JP6693150B2 - 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 - Google Patents

圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 Download PDF

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JP6693150B2
JP6693150B2 JP2016015706A JP2016015706A JP6693150B2 JP 6693150 B2 JP6693150 B2 JP 6693150B2 JP 2016015706 A JP2016015706 A JP 2016015706A JP 2016015706 A JP2016015706 A JP 2016015706A JP 6693150 B2 JP6693150 B2 JP 6693150B2
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mass
vibrating body
piezoelectric
piezoelectric actuator
housing
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JP2017135936A (ja
JP2017135936A5 (enExample
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友寿 岩▲崎▼
友寿 岩▲崎▼
豊 荒川
豊 荒川
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Seiko Epson Corp
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JP2016015706A 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 Expired - Fee Related JP6693150B2 (ja)

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JP2016015706A JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

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JP2017135936A5 JP2017135936A5 (enExample) 2019-02-21
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JP7174399B2 (ja) * 2018-08-01 2022-11-17 株式会社ミクロブ グリッパーモジュール及びグリッパー
JP2023085718A (ja) * 2021-12-09 2023-06-21 セイコーエプソン株式会社 圧電駆動装置、およびロボット

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