JP6696978B2 - 分光モジュールの制御方法 - Google Patents
分光モジュールの制御方法 Download PDFInfo
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- JP6696978B2 JP6696978B2 JP2017515389A JP2017515389A JP6696978B2 JP 6696978 B2 JP6696978 B2 JP 6696978B2 JP 2017515389 A JP2017515389 A JP 2017515389A JP 2017515389 A JP2017515389 A JP 2017515389A JP 6696978 B2 JP6696978 B2 JP 6696978B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J2003/102—Plural sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1273—Order selection
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
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- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
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Description
101 測定光源
101A 測定光線
102 波長可変光フィルタ
103 フォトダイオード
103A 信号強度情報
104 被検体
105 バンドパスフィルタ
106 参照光源
106A 参照光線
107 変換回路
107A 第一変換式
107B 第二変換式
107C 干渉波長情報
108 別光源
108A 参照光線
201,202 反射板
203 枠体
204 駆動体
205 梁
206 駆動層
207 上部電極
208 下部電極
209 圧電体層
210 制御回路
Claims (3)
- 測定光線を分光して分光スペクトルを測定する分光モジュールの制御方法であって、
前記分光モジュールは、
前記測定光線を射出する測定光源と、
波長が既知である単波長の参照光線を射出する参照光源と、
前記測定光線あるいは前記参照光線から多重反射により干渉光線を出力する波長可変光フィルタと、
前記干渉光線を検出するフォトダイオードと、
を備え、
前記波長可変光フィルタは、対向する一対の反射板と、駆動信号を印加することにより前記一対の反射板のギャップを変位させる駆動体を有し、
前記分光モジュールは、
第一変換式に基づき前記駆動信号の電圧を前記ギャップの変位情報に変換し、第二変換式に基づき前記変位情報を前記波長可変光フィルタの干渉波長情報に変換する変換回路を有し、
前記分光モジュールの制御方法は、
前記フォトダイオードにおける前記参照光線に対する前記干渉光線の干渉次数に応じて極大となる2点を検出し、前記2点に対する出力に基づき前記第一変換式を更新することで、前記変換回路が変換する前記ギャップの変位情報を補正し、前記補正された変位情報に基づいて前記測定光線を分光処理するものであり、
所定の波長領域における分光スペクトルの測定において、前記測定光線の分光処理と、前記第一変換式の更新による前記ギャップの変位情報の補正を交互に行い、前記測定光源の分光スペクトルを測定する、
分光モジュールの制御方法。 - 前記フォトダイオードにおける前記参照光線に対する前記干渉光線の干渉次数に応じて極大のうち連続する2点を検出する、
請求項1に記載の分光モジュールの制御方法。 - さらに前記フォトダイオードにおける連続する干渉次数の極大を示す点を検出し、これら干渉次数が連続する3点に対する前記フォトダイオードからの出力に基づき第一変換式を更新する、
請求項2に記載の分光モジュールの制御方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015091930 | 2015-04-28 | ||
JP2015091930 | 2015-04-28 | ||
PCT/JP2016/002191 WO2016174865A1 (ja) | 2015-04-28 | 2016-04-26 | 分光モジュールの制御方法 |
Publications (2)
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JPWO2016174865A1 JPWO2016174865A1 (ja) | 2018-03-01 |
JP6696978B2 true JP6696978B2 (ja) | 2020-05-20 |
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JP2017515389A Active JP6696978B2 (ja) | 2015-04-28 | 2016-04-26 | 分光モジュールの制御方法 |
Country Status (4)
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US (1) | US10247608B2 (ja) |
EP (1) | EP3290879B1 (ja) |
JP (1) | JP6696978B2 (ja) |
WO (1) | WO2016174865A1 (ja) |
Families Citing this family (2)
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JP2019159031A (ja) * | 2018-03-12 | 2019-09-19 | オリンパス株式会社 | 細胞観察装置、細胞観察方法 |
CN114322831A (zh) * | 2021-12-30 | 2022-04-12 | 南京秋辰光电技术有限公司 | 一种复杂结构体尺寸高精度测量装置及测量方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02136722A (ja) | 1988-11-17 | 1990-05-25 | Hitachi Zosen Corp | 高速光周波数変調器 |
JP2942654B2 (ja) | 1992-03-06 | 1999-08-30 | アンリツ株式会社 | 光スペクトラムアナライザ |
JPH05312646A (ja) | 1992-05-15 | 1993-11-22 | Mitsubishi Electric Corp | 波長測定装置およびこれを搭載したレーザ装置 |
US6438288B1 (en) * | 2000-12-15 | 2002-08-20 | Lightap | Tunable optical filter system |
US6993257B2 (en) * | 2001-08-15 | 2006-01-31 | Broadband Royalty Corporation | Optical channel monitor utilizing multiple Fabry-Perot filter pass-bands |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
JP2015031606A (ja) | 2013-08-02 | 2015-02-16 | セイコーエプソン株式会社 | 分光測定装置および分光測定方法 |
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2016
- 2016-04-26 JP JP2017515389A patent/JP6696978B2/ja active Active
- 2016-04-26 WO PCT/JP2016/002191 patent/WO2016174865A1/ja active Application Filing
- 2016-04-26 EP EP16786142.6A patent/EP3290879B1/en active Active
- 2016-04-26 US US15/559,435 patent/US10247608B2/en active Active
Also Published As
Publication number | Publication date |
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EP3290879A4 (en) | 2018-05-16 |
EP3290879A1 (en) | 2018-03-07 |
JPWO2016174865A1 (ja) | 2018-03-01 |
US10247608B2 (en) | 2019-04-02 |
WO2016174865A1 (ja) | 2016-11-03 |
EP3290879B1 (en) | 2023-10-11 |
US20180087964A1 (en) | 2018-03-29 |
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