JP6659450B2 - 圧電素子および圧電素子の製造方法 - Google Patents

圧電素子および圧電素子の製造方法 Download PDF

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Publication number
JP6659450B2
JP6659450B2 JP2016093989A JP2016093989A JP6659450B2 JP 6659450 B2 JP6659450 B2 JP 6659450B2 JP 2016093989 A JP2016093989 A JP 2016093989A JP 2016093989 A JP2016093989 A JP 2016093989A JP 6659450 B2 JP6659450 B2 JP 6659450B2
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Japan
Prior art keywords
electrode layer
piezoelectric body
piezoelectric
connection portion
electrically connected
Prior art date
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Active
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JP2016093989A
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English (en)
Japanese (ja)
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JP2017204506A5 (enExample
JP2017204506A (ja
Inventor
隆哉 増田
隆哉 増田
嘉之 渡部
嘉之 渡部
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Shimano Inc
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Shimano Inc
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Publication date
Application filed by Shimano Inc filed Critical Shimano Inc
Priority to JP2016093989A priority Critical patent/JP6659450B2/ja
Priority to CN201710265529.XA priority patent/CN107452866A/zh
Priority to DE102017004430.9A priority patent/DE102017004430A1/de
Publication of JP2017204506A publication Critical patent/JP2017204506A/ja
Publication of JP2017204506A5 publication Critical patent/JP2017204506A5/ja
Application granted granted Critical
Publication of JP6659450B2 publication Critical patent/JP6659450B2/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
JP2016093989A 2016-05-09 2016-05-09 圧電素子および圧電素子の製造方法 Active JP6659450B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016093989A JP6659450B2 (ja) 2016-05-09 2016-05-09 圧電素子および圧電素子の製造方法
CN201710265529.XA CN107452866A (zh) 2016-05-09 2017-04-21 压电元件及压电元件的制造方法
DE102017004430.9A DE102017004430A1 (de) 2016-05-09 2017-05-08 Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016093989A JP6659450B2 (ja) 2016-05-09 2016-05-09 圧電素子および圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2017204506A JP2017204506A (ja) 2017-11-16
JP2017204506A5 JP2017204506A5 (enExample) 2018-07-19
JP6659450B2 true JP6659450B2 (ja) 2020-03-04

Family

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Family Applications (1)

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JP2016093989A Active JP6659450B2 (ja) 2016-05-09 2016-05-09 圧電素子および圧電素子の製造方法

Country Status (3)

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JP (1) JP6659450B2 (enExample)
CN (1) CN107452866A (enExample)
DE (1) DE102017004430A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7512265B2 (ja) * 2018-10-10 2024-07-08 ヨアノイム リサーチ フォルシュングスゲゼルシャフト エムベーハー 圧電センサ
WO2024138554A1 (zh) * 2022-12-29 2024-07-04 中国科学院光电技术研究所 压电陶瓷驱动阵列及面形调整方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62208680A (ja) * 1986-03-07 1987-09-12 Murata Mfg Co Ltd 積層バイモルフ
JP2004002069A (ja) * 2002-05-30 2004-01-08 Tdk Corp 圧電磁器の製造方法および圧電素子の製造方法
US7067965B2 (en) * 2002-09-18 2006-06-27 Tdk Corporation Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof
JP4506172B2 (ja) 2003-12-26 2010-07-21 Ｔｄｋ株式会社 積層型圧電素子
JP5043311B2 (ja) * 2005-05-19 2012-10-10 太陽誘電株式会社 圧電積層体及びその製造方法，圧電スピーカ，電子機器
JP4725432B2 (ja) * 2006-06-15 2011-07-13 Ｔｄｋ株式会社 積層型圧電素子及び圧電装置
WO2013031715A1 (ja) * 2011-09-01 2013-03-07 北陸電気工業株式会社 積層圧電体
WO2015060132A1 (ja) * 2013-10-22 2015-04-30 株式会社村田製作所 積層セラミック構造体及びその製造方法並びに圧電アクチュエータ
JP2016093989A (ja) 2014-11-07 2016-05-26 三菱レイヨン株式会社 ロッドレンズアレイ及びロッドレンズアレイを備えた機器

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Publication number Publication date
DE102017004430A1 (de) 2017-11-09
CN107452866A (zh) 2017-12-08
JP2017204506A (ja) 2017-11-16

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