JP6652265B2 - 有機物試料の観察方法、これに用いられる観察ホルダ及び観察ステージ - Google Patents
有機物試料の観察方法、これに用いられる観察ホルダ及び観察ステージ Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/612—Specific applications or type of materials biological material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J2237/26—Electron or ion microscopes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
Description
10 観察ホルダ
12a 絶縁性薄膜
12b 絶縁性薄膜
13 導電性薄膜
15 電位感受性膜
18 生物試料
18b 水溶液
31 電子線
Claims (9)
- 走査電子顕微鏡内で水溶液中の生物の如き有機物試料を観察する観察方法であって、一対の対向する第1及び第2の絶縁性薄膜の対向面の間に前記水溶液とともに前記有機物試料を介在させ、前記第1の絶縁性薄膜の外向面上に与えられた導電性薄膜にその強度をパルス状に変化させたパルス電子線を走査照射し、前記第2の絶縁性薄膜の外向面上の電位変化に応じた画像を得る方法において、異なるON/OFF周波数の前記パルス電子線に対応した前記画像の差から前記有機物試料の組成分析を与えることを特徴とする有機物試料の観察方法。
- 前記パルス電子線は、第1のON/OFF周波数のパルスの一群を第2のON/OFF周波数で与えるよう制御することを特徴とする請求項1記載の有機物試料の観察方法。
- 前記第1の絶縁性薄膜は前記導電性薄膜との間にエレクトレット層を含むことを特徴とする請求項2記載の有機物試料の観察方法。
- 前記第2の絶縁性薄膜の外向面上には電位変化により光学的変化を与える電位感受性物質からなる電位感受性膜を与え、これを光学的に検知することを特徴とする請求項2記載の有機物試料の観察方法。
- 前記電子線の走査照射と同期させて前記電位感受性膜の光学的変化を検知することを特徴とする請求項3記載の有機物試料の観察方法。
- 走査電子顕微鏡内で水溶液中の生物の如き有機物試料を観察する観察ホルダであって、
一対の対向する第1及び第2の絶縁性薄膜の対向面の間に前記水溶液とともに前記試料を介在させ、前記第1の絶縁性薄膜の外向面上に与えられた導電性薄膜にその強度をパルス状に変化させたパルス電子線を走査照射し、前記第2の絶縁性薄膜の外向面上の電位変化に応じた画像を得る方法に用いられ、
前記水溶液とともに前記有機物試料を介在させる試料保持空間と、
前記試料保持空間を与える前記第1及び第2の絶縁性薄膜と、
前記第1の絶縁性薄膜の外向面上に与えられた導電性薄膜と、
前記第2の絶縁性薄膜の外向面上に与えられた電位感受性物質からなる電位感受性膜と、を少なくとも含むことを特徴とする観察ホルダ。 - 前記電位感受性物質は電位変化により光学的変化を与えることを特徴とする請求項6記載の観察ホルダ。
- 前記第1の絶縁性薄膜は前記導電性薄膜との間にエレクトレット層を含むことを特徴とする請求項7記載の観察ホルダ。
- 走査電子顕微鏡内で水溶液中の生物の如き有機物試料を観察する観察ステージであって、
一対の対向する第1及び第2の絶縁性薄膜の対向面の間に前記水溶液とともに前記有機物試料を介在させ、前記第1の絶縁性薄膜の外向面上に与えられた導電性薄膜にその強度をパルス状に変化させたパルス電子線を走査照射し、前記第2の絶縁性薄膜の外向面上の電位変化に応じた画像を得る方法に用いられ、
前記第2の絶縁性薄膜の外向面上の電位変化を検知する検知手段を少なくとも含み、
前記検知手段は、前記第2の絶縁性薄膜の外向面上の電位変化により光学的変化を与える電位感受性物質からなる電位感受性膜の変化を光学的に検知する手段であることを特徴とする観察ステージ。
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PCT/JP2016/080111 WO2017065135A1 (ja) | 2015-10-16 | 2016-10-11 | 有機物試料の観察方法、これに用いられる観察ホルダ及び観察ステージ |
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JP6652265B2 true JP6652265B2 (ja) | 2020-02-19 |
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JP2003050221A (ja) * | 2001-08-06 | 2003-02-21 | Mitsubishi Heavy Ind Ltd | ハイドレート含有率測定方法、測定装置及びそれを備えた設備 |
JP5317120B2 (ja) * | 2009-05-22 | 2013-10-16 | 独立行政法人産業技術総合研究所 | X線顕微鏡用試料収容セル、x線顕微鏡、およびx線顕微鏡像の観察方法 |
JP5626757B2 (ja) * | 2010-02-24 | 2014-11-19 | 独立行政法人産業技術総合研究所 | X線顕微鏡像観察用試料支持部材、x線顕微鏡像観察用試料収容セル、およびx線顕微鏡 |
JP6112553B2 (ja) * | 2013-04-08 | 2017-04-12 | 国立研究開発法人産業技術総合研究所 | 観察システム及び観察方法 |
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