TWI715623B - Front opening substrate container with compression latches - Google Patents

Abstract

A substrate container includes at least one container component having a latch member which is used to secure the container component to the container body. The latch member is able to maintain a secure connection between the container component and the container body during a shock event, preventing the container component from disconnecting from the container body. The latch member includes an arm configured to contact and apply a load to one or more corresponding features provided on the container portion providing a robust connection between the container component and the container body.

Description

Open the substrate container before having a compression latch

The present invention generally relates to substrate containers for confined wafers, flat panels, other substrates, and the like for transportation, storage, and processing. More specifically, the present invention relates to a front opening substrate container, which has one or more compression latch components for fixing one or more container components to the container shell and capable of withstanding an impact and vibration.

Wafer carriers or pods are used to hold, transport, and store substrates before, during, and after processing. These substrates are used to make semiconductors such as integrated circuits and liquid crystal display panels. In its transformation into the final product, these sophisticated and highly valuable substrates undergo repeated processing, storage, and transportation. These substrates must be protected from specific contaminants, damage from electrostatic discharge, physical damage from fracture, or contamination from steam or gas (such as steam or gas degassed from materials used in processing).

These substrate containers are called FOUP (an abbreviation for Front Opening Unified Transport Box) and FOSB (an abbreviation for Front Opening Transport Box). The industry standard stipulates that these substrate containers utilize kinematic couplings. The kinematic couplings include three radially oriented grooves on the bottom of the container that interface with three circular protrusions arranged in a triangle on the processing equipment. . These kinematic couplings provide precise orientation of the wafer container, thereby allowing precise manipulation of the container and its contents, for example, a wafer machine Robot removal and insertion. These containers will usually have means for allowing robotic transfer of the containers with contents. This component may include a robotic flange on the top of the wafer container and suitable rails or other features on the bottom of the container to allow the container to be transported properly on a conveyor using rollers or a suitable carrier. It should be understood that sudden start and stop (which is the vibration of the wafer container with the loaded wafer) can cause damage to the wafer. Therefore, it is appropriate to provide suitable buffers for wafers during transportation (including transportation within a facility). Wafer stoppers and external packaging provide this buffer in customary areas during transportation from facility to facility. It is also desirable to have additional damping and cushioning for the wafers when the containers are transported by means of a conveyor that engages the floor of the FOUP and/or FOSB in a facility.

The present invention generally relates to a front-opening substrate container, which has one or more compression latch components for fixing one or more container components to the container shell and capable of withstanding an impact and vibration. The compression latch member includes an arm configured to contact one or more corresponding features provided on the container portion and apply a load to the one or more corresponding features, thereby fixing the container assembly to the container main body.

In one embodiment, a substrate container includes: a door and a container portion, the container portion including a pair of substantially opposite side walls; a rear wall; a top wall; a bottom; and a pair of substantially opposite wafer supports, It attaches each of these side walls in a removable manner. Each of the wafer supports has a plurality of racks for accommodating a plurality of substrates. In addition, at least one of the wafer supports includes a compression latch member having an arm extending away from at least one bridging support member at a downward angle toward the container portion, wherein the arm passes The configuration is configured to contact one or more corresponding features provided on the container portion and apply a load to the one or more corresponding features. The substrate container can be a front-opening transport box, a front-opening unified transfer box or a multi-application Use any of the carriers.

In another embodiment, a substrate container includes: a door and a container portion, the container portion including a pair of substantially opposite side walls; a rear wall; a top wall; and a bottom. At least one container assembly engages the container portion. The at least one container assembly includes a compression latch component having a flexible arm that is configured to contact a corresponding feature on the container portion and apply a load to the corresponding feature.

In yet another embodiment, a method for fixing a container assembly to a container body of a substrate carrier includes aligning an arm of a compression latch member of a container assembly corresponding to an arm provided on a portion of the container body Feature engagement, wherein the arm is configured to contact the corresponding features provided on the container body and apply a load to the corresponding features.

The foregoing summary of the invention is provided to facilitate the understanding of one of the unique innovative features of the invention and is not intended to be a full description. A full understanding of one of the present inventions can be obtained by taking the entire specification, patent application scope, drawings and abstract as a whole.

10: Carrier/wafer carrier

14: Front door frame

16: door opening

20: container part/container body

24: door

26: bottom plate

30: Top/top container wall

32: bottom/bottom container wall

34: side/starboard container wall/port container wall

36: back/rear container wall

37: bottom surface

40: Wafer support/first wafer support/second wafer support/starboard wafer support/port wafer support

44: automatic flange

47: Motion coupling components

48: V-shaped groove

52: Wafer support frame/bow wafer support frame/frame

54: The first bridge support

55: The second bridge support / bridge support

56: Wafer receiving area

60: Wafer engagement part

64: bracket/attachment member

66: first side

70: Compression Latch Parts/Latch Parts

74: arm / latch arm / cantilever arm

78: inner surface

82: finger/interdigit

86: Block Features

88: Triangular section

92: Compression latch parts/compression parts

96: arm

98: pivot point

102: Track structure/track/static track components/angled track structure

104: outer surface

106: Part One

108: Part Two

112: bottom surface

120: V-shaped groove

122: Compression latch parts

123: Motion coupling components

124: T-slot

125: track structure

126: Arm

128: block structure

130: main part

132: Socket

134: Pillar

136: The first leg

138: Second leg

140: wing spar

150: anchor

152: Channel

X: starboard direction

-X: port direction

Y: upward direction

-Y: downward direction/lower direction

Z: backward direction

-Z: forward direction

The following description of various illustrative embodiments may be considered in conjunction with the accompanying drawings to understand the present invention more completely.

Figure 1 is a perspective view of an exemplary wafer carrier.

FIG. 2 is a top plan view of the wafer carrier shown in FIG. 1. FIG.

FIG. 3 is a bottom plan view of the wafer carrier shown in FIG. 1. FIG.

4 is a side cross-sectional view of the wafer carrier shown in FIG. 1.

Figure 5 is a perspective view of an illustrative wafer support according to one of the various embodiments of the present invention.

Figure 6 is a side view of an illustrative wafer support in accordance with one of the various embodiments of the present invention.

7A to 7C show an exemplary compression latch member 70 according to an embodiment of the present invention The different close up view.

Figure 8 is a close-up view of an exemplary automatic flange including one or more compression latch components in accordance with one embodiment of the present invention.

Figure 9 is a close-up view of one or more track structures provided on the container body according to an embodiment of the present invention.

Figure 10A shows a top view of a wafer carrier including an automatic flange. Figure 10B shows an enlarged top view of one of the automatic flanges seen in Figure 10A. Fig. 10B is a schematic diagram and shows an automatic flange engaged with one or more track structures provided on the container body of the wafer carrier. 10A and 10B can be collectively referred to as FIG. 10.

Figure 11 is a close-up view of an exemplary compression latch component interacting with a corresponding track structure provided on the container body in an unlatched configuration.

Figure 12 shows the same compression latch component and track structure of Figure 11 in a latched configuration.

FIG. 13A is a perspective view of an exemplary wafer carrier. FIG. 13B is a close-up view of a V-shaped groove including a compression latch component according to an embodiment of the present invention. 13A and 13B can be collectively referred to as FIG. 13.

FIG. 14A is a cross-sectional perspective view of an exemplary wafer carrier. 14B is a close-up view of a V-shaped groove including a compression latch component according to an embodiment of the present invention. 14A and 14B can be collectively referred to as FIG. 14.

FIG. 15A is a cross-sectional perspective view of an exemplary wafer carrier container portion. FIG. 15B further illustrates an enlarged perspective view of a portion of the wafer carrier container portion shown in FIG. 15A. FIG. 15C further illustrates an enlarged perspective view of a portion of the wafer carrier container portion shown in FIG. 15A. 15A to 15C may be collectively referred to as FIG. 15.

Figure 16 shows an exploded perspective view of an illustrative wafer support and an illustrative wafer carrier container portion. The exemplary wafer carrier container is partially sectioned in FIG. 16 for illustration purposes.

FIG. 17A is a cross-sectional perspective view of an exemplary wafer carrier. FIG. 17B further illustrates an enlarged perspective view of a portion of the wafer carrier shown in FIG. 17A. FIG. 17C further illustrates an enlarged perspective view of a portion of the wafer carrier shown in FIG. 17A. 17A to 17C can be collectively referred to as FIG. 17.

FIG. 18 is an exploded view of an exemplary wafer carrier.

Although the present invention is applicable to various modifications and alternative forms, the details thereof have been shown in the drawings as examples and will be elaborated in detail. However, it should be understood that it is not intended to limit the aspects of the invention to the specific illustrative embodiments set forth. On the contrary, the intention is to cover all modifications, equivalent forms, and alternatives that fall within the spirit and scope of the present invention.

As used in this specification and the accompanying patent application, unless the content clearly indicates otherwise, the singular forms "一 (a, an)" and "the (the)" include plural referents. As used in the scope of this specification and the accompanying application, unless the content clearly indicates otherwise, the term "or" is usually used in the sense that it includes "and/or".

Elongation can be defined as having a length to width aspect ratio greater than about 4 in an object having a length, a width, and a thickness. The width is less than the length and greater than the thickness.

The following detailed description should be read with reference to the drawings, in which similar elements are numbered the same in different drawings. The detailed description and drawings (which are not necessarily to scale) illustrate illustrative embodiments and are not intended to limit the scope of the present invention. The illustrative embodiments shown are intended to be illustrative only. Unless the contrary is clearly stated, selected features of any illustrative embodiment may be incorporated into an additional embodiment In the examples.

1, 2, 3 and 4 show different views of an exemplary wafer carrier 10. The carrier 10 may be configured to accommodate any one of a front opening transport box (FOSB), a front opening unified transport box (FOUP), or a multi-application carrier (MAC) for wafers having a diameter of 300 mm or 450 mm, And generally includes a container portion 20 having a front opening, a door 24 (used to close the front opening) and a bottom plate 26. The container portion generally has a top 30, a bottom 32, sides 34, a back 36, a bottom surface 37, and an internal opening. The wafer support 40 for supporting the wafer is positioned in the interior of the container part at each side thereof, as illustrated in FIG. 4. The front opening wafer carriers known in the art have features such as those illustrated in U.S. Patent Nos. 7,866,480, 7,316,325, and 6,267,245, all of which are incorporated herein by reference in their entirety for all purposes in.

In some cases, as shown in FIGS. 1 to 4, the carrier 10 may include one or more container components attached to the container portion 20. Exemplary container components that can be attached to the container portion and form part of the carrier 10 include (but are not limited to) the wafer support 40, an automatic flange 44, and one or more kinematic coupling components 47, the one or more movements The coupling assembly has a V-shaped groove 48 for interfacing with kinematic coupling (KC) pins provided on automated equipment in a wafer processing facility.

The carrier 10 (as shown in FIGS. 1 to 4) may include a pair of substantially opposed wafer supports 40 fixed to the inner surface of the container sidewall. More specifically, a first wafer support 40 is fixed to a first side wall and is opposite to a second wafer support 40 fixed to a second side wall. The second side wall is opposite to the first side wall so that the wafer The wafer support frame 52 of each of the supports 40 face each other.

FIG. 5 is a perspective view of an illustrative wafer support 40 that can be fixed to an inner surface of one of the container sidewalls according to various embodiments of the present invention, and FIG. 6 is a perspective view of the illustrative wafer support 40 A floor plan. As shown in FIG. 5, the wafer support 40 includes a plurality of arcuate wafer support frames 52 extending between a first bridge support 54 and a second bridge support 55, and each frame 52 defines a The wafer receiving area 56 and a wafer engaging portion 60. Each wafer support 40 may also include one or more brackets or attachment members 64 that extend away from the first bridge support 54 for attaching the wafer support to A first side 66 of 40 is fixed to the inner surface of the side wall of the container. In addition, each wafer support 40 may include one or more compression latches 70 for further fixing the wafer support 40 to the side wall of the container via compression force. As shown in FIGS. 5 and 6, each wafer support 40 includes two latch members 70 spaced apart from the other along one side of the wafer support 40. However, it is contemplated that the wafer support 40 may include fewer or more latch components 70 when necessary or desired. The wafer support 40 (including the compression latch member 70) can be injection molded from polycarbonate or another thermoplastic polymer material. The compression latch member 70 is integrally formed with the rest of the wafer support, so that the wafer support 40 has a single integral body and is not composed of separate individual parts.

7A-7C show different close-up views of an exemplary compression latch member 70. Figure 7A shows the latch member 70 in an unlatched configuration and Figure 7B shows the latch member 70 in a latched configuration. Figure 7C is a side view of the latch member 70 shown in Figure 7B in the latched configuration. As best seen in FIGS. 7A to 7C, each compression latch member 70 has an arm 74 extending away from the second bridge support 55. In many cases, the arm 74 extends away from the bridging support 55 into the inner surface 78 of the container portion 20 of the wafer carrier 10 at a downward angle. When the latch member 70 is in the latched configuration as shown in FIG. 7B, the arm 74 is positioned at a downward angle relative to the inner surface 78 of the container portion 20 to drive the compressive load from the latch member 70 to the container portion In order to provide a strong latching force. Each arm has a modulus of elasticity, making the arm rigid enough to handle the compressive load applied to the container portion 20, but still sufficiently flexible so that the arm can be used Snap into place by hand. In some embodiments (as shown in FIGS. 7A-7B), each arm includes one or more fingers or fingers 82 that are configured to interact with One or more corresponding block features 86 formed on the inner surface 78 of the container portion contact and apply a compressive load to the one or more corresponding block features. Additionally, in certain embodiments, as shown in FIG. 7C, each of the fingers or interdigital fingers 82 may have a triangular cross-section 88. The triangular cross section 88 of the finger or interdigit 82 provides an additional mechanism for further supporting the latch member 70 at the point where the load is applied to the container portion 20. In addition, supporting the latch member 70 at two or more contact points can prevent the compression of the latch member 70 from buckling and rotating backward, and can also be provided to help strengthen the latch arm 74 and the container portion 20 Another support point between the latches. This latching configuration can prevent the wafer support 40 from being unfixed from the container portion 20 in a shock event. During a shock event, the downward angle of the latch arm 74 causes the latch arm 74 to drive toward the container portion 20, which can further strengthen the connection between the compression latch member 70 and the container portion 20, and this can prevent wafer support The piece 40 is partially detached from the container.

Referring to FIGS. 2 and 8 to 11, the automatic flange 44 may also include one or more compression latch components 92 that can cooperate with a corresponding structure on the container part 20 to fix the automatic flange 44 to the container part 20. Like the wafer support 40 discussed herein, the automatic flange 44 (including the compression latch component 92) can also be injection molded from polycarbonate or another suitable thermoplastic material. In some embodiments, the compression latch component 92 is integrally formed with the rest of the automatic flange 44 so that the automatic flange 44 has a single integral body and is not composed of separate individual parts. However, this is not necessary. Each arm has a modulus of elasticity, making the arm rigid enough to handle the compressive load applied to it, but still sufficiently flexible so that the arm allows the automatic flange 44 to be snapped into place by hand.

FIG. 8 is a close-up view of one of the exemplary automatic flanges 44 including one of the two compression latch members 92. FIG. This is only an example. It is contemplated that certain embodiments may include more than two compression latch components 92. Each compression member 92 includes an arm 96 extending from a central axis x of the automatic flange 44 at an angle. In addition, each arm 96 includes a pivot point 98 that allows when a load is applied to the arm 96, the arm 96 from which no load is applied to the arm 96 to pivot or bend in a first relaxed configuration. Bent into a second configuration in which the arm 96 pivots or moves toward the central axis x in the direction of the arrow. FIG. 8 shows the arm 96 in the first relaxed configuration in which no load is applied to the arm 96.

Each of the arms 96 of the compression latch member 92 is configured to interact with a corresponding block or track structure provided on the outer surface of the container portion 20. FIG. 9 is a close-up view of two track structures 102 provided on the outer surface 104 of the container portion 20 of an exemplary wafer carrier. Each of the rails 102 includes a first portion 106 extending at an angle along the outer surface 104 toward a central axis y of the container body 20, and extending from the first portion in a direction toward a central axis y of the container body 20 One second part 108. The track structure 102 is a static structure, because the track structure does not move when a force is applied thereto. Instead, the track structures act as a block to which a compressive load or force from a corresponding compression latch member 92 can be applied. Since the rail structure 102 is angled toward the central axis y of the container body in a direction opposite to the direction of the angle of the compression latch member 92, these rail structures act as a stopper or a block and can receive the compression latch Any compression force of component 92. The compression force between the compression latch member 92 and the track structure 102 provides a strong connection between the automatic flange 44 and the container portion 20, which can withstand a shock event and prevent the automatic flange 44 from being in this event The middle is removed from the container portion 20.

Fig. 10 is a schematic diagram of an automatic flange 44 engaged with the rail structure 102 provided on the container body. Figure 11 is a close-up view of an exemplary compression latch member 92 interacting with a corresponding track structure 102 in an unlatched configuration. Figure 12 shows the same compression latch component 92 and track structure in a latched configuration. As shown in Figure 11, due to the automatic flange 44 along As the rail structure 102 provided on the outer surface of the container portion moves forward, a rail structure 102 contacts and engages a corresponding compression latch member 92, thereby causing the compression latch member to move along a central axis toward the automatic flange 44 One direction flexes or pivots at the pivot point. Since the compression latch member 92 is transitioning from a relaxed state in which no load is applied to a second state, the compression latch member 92 applies a compressive force or load to the static rail member 102. This interaction between the compression latch member 92 and the rail structure 102 continues until the compression latch member 92 moves beyond the second portion 108 of the rail structure 102, after which the compression latch member 92 is at least partially oriented as shown in FIG. 12 The first relaxed configuration transition shown. In this partially relaxed configuration, the compression latch member 92 continues to apply a compressive force or load to the angled rail structure 102, thereby providing a strong latch mechanism between the compression latch member 92 and the rail structure 102, which will automatically The flange 44 is fixed to the container part.

In some embodiments of the wafer carrier, the V-shaped groove may also include a compression latch for fixing the V-shaped groove to the container body. The V-shaped groove interfaces with Kinematic Coupling (KC) pins provided on automated equipment in a wafer fabrication facility.

13 and 14 are two schematic diagrams of a kinematic coupling component 123 having a V-shaped groove 120 fixed to the bottom surface 112 of the container body 20. Those skilled in the art generally understand that more than one kinematic coupling element 123 having a V-shaped groove 120 can be fixed to the bottom of an exemplary wafer carrier. For example, a front opening shipping box may include three V-shaped grooves fixed to the container body. Each motion coupling component 123 with the V-shaped groove 120 includes a compression latch member 122. In addition to the compression latch member 122, each of the motion coupling components 123 with the V-shaped groove 120 also includes a T-shaped groove 124 corresponding to a track structure 125 provided on the bottom surface 112 of the container body 20 It interacts and provides a first holding mechanism for holding and fixing the motion coupling assembly 123 with the V-shaped groove 120 to the container body 20. The compression latch member 122 includes an arm 126, The arm extends in a downward direction from an upper surface of the V-shaped groove 120 and is configured to interact with a corresponding block structure 128 provided on the bottom surface 112 of the container body 20 or integrally formed with the bottom surface . In addition, in some cases (as seen in FIG. 14) the arm 126 has a triangular shape that helps maintain the V-shaped groove when the V-shaped groove 120 is fixed to the container body 20. Other shapes are also expected. The arm 126 and the remainder of the V-shaped groove 120 are integrally formed by injection molding or some other suitable manufacturing method. The arm 126 has a modulus of elasticity so that the arm is rigid enough to handle a compressive load applied to one of it, but still sufficiently flexible so that the arm 126 allows the V-shaped groove 120 to be snapped into place by hand .

During assembly, since the t-shaped groove 124 of the V-shaped groove 120 engages the track structure 125, the arm 126 of the compression latch member 122 contacts the block structure 128, thereby forcing the arm 126 to move away from the main part 130 of the V-shaped groove 120 Move in one direction. This movement causes a load to be applied to the arm 126, thereby causing the arm to flex from a relaxed state in which no load is applied to a second state in which a load is applied. The arm 126 applies a compressive force to the block structure 128. As the V-shaped groove continues to move along the track structure, the arm 126 moves beyond the block structure 128 and transitions from the second state to a state in which the arm 126 applies a compressive force to an at least partially relaxed state of the block structure 128, thereby allowing the arm 126 snaps into position to fix and hold the V-shaped groove to the container body.

Referring to FIGS. 1 to 18, a device for holding one of the substrates stacked at intervals includes a front door frame 14 spaced apart from a rear container wall 36. The front door frame 14 defines a door opening 16 configured to receive a door 24. In one embodiment, a door 24 is disposed in the door opening 16 defined by the front door frame 14. A top container wall 30 extends from the front door frame 14 to the rear container wall 36 in a rearward direction Z and extends from the rear container wall 36 to the front door frame 14 in a forward direction -Z. A bottom container wall 32 extends from the front door frame 14 to the rear container wall 36 in a backward direction Z and extends from the rear container wall 36 to the front door frame 14 in a forward direction -Z.

A starboard container wall 34 extends from the bottom container wall 32 to the top container wall 30 in an upward direction Y and extends from the top container wall 30 to the bottom container wall 32 in a downward direction -Y. The starboard container wall 34 extends in the rearward direction Z from the front door frame 14 to the rear container wall 36 and in the forward direction -Z from the rear container wall 36 to the front door frame 14. The starboard container wall 34 includes an inner surface 78 and a plurality of block features 86 protruding beyond the inner surface 78. A port container wall 34 extends from the bottom container wall 32 to the top container wall 30 in the upward direction Y and extends from the top container wall 30 to the bottom container wall 32 in the downward direction -Y. The port container wall 34 extends from the front door frame 14 to the rear container wall 36 in the backward direction Z and extends from the rear container wall 36 to the front door frame 14 in the forward direction -Z.

The device includes a pair of generally opposed wafer supports 40. Each wafer support 40 includes a plurality of racks 52 for carrying substrates. The pair of wafer supports 40 includes a port wafer support 40 and a starboard wafer support 40. In one embodiment, the port wafer support 40 and the starboard wafer support 40 are mirror images of each other. The starboard wafer support 40 includes a plurality of brackets 64 extending away from the plurality of racks 52 in the rearward direction Z. Each bracket 64 defines a socket 132 that opens in the rearward direction Z.

The starboard container wall 34 supports a plurality of pillars 134. Each pillar 134 extends in the forward direction -Z through one of the plurality of sockets 132 defined by the bracket 64 of the starboard wafer support 40 relative to the starboard container in the upward, downward, port, and starboard directions The wall 34 restrains the starboard wafer support 40. The starboard wafer support 40 includes a plurality of latch members 70, and each latch member includes an interdigit 82 fixed to a cantilever 74. Each finger engages a block feature 86 of the starboard container wall 34 to restrict movement of the starboard wafer support 40 in the rearward direction Z relative to the starboard container wall 34.

The starboard container wall 34 includes a plurality of anchor 150 sections. Each anchor 150 partially defines a channel 152 that opens in the forward direction -Z. The starboard wafer support 40 includes a plurality of anchor engaging parts. Each anchor engaging member includes a first leg 136 and a second leg 138 that extend away from the plurality of frames 52 in the forward direction -Z. Each anchor engaging part is also included in the first A spar extends between the leg 136 and the second leg 138. The spar of each anchor engaging member extends through a channel 152 defined by a corresponding anchor 150 of the starboard container wall 34 to restrict the movement of the starboard wafer support 40 in the port direction -X relative to the starboard container wall 34 .

The port wafer support 40 includes a plurality of brackets 64 extending away from the plurality of racks 52 in the rearward direction Z. Each bracket 64 defines a socket 132 that opens in the rearward direction Z. The port container wall 34 supports a plurality of pillars 134. Each pillar 134 extends in the forward direction -Z through one of the plurality of sockets 132 defined by the bracket 64 of the port wafer support 40 to constrain the port wafer support 40 upward, downward, and upward. And the starboard direction relative to the movement of the port container wall 34. The port wafer support 40 also includes a plurality of latch parts 70. Each latch member 70 includes an interdigit 82 fixed to a cantilever 74. Each finger 82 engages a block feature 86 of the port container wall 34 to restrict the movement of the port wafer support 40 relative to the port container wall 34 in the backward direction Z.

The port container wall 34 includes a plurality of anchor 150 parts. Each anchor 150 partially defines a channel 152 that opens in the forward direction -Z. The port wafer support 40 includes a plurality of anchor engaging parts. Each anchor engaging member includes a first leg 136 and a second leg 138. Both legs extend away from the plurality of frames 52 in the forward direction -Z. Each anchor engaging member also includes a spar 140 extending between the first leg 136 and the second leg 138. The spar 140 of each anchor engaging member extends through a channel 152 defined by a corresponding anchor 150 of the port container wall 34 to restrict movement of the port wafer support 40 in the starboard direction X relative to the port container wall 34 .

Referring to Figures 1 to 4, Figure 15A, Figure 16 and Figure 17B, the arrows labeled "Y" and "-Y" are used to illustrate an upward direction Y and a downward or downward direction -Y, respectively. Use the arrows marked "-Z" and "Z" to illustrate a forward direction -Z and a backward direction Z respectively. Use the arrows marked "X" and "-X" to illustrate a starboard direction S and a port direction P respectively. The directions illustrated using these arrows are applicable to the equipment throughout this application. Port direction can also be called Port (portward) direction. In one embodiment, the upward direction is substantially opposite to the downward direction. In one embodiment, both the upward direction and the downward direction are substantially orthogonal to a plane defined by the forward direction and the starboard direction. In one embodiment, the forward direction is substantially opposite to the backward direction. In one embodiment, both the forward direction and the backward direction are substantially orthogonal to a plane defined by the upward direction and the starboard direction. In one embodiment, the starboard direction is substantially opposite to the port direction. In one embodiment, both the starboard direction and the port direction are substantially orthogonal to a plane defined by the upward direction and the forward direction. Various direction indicating terms are used herein as a convenient way to discuss the objects shown in each figure. It will be understood that many direction-indicating terms relate to the instantaneous orientation of the object being described. It will also be understood that the objects described in this article can assume various orientations without departing from the spirit and scope of this detailed description. Therefore, directional terms such as "up", "down", "forward", "backward", "toward" and "starboard" should not be construed as limiting the scope of the invention described in the accompanying patent application category.

Therefore, although several illustrative embodiments of the present invention have been described, those skilled in the art will easily understand that other embodiments can be made and used within the scope of the attached patent application. The numerous advantages of the invention covered by this document have been stated in the foregoing description. However, it will be understood that the present invention in many aspects is only illustrative. Changes can be made in details, specifically in terms of the shape, size, and configuration of parts, without going beyond the scope of the present invention. Of course, the scope of the present invention is defined in the language in which the scope of the accompanying patent application is expressed.

20‧‧‧Container part/container body

55‧‧‧Second bridge support / bridge support

70‧‧‧Compression Latch Parts/Latch Parts

74‧‧‧Arm/Latch Arm/Cantilever Arm

78‧‧‧Inner surface

82‧‧‧Finger/Interfinger

86‧‧‧Block characteristics

88‧‧‧Triangular Section

Claims (4)

A substrate container comprising: a door and a container part, the container part comprising a pair of substantially opposite side walls; a rear wall; a top wall; a bottom; and a pair of substantially opposite wafer support members, the wafer support members Removably attached to each of the side walls, each of the wafer supports has a plurality of racks for accommodating a plurality of substrates and a vertically extending bridge support, wherein the Each of the wafer supports includes a latch member having an elastic arm that extends horizontally away from the vertical extension frame bridging support member at an acute angle with respect to the respective side wall, and the elastic arm is configured Provided in contact with one or more corresponding features on the container portion; wherein each wafer support has a front end and a rear end, and each wafer support has a function for restraining each The restraining structure toward the rear end of a wafer support; wherein the restraining structure includes a plurality of sockets formed in the plurality of brackets toward the rear end of the wafer support, and the plurality of sockets are respectively used for receiving A plurality of pillars formed on the side wall of the container part; and the rearward end of the wafer support is restrained upward, downward, inward, outward and backward at the side wall by the restraining structure, And the wafer support is bound forward by the elastic arm at the forward end. Such as the substrate container of claim 1, wherein each wafer support has a front end and a rear end, and the latch member of each wafer support is positioned at the front end of the wafer support. A substrate container comprising: a door and a container part, the container part comprising a pair of substantially opposite side walls; a rear wall; a top wall; a bottom wall; and at least one container assembly, which is connected to the pair of side walls and the top wall And the container part on one of the bottom walls is engaged, the at least one container component includes: a side wall restraining part for positioning against the one wall and restraining the at least one container component; and a latch member, It includes an elastic arm configured to engage a block feature on the wall of each container part, wherein the at least one container component is a V-shaped groove. Such as the substrate container of claim 3, wherein the at least one container component has a forward end and a rearward end, and wherein the restraining portion is positioned at one of the forward end and the backward end, and the elastic arm is positioned at the forward end And the other one of the backward ends.

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