JP6677801B2 - 結晶シリコン系太陽電池およびその製造方法、ならびに太陽電池モジュール - Google Patents
結晶シリコン系太陽電池およびその製造方法、ならびに太陽電池モジュール Download PDFInfo
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- JP6677801B2 JP6677801B2 JP2018511917A JP2018511917A JP6677801B2 JP 6677801 B2 JP6677801 B2 JP 6677801B2 JP 2018511917 A JP2018511917 A JP 2018511917A JP 2018511917 A JP2018511917 A JP 2018511917A JP 6677801 B2 JP6677801 B2 JP 6677801B2
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 200
- 239000002184 metal Substances 0.000 claims description 200
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 136
- 229910052710 silicon Inorganic materials 0.000 claims description 136
- 239000010703 silicon Substances 0.000 claims description 136
- 239000010409 thin film Substances 0.000 claims description 113
- 239000000758 substrate Substances 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 30
- 238000009713 electroplating Methods 0.000 claims description 29
- 239000010408 film Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 9
- 238000007639 printing Methods 0.000 claims description 6
- 238000001579 optical reflectometry Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 209
- 238000007747 plating Methods 0.000 description 20
- 230000002093 peripheral effect Effects 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 238000010248 power generation Methods 0.000 description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 239000003566 sealing material Substances 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 238000009751 slip forming Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- PTVDYARBVCBHSL-UHFFFAOYSA-N copper;hydrate Chemical compound O.[Cu] PTVDYARBVCBHSL-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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Description
21,22 真性シリコン系薄膜
31,32 導電型シリコン系薄膜
41,42 透明電極層
71,72 金属電極
61,62 金属シード
75 裏面端部平坦化金属層
51 離間領域
100 太陽電池
151,152 保護材
155 配線部材
157 封止材
200 太陽電池モジュール
Claims (15)
- 第一主面、第二主面および側面を有する結晶シリコン基板と;前記結晶シリコン基板の第一主面上に順に設けられた、第一真性シリコン系薄膜、第一導電型シリコン系薄膜、受光面透明電極層、および受光面金属電極と;前記結晶シリコン基板の第二主面上に順に設けられた、第二真性シリコン系薄膜、前記第一導電型シリコン系薄膜とは異なる導電型を有する第二導電型シリコン系薄膜、裏面透明電極層、および裏面金属電極と、
を備える結晶シリコン系太陽電池であって、
前記結晶シリコン基板は、第一主面および第二主面にテクスチャを有し、
前記受光面金属電極および前記裏面金属電極は、いずれもパターン状に設けられており、
前記裏面透明電極層は、第二主面の周縁には設けられておらず、
第二主面の周縁には、端部平坦化金属層が、前記裏面透明電極層と離間して設けられている、結晶シリコン系太陽電池。 - 前記裏面透明電極層と前記裏面金属電極との間に、裏面金属シードが設けられている、請求項1に記載の結晶シリコン系太陽電池。
- 前記端部平坦化金属層が、前記受光面金属電極と同一の材料からなる、請求項1または2に記載の結晶シリコン系太陽電池。
- 前記受光面透明電極層と前記受光面金属電極との間に、受光面金属シードが設けられている、請求項1〜3のいずれか1項に記載の結晶シリコン系太陽電池。
- 前記受光面透明電極層が第一主面の全面に設けられ、かつ、側面および第二主面の周縁にも回り込んで形成されており、
第二主面の周縁に回り込んで形成された受光面透明電極層と、前記裏面透明電極層とが離間している、請求項1〜4のいずれか1項に記載の結晶シリコン系太陽電池。 - 第二主面の周縁に回り込んで形成された前記受光面透明電極層上に、前記端部平坦化金属層が設けられている、請求項5に記載の結晶シリコン系太陽電池。
- 前記結晶シリコン基板の第一主面の全面、第二主面の全面および側面の全ての領域に、前記第一真性シリコン系薄膜および前記第二真性シリコン系薄膜のうちの少なくともいずれか一方が設けられている、請求項1〜6のいずれか1項に記載の結晶シリコン系太陽電池。
- 前記第一導電型シリコン系薄膜は、第一主面の全面および側面に設けられており、前記第二導電型シリコン系薄膜は、第二主面の全面および側面に設けられている、請求項1〜7のいずれか1項に記載の結晶シリコン系太陽電池。
- 請求項1〜8のいずれか1項に記載の結晶シリコン系太陽電池の製造方法であって、
前記受光面金属電極および前記裏面金属電極が、電解メッキにより形成される、結晶シリコン系太陽電池の製造方法。 - 前記受光面金属電極および前記裏面金属電極は、レジストパターンの開口下に露出した導電層を起点として電解メッキにより形成される、請求項9に記載の結晶シリコン系太陽電池の製造方法。
- 印刷法により、裏面側の導電層上へのレジスト層が形成される、請求項10に記載の結晶シリコン系太陽電池の製造方法。
- 前記裏面側のレジスト層が、裏面透明電極層上の全面を覆い、かつ裏面の周縁には形成されないように印刷が行われる、請求項11に記載の結晶シリコン系太陽電池の製造方法。
- 第二主面の周縁をマスクで被覆した状態で、裏面透明電極層の製膜が行われる、請求項9〜12のいずれか1項に記載の結晶シリコン系太陽電池の製造方法。
- 前記端部平坦化金属層が、前記受光面金属電極と同時に電解メッキにより形成される、請求項9〜13のいずれか1項に記載の結晶シリコン系太陽電池の製造方法。
- 受光面保護材と裏面保護材との間に、請求項1〜8のいずれか1項に記載の結晶シリコン系太陽電池の複数が電気的に接続された太陽電池ストリングが配置され、
前記裏面保護材が光反射性を有する、太陽電池モジュール。
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