JP6660295B2 - ピックオフトランスデューサワイヤボンドビット検出 - Google Patents
ピックオフトランスデューサワイヤボンドビット検出 Download PDFInfo
- Publication number
- JP6660295B2 JP6660295B2 JP2016522634A JP2016522634A JP6660295B2 JP 6660295 B2 JP6660295 B2 JP 6660295B2 JP 2016522634 A JP2016522634 A JP 2016522634A JP 2016522634 A JP2016522634 A JP 2016522634A JP 6660295 B2 JP6660295 B2 JP 6660295B2
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- JP
- Japan
- Prior art keywords
- transducers
- transducer
- load
- differential
- wire bond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 title description 11
- 239000003990 capacitor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
- G01R31/70—Testing of connections between components and printed circuit boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2829—Testing of circuits in sensor or actuator systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- General Engineering & Computer Science (AREA)
- Gyroscopes (AREA)
- Amplifiers (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Description
少なくとも2つのトランスデューサと、
センサ信号処理回路と、
それぞれが、トランスデューサのうちの各1つをセンサ信号処理回路に接続する、トランスデューサからセンサ信号処理回路への電気接続と、
2つのボンドワイヤで接続された差動増幅器であって、ボンドワイヤが、差動増幅器の差動入力に接続され、増幅器出力が、センサ信号処理回路に接続されている、差動増幅器と、
を備えるセンサデバイス、を提供する。
ゲイン=−(帰還コンデンサ)/負荷容量
すなわち、
ゲイン=−(Cfeedback)/Cload
に従って、帰還コンデンサと負荷コンデンサとの両方によって定義される。
Claims (1)
- 2対のトランスデューサと、
センサ信号処理回路と、
差動入力と、2つの出力とを有する作動増幅器と、
を備え、
各対のトランスデューサは、ハブワイヤボンドによって互いに直列に接続され、各対のトランスデューサは、ハブワイヤボンドによって接続されると、一緒に負荷容量Cloadを有し、
各対のトランスデューサの出力は、それぞれ1つのボンドワイヤで差動増幅器の差動入力のそれぞれに接続され、2つの出力は、センサ信号処理回路に接続され、差動増幅器の各出力は、容量接続Cfeedbackを介して差動入力のそれぞれに接続し戻されており、負荷容量Cloadは、ハブワイヤボンドが破損した場合、差動入力に接続されているトランスデューサの負荷容量Cloadになり、作動増幅器のゲインが、ゲイン=−(Cfeedback)/Cloadの式によって定義され、トランスデューサの損失が、作動増幅器の出力の損失によって検出されることを特徴とするセンサデバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1311967.2A GB2515787B (en) | 2013-07-04 | 2013-07-04 | Pickoff transducer wire bond bit detection |
GB1311967.2 | 2013-07-04 | ||
PCT/EP2014/064239 WO2015001044A1 (en) | 2013-07-04 | 2014-07-03 | Pickoff transducer wire bond bit detection |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016523374A JP2016523374A (ja) | 2016-08-08 |
JP6660295B2 true JP6660295B2 (ja) | 2020-03-11 |
Family
ID=49033290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016522634A Active JP6660295B2 (ja) | 2013-07-04 | 2014-07-03 | ピックオフトランスデューサワイヤボンドビット検出 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10330719B2 (ja) |
EP (1) | EP3017276A1 (ja) |
JP (1) | JP6660295B2 (ja) |
KR (1) | KR102212300B1 (ja) |
GB (1) | GB2515787B (ja) |
WO (1) | WO2015001044A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2515787B (en) | 2013-07-04 | 2018-04-18 | Silicon Sensing Systems Ltd | Pickoff transducer wire bond bit detection |
WO2019216274A1 (ja) | 2018-05-08 | 2019-11-14 | 株式会社エヌエフ回路設計ブロック | 静電容量測定回路及び静電容量変位計 |
JP2020035804A (ja) * | 2018-08-28 | 2020-03-05 | ルネサスエレクトロニクス株式会社 | 半導体装置、電子回路および半導体装置の検査方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3818476A (en) * | 1972-06-27 | 1974-06-18 | Tull Aviation Corp | Navigation aid transmitter-monitor system |
US5495414A (en) * | 1993-04-07 | 1996-02-27 | Ford Motor Company | Integrated silicon automotive accelerometer and single-point impact sensor |
US6879056B2 (en) * | 2000-12-29 | 2005-04-12 | Intel Corporation | Converting sensed signals |
US7276911B2 (en) * | 2001-03-20 | 2007-10-02 | Integrated Power Components, Inc. | Detection of malfunctioning bulbs in decorative light strings |
JP2007005509A (ja) * | 2005-06-23 | 2007-01-11 | Rohm Co Ltd | 半導体集積回路装置及びこれを用いたレギュレータ |
US7358717B2 (en) * | 2006-05-08 | 2008-04-15 | Tektronix, Inc. | Input by-pass circuit for a current probe |
DE102006025031A1 (de) * | 2006-05-26 | 2007-11-29 | Micronas Gmbh | Prüfschaltungsanordnung und Prüfverfahren zum Prüfen einer Schaltungsstrecke einer Schaltung |
JP2009025044A (ja) * | 2007-07-17 | 2009-02-05 | Toshiba Corp | 半導体装置 |
US7960983B2 (en) * | 2008-08-25 | 2011-06-14 | Freescale Semiconductor, Inc. | Circuit for detecting bonding defect in multi-bonding wire |
US8610497B2 (en) * | 2011-07-14 | 2013-12-17 | Infineon Technologies Ag | System and method for capacitive signal source amplifier |
ITTO20110688A1 (it) * | 2011-07-28 | 2013-01-29 | St Microelectronics Srl | Giroscopio microelettromeccanico con funzione di autocalibrazione e metodo di calibrazione di un giroscopio microelettromeccanico |
GB201120536D0 (en) * | 2011-11-29 | 2012-01-11 | Atlantic Inertial Systems Ltd | Fault detection using skewed transducers |
GB2515787B (en) | 2013-07-04 | 2018-04-18 | Silicon Sensing Systems Ltd | Pickoff transducer wire bond bit detection |
-
2013
- 2013-07-04 GB GB1311967.2A patent/GB2515787B/en active Active
-
2014
- 2014-07-03 JP JP2016522634A patent/JP6660295B2/ja active Active
- 2014-07-03 EP EP14737195.9A patent/EP3017276A1/en not_active Ceased
- 2014-07-03 KR KR1020167003043A patent/KR102212300B1/ko active IP Right Grant
- 2014-07-03 US US14/901,434 patent/US10330719B2/en active Active
- 2014-07-03 WO PCT/EP2014/064239 patent/WO2015001044A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2015001044A1 (en) | 2015-01-08 |
GB2515787A (en) | 2015-01-07 |
KR102212300B1 (ko) | 2021-02-03 |
JP2016523374A (ja) | 2016-08-08 |
US10330719B2 (en) | 2019-06-25 |
GB201311967D0 (en) | 2013-08-21 |
GB2515787B (en) | 2018-04-18 |
EP3017276A1 (en) | 2016-05-11 |
US20160370417A1 (en) | 2016-12-22 |
KR20160063311A (ko) | 2016-06-03 |
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