JP6660246B2 - Drying device and coating system - Google Patents

Description

  The present invention relates to a drying device, a light irradiation device, and a coating system, and more particularly, to a drying device capable of drying a liquid applied to an end surface of a substrate or a peripheral portion including the end surface, and a photochemical reaction of the liquid. The present invention relates to a light irradiation device capable of curing and drying, and a coating system including the drying device and / or the light irradiation device.

A printed board using a glass epoxy member is generally used as a board for mounting electronic components. The glass epoxy member is obtained by impregnating a glass fiber cloth with epoxy resin. Therefore, when the glass epoxy member is cut, fine dust made of epoxy resin or glass fiber is generated. Such fine dust may cause a poor contact of the substrate circuit or a decrease in quality. Therefore, it is necessary to remove dust generated at the time of cutting the board at the time of manufacturing the printed board.
However, even if dust is removed from the end surface of the printed circuit board, the end surface portion of the printed circuit board is fragile, and there is a problem that the dust may be broken and further dust may be generated.

Therefore, the inventor previously applied a liquid (film forming liquid) to an end surface of a substrate such as a printed circuit board or a copper-clad laminated substrate (also referred to as a package substrate) or a peripheral portion including the end surface to form a coating film, A coating system including a coating unit capable of preventing collapse of a substrate end face portion in a later production process and generation of dust due to the collapse has been proposed (Patent Documents 1 and 2).
According to the coating systems proposed in Patent Documents 1 and 2, in the coating unit, a thin and uniform film-forming liquid can be efficiently applied to a peripheral portion including an end face of a substrate. . The substrate that has passed through the coating unit is then conveyed to a drying device (drying oven), where the coating film formed on the peripheral portion of the substrate is dried.

[Problems to be solved by the invention]
In the case where the drying apparatus is a method of drying the substrates one by one, when the drying time of the coating film is short, the drying processing can be performed relatively efficiently, while a liquid material that is difficult to dry is used. In addition, since the drying time of the coating film is long, it is difficult to efficiently perform the drying treatment, and there has been a problem that the effect of the coating unit cannot be sufficiently exhibited.
Further, it is possible to use a conveyor system for the drying device, but a large drying room requires a large installation space, and also when transferring the substrate on the conveyor, the undried formed on the peripheral portion of the substrate. There was a problem that the coating film might be peeled off.

  Further, when an ultraviolet curable material is contained in the liquid applied to the end face or the peripheral portion of the substrate, a method of using an ultraviolet irradiation device to cure the liquid may be considered in addition to the drying treatment by the drying device. However, it is difficult for a general lamp type ultraviolet irradiation apparatus to appropriately irradiate ultraviolet rays only to the end face and the peripheral edge of the substrate. Was not previously proposed.

Japanese Patent No. 5735035 Japanese Patent No. 5735047

Means for solving the problem and its effects

  The present invention has been made in view of the above problems, and a plurality of substrates having a liquid agent applied to an end surface or a peripheral portion of the substrates can be collectively and efficiently dried neatly, and the size can be reduced. Provided are a drying device capable of appropriately irradiating light for curing and drying a liquid agent to an end surface and a peripheral portion of a substrate, and a coating system including the drying device and / or the light irradiation device. It is intended to be.

  In order to achieve the above object, a drying apparatus (1) according to the present invention includes a drying chamber for drying a substrate, loading means for loading the substrate into the drying chamber, and unloading means for unloading the substrate from the drying chamber. A drying apparatus, wherein the drying chamber is provided in correspondence with each of the plurality of shelves on which the substrates are mounted, substrate holding means arranged on each of these shelves, and each of the shelves. Provided opening / closing doors, unloading opening / closing doors provided corresponding to the respective shelves, and blowing air in a fixed direction along each side of the substrate placed on the plurality of shelves. Means, and suction means for sucking gas in the drying chamber, wherein the carry-in means is configured to carry in the substrate between the shelf portion and the substrate holding means, and the carry-out means comprises the shelf. Characterized in that it is configured to carry out the substrate from between the unit and the substrate holding means. It is.

  According to the drying apparatus (1), substrates can be loaded and unloaded one by one into each shelf of the drying chamber, and a plurality of substrates can be accommodated in the drying chamber. In addition, the size can be reduced. Further, during drying, the substrate is pressed by the substrate pressing means, so that it is possible to prevent the substrate from being lifted or displaced due to the air blow, and the blower means allows each side (end face or peripheral edge) of the substrate to be blown. Can be efficiently blown, and the liquid applied to the end face or the peripheral edge of the substrate can be efficiently and cleanly dried.

  Further, in the drying device (2) according to the present invention, in the drying device (1), the shelf is provided on a loading side lower frame portion provided on the loading opening / closing door side and on the loading / unloading opening / closing door side. And a plurality of cross members provided between the carry-in lower frame portion and the carry-out lower frame portion, wherein the carry-in means is provided for carrying a substrate. A fork unit, elevating means for elevating and lowering the carry-in fork unit, and horizontal moving means for moving the carry-in fork unit in a horizontal direction, wherein the carry-out means comprises a carry-out fork unit on which a substrate is placed; An elevating means for elevating and lowering the carry-out fork part, and a horizontal moving means for moving the carry-out fork part in a horizontal direction, wherein the carry-in fork part and the carry-out fork part are provided with the plurality of cross members. It is characterized by being configured to be able to go up and down between That.

  According to the drying device (2), since the carry-in fork and the carry-out fork are configured to be able to move up and down between the plurality of cross members, it is necessary to carry in / out one substrate. The height of the drying chamber capable of storing a plurality of sheets can be reduced, and the apparatus can be compact and excellent in maintenance.

  Further, in the drying device (3) according to the present invention, in the drying device (2), the carry-in opening / closing door is attached to the carry-in lower frame so as to be capable of turning up and down, and the carry-out lower frame is attached to the carry-out lower frame. A carry-out opening / closing door is attached to be rotatable up and down, and a lower portion of the carrying-in opening / closing door is formed with a pressing piece that can be pushed down by a tip end of the carrying-in fork portion, and a lower side of the carrying-out opening / closing door. A pressing piece which can be pressed down at the tip of the carry-out fork portion is formed on the portion.

  According to the drying device (3), the opening / closing operation of the loading / unloading door and the unloading opening / closing door is performed by the operation of the loading fork unit and the unloading fork unit. A separate power for opening and closing the door is not required, and energy saving of the apparatus can be achieved.

  The drying device (4) according to the present invention is the drying device (2) or (3), in which the loading-side vertical frame portion is fixed to the loading-side lower frame portion on both sides of the loading opening / closing door. In the state where the loading-side vertical frame portion is fixed to the unloading-side lower frame portion on both sides of the unloading opening / closing door, and when the loading opening / closing door is closed, the loading is performed. A magnet is provided on the loading door and the loading vertical frame so that the loading door and the loading vertical frame attract each other by magnetic force, and in a state where the loading door is closed, A magnet is provided on the unloading door and the unloading vertical frame so that the unloading door and the unloading vertical frame attract each other by magnetic force.

  According to the drying device (4), when the carry-in open / close door and the carry-out open / close door are closed, the magnetic force of the magnet attracts the carry-in vertical frame portion and the carry-out vertical frame portion, respectively. The closed state can be easily stabilized, and the closed state can be stabilized by the magnetic force of the magnet.

  Further, in the drying device (5) according to the present invention, in any one of the drying devices (2) to (4), the substrate pressing means may include a frame for pressing the substrate, and a direction of loading the substrate from the frame. And a plurality of rotating members rotatably mounted on the overhanging portion in a direction in which the substrate is carried in, and the plurality of rotating members are provided in the carrying-in direction. A fork on the outer fork of the carrying fork and an outer fork of the carrying-out fork.

  According to the drying device (5), the plurality of rotating members provided on the overhanging portion of the substrate holding portion are formed of the outer fork of the loading fork and the outer fork of the loading fork. Since it is configured to be able to ride on the upper side, the vertical operation of the substrate holding means can be realized by the operation of the loading fork section and the unloading fork section, and the loading fork section The substrate pressing means can be smoothly placed on the outer fork portion of the above or the outer fork portion of the unloading fork, and the loading and unloading operations of the substrate can be smoothly performed.

  Further, in the drying device (6) according to the present invention, in the drying device (5), the displacement of the rotating member in the horizontal direction is restricted by the carry-in lower frame portion and / or the carry-out lower frame portion. It is characterized in that a position regulating portion is provided.

  According to the drying device (6), the displacement of the rotating member in the horizontal direction is regulated by the position regulating portion, and the displacement of the substrate pressing means can be prevented.

  Further, in the drying device (7) according to the present invention, in any one of the drying devices (2) to (6), the crosspiece member may be arranged with respect to the carry-in side lower frame portion and / or the carry-out side lower frame portion. And a fixing portion for fixing the crosspiece with play in the longitudinal direction.

According to the drying device (7), since the fixing portion has a play, for example, even if the bar member thermally expands in the longitudinal direction due to heat (hot air) in the drying chamber, the thermal expansion causes Distortion can be appropriately released, and deformation or the like of the crosspiece can be prevented.
The fixing portion includes, for example, a fixing member fixed to both ends of the cross member, a long hole formed in the fixing member, a cylindrical spacer arranged in the long hole, the loading side via the spacer. A lower frame portion or a fixture fixed to the carry-out side lower frame portion.

  Further, the drying device (8) according to the present invention, in any one of the drying devices (2) to (7), removes all the substrate pressing means placed on each of the shelves from the respective shelves at once. It is characterized by having lifting means for lifting.

According to the drying device (8), all the substrate pressing means placed on each of the shelves can be lifted at once from each of the shelves by the lifting means, thereby causing a positional shift of the loaded substrate. In such a case, maintenance work and the like can be easily performed.
The lifting means is, for example, provided on both sides of the loading-side lower frame part and on both sides of the unloading-side lower frame part, and includes a vertical frame for lifting and lowering provided with a locking part for locking a part of the substrate pressing means. It can be configured to include a member and an elevating unit for elevating the elevating vertical frame member.

  Further, in the drying device (9) according to the present invention, in any one of the drying devices (1) to (8), the blowing unit includes a vertical blowing tubular portion provided in the drying chamber; A vertical blow-off port provided on a side surface of the blower tubular portion, a blower is connected to the blower tubular portion, and the suction means is a vertical suction tubular shape provided in the drying chamber. Unit, and a vertically long suction port provided on a side surface of the suction tubular portion, a suction device is connected to the suction tubular portion, and gas sucked by the suction device is sent to the blower. It is characterized by having such a configuration.

According to the drying device (9), since the blower includes the vertical blown tubular portion and the vertically elongated outlet, the blower can be mounted on a shelf at any height of the drying chamber. The gas can be evenly and efficiently blown to the mounted substrate under substantially the same conditions.
Further, since the suction means includes the vertical suction tubular portion and the vertically elongated suction port, the gas can be sucked along the flow of gas in the drying chamber by the blowing means.
Further, since the gas sucked by the suction machine is sent to the blower, the gas in the drying chamber can be circulated, and in particular, when hot air (hot air) is used, heat energy loss can be reduced. And energy saving can be achieved.

  The drying device (10) according to the present invention, in the drying device (9), further includes an exhaust unit that discharges gas in the drying chamber to the outside, and the suction unit includes an outside air intake unit that takes in outside air. It is characterized by:

According to the drying device (10), the gas in the drying chamber can be discharged to the outside as necessary by the exhaust means, and the outside air can be appropriately taken in by the suction means. Conditions such as temperature and humidity can be adjusted appropriately.
Further, the coating system (1) according to the present invention includes: a coating device for coating a liquid material on an end surface of a substrate or a peripheral portion including the end surface; and any of the drying devices (1) to (10). Features.
According to the coating system (1), since any one of the drying devices (1) to (10) is provided, even when a liquid material having a short drying time is used or a liquid material having a long drying time is used, Irrespective of the properties of the liquid agent, the coating process on the end face or the peripheral portion of the substrate and the drying process can be performed efficiently.

Further, the coating system (2) according to the present invention, in the coating system (1), further includes a light irradiating device for irradiating light to an end surface of the substrate on which the liquid agent is applied or a peripheral portion including the end surface. The apparatus is provided with a transport unit for transporting the substrate, a positioning unit for positioning the substrate transported by the transport unit, and a direction intersecting the transport direction of the substrate, and the end face of the substrate in the direction of the intersection or the First light irradiating means for irradiating light to the peripheral portion including the end face, and light irradiating light to the end face of the substrate in the parallel direction or the peripheral portion including the end face, which is provided in a direction parallel to the transport direction of the substrate. A second light irradiating means for detecting the position of the substrate conveyed by the conveying means; a first light irradiating means for detecting the position of the substrate conveyed by the conveying means; Means and said second light irradiating means Light irradiation control means for performing irradiation control; and transfer control means for controlling a transfer speed of the substrate by the transfer means based on a transfer position of the substrate detected by the substrate detection means. .

According to the coating system (2) , since the light irradiation device is further provided, even when a liquid material containing a photocuring agent such as an ultraviolet curable resin is used, only the end surface and the peripheral edge portion of the substrate can be appropriately formed. Light for curing / drying a liquid material containing a photocuring agent or the like can be irradiated, so that the curing / drying process of the liquid material applied to the end surface or the peripheral portion of the substrate can be efficiently performed.

Also, in the coating system (3) according to the present invention, in the coating system (2) , the first light irradiating means is an LED type ultraviolet irradiating means, and the first and second light irradiating means are arranged in the up and down directions of the conveying means. The second light irradiating means is an LED type ultraviolet irradiating means, and the irradiation position in the upward and downward directions is shifted to the upper and lower positions of the transporting means. It is characterized in that it is arranged in a state where it is placed.

According to the coating system (3), wherein the first light irradiation means second light irradiation means of the light irradiation apparatus, since the ultraviolet irradiation unit of the LED type, said liquid comprising an ultraviolet curable resin The device can be cured and dried in a short time, the size of the device can be reduced, and the life of the device can be prolonged and the cost for maintenance can be reduced.

Further, in the coating system (4) according to the present invention, in the coating system (2) or (3) , the light irradiation control unit may be configured such that an end surface of the substrate or a peripheral portion including the end surface is the first light irradiation. Means for controlling the light irradiation at the timing of passing through the irradiation area of the means and the irradiation area of the second light irradiation means, respectively. A device for controlling the speed of the light irradiation means to pass through the irradiation area of the first light irradiation means so that the end face of the substrate in the direction parallel to the direction of transport of the substrate passes through the irradiation area of the second light irradiation means. It is characterized by being.

According to the coating system (4), by said conveyance control unit and the light irradiation control means of the light irradiation device, a light irradiation to the end face of the substrate of the direction intersecting the transport direction of the substrate being transported, It is possible to appropriately control light irradiation on the end surface of the substrate in a direction parallel to the transfer direction of the substrate during transfer, and to perform uniform hardening and drying processing without variation over the entire circumference of the substrate. Can be.

FIG. 1 is a block diagram illustrating a schematic configuration of a coating system according to an embodiment of the present invention. It is a partially omitted perspective view of the drying device concerning embodiment. It is an opening side view of the drying device concerning an embodiment. It is the schematic which shows the internal structure of the drying apparatus which concerns on embodiment, (a) is a cross-sectional view, (b) is a partial side view. FIG. 5 is a diagram for explaining a substrate carrying-in operation of the drying device according to the embodiment. FIG. 4 is a diagram for explaining a substrate unloading operation of the drying device according to the embodiment. It is the schematic plan view which showed the internal structure of the light irradiation apparatus which concerns on embodiment. It is the schematic side view which showed the internal structure of the light irradiation apparatus which concerns on embodiment.

  Hereinafter, embodiments of a drying device, a light irradiation device, and a coating system according to the present invention will be described with reference to the drawings. Note that the embodiments described below are preferred specific examples of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention particularly limits the present invention in the following description. It is not limited to these forms unless otherwise stated.

FIG. 1 is a block diagram showing a schematic configuration of a coating system according to Embodiment (1). The coating system 1 includes a coating device 10, a drying device 30, and an ultraviolet irradiation device 100 as a light irradiation device.
The coating device 10 constituting the coating system 1 is a device for applying a liquid agent to an end face of a substrate or a peripheral portion including the end face (for example, about 1 mm to 10 mm in width). The substrate to be coated includes various substrates such as a thin (several tens μm to several hundred μm) copper-clad laminated substrate (also referred to as a package substrate) having a substantially rectangular shape, an aluminum substrate, a glass substrate, and the like. .

In addition, the liquid agent (also referred to as a film forming liquid or a substrate coating agent) forms a coating film (for example, a film thickness after curing is about 10 μm to 200 μm) on an end surface or a peripheral portion of the substrate, and the end surface portion of the substrate is formed. It is used to prevent the generation of dust due to the collapse of, and to reinforce the peripheral edge of the substrate with the coating film, to improve the handleability of the substrate in a later process, and to reduce the incidence of defective products of the substrate. is there.
The liquid agent has a property (resistance to acid and / or alkali) that does not peel off in a substrate processing step (such as an etching step or a plating step), and is mixed with a plurality of resin components so as to have excellent adhesion to the substrate surface. For example, a liquid agent prepared according to the intended use, such as a coating agent containing an aqueous urethane resin, an aqueous styrene resin and an aqueous thickener with respect to a solvent of an aqueous medium, can be used. Further, the viscosity is appropriately adjusted according to the film thickness to which the liquid agent is applied. For example, when the film thickness is reduced, it is preferable to lower the viscosity.

  The coating apparatus 10 includes a conveyor section 11 for transporting a substrate, a positioning section 12 for positioning the substrate on the conveyor section 11, a substrate transfer section 13, a coating section 20, a control section 14 for controlling a driving operation of each section, and a work. And an operation unit 15 for the user to perform necessary operations.

  The positioning section 12 includes positioning guide sections (not shown) provided on both sides of the conveyor section 11, moves the positioning guide section in a direction to sandwich the substrate, sandwiches the board, and positions and arranges the board at a predetermined position. Has functions. A member for gripping the substrate without damaging it is provided on the inner surface of the positioning guide.

The coating unit 20 includes a support table 21 for supporting the substrate, one or more, for example, four coating units 22 disposed around the support table 21, and these coating units 22 are arranged along each side of the support table 21. And a moving unit 23 for moving each of them. Each coating unit 22 is equipped with, for example, a pair of coating heads (not shown) each having an upper head and a lower head which are vertically opposed to each other with a gap into which the end of the substrate can be inserted. I have.
Further, the coating unit 20 is equipped with a liquid supply unit 24 that supplies a film forming liquid containing a resin component to each coating head of the coating unit 22. The moving unit 23 can be configured by, for example, a biaxial (XY axis) linear motion mechanism that horizontally moves the coating unit 22 in the biaxial (XY axis) directions.

  The pair of coating heads are, for example, a liquid storage portion for storing a film forming liquid on the opposing surfaces of the pair of coating heads, and a thin film-like film formed by attaching the film forming liquid adhered to the end of the substrate passing through the liquid storage portion. And a coating unit (both not shown) for coating. Further, the coating unit may be, for example, a trowel (trowel) for leveling (equalizing) the film-forming liquid attached to an end of the substrate, A configuration may be provided that includes a scraping unit (both not shown) that scrapes the excess film forming liquid.

  Note that the coating unit 22 is not limited to the one provided with the pair of coating heads. For example, in another embodiment, the coating unit 22 includes a disk-shaped, column-shaped, or substantially truncated cone-shaped coating roller having an annular groove formed on the outer peripheral surface, or a substrate. For example, a device having a pair of application rollers arranged to face each other so as to sandwich the end portion may be employed.

  Further, a protective device for an application head (not shown) may be set at the retracted position of the pair of application heads. The protective device for a coating head includes, for example, a pad portion that comes into contact with a gap between the pair of coating heads, a liquid receiving portion disposed below the pad portion, and supports the pad portion and the liquid receiving portion. And a supporting portion (not shown). The coating head protector is lowered by the lifting mechanism (not shown) below the support table 21 at the time of coating, and is raised to the position of the pair of coating heads at the time of evacuation, so that the pad portion is in front of the pair of coating heads. Abut on the gap.

  The liquid supply unit 24 includes a liquid storage unit that stores the film forming liquid, an electric pump that supplies the film forming liquid from the liquid storage unit to each coating head, and a film forming unit that receives the film forming liquid received by the liquid receiving unit of the coating head. It is configured to include an electric pump for transferring (recovering) the liquid to the liquid storage unit and (not shown).

The control unit 14 controls the transfer and positioning of the positioning unit 12, the transfer of the substrate by the substrate transfer unit 13, the XY-axis linear motion control of the moving unit 23, and the drive control of the pump of the liquid supply unit 24. 10 has a function of controlling each unit, and includes a microcomputer, a driver circuit, a storage unit, a power supply unit, and the like (all not shown). Note that the control unit 14 can be configured with one or a plurality of control units (for example, for control of loading / positioning, control of an application unit, and the like).
Further, the control unit 14 inserts the ends of the four sides of the substrate supported by the support table 21 into the gap between the pair of coating heads, and moves each coating head along the peripheral edge of the substrate in that state. It has a function of driving and controlling the moving unit 23 so as to cause the movement.

  The operation unit 15 includes a liquid crystal operation panel (not shown). Through the liquid crystal operation panel, it is possible to perform various operations such as setting operation conditions of each unit of the coating apparatus 10, instructing operation of each unit, and switching operation modes (manual, automatic, etc.). An operation signal and a setting signal input through the liquid crystal operation panel are transmitted to the control unit 14 and the like.

  The substrate transfer unit 13 has a function of transferring the substrate positioned by the conveyor unit 11 to the support table 21 of the coating unit, and after the coating process in the coating unit 20 is completed, the substrate is transferred from the support table 21 to the drying device 30. A function of transferring the data to the carry-in device 81 is provided. The substrate transfer unit 13 includes one or more substrate holding units provided with a plurality of suction holders for sucking a substrate, a horizontal moving mechanism that reciprocates the substrate holding unit in the substrate transport direction, and a substrate holding unit. A vertical movement mechanism for reciprocating vertically (both not shown). The substrate is suction-held by the suction holder.

Next, the drying device 30 included in the coating system 1 will be described.
FIG. 2 is a partially omitted perspective view of the drying device 30 according to the embodiment. FIG. 3 is an open side view of the drying device 30 according to the embodiment. 4A and 4B are schematic diagrams illustrating an internal structure of the drying device 30 according to the embodiment, in which FIG. 4A is a cross-sectional view and FIG. 4B is a partial side view.

The drying device 30 includes a drying chamber 31 for drying the substrate 2, a loading device 81 for loading the substrate 2 into the drying chamber 31, and an unloading device 91 for unloading the substrate 2 from the drying chamber 31.
The drying chamber 31 includes a plurality of stages of shelves 32 on which the substrates 2 are placed, a substrate pressing member 41 arranged to be superimposed on each of the shelves 32, and a substantially band provided corresponding to each of the shelves 32. A plate-shaped carry-in opening / closing door 51, a substantially band-shaped carry-out open / close door 52 provided corresponding to each shelf 32, and a plurality of stages of the substrate 2 placed on the shelf 32 The drying unit 31 includes a blowing unit 62 that blows out wind (for example, hot air) in a certain direction along the air, and a suction unit 63 that sucks gas in the drying chamber 31.
The carry-in device 81 is configured to carry in the substrate 2 between the shelf 32 and the substrate pressing member 41, and the carry-out device 91 carries out the substrate 2 from between the shelf 32 and the substrate pressing member 41. Is configured.

  The control unit 40 has a function of controlling each unit of the drying device 30, such as drive control of the carry-in device 81 and the carry-out device 91, drive control of the blower 72 and the suction device 74, and includes a microcomputer, a driver circuit, and a storage unit. And a power supply unit (both not shown). Note that the control unit 40 can be configured with one or a plurality of control units (for example, for controlling the loading device, controlling the unloading device, controlling the blower, controlling the suction device, and the like).

  The shelf 32 includes a strip-shaped loading lower frame 33 provided in front of the loading door 51, and a strip-shaped loading lower frame 34 provided in front of the loading door 52. And a plurality of (five in the present embodiment) crosspiece members (small metal bar members) 36 provided between the carry-in lower frame portion 33 and the carry-out lower frame portion 34. .

  The carry-in device 81 includes a carry-in fork portion (fork-shaped portion) 82 on which the substrate 2 is placed, an elevating mechanism 86 that moves the carry-in fork portion 82 up and down, and a horizontal movement that moves the carry-in fork portion 82 in the horizontal direction. And a mechanism 87.

  The unloading device 91 includes an unloading fork portion (fork-shaped portion) 92 on which the substrate 2 is placed, an elevating mechanism 96 that moves the unloading fork portion 92 up and down, and a horizontal movement that moves the unloading fork portion 92 in the horizontal direction. And a mechanism 97.

The lifting mechanisms 86 and 96 are provided with pulley mechanisms using balance weights (balance weights), so that the loading and unloading fork portions 82 and 92 can be moved up and down with little power. The horizontal movement mechanisms 87 and 97 are configured by a linear motion mechanism or the like that can slide on a fixed rail (not shown).
The carry-in fork portion 82 and the carry-out fork portion 92 are configured to be able to move up and down between a plurality of crosspiece members 36. That is, the carry-in fork portion 82 and the carry-out fork portion 92 and the plurality of crosspiece members 36 are arranged and configured to have a staggered positional relationship in plan view.

The carry-in fork portion 82 and the carry-out fork portion 92 include two outer fork portions 83 and 93 and a plurality (four in this case) of inner fork portions 84 provided inside the outer fork portions 83 and 93. The inner forks 84 and 94 are provided with suction mechanisms 85 and 95 for sucking the substrate 2. The distal ends of the outer forks 83 and 93 are formed of an inclined resin material.
The suction mechanisms 85 and 95 include a plurality of suction holes formed on the upper surfaces of the inner forks 84 and 94, and suction nozzles (not shown) provided inside the inner forks 84 and 94 so as to be connected to the suction holes. ).

A loading opening / closing door 51 is attached to the loading side lower frame portion 33 so as to be able to be turned upside down by using a fixture (not shown) such as a hinge, and a loading / unloading opening / closing door 52 is attached to the loading side lower frame portion 34. It is attached so as to be able to turn up and down by using an attachment (not shown).
At both ends of the lower side of the carry-in opening / closing door 51, pressing pieces 51a that can be pushed down at the tip of the outer fork portion 83 of the carry-in fork 82 are formed in a protruding state, and both ends of the lower side of the carry-out opening / closing door 52 are formed. The pressing piece 52a that can be pressed down at the tip of the outer fork 93 of the unloading fork 92 is formed in a protruding state.

On both sides of the carry-in opening / closing door 51, a carry-in vertical frame portion 38 in the shape of a vertically long and narrow strip is disposed in a state fixed to the carry-in lower frame portion 33. The discharge-side vertical frame portion 39 having a narrow band shape is disposed in a state of being fixed to the discharge-side lower frame portion 34.
With the carry-in door 51 closed, both ends of the carry-in door 51 and the carry-in vertical frame 38 are drawn so that the carry-in door 51 and the carry-in vertical frame 38 attract each other by magnetic force. Magnets 51b and 38a are provided at locations facing both ends, respectively.
In addition, both ends of the unloading door 52 and the unloading vertical frame unit are arranged so that the unloading door 52 and the unloading-side vertical frame 39 are attracted to each other by magnetic force when the unloading door 52 is closed. Magnets 52b and 39a are provided at both ends of 39 and at locations facing each other.

The substrate pressing member 41 includes a frame portion 42 having a substantially rectangular shape for holding the substrate 2, and a plurality of thin plate-shaped protrusions 43 provided to protrude from the frame portion 42 in a direction intersecting with the direction of loading the substrate 2. And a plurality of rotating members 44 attached to the overhanging portions 43 so as to be rotatable in the direction in which the substrate 2 is carried in. The frame portion 42 is made of a metal square material. The weight of the substrate pressing member 41 can be about 1 kg.
A small bearing member can be used for the rotating member 44, and the bearing is rotatably inserted into a shaft portion formed on the overhang portion 43.
The plurality of rotating members 44 of the substrate holding member 41 can ride on the outer fork portion 83 of the carry-in fork portion 82 and the outer fork portion 93 of the carry-out fork portion 92, respectively.

At both ends of the loading-side lower frame portion 33 and / or the unloading-side lower frame portion 34, a position restricting member 35 for restricting a horizontal displacement of the rotating member 44 of the substrate pressing member 41 is provided.
The position restricting tool 35 is formed with, for example, a convex portion (convex portion) 35a in plan view that can restrict the displacement of the rotating member 44 in the horizontal direction. The shape of the position restricting tool 35 can restrict the displacement of the rotating member 44 in the horizontal direction, and can move the rotating member 44 in the vertical direction. There is no particular limitation as long as it can be attached.

  When the substrate holding member 41 is lifted by the loading fork portion 82 or the unloading fork portion 92 at the time of loading or unloading the substrate 2, or when the substrate holding member 41 is lifted by the lifting mechanism 46, the upper level is increased. The convex portions 35a of the position restricting tool 35 of the loading-side lower frame portion 33 and the unloading-side lower frame portion 34 abut against the outer surfaces of the rotating members 44 provided at the four corners of the lifted substrate holding member 41. The position shift of the 44 with respect to the horizontal outside direction is regulated.

The crosspiece member 36 is provided with a fixing portion 37 for fixing to the carry-in lower frame portion 33 and / or the carry-out lower frame portion 34 with play in the longitudinal direction of the crosspiece member 36.
The fixing portion 37 includes, for example, a stair-shaped fixing member fixed to both ends of the crosspiece member 36, a long hole formed in the fixing member, a cylindrical spacer arranged in the long hole, and the spacer. It is configured to include a fixture (screw member) that is fixed to the carry-in side lower frame portion 33 or the carry-out side lower frame portion 34, but is not limited to this configuration.
A crosspiece member 36 is also provided on the upper surface of the drying chamber 31. Since the crosspiece member 36 is provided on the upper surface of the drying chamber 31, the substrate 2 can be transferred to the ultraviolet irradiation device 100 without passing through the drying chamber 31.

  The drying chamber 31 is equipped with a lifting mechanism 46 that lifts all the substrate pressing members 41 placed on each shelf 32 from each shelf 32 at a time. The lifting mechanisms 46 are disposed on both sides of the loading-side lower frame portion 33 and on both sides of the unloading-side lower frame portion 34, and are provided on a part of each substrate holding member 41, that is, on the projecting portions 43 at the four corners of the frame portion 42. A vertical frame member 47 for lifting provided with a locking portion 47a for locking the shaft portion of the rotating member 44 provided, and a drive handle and a lifting mechanism (not shown) for lifting and lowering the vertical frame member 47 for lifting. It can be configured to include.

  Further, a dedicated support 98 is used to put the substrate pressing member 41 in and out of the drying chamber 31. The support member 98 is formed in a substantially U-shape in plan view, and is inserted between the cross member 36 and the substrate holding member 41 from a direction intersecting with the substrate loading direction with the opening / closing door 61 of the drying chamber 31 opened. Then, by pulling out the support 98 from the drying chamber 31 with the substrate pressing member 41 placed on the support 98, the substrate pressing member 41 can be taken out of the drying chamber 31. When the substrate holding member 41 is placed on each shelf 32 in the drying chamber 31, the operation is performed in a reverse manner to the operation at the time of taking out. That is, with the substrate pressing member 41 placed on the support 98, the support 98 is horizontally inserted on the shelf 32 of the drying chamber 31, and after being inserted to a predetermined position, while pulling out the support 98, What is necessary is just to mount the board | substrate holding member 41 on the shelf part 32. FIG.

On both sides of the drying chamber 31 in a direction intersecting with the substrate loading direction, double doors-type open / close doors 61 are provided. Inside the opening / closing door 61 (in the drying chamber 31), a blowing unit 62 and a suction unit 63 are provided.
The blower unit 62 includes a vertical blower tubular portion 62 a provided inside the opening / closing door 61, and a vertically elongated (substantially mouth-like) provided so as to protrude from a side surface of the blower tubular portion 62 a. And an upper portion of the blower tubular portion 62 a is connected to a blower (blower device) 72 via a blower duct 71. The blower 72 is arranged outside (upper) of the drying chamber 31 and is capable of sending out hot air (up to 80 ° C.).

  The blower tubular portion 62a is formed at substantially the same height as the inside of the drying chamber 31, and the blowout port 62b is formed at substantially the same height (longitudinal) as the inside of the drying chamber 31 in a narrow slit shape. The airflow (circulation flow) is formed in a certain direction along the inner wall surface of the drying chamber 31 so as to be directed along each side of the substrate placed on the drying chamber 32. Further, the outlet 62b can adjust the slit width (from about 1 mm).

The suction portion 63 includes a vertical suction tubular portion 63a (hollow portion) provided inside the opening / closing door 61, and a vertically long suction port 63b provided on a side surface of the suction tubular portion 63a. The upper portion of the suction tubular portion 63a is connected to a suction machine (suction fan or the like) 74 via a suction duct 73.
The suction tubular portion 63a is formed at substantially the same height as the inside of the drying chamber 31, and the suction port 63b is formed at substantially the same height (vertical length) as the inside of the drying chamber 31 and in a narrow slit shape. The slit width (about 1 mm or more) of the suction port 63b can be adjusted by shifting the slit width adjusting plate 63c.
The suction device 74 and the blower 72 are connected by a duct 76, and the gas sucked by the suction device 74 is sent to the blower 72, and the gas (hot air) in the drying chamber 31 can be circulated.

  The drying chamber 31 is provided with an exhaust part 64 for discharging the gas inside to the outside. The exhaust part 64 is configured to include an exhaust hole 64a provided above the opening / closing door 61 of the drying chamber 31 and an exhaust duct 77 connected to the exhaust hole 64a. It is connected to the exhaust mechanism 78. Further, the suction device 74 is provided with an outside air intake section (intake valve) 75 for taking in outside air. A part of the gas inside the drying chamber 31 is configured to be able to be exhausted by the exhaust unit 64, and the external air intake unit 75 provided in the suction device 74 is configured to be able to appropriately take in the external air. Is adjustable.

The operation of the drying device 30 according to the embodiment will be described.
First, an operation of carrying the substrate 2 into the drying chamber 31 will be described. FIG. 5 is a diagram for explaining the substrate loading operation of the drying device 30 according to the embodiment.
When the coating process of the liquid material on the end surface of the substrate or the peripheral portion including the end surface is completed in the coating device 10, the substrate 2 is moved onto the loading fork portion 82 of the loading device 81 by the substrate transfer unit 13 of the coating device 10. And is placed on the inner fork 84 of the carry-in fork 82. At this time, the substrate 2 is held in a state of being sucked by the inner fork portion 84 by the suction mechanism 85.

  When the substrate 2 is placed on the carry-in fork 82, the operation proceeds to carry-in operation to the drying chamber 31. The control unit 40 determines the shelf 32 on which the substrate 2 is placed based on the loading / unloading state (history) of the substrate 2 into the drying chamber 31, and the height position where the shelf 32 is provided. The loading fork 82 is moved up and down to the front position of the loading opening / closing door 51 (FIG. 5A).

  Next, the loading fork 82 is horizontally moved in the direction of the loading door 51, and the loading fork 51 is pushed down inside the drying chamber 31 with the outer fork 83 of the loading fork 82, and the loading door is moved. 51 is opened. After finely adjusting the height position of the upper surface of the distal end portion of the outer fork portion 83 to a position where the rotating member 44 of the substrate pressing member 41 can ride on and a position higher than the upper surface of the cross member 36, the loading fork portion 82 Is moved horizontally.

With the horizontal movement of the carry-in fork portion 82, the rotating member 44 of the substrate holding member 41 sequentially rides on the outer fork portion 83, and the inner fork portion 84 is inserted between the cross members 36.
Since the rotating member 44 of the substrate pressing member 41 is located below the frame portion 42, when the rotating member 44 of the substrate pressing member 41 rides on the outer fork portion 83, the upper surface of the inner fork portion 84 and the frame A gap (a gap for the rotation member 44 projecting below the frame portion 42) is formed between the lower surface of the portion 42 and the upper surface of the inner fork portion 84 at a position higher than the upper surface of the cross member 36. The substrate 2 is inserted into the gap (FIG. 5B).

When all the rotating members 44 of the substrate holding member 41 ride on the outer fork portion 83 and the leading end of the loading fork portion 82 reaches a predetermined position in front of the loading / unloading door 52, the loading fork portion 82 is then lowered. Let it.
As the carry-in fork portion 82 descends, first, the substrate 2 on the inner fork portion 84 is placed on the beam member 36, and then the frame portion 42 of the substrate holding member 41 is placed on the substrate 2. Is done. At this time, the peripheral edge of the substrate 2 is in a state of protruding from the frame member 36 and the frame portion 42 of the substrate pressing member 41. Thereafter, the carry-in fork portion 82 is lowered to a position where the rotating member 44 of the substrate holding member 41 is separated from the outer fork portion 83 (FIG. 5C).

  Next, the carry-in fork 82 is horizontally moved in a direction opposite to the carry-in direction, and the carry-in fork 82 is pulled out from the drying chamber 31. When the tip of the outer fork 83 reaches the upper part of the pressing piece 51 a of the loading door 51, the loading fork 82 is slightly lowered, and the pushing piece 51 a is pushed down by the tip of the outer fork 83. Along with the pushing-down operation, the carry-in opening / closing door 51 that has fallen inside rises, and the carry-in opening / closing door 51 is closed. Thereafter, the carry-in fork portion 82 is retracted to a predetermined position, and the carry-in operation is completed.

Next, the drying operation in the drying chamber 31 will be described.
Hot air (for example, air at about 80 ° C.) from a blower 72 having a heater function is sent through a blower duct 71 to a blower tubular portion 62 a of a blower unit 62 disposed at each of the four corners of the drying chamber 31.
The hot air introduced into the blowing tubular portion 62a is blown out from a vertically elongated slit-shaped blowout port 62b of the blowing tubular portion 62a. Since the blowers 62 are arranged at the four corners of the drying chamber 31 and the outlets 62b of the blower tubular part 62a are directed in a fixed direction along each side of the substrate, the four sides of the substrate (the inside of the drying chamber 31). An airflow (circulation flow) flowing in a certain direction along the wall surface is generated.

  In addition, a part of the hot air in the drying chamber 31 is sucked from the vertically slit suction port 63b formed in the suction tubular portion 63a and sent to the suction device 74 via the suction duct 73. The hot air sucked by the suction device 74 is sent to the blower 72. Further, the gas in the drying chamber 31 is appropriately exhausted from the exhaust holes 64 a provided in the drying chamber 31, and the outside air is appropriately introduced from the intake valve provided in the suction device 74, and the humidity and the like in the drying chamber 31 are reduced. Conditions such as temperature are adjusted.

Next, an operation of unloading the substrate 2 from the drying chamber 31 will be described. FIG. 6 is a diagram for explaining the substrate unloading operation of the drying device 30 according to the embodiment.
After a predetermined drying time has elapsed after the substrate 2 has been carried into the drying chamber 31, the unloading operation of the substrate 2 is started. The shelf 32 on which the substrate 2 to be carried out is placed is determined based on the state of loading (history) of the substrate 2 into the drying chamber 31, and the shelf 32 for carrying out the substrate at the height position where the shelf 32 is provided is determined. The carry-out fork 92 is moved up and down to the front position of the door 52.

  Next, the carry-out fork part 92 is horizontally moved in the direction of the carry-out fork door 52, and the carry-out fork part 52 is pushed down inside the drying chamber 31 by the outer fork part 93 of the carry-out fork part 92, and the carry-out fork door is moved. 52 is opened. After adjusting the height position of the upper surface of the distal end portion of the outer fork portion 93 to a position below the upper surface of the cross member 36 on which the substrate is placed, the unloading fork portion 92 is moved in the horizontal direction (FIG. 6). (A)).

  When the tip of the carry-out fork 92 reaches a predetermined position before the carry-in opening / closing door 51, the carry-out fork 92 is raised. As the unloading fork portion 92 rises, first, the rotating member 44 of the substrate pressing member 41 is placed on the outer fork portion 93, and the substrate pressing member 41 is lifted from the beam member 36 on which the substrate 2 is placed. Go. When the board 2 is further raised, the substrate 2 placed on the cross member 36 is placed on the inner fork 94. The substrate 2 is held by the suction mechanism 95 provided on the inner fork 94 while being sucked on the inner fork 94 (FIG. 6B).

  Next, the carry-out fork 92 is horizontally moved in the opposite direction, and the carry-out fork 92 is pulled out of the drying chamber 31. When the operation of pulling out the unloading fork portion 92 is started, the rotating member 44 of the substrate pressing member 41 riding on the outer fork portion 93 sequentially comes off the outer fork portion 93, and the frame portion 42 of the substrate pressing member 41 is It is mounted on the crosspiece 36 (FIG. 6 (c)).

  When the distal end of the outer fork 93 reaches the upper part of the pressing piece 52a of the discharge opening / closing door 52, the discharging fork 92 is slightly lowered, and the pressing part 52a is pushed by the distal end of the outer fork 93. Lower. With the push-down operation, the carry-out opening / closing door 52 that has fallen inside rises, and the carry-out opening / closing door 52 is closed. Thereafter, the carry-out fork portion 92 is retracted to a predetermined position, and the carry-out operation is completed (FIG. 6D). Thereafter, the substrate 2 on the unloading fork 92 is transferred to the ultraviolet irradiation device 100 by the substrate transfer unit 101.

Next, an ultraviolet irradiation device 100 as a light irradiation device constituting the coating system 1 will be described. FIG. 7 is a schematic plan view showing the internal structure of the ultraviolet irradiation device 100 according to the embodiment. FIG. 8 is a schematic side view showing the internal structure of the ultraviolet irradiation device 100 according to the embodiment.
The ultraviolet irradiation device 100 is a device for irradiating an ultraviolet ray to an end surface of a substrate coated with a liquid agent including an ultraviolet curing agent or the like or a peripheral portion including the end surface to cure and dry a coating film.
The ultraviolet irradiation device 100 includes a substrate transfer unit 101 that transfers the substrate 2, a transfer device 111 that transfers the substrate 2, a positioning device 121 that positions the substrate 2 transferred by the transfer device 111, and a transfer of the substrate 2. The first ultraviolet irradiation units 131A and 131B arranged in a direction crossing the direction, the second ultraviolet irradiation units 141A and 141B arranged in a direction parallel to the conveyance direction of the substrate 2, and the conveyance device 111 It is configured to include a plurality of substrate detection sensors 151 to 154 for detecting a transfer position of a transferred substrate. The arrows in FIGS. 7 and 8 indicate the transport direction of the substrate 2.

  Further, the ultraviolet irradiation device 100 controls the irradiation of the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation units 141A and 141B based on the transport position of the substrate 2 detected by the substrate detection sensors 151 to 154. An irradiation control unit 161 for performing the operation and a transfer control unit 171 for controlling the transfer speed of the substrate by the transfer device 111 based on the transfer position of the substrate 2 detected by the substrate detection sensors 151 to 154 are provided.

  The substrate transfer unit 101 has a function of transferring the substrate 2 from the drying device 30 to the transfer device 111. The substrate transfer unit 101 includes a substrate holding unit 102, a horizontal moving mechanism 104 for reciprocating the substrate holding unit 102 in the substrate transport direction, and a vertical moving mechanism 105 for reciprocating the substrate holding unit 102 in the vertical direction. I have. The substrate holder 102 is provided with a suction holder 103 for holding the substrate 2 by suction. The suction holder 103 is configured by a suction nozzle or the like, and is connected to a vacuum pump via an air tube (not shown).

  The transport device 111 employs a roller type conveyor device in which narrow rollers (wheel portions) 112 are arranged at predetermined intervals so as to reduce the contact area with the substrate 2. It comprises a conveyor unit 113 provided and a substrate lifting unit 114 disposed between the rollers 112 so as to be able to move up and down. In addition, before and after the first ultraviolet irradiation units 131A and 131B, a fall prevention plate 115 for preventing the transported substrate 2 from falling is disposed in a state where only the upper end of the roller 112 faces. . On the surface of the fall prevention plate 115, a plurality of small bearing (rotation) members 116 for assisting the transfer of the substrate 2 are provided.

  The positioning device 121 is provided for positioning the substrate 2 before performing the ultraviolet irradiation by the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation units 141A and 141B. The positioning device 121 includes a positioning guide portion 122 for positioning (position adjustment) the substrate 2 transferred from the drying device 30 onto the transport device 111, and a driving portion 123 for driving the positioning guide portion 122 in a predetermined direction. It is composed of

  In the step of positioning the substrate 2 by the positioning device 121, the substrate 2 is transferred from the drying device 30 onto the transfer device 111, and then the substrate lifting unit 114 lifts the substrate 2 from the rollers 112. After that, the positioning guides 122 provided on both sides of the conveyor 113 are moved to a predetermined position in the direction of sandwiching the substrate 2, and the substrate 2 is positioned at the predetermined position so as to be sandwiched by the positioning guides 122. After the positioning, the substrate lifting unit 114 is lowered, and the substrate 2 is arranged on the roller 112, and the processing is completed. A member for holding the substrate 2 without damaging it may be provided on the inner surface of the positioning guide 122.

  The first ultraviolet irradiation units 131A and 131B are arranged one above the other at the upper and lower positions of the transport device 111 with the irradiation angles in the upward and downward directions shifted by a predetermined angle. Ultraviolet irradiation LEDs are arranged in rows. The first ultraviolet irradiation units 131A and 131B are arranged in a direction intersecting with the transport direction of the substrate 2, and are for irradiating the end face and the peripheral portion of the substrate 2 in the intersecting direction with ultraviolet rays. The control of the switching of the irradiation state (ON / OFF) and the like can be performed by the unit 161. By arranging the first ultraviolet irradiation units 131A and 131B so that the irradiation angles in the upward and downward directions are shifted by a predetermined angle, it is possible to protect the irradiation units 132 from each other.

The second ultraviolet irradiation units 141A and 141B are arranged one above and below the conveyance device 111, with the irradiation positions in the upward and downward directions being shifted in the conveyance direction. Ultraviolet irradiation LEDs are arranged in rows. The second ultraviolet irradiation units 141A and 141B are disposed on both sides of the transfer device 111 (in a direction parallel to the direction in which the substrate is transferred) to irradiate the end surface and the peripheral edge of the substrate 2 in the parallel direction with the ultraviolet light. The irradiation control unit 161 can control the irradiation state (ON / OFF).
As the ultraviolet irradiation LED, for example, it is preferable to use an LED having a wavelength of about 350 nm to 400 nm, preferably 360 nm, and a directional angle of about 30 °, but is not limited thereto.

  A plurality of substrate detection sensors 151 to 154 for detecting the substrate 2 being conveyed are provided around the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation units 141A and 141B. The board detection sensors 151 to 154 can be configured by, for example, an optical sensor, an infrared sensor, an image sensor, and the like.

  The irradiation control unit 161 is configured to determine whether the substrate 2 is transported by the substrate detection sensors 151 to 154, that is, the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation unit It has a function of performing irradiation ON / OFF control of the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation units 141A and 141B at the timing of passing through the respective irradiation areas of 141A and 141B. The irradiation control unit 161 is configured to include a microcomputer, a driver circuit, a storage unit, a power supply unit, and the like (all not shown). Note that the irradiation control unit 161 can be configured with one or a plurality of control units.

  The transfer control unit 171 is configured to control the first speed at which the end surface of the substrate 2 in the direction intersecting the transfer direction of the substrate 2 passes through the irradiation area of the first ultraviolet irradiation units 131A and 131B, and the direction parallel to the transfer direction of the substrate. And the second speed at which the end surface of the substrate 2 passes through the irradiation area of the second ultraviolet irradiation units 141A and 141B. The transfer control unit 171 executes the transfer control so that the first speed is lower than the second speed. The transfer control unit 171 is configured to include a microcomputer, a driver circuit, a storage unit, a power supply unit, and the like (all not shown). Note that the transport control unit 171 can be configured with one or a plurality of control units.

The operation of the ultraviolet irradiation device 100 according to the embodiment will be described.
By driving the substrate transfer unit 101, the substrate is transferred from the unloading device 91 (unloading fork unit 92) of the drying device 30 onto the roller 112 of the transfer device 111, and the substrate 2 is mounted on the roller 112.
Next, the substrate lifting unit 114 of the transfer device 111 and the positioning device 121 are driven to move the substrate 2 to a predetermined position, that is, the position of both sides of the substrate 2 in the direction parallel to the transfer direction of the substrate 2 to the second ultraviolet light. Positioning is performed so as to coincide with the irradiation unit 142 of the irradiation units 141A and 141B.

  After the positioning, the substrate 2 is placed on the rollers 112 and the transport device 111 is driven. When the substrate 2 is detected by the substrate detection sensor 151 in front of the first ultraviolet irradiation units 131A and 131B, irradiation by the first ultraviolet irradiation units 131A and 131B is started, and the transfer speed of the substrate 2 is reduced to the second speed. At a speed of 1 (for example, 5 mm / sec), the end face of the substrate 2 in front of the transport direction and the peripheral edge including the end face are irradiated with ultraviolet rays.

  Thereafter, when the substrate detection sensor 152 detects the substrate 2 that has passed between the first ultraviolet irradiation units 131A and 131B, the irradiation by the first ultraviolet irradiation unit is terminated, and the transport speed of the substrate 2 is reduced to the second speed. 2 (for example, 60 mm / sec).

  Thereafter, when the substrate is detected by the substrate detection sensor 153 in front of the second ultraviolet irradiation units 141A and 141B, irradiation by the second ultraviolet irradiation units 141A and 141B is started, and the substrates on both sides in the transport direction are started. Ultraviolet rays are irradiated to the end face of the second and the peripheral portion including the end face.

  Thereafter, when the substrate 2 is no longer detected by the substrate detection sensor 151 before the first ultraviolet irradiation units 131A and 131B (the substrate 2 passes and becomes a non-detection state), the first ultraviolet irradiation unit 131A again. , 131B is started, the transport speed of the substrate 2 is controlled to the first speed, and the end face of the substrate 2 and the peripheral edge including the end face behind the transport direction are irradiated with ultraviolet rays.

  Thereafter, when the substrate detection sensor 152 no longer detects the substrate 2 that has passed between the first ultraviolet irradiation units 131A and 131B (the substrate 2 passes and is in a non-detection state), the first ultraviolet irradiation unit 131A , 131B, and the transfer speed of the substrate is controlled to the second speed.

  Thereafter, when the substrate detection sensor 154 no longer detects the substrate that has passed through the second ultraviolet irradiation units 141A and 141B (the substrate has passed and is in a non-detection state), the irradiation by the second ultraviolet irradiation units 141A and 141B is performed. After that, when the transfer device 111 detects that the substrate 2 has been transferred to the outside of the ultraviolet irradiation device 100 by an external sensor, the driving of the transfer device 111 is stopped.

  According to the drying apparatus 30 according to the above-described embodiment, the substrates 2 can be loaded and unloaded one by one into each shelf 32 of the drying chamber 31, and a plurality of substrates 2 can be stored in the drying chamber 31. In addition, space and size of the device can be reduced. Further, during drying, the substrate 2 is appropriately pressed by the substrate pressing member 41, so that it is possible to prevent the substrate 2 from being lifted up or displaced by air blowing during loading / unloading or drying. The air can be efficiently blown to each side (end surface or peripheral portion) of the substrate 2, and the liquid applied to the end surface or peripheral portion of the substrate 2 can be efficiently and cleanly dried.

  Further, according to the drying device 30, the carry-in fork portion 82 and the carry-out fork portion 92 are configured to be able to move up and down between the plurality of cross members 36, so that the carry-in and carry-out per substrate is necessary. The height can be suppressed to 50 mm or less (about 40 mm to 50 mm), and even in the drying chamber 31 that can store about 24 sheets, the height can be suppressed to about 120 to 130 cm, and compactness and maintainability are improved. It can be an excellent device.

  Further, according to the drying device 30, the opening and closing doors 51 and 52 for opening and closing are carried out by the operations of the fork section 82 for loading and the fork section 92 for unloading. Separate power for opening and closing the door 52 is not required, and energy saving of the apparatus can be achieved.

  Further, according to the drying device 30, when the carry-in door 51 and the carry-out door 52 are closed, the magnetic force of the magnets 51b, 52b, 38a, and 39a causes the carry-in door 51 and the carry-out door 52 to close. Are easily attracted to the carry-in side vertical frame portion 38 and the carry-out side vertical frame portion 39, respectively, and the closed state can be stabilized by the magnetic force of the magnet.

  Further, according to the drying device 30, the plurality of rotating members 44 provided on the overhanging portion 43 of the substrate pressing member 41 are connected to the outer fork 83 of the loading fork 82 and the outer fork of the loading fork 92. Since the board holding member 41 is configured to be able to ride on the board 93, the vertical operation of the board holding member 41 can be executed by the operation of the loading fork 82 and the unloading fork 92. In addition, the separate power is not required, the energy saving of the apparatus can be achieved, and the board holding member 41 is placed on the outer fork 83 of the carry-in fork 82 and the outer fork 93 of the carry-out fork 92. Can be smoothly placed, and the loading / unloading operation of the substrate 2 can be smoothly performed.

  Further, according to the drying device 30, the displacement of the rotating member 44 in the horizontal direction is regulated by the position regulating tool 35 provided on the carry-in lower frame portion 33 and / or the carry-out lower frame portion 34, and the substrate holding member is controlled. 41 can be prevented from shifting.

  Further, according to the drying device 30, since the fixing portion 37 of the beam member 36 has play, for example, even if the beam member 36 thermally expands in the longitudinal direction due to heat (hot air) in the drying chamber 31, Distortion due to the thermal expansion can be appropriately released, and deformation or the like of the crosspiece member 36 can be prevented.

  Further, according to the drying device 30, all the substrate pressing members 41 placed on each of the shelves 32 can be lifted at once from each of the shelves 32 by the lifting mechanism 46. When this occurs, maintenance work and the like can be easily performed.

Further, according to the drying device 30, since the blower unit 62 includes the vertical blower tubular portion 62 a and the vertically elongated blowout port 62 b, the blower unit 62 is provided at the shelf 32 at any height position of the drying chamber 31. The gas can be evenly and efficiently blown onto the mounted substrate 2 under substantially the same conditions.
Further, since the suction section 63 includes the vertical suction tubular section 63a and the vertically long suction port 63b, it is possible to suction the gas along the flow of the gas in the drying chamber 31 by the blower section 62. It is possible to keep the air flow constant. Further, since the gas sucked by the suction device 74 is sent to the blower 72, the gas in the drying chamber 31 can be circulated, and in particular, when hot air (hot air) is used, loss of heat energy is reduced. Energy saving can be achieved.

  Further, according to the drying device 30, the gas in the drying chamber 31 can be discharged to the outside by the exhaust mechanism 78 as needed, and the outside air can be appropriately taken in by the suction mechanism. Conditions such as temperature and humidity can be adjusted appropriately.

  Further, according to the ultraviolet irradiation apparatus 100 according to the above-described embodiment, it is possible to accurately irradiate the ultraviolet rays only to the end surface and the peripheral portion of the substrate 2, and to cure the liquid applied to the end surface and the peripheral portion of the substrate 2. Can be executed efficiently. Further, since the first ultraviolet irradiation units 131A and 131B and the second ultraviolet irradiation units 141A and 141B are LED ultraviolet irradiation units, it is possible to cure and dry a liquid material containing an ultraviolet curing resin in a short time. Thus, the size of the device can be reduced, and the life of the device can be prolonged and the cost for maintenance can be reduced.

  Further, the irradiation control unit 161 and the transfer control unit 171 irradiate the ultraviolet light to the end face of the substrate 2 in the direction intersecting the transfer direction of the substrate 2 and the ultraviolet light to the end face of the substrate 2 in the direction parallel to the transfer direction of the substrate 2. UV irradiation can be appropriately controlled, and uniform hardening / drying processing can be performed over the entire circumference of the substrate 2 without variation.

  In the above embodiment, the case where the light irradiation device is the ultraviolet irradiation device 100 has been described. However, the light irradiation device according to the present invention is not limited to the ultraviolet irradiation device 100, and may be a radiation device such as an electron beam. The present invention can also be applied to an apparatus that irradiates a substrate, on which a liquid agent containing a resin curable by visible light or a visible light is applied, with light such as radiation or visible light.

  Further, according to the coating system 1 according to the above-described embodiment, regardless of the characteristics of the liquid material, the end surface and the peripheral portion of the substrate 2 can be used regardless of whether the liquid material has a short drying time or a liquid material having a long drying time. It is possible to efficiently perform the coating process on the substrate and the drying process. In addition, even when a liquid material containing an ultraviolet curing agent is used, the curing process of the liquid material applied to the end face and the peripheral portion of the substrate 2 can be efficiently performed, and a series of processes from the coating operation to the drying / curing process can be performed. It can be realized efficiently and in a small space.

  The coating system 1 includes the coating device 10, the drying device 30, and the ultraviolet irradiation device 100. However, in another embodiment, a coating system including the coating device 10 and the drying device 30, or A coating system including the coating device 10 and the ultraviolet irradiation device 100 may be used.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications may be made to the embodiments of the present invention without departing from the spirit of the present invention. Modifications and changes can be made, and such modifications and changes are also included in the technical scope of the present invention. Also, the actions and effects described in the embodiments of the invention merely enumerate the most preferable actions and effects resulting from the present invention, and the actions and effects according to the present invention are described in the embodiments of the present invention. It is not limited to what was done.

DESCRIPTION OF SYMBOLS 1 Coating system 10 Coating device 30 Drying device 31 Drying room 32 Shelf part 41 Substrate pressing member 51 Carry-in opening / closing door 52 Carry-out opening / closing door 62 Blower 63 Suction part 81 Carry-in device 82 Carry-in fork part 91 Carry-out device 92 Carry-out fork Part 100 UV irradiation device (light irradiation device)
111 Transport device 121 Positioning device 131A, 131B First ultraviolet irradiation unit 141A, 141B Second ultraviolet irradiation unit 151, 152, 153, 154 Substrate detection sensor 161 Irradiation control unit 171 Transport control unit

Claims (14)

A drying chamber for drying the substrate,
Carrying-in means for carrying the substrate into the drying chamber;
A drying device comprising: a carry-out unit that carries out the substrate from the drying chamber;
The drying chamber,
A plurality of shelves on which substrates are placed,
Board holding means arranged on each of these shelves,
A loading opening / closing door provided corresponding to each of the shelves,
A carry-out opening / closing door provided corresponding to each of the shelves,
Blowing means for blowing air in a certain direction along each side of the substrate mounted on the plurality of shelves,
Suction means for sucking gas in the drying chamber,
The loading means is configured to load a substrate between the shelf and the substrate pressing means,
The drying device, wherein the unloading unit is configured to unload the substrate from between the shelf and the substrate pressing unit. The shelf is
A loading-side lower frame portion provided on the loading opening / closing door side,
An unloading-side lower frame portion provided on the unloading opening / closing door side,
Including a plurality of cross members installed between the carry-in lower frame portion and the carry-out lower frame portion,
The carrying means,
A loading fork on which the substrate is placed,
Lifting means for lifting and lowering the loading fork;
Horizontal moving means for moving the loading fork portion in the horizontal direction,
The carrying-out means,
An unloading fork on which the substrate is placed,
Lifting means for lifting and lowering the unloading fork portion;
Horizontal moving means for moving the unloading fork portion in the horizontal direction,
2. The drying device according to claim 1, wherein the carry-in fork and the carry-out fork are configured to be able to move up and down between the plurality of crosspieces. 3. The carry-in opening / closing door is attached to the carry-in lower frame portion so as to be capable of turning up and down,
The carry-out opening / closing door is attached to the carry-out lower frame portion so as to be capable of turning up and down,
On the lower side of the carry-in opening / closing door, a pressing piece that can be pressed down at the tip of the carry-in fork portion is formed,
The drying device according to claim 2, wherein a pressing piece that can be pressed down by a tip portion of the carry-out fork portion is formed on a lower side of the carry-out opening / closing door. On both sides of the carry-in opening and closing door, a carry-in vertical frame portion is disposed in a state fixed to the carry-in lower frame portion,
On both sides of the carry-out opening and closing door, a carry-out vertical frame portion is disposed in a state fixed to the carry-out lower frame portion,
Magnets are provided on the loading door and the loading vertical frame so that the loading door and the loading vertical frame are attracted to each other by magnetic force when the loading door is closed. And
In the state in which the unloading door is closed, the unloading door and the unloading vertical frame are magnetized so that the unloading door and the unloading vertical frame attract each other by magnetic force. The drying device according to claim 2, wherein the drying device is provided. The substrate holding means,
A frame for holding the substrate,
An overhanging portion provided so as to extend from the frame in a direction intersecting with the direction of loading the substrate,
The overhang portion includes a plurality of rotating members rotatably attached in the direction of loading the substrate,
The plurality of rotating members are configured to be able to ride on the outer fork portion of the carry-in fork portion and the outer fork portion of the carry-out fork portion, respectively. The drying device according to any of the above items.   The drying device according to claim 5, wherein a position regulating portion that regulates a displacement of the rotating member in a horizontal direction is provided on the loading-side lower frame portion and / or the unloading-side lower frame portion. .   The crosspiece member is provided with a fixing portion for fixing the playpiece lower frame portion and / or the discharge side lower frame portion with play in the longitudinal direction of the crosspiece member. The drying device according to any one of claims 2 to 6.   The drying apparatus according to any one of claims 2 to 7, further comprising lifting means for lifting all the substrate pressing means placed on each of the shelves from the respective shelves at once. . The blowing means,
A vertical blown tubular portion provided in the drying chamber,
A vertically long outlet provided on a side surface of the tubular portion for blowing air,
A blower is connected to the blown tubular portion,
The suction means,
A vertical suction tubular portion provided in the drying chamber,
A vertically long suction port provided on a side surface of the suction tubular portion,
A suction device is connected to the suction tubular portion,
The drying device according to any one of claims 1 to 8, wherein the gas sucked by the suction device is sent to the blower. An exhaust unit that exhausts gas in the drying chamber to the outside,
The drying device according to claim 9, wherein the suction unit includes an outside air intake unit that takes in outside air. An application device for applying a liquid agent to an end surface of the substrate or a peripheral portion including the end surface,
A coating system, comprising: the drying device according to claim 1. Further comprising a light irradiation device that irradiates light to the end surface of the substrate coated with the liquid agent or a peripheral portion including the end surface ,
The light irradiation device,
Transport means for transporting the substrate,
Positioning means for positioning the substrate transferred by the transfer means,
A first light irradiating unit that is disposed in a direction intersecting with the substrate transport direction and irradiates light to an end surface of the substrate in the intersecting direction or a peripheral portion including the end surface,
A second light irradiating unit that is disposed in a direction parallel to the transport direction of the substrate, and irradiates light to an end surface of the substrate in the parallel direction or a peripheral portion including the end surface,
Board detection means for detecting a transfer position of the board transferred by the transfer means,
A light irradiation control unit that performs irradiation control of the first light irradiation unit and the second light irradiation unit based on a substrate transfer position detected by the substrate detection unit;
12. The coating system according to claim 11 , further comprising: transport control means for controlling a transport speed of the substrate by the transport means based on the transport position of the substrate detected by the substrate detection means. The first light irradiation means,
LED type ultraviolet irradiation means,
In the upper and lower positions of the transport means, arranged in a state where the irradiation angle in the upward and downward directions is shifted,
The second light irradiation means,
LED type ultraviolet irradiation means,
13. The coating system according to claim 12, wherein the irradiation system is arranged above and below the conveying unit so that the irradiation positions in the upward direction and the downward direction are shifted. The light irradiation control means,
An end surface of the substrate or a peripheral portion including the end surface is to perform control to irradiate light at a timing of passing through the irradiation area of the first light irradiation unit and the irradiation region of the second light irradiation unit, respectively.
The transfer control means,
The speed at which the end face of the substrate in the direction intersecting with the direction of transport of the substrate passes through the irradiation area of the first light irradiating means is such that the end face of the substrate in the direction parallel to the direction of transport of the substrate is irradiated with the second light irradiation. means according to claim 12 or claim 13 applied system, wherein the irradiation zone in which the controlled so as to be smaller than the velocity through the.

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