JP6680414B1 - 半導体装置及び電力変換装置 - Google Patents
半導体装置及び電力変換装置 Download PDFInfo
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- JP6680414B1 JP6680414B1 JP2019560418A JP2019560418A JP6680414B1 JP 6680414 B1 JP6680414 B1 JP 6680414B1 JP 2019560418 A JP2019560418 A JP 2019560418A JP 2019560418 A JP2019560418 A JP 2019560418A JP 6680414 B1 JP6680414 B1 JP 6680414B1
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- insulating layer
- semiconductor device
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Abstract
Description
本発明に係る実施の形態1の半導体装置について図1を用いて説明する。図1は、本実施の形態の半導体装置100の構成を示す断面図である。また、図2は、半導体装置100を平面視した半導体装置100の上面図である。金属ベース21の面上に第1絶縁層41が設けられる。第1絶縁層41の金属ベース21を設けた面の反対の面上に、載置導体31が設けられる。本実施の形態では、載置導体31は第1載置導体31Aと第2載置導体31Bとを備える。なお、図1では、載置導体31は第1載置導体31A及び第2載置導体31Bの2つを備える場合を示したが、3つ以上も含めて複数の載置導体を備える場合もあるのは言うまでもない。載置導体31の側面に、載置導体31の第1絶縁層41に接する面の反対の面を露呈して、第2絶縁層51が設けられる。金属ベース基板11は、上記した金属ベース21と、第1絶縁層41と、載置導体31と、第2絶縁層51とを有する。半導体素子71は、導電接合部材としてのはんだ81を介して載置導体31上に載置され、接合されている。なお、本実施の形態では、半導体素子71はシリコン(Si)を半導体材料として形成されている場合を例として説明する。また、導電接合部材としては、銀粒子、銅粒子等を焼結した焼結金属接合部材を用いることもできる。ケース61は、図1に示すように断面視で第1絶縁層41の上側に、図2に示すように平面視で第2絶縁層51よりも外側に、第2絶縁層51の側面を周囲にわたって取り囲むようにして設けられる。すなわち、ケース61は金属ベース基板11上に設けられている。ケース61に、外部端子74が両端を除いて埋め込まれて取り付けられている。第1載置導体31Aと第2載置導体31Bと第2絶縁層51とで形成された底面とケース61とで囲まれた領域には、載置導体31上に搭載された半導体素子71を外気からの水分の侵入に対して保護するために封止部材77が充填されている。半導体装置100は、配線部材としてのワイヤ84をさらに備える。
本発明に係る実施の形態2の半導体装置について図6を用いて説明する。図6は、本実施の形態の半導体装置200の構成を示す断面図である。本実施の形態の半導体装置200は、金属ベース21と第1絶縁層43と載置導体31と第2絶縁層51とを有する金属ベース基板14と、半導体素子71と、ケース61と、外部端子74と、封止部材77とを備え、ケース61が第2絶縁層51よりも外側に設けられていることは実施の形態1と同様であるが、ケース61が第1絶縁層43よりも外側に設けられる点が実施の形態1の半導体装置100とは異なる特徴である。
本発明に係る実施の形態3の半導体装置について図8を用いて説明する。図8は、本実施の形態の半導体装置300の構成を示す断面図である。本実施の形態の半導体装置300は、金属ベース21と第1絶縁層41と載置導体31と第2絶縁層51とを有する金属ベース基板11と、半導体素子71と、ケース61と、外部端子74と、封止部材77とを備え、ケース61が第1絶縁層41よりも外側に設けられていることは実施の形態1と同様であるが、半導体素子71に対して金属ベース基板11とは反対側に配置され、封止部材77上のケース61よりも内側の領域に設けられたバリア層91を備える点が実施の形態1の半導体装置100とは異なる特徴である。ここで、図8の半導体装置300は、実施の形態1で説明した半導体装置100にバリア層91を設けた半導体装置を示すものであるが、実施の形態1で説明した半導体装置100の変形例にバリア層91を設けた半導体装置であってもよいし、実施の形態2で説明した半導体装置200又はその変形例にバリア層91を設けた半導体装置であってもよい。また、図8ではバリア層91がケース61よりも内側の領域に設けられる構成を示したが、これに限られるものではなく、バリア層91の少なくとも一部がケース61の外側の領域に設けられてもよい。
上述した実施の形態1〜3のいずれかに係る半導体装置が搭載された、本発明に係る実施の形態4の電力変換装置について図9を用いて説明する。図9は、本実施の形態の電力変換装置を説明するためのブロック図であり、図9の全体は本実施の形態の電力変換装置が適用された電力変換システムを示している。以下、実施の形態4が三相のインバータである場合について具体的に説明する。
21 金属ベース
31、32 載置導体
31A、32A 第1載置導体
31B、32B 第2載置導体
32C 上面
41、42、43、44 第1絶縁層
50 境界面
51、52、53 第2絶縁層
53A 上面
61、62、63 ケース
62A、63A 凸部
71 半導体素子
74 外部端子
77 封止部材
81 はんだ
84 ワイヤ
91 バリア層
100、101、102、103、200、201、300、402 半導体装置
400 電力変換装置
401 主変換回路
403 制御回路
410 電源
420 負荷
Claims (12)
- 金属ベースと、前記金属ベースの面上に設けられた第1絶縁層と、前記第1絶縁層の前記金属ベースを設けた面の反対の面上に設けられた載置導体と、前記載置導体の前記第1絶縁層に接する面の反対の面を露呈して、前記第1絶縁層の前記金属ベースを設けた面の反対の面と前記載置導体の側面とに接して設けられた第2絶縁層とを有する金属ベース基板と、
前記載置導体に接合された半導体素子と、
前記第2絶縁層よりも外側に設けられたケースと、
前記ケースに取り付けられた外部端子と、
前記載置導体と前記第2絶縁層と前記ケースとで囲まれた領域に充填された封止部材と
を備えた半導体装置。 - 前記載置導体は、前記第1絶縁層よりも厚いこと
を特徴とする請求項1に記載の半導体装置。 - 前記載置導体は、前記半導体素子の面積よりも大きい面積を有すること
を特徴とする請求項1又は2に記載の半導体装置。 - 前記金属ベースは、前記載置導体の面積と前記第2絶縁層の面積との和よりも大きい面積を有すること
を特徴とする請求項1〜3のいずれか1項に記載の半導体装置。 - 前記載置導体は、前記金属ベースよりも厚いこと
を特徴とする請求項1〜4のいずれか1項に記載の半導体装置。 - 前記ケースは、前記第1絶縁層よりも外側に設けられたこと
を特徴とする請求項1〜5のいずれか1項に記載の半導体装置。 - 前記第1絶縁層と前記第2絶縁層とは、異なる材料で構成されること
を特徴とする請求項1〜6のいずれか1項に記載の半導体装置。 - 前記第1絶縁層と前記第2絶縁層とは、同一の材料で一体に構成されること
を特徴とする請求項1〜6のいずれか1項に記載の半導体装置。 - 前記第2絶縁層は、前記載置導体と同じ厚さであること
を特徴とする請求項1〜8のいずれか1項に記載の半導体装置。 - 前記第2絶縁層は、前記載置導体よりも厚いこと
を特徴とする請求項1〜8のいずれか1項に記載の半導体装置。 - 前記半導体素子に対して前記金属ベース基板とは反対側に配置され、前記封止部材上に設けられたバリア層を備えること
を特徴とする請求項1〜10のいずれか1項に記載の半導体装置。 - 請求項1〜11のいずれか1項に記載の半導体装置を有し、入力される電力を変換して出力する主変換回路と、
前記主変換回路を制御する制御信号を前記主変換回路に出力する制御回路と、
を備えた電力変換装置。
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