む、請求項28に記載の組成物。
- 前記少なくとも1種のアルコール溶媒が、アルカンジオール、グリコール、アルコキシアルコール、飽和脂肪族一価アルコール、不飽和非芳香族一価アルコール、環構造を含有するアルコール、またはこれらの混合物を含む、請求項28に記載の組成物。
- 5%〜60%の前記少なくとも1種のアルコール溶媒を含む、請求項28に記載の組成物。
- 2.5%〜25%の水を含む、請求項28に記載の組成物。
- 0.01%〜3%の前記少なくとも1種の脱泡界面活性剤を含む、請求項28に記載の組成物。
- 少なくとも1種のアルミニウム腐食抑制剤をさらに含む、請求項28に記載の組成物。
- 前記少なくとも1種のアルミニウム腐食抑制剤が、リン酸類およびリン酸類の塩からなる群から選択される化合物を含む、請求項41に記載の組成物。
- 前記少なくとも1種のアルミニウム腐食抑制剤が、一リン酸、ポリリン酸、無水リン酸、またはその塩を含む、請求項42に記載の組成物。
- 前記第1成分が、Ca 2+ 、Mg 2+ 、Sr 2+ 、またはBa 2+ を含む、請求項28に記載の組成物。
- 前記剤が、塩基性条件下で電子供与基である基によって置換されている1,2,3−トリアゾールカルボン酸化合物、および塩基性条件下で電子供与基である基によって置換されている1,2,4−トリアゾールカルボン酸化合物からなる群から選択される、請求項28に記載の組成物。
- 前記電子供与基が、カルボキシル、メルカプト、ヒドロキシフェニル、アミノ、アルキルアミノ、またはジアルキルアミノである、請求項45に記載の組成物。
- 前記剤が、3−アミノ−1,2,4−トリアゾール−5−カルボン酸である、請求項46に記載の組成物。
- 0.1%〜10%の前記少なくとも1種のアルミニウム腐食抑制剤を含む、請求項41に記載の組成物。
- 13以上のpHを有する、請求項28に記載の組成物。
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