JP5169738B2 - PCB cassette - Google Patents

Description

  The present invention relates to a substrate cassette for separating and supporting glass substrates and other various substrates so as not to contact each other.

  Electronic component manufacturing is a process that forms various patterns on a rigid flat substrate such as glass substrates for flat panel displays such as liquid crystal display devices and various wiring substrates related to semiconductors and performs various surface treatments in recent years. Widely used in the field. In particular, there are many cases where the substrate is required to be thin and large, and the processing efficiency is further required. Therefore, further contrivance is required for the handling means in each process.

  In the various manufacturing processes described above, a thin substrate having a rectangular shape in plan view is temporarily stored in a cassette as an assembly of several to several tens of sheets, and then the substrates are sequentially taken out one by one in various processing steps. In many cases, the substrates are sequentially stored again at the end of a series of processes. In some cases, a dry or wet process is handled in an integrated state in which a plurality of substrates are housed in a cassette. Further, movement and temporary storage between processes also handle the assembly stored in the cassette as a unit.

  In the substrate cassette frequently used in each of the above scenes, it goes without saying that the function of separating and supporting the temporarily stored substrates so as not to contact each other is important. It is required to be able to be carried out smoothly, to have high use efficiency of the cassette exclusive space, and to be excellent in durability. In addition, since it is generally used in environments that do not want to generate dust, it is also important that the edge of the substrate, particularly the glass substrate, does not generate cutting waste due to resin scraping at the contact portion with the cassette of the resin molded product, Various improvements have been made (see Patent Document 1).

  In addition, liquids that remain in the structural gap of the cassette during the use process are easier to assemble the cassette or handle dry or wet processing processes in an integrated state where multiple substrates are housed in the cassette. A simple structure has been proposed so as to prevent a drop of liquid droplets and dirt (see Patent Document 2).

  On the other hand, in order to store a substrate in a cassette, a structure is generally used in which a plurality of shelves provided inside the cassette support two or three sides facing each other among four sides of a rectangular substrate in plan view. It is common to store boards one by one in a horizontal direction at regular intervals so that they are placed on a shelf piece. There is also a way to arrange them. Even when the substrates are arranged vertically, the same cassette as in the case where the substrates are arranged horizontally is often used except for the case of supporting two sides.

In addition, the substrate cassette in which the substrate is temporarily stored needs to be transported or changed by a robot or a tool and a manpower for movement or storage between processes. Since there are many opportunities for the contact state to change, both damage and dust generation due to the accumulation of small collisions cannot be ignored. Further, when the substrate size is increased and the substrate is made thinner, it is necessary to consider an increase in the amount of bending of the substrate, so that the design is changed in a direction in which the shelf piece supporting the substrate extends from the substrate end to the inside. Due to the above-mentioned collision, the shelf on the side adjacent to the upper side that supports the substrate often comes into contact with the film surface side that is the main processing target of the substrate surface, but in that case, before the design change described above The possibility of damaging the film surface closer to the inner side of the substrate due to the newly expanded shelf piece is greater than with the conventional short shelf piece.
JP-A-2-295150 JP-A-3-133153

  The present invention is proposed in view of the above problems, and the problem to be solved by the present invention is different from the improvement at the time of loading and unloading the substrate, and the cassette for the substrate which ensures the stability of the substrate after being stored in the cassette. Even if the shelf of the cassette for a substrate is elongated in the cassette inner direction, the stored substrate can be separated from the shelf adjacent to the film surface side due to vibration or inclination during transportation. It is an object of the present invention to provide a substrate cassette having a structure that prevents damage to the film surface due to contact.

The invention according to claim 1 of the present invention is for holding two or three sides facing each other among four sides of a rectangular substrate in plan view, and storing the substrates in a stacked state at a constant interval. A cassette for substrates, wherein the cassette for substrates has two sets of side plates facing each other, a shelf piece on which an end surface of the substrate is placed, and a claw portion for restraining the substrate position, and the shelf pieces are arranged between the side plates of the substrate cassette. There are aligned on opposite sides, the substrate position control claws are aligned inside facing the shelf Katazuki side plate parallel and independently provided with movable claws attachment struts to the substrate cassette, the substrate The position restraining claw part is attached to be inclined to the side where the film surface of the board faces from the normal direction of the claw part mounting column, and the warping of the extreme end due to the bending of the board on the shelf piece is It is characterized that you suppressed by the inclined portion of the claw portion It is a substrate for the cassette.

Next, in the invention according to claim 2 of the present invention, the position of the substrate position restraining claw restrains the position of the substrate by restraining the movement of the substrate through the claw portion mounting column, and the movement of the substrate. a substrate cassette according to claim 1 Symbol mounting, characterized in that it is switchable to a position not located inhibit substrate without restraining the.

Next, the invention according to claim 3 of the present invention is the cassette for a substrate according to claim 2 , further comprising a mechanism for sliding the claw portion mounting column in the axial direction of the column.

Next, in the invention according to claim 4 of the present invention, the substrate cassette is moved and placed on a cassette stage in which a column raising block is previously set at a specified position, whereby the column raising block is 4. The substrate cassette according to claim 3, wherein the claw portion mounting support is slid in the axial direction of the support.

Next, the invention according to claim 5 of the present invention is the cassette for a substrate according to claim 2 , further comprising a mechanism for rotating the claw portion mounting column around the axis of the column.

Next, the invention according to claim 6 of the present invention uses the mechanism that the optical sensor provided on the cassette stage side detects the dog (detection piece) provided on the claw portion mounting column, and the substrate position suppressing claw. 6. The substrate cassette according to claim 5 , wherein the rotational position state of the part can be confirmed.

According to the first aspect of the present invention, since the shelf piece and the substrate position suppressing claw portion can sandwich the end portion of the substrate, the stability of the storage substrate in the cassette can be ensured, Structure that prevents damage to the membrane surface due to contact with the shelf on the membrane side due to vibration or tilt during transportation even when the cassette shelf is elongated in the cassette inner direction Can be provided. Accordingly, the substrate size is increased and the substrate is made thinner, which is useful for a substrate cassette when it is necessary to consider an increase in the amount of bending of the substrate. In addition to the case where the storage board is placed horizontally, the storage board can be secured in the cassette in the same manner as described above, even when the storage board is placed vertically or obliquely. Damage to the film surface can be prevented. Also provided is a substrate cassette having means for preventing a substrate from being dropped and damaged in response to an abnormal situation in which the substrate cassette in a state in which the substrate is stored is tilted in a direction in which the substrate is accidentally pulled out. It becomes possible.

According to the invention according to the claim 1, wherein the tip portion of the substrate position control pawl portion in a state of floating, it is possible to position control of the substrate, the tip portion of the claw portion of concern during the position control operation Damage to the film surface of the substrate due to can also be avoided.

According to the second aspect of the invention, the operation for suppressing the substrate position of the claw portion for suppressing the substrate position and the operation for releasing the suppression of the substrate position can be performed collectively through the claw portion mounting support column. The switching operation can be easily performed with respect to each storage board without any omission.

According to the invention of claim 3 , a simple concrete measure for carrying out the invention of claim 2 can be provided.

According to the fourth aspect of the invention, a simple specific measure for reliably and stably carrying out the third aspect of the invention can be provided by devising the cassette stage on which the substrate cassette is placed.

According to the invention of claim 5 , another simple concrete measure for carrying out the invention of claim 2 can be provided.

According to the sixth aspect of the present invention, since the ON / OFF state relating to the substrate position suppression state can be clearly indicated as an electric signal, it is possible to prevent an operational error and to cooperate with the operating state of other devices. It can be used as means for automatically controlling electrically.

  Hereinafter, the present invention will be described in detail with reference to the drawings. 1A and 1B are conceptual diagrams for explaining an example of a substrate cassette according to the present invention. FIG. 1A is a front perspective view when a substrate position is suppressed, FIG. 1B is a plan perspective view when a substrate position is suppressed, and FIG. Is a front perspective view when the substrate position suppression is released, and (d) is a planar perspective view when the substrate position suppression is released. In the plan perspective views (b) and (d), neither the ceiling-side frame 2 nor the bottom-side frame 3 is displayed, and the outer contours thereof are displayed as dotted lines as the outline 20 of the cassette frame in order to make the drawings easier to see. Fastened.

  In FIG. 1, a cassette frame 1 is composed of a ceiling side frame 2, a bottom side frame 3, and a vertical frame 4. Inside the cassette frame 1, two opposing sets and another set of side plates 5 with shelf pieces and side plates are arranged. The provided shelf piece 6 and, if necessary, the protruding portion 7 of the shelf piece are the same as in the conventional cassette for substrates. The glass substrate 8 is stored in a state in which two or three of the four sides of the substrate are supported in any stage of the shelf piece 6 in which the glass substrate 8 is arranged and arranged, and another substrate is sequentially placed on the adjacent shelf piece. Is supported and stored. In the present embodiment, three sides of the glass substrate 8 are supported by a plurality of sets of the side plates 5 with shelf pieces obtained by joining the shelf pieces 6 and the protruding portions 7 of the shelf pieces. However, the protruding portions 7 of the shelf pieces are not required for all the shelf pieces, and may be unnecessary depending on the material and the processing shape of the shelf pieces. The width in the direction along each side of the side plate 5 with the shelf piece is not particularly limited as long as a certain strength is maintained together with the width of the shelf piece 6, but it interferes with the later-described claw portion mounting column 11 and the claw portion 10. It is designed to secure a gap that can be installed without using it.

  In the present invention, by adding a movable claw portion mounting column 11 in which a substrate position suppressing claw portion 10 is aligned and arranged inwardly of the substrate cassette, the above-described conventional function is improved. It can be transformed. That is, conventionally, when the glass substrate 8 is supported by the shelf piece 6 and the protruding portion 7 of the shelf piece, or when the substrates are arranged vertically, the narrow region between the two adjacent shelf pieces only stands without being restrained. From the state, the substrate after storage according to the present invention is pressed against the shelf piece 6 positioned on the opposite side from the substrate 8 by the substrate position suppressing claw 10 or the free movement is suppressed. The state is changed to a state in which the end portion of 8 is sandwiched and the position of the substrate is suppressed. The level at which the position suppression is performed from the state where the substrate is strongly pressed by the claw portion to the state where the claw portion approaches the vicinity of the substrate surface can be determined by a specific design. Usually, since the shelf piece 6 supports the back side of the substrate and the claw portion 10 for suppressing the substrate position presses the film surface side of the substrate, the front end portion of the claw portion 10 for suppressing the substrate position is provided on the film surface side of the substrate. Care must be taken for damage. The above points will be described later.

  The main part of the substrate cassette is resin-molded for each element, and the whole structure can be obtained by joining the parts. As the resin to be used, a resin that can be melt-molded and has mechanical strength, heat resistance, solvent resistance, acid resistance, alkali resistance, and the like necessary according to the product specifications considering the use process is selected. For example, polyimide, polyether imide, polyether amide, polyamide imide, polyether ether ketone, polyphenylene sulfide, polyarylate, polysulfone, polypropylene, etc., or glass fiber, carbon fiber, aramid fiber, ceramic fiber, metal, etc. A fiber reinforced thermoplastic resin containing fibers and the like is used.

  As the melt molding method, an injection molding method, an extrusion molding method, a transfer molding method, or the like is employed. In melt molding, fillers, stabilizers, lubricants, and other additives can be blended.

  In general, the shelf piece 6 is formed separately from the shelf-attached side plate 5, and is later aligned and arranged at least at the inner side of the substrate cassette so as to maintain a constant spacing, and is coupled to the shelf-attached side plate. However, in the case where the above-described inward extension of the shelf piece is short, the side plate 5 with the shelf piece may be formed integrally by grooving, or the shelf piece and the side plate with the shelf piece may be melt-formed together. You can also. In that case, there is a method of avoiding distortion during molding as a structure symmetrical to the inside even when facing the outside of the substrate cassette.

  The substrate position restraining claw portion 10 is formed separately from the claw portion mounting support column 11, and later, a plurality of substrate position restraining claw portions 10 are aligned and connected at least toward the inside of the substrate cassette. The claw portion mounting column 11 stands upright in the vicinity of the side plate 5 with shelf pieces, but is independent of the side plate 5 with shelf pieces and has mobility in the axial direction of the column. The coupling portion between the claw portion mounting column 11 and the ceiling side frame 2 and the bottom frame 3 has a function of switching between a fixed state and a state in which only the axial direction of the column is movable as a column slide / support mechanism 12. Have. In order to make the claw portion mounting column 11 function equally on the two opposing sides of the substrate, at least one location per side of the two opposing sides of the substrate so as to run vertically in the thickness direction of each storage substrate, Desirably, two places are installed at positions that do not interfere with the side plates 5 with shelf pieces and the shelf pieces 6.

  As an example of the above, description will be made in the situation of a front perspective view when the substrate position suppression is released as shown in FIG. First, the entire substrate cassette is moved laterally as shown in FIGS. 1A to 1C and placed on the cassette stage 15. Prior to the above operation, a state is prepared in which the slide / support mechanism 12 of the support column is movable in the axial direction. That is, the movable state of the slide / support mechanism 12 of the support column fixed by a fixing pin or a fixing screw is restored. A column raising block 14 is set in advance at a predetermined position on the cassette stage 15, and when the substrate cassette is placed on the cassette stage 15, the block is placed below the column with respect to the column. Then, the column-lifting target piece 13 provided in a fixed manner is positioned so as to push up. By the operation of placing the substrate cassette on the cassette stage 15, the claw portion attaching column 11 is raised by a distance corresponding to the height at which the column raising block 14 pushes up the column raising target piece 13. The substrate position suppressing claw portion 10 coupled to the column 11 is also raised by the same distance. Therefore, the substrate position suppressing claw portion 10 is removed from the state shown in FIG. 1A in which the end portion of the glass substrate 8 is sandwiched between the shelf pieces 6, and as shown in FIG. The board position suppression is released. In addition, the block arrow in a figure represents the raise of said each part. Further, the series of explanations described above are the same among the corresponding slide support / support mechanism 12, the column raising target piece 13, and the column raising block 14 corresponding to each claw portion mounting column 11. To function.

  In the above example, the substrate cassette is placed on the cassette stage 15 in the state shown in FIGS. 1C and 1D in which the substrate position suppression claw portion 10 is raised by a certain amount to enter the substrate position suppression release state. The substrate can be taken in and out automatically or manually. Thereafter, if the substrate cassette is unloaded from the cassette stage 15 or moved to a position not affected by the column raising block 14 even on the same cassette stage 15, the substrate cassette is Returning to the state of FIGS. 1A and 1B again, the substrate position suppressing claw portion 10 at a position corresponding to the shelf piece 6 storing the substrate suppresses the end portion of the glass substrate 8. However, in order to be truly fixed, it is necessary to switch the support / sliding mechanism 12 of the column to the fixed state. As a simple means, it is possible to stop with the fixing pin or the fixing screw, but the method is not limited.

  2A and 2B are conceptual diagrams for explaining another example of the substrate cassette of the present invention, in which FIG. 2A is a front perspective view when the substrate position is suppressed, FIG. 2B is a plan perspective view when the substrate position is suppressed, c) is a front perspective view when the substrate position suppression is released, and (d) is a planar perspective view when the substrate position suppression is released. In the plan perspective views (b) and (d), neither the ceiling-side frame 2 nor the bottom-side frame 3 is displayed, and the outer contours thereof are displayed as dotted lines as the outline 20 of the cassette frame in order to make the drawings easier to see. Fastened.

  In FIG. 2, the difference from FIG. 1 is the movement of the claw portion 10 for restraining the substrate position and the claw portion mounting column 11, and in this example, as means for releasing the restraint of the substrate position by the claw portion, Instead of sliding in the axial direction and removing position restraint, a method of removing position restraint by rotation is used. The block arrow in the figure indicates the direction of rotation.

  That is, the board position restraining claw part 10 is formed separately from the claw part mounting column 11, and is arranged in an aligned manner so that the initial position of the claw part is later directed toward the inside of the board cassette. Combined with the support. The claw portion mounting column 11 is erected parallel to the vicinity of the side plate 5 with shelf pieces, but is independent from the side plate 5 with shelf pieces and at an angle of at least about 90 ° in the circumferential direction around the axis of the column. Has rotational mobility. The coupling portion between the claw portion mounting column 11 and the ceiling side frame 2 and the bottom frame 3 has a function of switching between a fixed state and a movable state in the rotation direction of the column as a column rotation / support mechanism 18. .

  The support can be easily rotated manually. It is preferable to use auxiliary parts such as levers and stoppers as appropriate so that a certain amount of rotation can be given steadily, but the method is not particularly limited. Prior to the rotation of the support column, the rotation / support mechanism 18 of the support column is switched from the fixed state to the released state as a means for releasing the fixation of the claw portion in advance. The method can be stopped by the fixing pin or the fixing screw described above, but the method is not limited. Also, when releasing from the state where the claw is in contact with the board, it is better to add a small amount of slide movement in the axial direction of the column and keep the claw part away from the board even if it is a minute amount. It is preferable for preventing friction at the time.

  In the present invention, by detecting the position of the substrate position suppressing claw portion 10, the position of the substrate is restrained by restraining the movement of the substrate, and the position of the substrate is restrained without restraining the movement of the substrate. It can also be a means for discriminating the state of the position not to be performed.

  In the example of FIG. 2, a method for detecting the position of the substrate position suppressing claw 10 will be described. 2 (a) and 2 (b), the substrate position suppressing claw portions 10 at the time of substrate position suppression are all arranged in alignment toward the inside of the substrate cassette. In addition, a dog (detection piece) 16 having a shape extending in the same direction as the claw portion and extending longer than the claw portion is previously installed with a small piece of metal or the like. The dog 16 is coupled to the support so that it rotates together with the claw when the support is rotated. On the other hand, the cassette stage 15 on which the substrate cassette is placed is fixed, and the dog 16 is placed in the same direction as the claw portion 10 when the substrate position is suppressed, that is, in the state where the dog 16 is directed inward. The optical sensor 17 is installed at a position directly below the cassette stage 15.

  When the optical sensor 17 detects the dog 16 with a detection line indicated by a thick arrow, it is electrically confirmed that the substrate position suppressing claw portion 10 is in a position to restrain the substrate by restraining the movement of the substrate. Can be confirmed. Further, as the column is rotated, the state changes from the state shown in FIGS. 2A and 2B to the state shown in FIGS. 2C and 2D. The dog 16 is no longer detected, and it can be electrically confirmed that the substrate position suppressing claw portion 10 has changed to a position that does not restrain the substrate and does not restrain the position of the substrate. In order to make the claw portion mounting column 11 function equally on the two opposing sides of the substrate, at least one location per side of the two opposing sides of the substrate so as to run vertically in the thickness direction of each storage substrate, Desirably, two places are installed at positions that do not interfere with the side plates 5 with shelf pieces and the shelf pieces 6. In addition, the series of explanations described above function in the same manner between the rotation / support mechanism 18, the dog 16, and the optical sensor 17 of each of the related struts corresponding to each of the plurality of claw portion mounting struts 11. It is.

  In the other example of the present invention described above, the substrate position restraining claw 10 rotates a certain amount to release the substrate position restraint state, and the substrate is placed on the cassette stage 15 in the state of FIGS. 2C and 2D. The substrate can be loaded and unloaded automatically or manually while the cassette is mounted. Thereafter, the substrate position suppressing claw portion 10 is reversely rotated to return the substrate cassette to the state shown in FIGS. 2A and 2B again, and the substrate position at the position corresponding to the shelf piece 6 storing the substrate. The suppression claw 10 is reset so that the position of the end of the glass substrate 8 is suppressed. However, in order to be truly fixed, it is necessary to switch the rotation / support mechanism 18 of the column to a fixed state. As a simple means, it is possible to stop with the fixing pin or the fixing screw, but the method is not limited.

  As the substrate becomes thinner and larger in size, the flexure of the substrate increases, and the portion that supports the end portion of the substrate including the shelf piece 6 and the protruding portion 7 of the shelf piece needs to extend long inward. In such a case, if the substrate cassette containing the substrate is transported or changed in direction without having the substrate position suppressing claw portion 10 described in the present invention, the substrate will vibrate greatly, and the substrate will be moved to the end of the substrate. A part of the near membrane surface comes into contact with the shelf piece 6 on the membrane surface side and / or the projection 7 of the shelf piece, and is easily damaged. The above situation will be described with reference to FIG.

  FIG. 3 is a conceptual diagram for explaining the form of substrate support and the movement of the substrate in the cassette. (A) is a conventional case and (b) is a case of the present invention.

In FIG. 3A, a glass substrate 8 is stored with the film surface 9 facing upward between a shelf piece 6 coupled to the side plate 5 with a shelf piece and, if necessary, a projection 7 of the shelf piece provided at the tip of the shelf piece 6. If so, there is no problem in a completely stationary state. However, in the worst case, when the substrate is housed and vibration or inclination due to transportation is applied to the substrate cassette from the outside, in the worst case, the film surface side shelf pieces 6 and shelf pieces such as the glass substrate 8 ′ and the film surface 9 ′ are used. It may also collide with the protruding portion 7. The block arrows in the figure mean that one glass substrate and the variation state of the film surface are shown in the same drawing. In particular, when the glass substrate is thinned and the size is increased, the above-mentioned collision is ineffective in the vicinity of the substrate edge because the extension of the shelf piece to the inside of the cassette is changed in consideration of the influence of bending. Without being limited thereto, the film surface entering the inside of the substrate may be damaged. Further, when the substrates are stored side by side in the vertical direction instead of horizontally, the stored substrates are in a state where they can move relatively freely in an area sandwiched between two adjacent shelf pieces on each facing side. Therefore, the possibility that the film surface collides with the shelf piece or the protruding portion of the shelf piece is further increased.

  FIG. 3B shows in more detail the coupling state of the substrate position suppressing claw portion 10 to be coupled to the movable claw portion mounting column of the present invention shown in FIG. 1 and FIG. The board position restraining claw part 10 is coupled to the claw part mounting column 11 so as to be aligned and arranged inward of the board cassette. The board position restraining claws 10 for restraining the positions of the two opposing sides of the board stored substantially horizontally are located on both the left and right sides in FIG. 3B and are bent by their own weight and have a slight end. In addition, the substrate end in a state of being separated from the shelf piece 6 is suppressed from above. At that time, if each of the substrate position suppressing claw portions 10 is mounted in a direction in which the film surface of the substrate to be stored should be directed from the normal direction of the claw portion mounting column 11, in this case, tilted upward, Without bringing the tip of the claw part 10 into contact with the film surface side of the substrate, the end of the substrate is pressed from above with the inclined surface of the claw, or the range in which the substrate end may swing between the upper and lower shelf pieces. This can greatly limit the film surface damage of the substrate due to the tip of the claw portion, which is a concern during the position restraining operation.

  As the degree of tilting the tip of the substrate position suppressing claw 10 upward in FIG. 3 (b), the tilt of the end of the substrate caused by the flexure caused by the weight of the substrate when supported horizontally on the shelf piece. Accordingly, it is preferable to attach the claw part mounting column upward from the normal direction at an angle larger than that. It is possible to suppress the warping of the end of the substrate 8 on the shelf piece by the inclined portion of the substrate position suppressing claw portion 10 fixed upward from the claw portion mounting column 11.

  Hereinafter, an example of the present invention will be described with reference to examples. However, the present invention is not limited to the examples.

  A claw portion with a claw portion for restraining the substrate position facing the inside of the cassette so as not to interfere with the side plate in the vicinity of the side plates with shelf pieces on both sides corresponding to the storage positions on the opposite sides of the glass substrate stored in the substrate cassette. Supports were provided facing each other. The glass substrate has a plate thickness of 0.5 mm, a Young's modulus of approximately 70 GPa, and a substrate length in the direction supported by the opposing shelf pieces is 550 mm. The shelf pieces are configured in 20 steps inside the cassette, and the side plates with shelf pieces are provided with four rows of 8 mm width side plates on the two opposite sides of the substrate, and one row of 5 mm width side plates on the other side. Each shelf piece extends 60 mm on one side, the interval between adjacent shelf pieces is 15 mm, and the substrate is designed to support the substrate from the free end to an average of 55 mm on the shelf piece. In addition, the claw portion for suppressing the substrate position is a PEEK material piece having a width of 5 mm, a length of 15 mm, and a thickness of 5 mm at a position 4 mm higher than the height at which the shelf piece is coupled to the side plate with the shelf piece when the substrate position is suppressed. It was made to couple | bond with the nail | claw part attachment support | pillar. Moreover, the board | substrate position suppression nail | claw part was attached to the support | pillar at the upward angle of 11 degrees with respect to the shelf piece. The nail | claw part attachment support | pillar was installed in the left and right both sides with PEEK material. In order to make the claw portion mounting column movable, a rotation mechanism was provided, and a screw was used to fix a specific column state.

When the above substrate cassette was used, the clearance to the upper shelf adjacent to the horizontally placed substrate could be 4 mm. The position of the substrate was suppressed by the nail portion for suppressing the substrate position, and a movement experiment assuming normal transportation was performed. In the movement experiment, the operation was repeated three times until the substrate cassette in the state in which the substrate was accommodated and the position was suppressed was changed from the horizontally placed state to the obliquely placed state tilted to 135 degrees through the vertically placed state. As a result, there was no evidence that the substrate was displaced or warped due to vibration during movement or the inclination of the cassette, and contact with the shelf on the film surface side occurred, and there was no damage such as dirt or scratches.

It is a conceptual diagram for demonstrating an example of the cassette for substrates of the present invention, (a) is a front perspective view at the time of substrate position suppression, (b) is a plane perspective view at the time of substrate position suppression, (c) is a substrate position. FIG. 6D is a front perspective view when the suppression is released, and FIG. 6D is a plan perspective view when the substrate position suppression is released. It is a conceptual diagram for demonstrating other examples of the cassette for substrates of this invention, (a) is a front perspective view at the time of substrate position suppression, (b) is a plane perspective view at the time of substrate position suppression, (c). FIG. 6D is a front perspective view when the substrate position suppression is released, and FIG. 6D is a plan perspective view when the substrate position suppression is released. It is a conceptual diagram for demonstrating the form of board | substrate support, and the motion of the board | substrate within a cassette, (a) is a conventional case, (b) is a case of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Cassette frame 2 ... Ceiling side frame 3 ... Bottom side frame 4 ... Vertical frame 5 ... Side plate 6 with a shelf piece ... Shelf piece 7 ...・ Protruding part 8 of the shelf piece ··· Glass substrate 8 '···· Glass substrate (separate state)
9 ... Membrane surface 9 '... Membrane surface (different state)
DESCRIPTION OF SYMBOLS 10 ... Nail | claw part 11 for board position suppression ... Claw part attachment support | pillar 12 ... Support / slide mechanism 13 of support | pillar ... Target piece 14 for support | pillar raising ... Block 15 for support | pillar raising ... Cassette Stage 16 ... Dog (detection piece)
17... Optical sensor 18... Support / rotation mechanism 20. Outline line (dotted line) of cassette frame

Claims (6)

A substrate cassette for holding two or three sides facing each other out of four sides of a rectangular substrate in plan view, and storing the substrates in a stacked state at a constant interval. Has a pair of side plates facing each other, a shelf piece on which an end surface of the substrate is placed, and a claw portion for restraining the substrate position, and the shelf pieces are arranged in alignment with the surfaces on which the side plates of the substrate cassette face each other. The claw part for position suppression is arranged in alignment with the movable claw part mounting column provided independently in parallel with the side plate with the shelf piece so as to face the inside of the cassette for the substrate ,
The claw portion for suppressing the substrate position is attached to be inclined to the side where the film surface of the substrate is directed from the normal direction of the claw portion mounting column, and the warping of the extreme end due to the bending of the substrate on the shelf piece is cassette substrate characterized that you suppressed by the inclined portion of the suppression claws. The board position restraining claw can be switched between a position for restraining the board by restraining the movement of the board and a position for restraining the board without restraining the movement of the board through the claw mounting support column. claim 1 Symbol placement of the cassette substrate, characterized in that it. 3. The substrate cassette according to claim 2, further comprising a mechanism for sliding the claw portion mounting column in the axial direction of the column. By moving and placing the substrate cassette on a cassette stage in which a support raising block is set in advance at a designated position, the claw portion attaching support can be slid in the axial direction of the support by the support raising block. 4. The substrate cassette according to claim 3, wherein: The substrate cassette according to claim 2, further comprising a mechanism for rotating the claw portion mounting column around an axis of the column. The rotation position state of the substrate position suppressing claw portion can be confirmed by using a mechanism in which an optical sensor provided on the cassette stage side detects a dog (detection piece) provided on the claw portion mounting column. 5. The substrate cassette according to 5 .