JP6650804B2 - ムライト含有焼結体、その製法及び複合基板 - Google Patents
ムライト含有焼結体、その製法及び複合基板 Download PDFInfo
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- JP6650804B2 JP6650804B2 JP2016058970A JP2016058970A JP6650804B2 JP 6650804 B2 JP6650804 B2 JP 6650804B2 JP 2016058970 A JP2016058970 A JP 2016058970A JP 2016058970 A JP2016058970 A JP 2016058970A JP 6650804 B2 JP6650804 B2 JP 6650804B2
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- mullite
- sintered body
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- containing sintered
- substrate
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- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 title claims description 89
- 229910052863 mullite Inorganic materials 0.000 title claims description 88
- 239000000758 substrate Substances 0.000 title claims description 82
- 239000002131 composite material Substances 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000843 powder Substances 0.000 claims description 32
- 239000002994 raw material Substances 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 19
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
- 238000010304 firing Methods 0.000 claims description 15
- 239000011148 porous material Substances 0.000 claims description 10
- 238000013001 point bending Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 13
- 239000013078 crystal Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000007731 hot pressing Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000010897 surface acoustic wave method Methods 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017109 AlON Inorganic materials 0.000 description 1
- 238000007088 Archimedes method Methods 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 235000019687 Lamb Nutrition 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- CUZMQPZYCDIHQL-VCTVXEGHSA-L calcium;(2s)-1-[(2s)-3-[(2r)-2-(cyclohexanecarbonylamino)propanoyl]sulfanyl-2-methylpropanoyl]pyrrolidine-2-carboxylate Chemical compound [Ca+2].N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1.N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1 CUZMQPZYCDIHQL-VCTVXEGHSA-L 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Description
混合原料粉末は、ムライト粉末と窒化珪素粉末とを混合することにより調製する。ムライト原料としては、純度が高く、平均粒径が小さい粉末を使用するのが好ましい。純度は99.0%以上が好ましく、99.5%以上がより好ましく、99.8%以上が更に好ましい。純度の単位は質量%である。また、平均粒径(D50)は1.5μm以下が好ましく、0.1〜1.5μmがより好ましい。ムライト原料は、市販品を用いてもよいし、高純度なアルミナやシリカ粉末を用いて作製したものを用いてもよい。ムライト原料を作製する方法としては、例えば特許文献2に記載された方法が挙げられる。窒化珪素原料としては、平均粒径が小さい粉末を使用するのが好ましい。平均粒径は1μm以下が好ましく、0.1〜1μmがより好ましい。ムライト原料と窒化珪素原料とを混合割合は、例えば、ムライト原料50〜90体積%(好ましくは70〜90体積%)と窒化珪素原料10〜50体積%(好ましくは10〜30体積%)とを合計100体積%となるように秤量し、ポットミル等の混合機で混合し、必要に応じてスプレードライヤーで乾燥して混合原料粉末を得るようにしてもよい。
工程(a)で得られた混合原料粉末を所定形状の成形体に成形する。成形の方法に特に制限はなく、一般的な成形法を用いることができる。例えば、混合原料粉末をそのまま金型によってプレス成形してもよい。プレス成形の場合は、混合原料粉末をスプレードライによって顆粒状にしておくと、成形性が良好になる。他に、有機バインダーを加えて坏土を作製し押出し成形したり、スラリーを作製しシート成形することができる。これらのプロセスでは焼成工程前あるいは焼成工程中に有機バインダー成分を除去することが必要になる。また、CIP(冷間静水圧プレス)にて高圧成形してもよい。
ムライト原料として、市販の純度99.9%以上、平均粒径1.5μmのムライト粉末を、窒化珪素原料として市販の純度97%以上、平均粒径0.8μmの窒化珪素粉末を用いた。ムライト原料と窒化珪素原料を表1の実験例1〜3に示す割合で秤量し、φ5mmのアルミナ玉石を用いてポットミル混合し、スプレードライにより混合原料粉末を作製した。
実験例1〜3の混合原料粉末を、直径約125mmの金型に入れ、厚さ10〜15mm程度の円盤状に200kgf/cm2の圧力で成形し、ムライト含有成形体を得た。次いで、内径約125mmのホットプレス用の黒鉛型にムライト含有成形体を収納し、ホットプレス炉にて直径約125mmで厚さ5〜8mm程度のムライト含有焼結体を作製した。なお、焼成時の最高温度(焼成温度)を1650℃、焼成温度での保持時間を5hrとし、昇温速度、降温速度ともに100℃/hrとした。プレス荷重は昇温中の900℃以上で200kgf/cm2とし、炉内雰囲気は900℃までは真空とし、900℃到達後にN2を導入しN2下で焼結を進めた。焼成温度で所定時間保持した後は1200℃まで降温し、プレス荷重と炉内雰囲気の制御を止めて、室温まで自然冷却した。また、実験例4では、ムライト粉末のみで同様にして成形体、焼結体を作製した。
実験例1〜4の焼結体から、試験片(4×3×40mmサイズの抗折棒等)を切り出し、各種特性を評価した。また、焼結体の研磨面は、4×3×10mm程度の試験片の一面を研磨によって鏡面状に仕上げたものとした。研磨は3μmのダイヤモンド砥粒、0.5μmのダイヤモンド砥粒の順に進め、最終仕上げには0.1μm以下のダイヤモンド砥粒を用いたラップ研磨を行った。評価した特性は以下のとおり。
焼結体を粉砕し、X線回折装置により、結晶相の同定を行った。測定条件はCuKα、50kV、300mA、2θ=5−70°とし、回転対陰極型X線回折装置(理学電機製RINT)を用いた。
上記(1)のX線回折プロファイルから、各結晶相のピーク面積比率を算出した。ムライト(210)面(2θ=26.2°)のピーク面積を1として、それに対する各結晶相のピーク面積を結晶相比率とした。ここで各結晶相の代表ピークとして、窒化珪素は(101)面(2θ=20.6°)、サイアロンはSi2Al3O7Nの(3−20)面(2θ=24.6°)及びSi5AlON7の(200)面(2θ=26.9°)を用いた。
抗折棒を用い、純水を用いたアルキメデス法により、嵩密度、開気孔率を測定した。
JIS R1602に準じた、静的撓み法で測定した。試験片形状は3mm×4mm×40mm抗折棒とした。
JIS R1601に準じて、4点曲げ強度を測定した。試験片形状は3mm×4mm×40mm抗折棒もしくは、そのハーフサイズとした。
JIS R1618に準じて、押し棒示差式で測定した。試験片形状は3mm×4mm×20mmとした。
上記のように仕上げた焼結体の研磨面をSEM観察し、100μm×100μm当りに存在する、最大長さが1μm以上の気孔の数を計測した。
上記のように仕上げた焼結体の研磨面に対し、AFMを用いて中心性平均粗さRaを測定した。測定範囲は、10μm×10μmとした。
上記のように仕上げた焼結体の研磨面をリン酸にてケミカルエッチングし、SEMにて焼結粒子の大きさを200個以上測定し、線分法を用いて平均粒径を算出した。線分法の係数は1.5とし、SEMにて実測された長さに1.5を乗じた値を平均粒径とした。
実験例1〜4の焼結体から直径100mm、厚さ600μm程度の円板を切り出した。この円板を上記の通りに研磨仕上げした後に、洗浄して表面のパーティクルや汚染物質等を取り除いた。次に、この円板を支持基板とし、支持基板と機能性基板との直接接合を実施して複合基板を得た。すなわち、まず支持基板と機能性基板のそれぞれの接合面をアルゴンのイオンビームによって活性化し、その後に両接合面を向かい合わせて10tonfで押圧し、接合して複合基板を得た。機能性基板としては、ニオブ酸リチウム(LN)基板を用いた。接合性の評価は、IR透過像から接合面積が90%以上のものを「最良」、80%以上90%未満のものを「良」、80%未満のものを「不良」とした。
実験例1〜3のムライト含有焼結体は、ムライト原料と窒化珪素原料とを混合した混合原料粉末を焼成したものであるが、窒化珪素の一部が焼成によってサイアロンに変化した。実験例1〜3のムライト含有焼結体は、窒化珪素等を含んでいるため、実験例4のムライト単独の焼結体に比べてヤング率及び4点曲げ強度が向上した。すなわちヤング率は240GPa以上、4点曲げ強度が320MPa以上に向上した。また、実験例1〜3のムライト含有焼結体は、40〜400℃の熱膨張係数が4.3ppm/℃未満(3.5〜4.1ppm/℃)であり、実験例4のムライト単独の焼結体よりも低い値になった。更に、実験例1〜3のムライト含有焼結体や実験例4のムライト単独の焼結体は、開気孔率が0.5%以下(0.1%未満)、平均結晶粒径が1.5μm以下(1.0〜1.2μm)であったため、研磨面の中心平均粗さRaは1.1nm以下(0.9〜1.1nm)と小さくなった。そのため、実験例2〜4の焼結体から切り出した円板を機能性基板と直接接合したときの接合性は、いずれも接合面積が90%以上の「最良」であり、実験例1の焼結体から切り出した円板を機能性基板と直接接合したときの接合性は、接合面積が80%以上90%未満の「良」であった。なお、研磨面の中心平均粗さRaがこのように小さな値になったのは気孔の数が3個以下(ゼロ)だったことも寄与している。
Claims (5)
- ムライトのほかに、窒化珪素、酸窒化珪素及びサイアロンからなる群より選ばれた少なくとも1種を含有するムライト含有焼結体であって、
40〜400℃の熱膨張係数が4.1ppm/℃以下であり、
開気孔率が0.5%以下であり、
平均結晶粒径が1.5μm以下であり、
研磨面の中心平均粗さRaが1.5nm以下であり、
4点曲げ強度が320MPa以上350MPa以下である、
ムライト含有焼結体。 - 研磨面100μm×100μmの面積当りに存在する最大長さ1μm以上の気孔の数が10個以下である、
請求項1に記載のムライト含有焼結体。 - ヤング率が240GPa以上である、
請求項1又は2に記載のムライト含有焼結体。 - (a)平均粒径1.5μm以下のムライト粉末50〜90体積%と平均粒径1μm以下の窒化珪素粉末10〜50体積%とを合計100体積%となるように混合して混合原料粉末を得る工程と、
(b)前記混合原料粉末を所定形状の成形体に成形し、前記成形体をプレス圧20〜300kgf/cm2、焼成温度1525〜1700℃、昇温速度50〜300℃/hr、焼成温度での保持時間2〜8時間でホットプレス焼成を行うことにより、請求項1〜3のいずれか1項に記載のムライト含有焼結体を得る工程と、
を含むムライト含有焼結体の製法。 - 圧電基板と支持基板とが接合された複合基板であって、
前記支持基板は、請求項1〜3のいずれか1項に記載のムライト含有焼結体である、
複合基板。
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JP2016058970A JP6650804B2 (ja) | 2016-03-23 | 2016-03-23 | ムライト含有焼結体、その製法及び複合基板 |
US15/454,180 US9981876B2 (en) | 2016-03-23 | 2017-03-09 | Mullite-containing sintered body, method for manufacturing the same, and composite substrate |
CN201710156213.7A CN107226690B (zh) | 2016-03-23 | 2017-03-16 | 含有多铝红柱石的烧结体、其制法及复合基板 |
KR1020170035402A KR102377657B1 (ko) | 2016-03-23 | 2017-03-21 | 멀라이트 함유 소결체, 그 제법 및 복합 기판 |
TW106109502A TWI718275B (zh) | 2016-03-23 | 2017-03-22 | 含富鋁紅柱石燒結體、其製法及複合基板 |
DE102017002808.7A DE102017002808A1 (de) | 2016-03-23 | 2017-03-22 | Mullit-enthaltender Sinterkörper, Verfahren zur Herstellung desselben und Verbundwerkstoffsubstrat |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5585570A (en) | 1978-12-25 | 1980-06-27 | Ishihara Sangyo Kaisha Ltd | Pyrazole derivative and its preparation |
JPS5861016A (ja) | 1981-10-07 | 1983-04-11 | Nissan Motor Co Ltd | 車両用空調装置 |
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JPH0196062A (ja) * | 1987-10-09 | 1989-04-14 | Toyota Central Res & Dev Lab Inc | ムライト質焼結体及びその製造方法 |
JPH0772108B2 (ja) * | 1988-04-16 | 1995-08-02 | トヨタ自動車株式会社 | β−サイアロン焼結体の製造方法 |
JPH0818875B2 (ja) * | 1988-09-05 | 1996-02-28 | トヨタ自動車株式会社 | 窒化珪素焼結体の製造方法 |
JPH06100306A (ja) * | 1992-09-22 | 1994-04-12 | Toray Ind Inc | サイアロン結晶粒子および複合セラミックス焼結体 |
JP2001319967A (ja) | 2000-05-11 | 2001-11-16 | Ibiden Co Ltd | セラミック基板の製造方法 |
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JP4811717B2 (ja) | 2006-02-23 | 2011-11-09 | 独立行政法人産業技術総合研究所 | マイクロ波加熱用鋳込み型及びセラミックス焼結体の製造方法 |
CN102596850B (zh) * | 2009-11-06 | 2014-04-09 | 三井金属矿业株式会社 | 莫来石陶瓷及其制造方法 |
JP5585570B2 (ja) | 2011-12-01 | 2014-09-10 | 住友電気工業株式会社 | ムライトを主成分とする焼結体 |
JP5861016B1 (ja) | 2014-06-06 | 2016-02-16 | 日本碍子株式会社 | ムライト焼結体、その製法及び複合基板 |
JP2016058970A (ja) | 2014-09-11 | 2016-04-21 | キヤノン株式会社 | 無線通信装置、無線通信装置の制御方法及びプログラム |
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