JP6646221B2 - Dicing apparatus and dicing method - Google Patents

Description

  The present invention relates to a dicing apparatus and a dicing method, and more particularly to a dicing apparatus and a dicing method for cutting a workpiece by a blade while relatively moving a workpiece such as a wafer and a rotating blade.

  In a semiconductor manufacturing process, various processes are performed on the surface of a wafer to manufacture a plurality of semiconductor elements having electronic devices. After the electrical characteristics of each chip of the semiconductor device are inspected by the inspection device, the chips are divided into individual chips by a high-speed rotating blade of the dicing device.

  The blades are replaced with new blades because the blades wear over time. When the type of work is changed, the blade may be replaced with another type of blade corresponding to the work. When the blade is replaced in this manner, the blade shape before and after the replacement is different, so that the operation of registering blade information on the blade shape and the like after the replacement in the dicing apparatus is performed. The dicing apparatus controls the depth of cut of the blade with respect to the workpiece based on the registered blade information after replacement, and continues cutting.

  Patent Literature 1 discloses a dicing apparatus (processing apparatus) that performs a blade replacement operation using a blade replacement operation screen. In this dicing apparatus, when a blade is replaced, information such as lot ID, new / old information, blade outer diameter, blade thickness, flange outer diameter, etc. is input as blade information in accordance with the displayed operation screen. It has become.

  As the blade, an electrodeposition blade in which diamond abrasive grains and CBN (Cubic Boron Nitride) abrasive grains are electrodeposited with nickel is known, and a metal resin bond blade in which a metal powder is mixed with a resin and the like is used. It has been known. The size of the blade is variously selected depending on the processing contents. When dicing a normal wafer, a blade having a diameter of 50 to 60 mm and a thickness of about 30 μm is used.

JP 2009-194326 A

  However, in the dicing apparatus disclosed in Patent Literature 1, each time the blade is replaced, the operator needs to input blade information using an operation screen, and the dicing apparatus can be operated during the input operation. The production efficiency is reduced.

  Further, when the tip shape of the blade is worn and deformed in accordance with the cutting of the work, the processing quality is deteriorated, which causes a problem such as cracking or chipping of the chip. Therefore, when the blade is reused, it is necessary to inspect whether or not the tip shape of the blade is within an allowable range in order to prevent the above-mentioned inconvenience.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a dicing apparatus and a dicing method that reduce time and effort involved in blade replacement and prevent a decrease in overall throughput.

  In order to achieve the above object, one aspect of the dicing apparatus according to the present invention is a dicing apparatus that cuts a workpiece with a blade while relatively moving the workpiece and a blade, and includes an RFID tag provided on the blade. Blade information reading means for reading blade information from a memory, storage means for storing blade information read by the blade information reading means, and control for controlling a relative position between a workpiece and a blade based on the blade information stored in the storage means Means, wherein the blade information includes blade tip shape information indicating the tip shape of the blade, and diagnoses whether or not the blade can be used based on the blade tip shape information before cutting is performed. Means.

  In one aspect of the dicing apparatus according to the present invention, an imaging unit configured to image a kerf formed on a workpiece or a dummy work by a blade, and a detection unit configured to detect blade tip shape information based on a captured image of the kerf captured by the imaging unit Updating means for updating the blade information stored in the storage means using the blade tip shape information detected by the detection means; and blade information writing means for writing the blade information stored in the storage means to the RFID tag. .

  In one aspect of the dicing apparatus according to the present invention, the blade information includes blade usage history information indicating a usage history of the blade, and the diagnosis unit diagnoses whether the blade is usable based on the blade usage history information. .

  One aspect of the dicing method according to the present invention is a dicing method for cutting a workpiece with a blade while relatively moving the workpiece and the blade, and reading blade information from an RFID tag provided on the blade. Step, a storage step of storing the blade information read in the blade information reading step, and a dicing step of performing a cutting process while controlling the relative position of the work and the blade based on the blade information stored in the storage step, The blade information includes blade tip shape information indicating the tip shape of the blade, and includes a diagnosis step of diagnosing whether or not the blade can be used based on the blade tip shape information before cutting is performed. .

  In one aspect of the dicing method according to the present invention, an imaging step of imaging a kerf formed on a work or a dummy work by a blade, and a detection step of detecting blade tip shape information based on an image obtained by imaging the kerf in the imaging step. An updating step of updating the blade information stored in the storing step using the blade tip shape information detected in the detecting step, and writing blade information for writing the blade information updated in the storing or updating step in the storing step to an RFID tag And a step.

  In one aspect of the dicing method according to the present invention, the blade information includes blade usage history information indicating a usage history of the blade, and the diagnosis step diagnoses whether the blade is usable based on the blade usage history information. .

  ADVANTAGE OF THE INVENTION According to this invention, the effort and time accompanying replacement | exchange of a blade can be reduced, and the fall of the whole throughput can be prevented.

Overall perspective view showing the dicing apparatus of the present embodiment FIG. 2 is a perspective view showing the structure of a processing unit of the dicing apparatus shown in FIG. Configuration diagram showing the configuration of the blade Diagram showing an example of blade information stored in an RFID tag FIG. 2 is a block diagram illustrating a main configuration of the dicing apparatus according to the embodiment. Flow chart showing an example of a dicing method using the dicing apparatus of the present embodiment Schematic diagram showing chop processing Schematic diagram showing chop processing Diagram showing an example of a calf image captured by a camera Diagram showing another example of a calf image captured by a camera

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  First, the dicing apparatus 10 of the present embodiment will be described. FIG. 1 is an overall perspective view showing a dicing apparatus 10 of the present embodiment.

  As shown in FIG. 1, a dicing apparatus 10 of the present embodiment is a dicing apparatus called a twin spindle dicer in which a pair of blades 12 and 12 are arranged to face each other. The dicing apparatus 10 has a pair of spindles 14 with a built-in high-frequency motor having a blade 12 mounted at a tip end thereof, and a work table 16 on which a work W such as a semiconductor wafer is placed and which sucks and holds the work W. A processing unit 18 is provided. The processing unit 18 performs a cutting process (dicing process) on the work W by the blade 12 while relatively moving the work W and the blade 12.

  The dicing apparatus 10 includes a camera 19 for imaging the surface of the work W, a cleaning unit 20 for spin-cleaning the processed work W, and a load port 22 on which a cassette containing a plurality of works W is placed. And the transfer device 24 for transferring the work W are respectively arranged at predetermined positions. Further, the dicing apparatus 10 has a built-in control unit 26 for controlling the operation of each part of the dicing apparatus 10.

  FIG. 2 is a perspective view illustrating the structure of the processing unit 18.

  As shown in FIG. 2, the processing unit 18 includes an X table 34. The X table 34 is guided by X guides 30 provided on the X base 28, and is driven by a linear motor 32 in the X direction indicated by arrows XX. A rotating table 36 that rotates in the θ direction is fixed to the upper surface of the X table 34, and the work table 16 is provided on the rotating table 36. Therefore, the work table 16 is moved in the X direction by the X table 34 and rotated in the θ direction by the rotary table 36.

  In addition, the processing unit 18 includes a Y base 38 configured in a gate shape so as to straddle the X base 28. A pair of Y tables 42, 42 are provided on the wall surface of the Y base 38. The pair of Y tables 42, 42 are guided by Y guides 40, 40 fixed to the wall surface of the Y base 38, and driven in a Y direction indicated by an arrow Y-Y by a driving device including a motor and a ball screw (not shown). You.

  The Y tables 42, 42 are provided with Z tables 44, 44, respectively. The Z tables 44 are guided by a Z guide (not shown) provided on the Y table 42, and driven in a Z direction indicated by an arrow ZZ by a driving device including a motor and a ball screw (not shown). The spindles 14, 14 are fixed to the Z tables 44, 44 so as to face each other, and the blades 12, 12 mounted on the distal ends of the spindles 14, 14 are arranged to face each other.

  With the configuration of the processing section 18, the blades 12, 12 are index-fed in the Y direction and cut and fed in the Z direction, and the work table 16 is cut and fed in the X direction and rotated in the θ direction. These operations are controlled by the control unit 26 (see FIG. 1).

  The above-mentioned X direction indicates one direction in the horizontal direction, and the Y direction indicates a direction orthogonal to the X direction in the horizontal direction. The Z direction refers to a vertical direction orthogonal to the X direction and the Y direction, and the θ direction refers to a rotation direction about a vertical axis as a central axis.

  FIGS. 3A and 3B are configuration diagrams illustrating the configuration of the blade 12. FIG. 3A is a front view of the blade 12, and FIG. 3B is a cross-sectional view of the blade 12.

  As shown in FIGS. 3A and 3B, the blade 12 has a blade portion 48 attached to an outer peripheral edge of one end surface of a hub (also referred to as a flange) 50 made of an aluminum alloy or the like. Be composed. The blade portion 48 is provided on the hub 50 by electroforming abrasive grains such as diamond. Further, a mounting hole 46 for mounting the blade 12 to the spindle 14 of the dicing apparatus 10 is provided at the center of the hub 50.

  The blade portion 48 is a portion cut into the work W. The thickness t (also referred to as blade thickness) of the blade portion 48 is configured to be at least smaller than the thickness of the work W. For example, when cutting a workpiece W having a thickness of 100 μm, the thickness t of the blade portion 48 is preferably 50 μm or less, more preferably 30 μm or less, and still more preferably 10 μm or less. Further, the cross-sectional shape of the blade portion 48 may be a straight shape having a uniform thickness, or a tapered shape in which the thickness gradually decreases toward the outer periphery.

  Here, a value ((φ1−φ2) / 2) obtained by subtracting a value obtained by subtracting the outer diameter φ2 of the hub 50 from the outer diameter φ1 of the blade portion 48 is (the above-mentioned amount of protrusion a) of the blade portion 48. Note that the protrusion amount a of the blade portion 48 is a value that gradually decreases as the blade 12 wears.

  Since the protrusion amount a of the blade portion 48 is a large factor for controlling the cutting amount in the Z direction, the position of the cutting edge of the blade 12 (the height position in the Z direction) is detected even during processing with the same blade 12. The protruding amount a of the blade portion 48 is indirectly measured by the blade edge position detecting means (not shown). The protrusion amount a of the blade portion 48 is stored in a storage portion 56 (see FIG. 5) described later as a part of the blade information, and is appropriately updated to a value measured by the above-described blade edge position detecting means. The blade edge position detecting means may be a non-contact type that detects the position of the blade edge of the blade 12 using an optical sensor, or a blade edge of the blade 12 on a reference surface unique to the apparatus (for example, the upper surface of the work table 16). May be contact type. Since the configuration of the blade edge position detecting means is well known, a detailed description thereof will be omitted here.

  By the way, as shown in FIG. 3A, the blade 12 in this embodiment is provided with an RFID (Radio Frequency Identifier) tag 52. The RFID tag 52 is a readable and writable storage medium, and is attached to the surface of the hub 50. Blade information is stored in the RFID tag 52, and the blade information is read and written by a reader / writer 54 (see FIG. 5) described later.

  FIG. 4 is a diagram showing an example of blade information stored in the RFID tag 52.

  As shown in FIG. 4, the blade information stored in the RFID tag 52 includes the outer diameter φ1, the thickness t, the protrusion amount a, the type of abrasive grains, and the grain size of abrasive grains (count) in the blade portion 48 of the blade 12. , The degree of concentration (content rate) of abrasive grains, and the type of binder. In addition to the above information, blade tip shape information indicating the tip shape of the blade 12 and blade use history information indicating history information since the start of use of the blade 12 (integrated processing time and integrated processing of the blade 12). Including distance).

  FIG. 5 is a block diagram illustrating a main configuration of the dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 5, the dicing apparatus 10 of the present embodiment includes a reader / writer 54. The reader / writer 54 is an example of a blade information reading unit and a blade information writing unit, and reads and writes blade information on the RFID tag 52 provided on the blade 12.

  The control unit 26 is an example of a control unit, and controls the operation of each unit of the dicing apparatus 10. For example, the control unit 26 controls a read / write operation of the reader / writer 54 with respect to the RFID tag 52, an imaging operation of the camera 19, a processing operation of the processing unit 18, and the like.

  The control unit 26 includes a blade tip shape information detection unit 62, a blade use history management unit 64, a blade diagnosis unit 66, and a storage unit 56.

  The blade tip shape information detecting unit 62 is an example of a detecting unit and an updating unit, detects blade tip shape information indicating the tip shape of the blade 12, and stores the blade tip shape information in the storage unit 56 using the detected blade tip shape information. This is for updating blade information. The method of detecting the blade tip shape information will be described later.

  The blade usage history management unit 64 manages the processing time and the processing distance of the blade 12 mounted on the spindle 14, and stores the blade usage history information (the integrated processing of the blade 12) stored in the storage unit 56 as part of the blade information. Update the time and total processing distance). For example, a drive control signal supplied to a drive motor that drives the work table 16 in the X direction is input to the blade use history management unit 64, and the blade use history management unit 64 controls the blade 12 based on the drive control signal. Calculate processing time and processing distance. Further, a measurement unit for measuring the number of rotations or the rotation speed of the blade 12 may be provided, and the processing time or the processing distance may be calculated based on the measurement result.

  The blade diagnosis unit 66 is an example of a diagnosis unit, and diagnoses whether the blade 12 can be used based on blade tip shape information and blade use history information included in the blade information stored in the storage unit 56. Is what you do.

  The storage unit 56 is an example of a storage unit and stores various data. The data stored in the storage unit 56 includes blade information read from the RFID tag 52 by the reader / writer 54. The blade information stored in the storage unit 56 is appropriately updated based on the blade tip shape information detected by the blade tip shape information detection unit 62 and the processing time and processing distance managed by the blade use history management unit 64. It has become so. That is, the storage unit 56 stores the latest blade information of the blade 12 currently in use.

  Next, a dicing method using the dicing apparatus 10 of the present embodiment will be described. FIG. 6 is a flowchart illustrating an example of a dicing method using the dicing apparatus 10 of the present embodiment.

(Step S10: blade information reading step)
First, the control unit 26 controls the reader / writer 54 so that the blade information stored in the RFID tag 52 is read by the reader / writer 54. The reading operation by the reader / writer 54 may be performed before the blade 12 is mounted on the spindle 14, or may be performed after the blade 12 is mounted on the spindle 14.

(Step S12: storage step)
Next, the control unit 26 stores the blade information read from the RFID tag 52 by the reader / writer 54 in the storage unit 56.

(Step S14: Diagnosis step)
Next, based on the blade tip shape information and the blade usage history information stored as part of the blade information in the storage unit 56, the blade diagnosis unit 66 determines whether the blade 12 is within the allowable range in which the blade 12 can be used as it is. Diagnose. As a result of the diagnosis, when the blade 12 is in a usable state (that is, when none of the tip shape of the blade 12, the integrated processing time and the integrated processing distance of the blade 12 exceed the allowable values), the next step Proceed to S16. On the other hand, when the blade 12 is in an unusable state (that is, when any of the tip shape of the blade 12, the integrated processing time of the blade 12, and the integrated processing distance exceeds the allowable value), A notification process for displaying a message indicating that replacement is necessary on a display unit (not shown) is performed, and the flowchart ends.

(Step S16: dicing step)
Next, the processing unit 18 cuts the work W with the blade 12 while relatively moving the work W and the blade 12. At that time, the control unit 26 controls the relative position between the blade 12 and the work W based on the blade information stored in the storage unit 56. That is, when changing the index feed amount for index feeding the blade 12 in the Y direction or the cut feed amount for cutting and feeding in the Z direction, the controller 26 adjusts the outer diameter φ1 of the blade portion 48 included in the blade information, The index feed amount and the cut feed amount are controlled such that the cut position and the cut depth of the blade 12 with respect to the work W are in a desired state with reference to the thickness t and the protrusion amount a. Thus, the work W can be efficiently and accurately processed under the processing conditions optimized for the blade 12 in use.

  Further, the blade use history management unit 64 reads blade use history information (including the integrated processing time and the integrated processing distance of the blade 12) included in the blade information from the storage unit 56 before the dicing process is started. While the dicing process is being performed, the processing time and the processing distance of the blade 12 are measured and added to the integrated processing time and the integrated processing distance read from the storage unit 56. Is stored in the storage unit 56 as the total integrated processing time and the total integrated processing distance.

(Step S18: chop processing step)
After the dicing step is performed, the control unit 26 controls the processing operation of the processing unit 18, and performs a chopping process on an empty region (a region where chips are not formed) of the workpiece W by the blade 12. In the chopping process, the blade 12 rotated by the spindle 14 is lowered in the Z direction by the Z table 44 in the processing unit 18, and the cutting edge (tip) of the blade 12 is vertically contacted with the work W, and On the other hand, after forming a groove (kerf) having a predetermined depth that does not penetrate the work W, the blade 12 is raised by the Z table 44 in the Z direction. During this time, the above operation is performed without changing the relative positions of the work W and the blade 12 in the X direction and the Y direction. Note that the chop processing may be performed on a dummy work instead of the work W.

  FIG. 7 is a schematic diagram showing a state of chop processing, and is a cross-sectional view in the XZ plane. Here, the radius of the blade 12 is R, and a kerf 100 having a cutting depth D0 is formed in the work W. The incision depth (depth of the calf 100) D0 of the chop processing is a detection result of a blade position detecting unit (not shown) that detects the position of the blade (height position in the Z direction) of the blade 12 mounted on the spindle 14. And the driving amount of the Z table 44 in the Z direction. That is, the cutting depth D0 is equal to the amount by which the spindle 14 is further lowered in the Z direction from the position where the blade (tip) of the blade 12 touches the work W.

FIG. 8 is a schematic diagram showing the state of chopping, and is a cross-sectional view in the YZ plane near the tip of the blade 12. Here, the thickness direction of the blade 12 around Y _C from the kerf 100 in Y1 position apart in the thickness direction depth (Y direction in FIG. 8), i.e. the distance from the upper surface of the workpiece W to the end portion of the blade 12 D1, the distance from the upper surface of the workpiece W to the end of the blade 12 at a position away from the center of the blade 12 in the thickness direction by Y2 in the thickness direction is D2. Incidentally, the radius R of the blade 12 shown in FIG. 7 is a design value at the center Y _C in the thickness direction of the blade 12, it may be used a value measured by a known method a radius at the center Y _C.

(Step S20: imaging step)
Next, the upper surface of the workpiece W is arranged so as to face the camera 19, and an image (kerf image) of the kerf 100 formed in the chop processing step (step S18) in plan view is captured. FIG. 9 is a diagram illustrating an example of a calf image captured by the camera 19. The kerf image captured by the camera 19 is input to the controller 26 (blade tip shape information detector 62). The camera 19 is an example of an imaging unit, and the kerf image is an example of a captured image.

(Step S22: detection step)
Next, the blade tip shape information detecting unit 62 detects blade tip shape information indicating the tip shape of the blade 12 based on the kerf image captured by the camera 19. Specifically, it is performed as follows.

First, the blade tip shape information detecting unit 62 measures the size of the kerf 100 from the kerf image captured by the camera 19. Here, the center of the kerf 100 in the direction corresponding to the width direction of the blade 12 (Y direction in FIG. 9, hereinafter referred to as the “width direction of the kerf 100”) is Y _C , the direction orthogonal to the width direction of the blade 12 (FIG. 7, the center of the X direction (hereinafter, referred to as the “length direction of the calf 100”) is X _C, and the center X _C and the end of the calf 100 at a position separated from the center Y _C by a distance Y1 in the Y direction. Is L1. Similarly, the distance to the end of the central X _C and calf 100 at a position distant in the Y direction by a distance Y2 with respect to the center Y _C and L2.

  Note that the imaging magnification of the camera 19 is known, and the above-described distances Y1, Y2, L1, and L2 are values obtained by converting dimensions on an image into actual kerf dimensions.

  Subsequently, the blade tip shape information detecting unit 62 calculates the tip shape of the blade 12 from the measured dimensions of the kerf 100. Here, if the Z position at a certain Y position of the blade 12 can be calculated from the shape of the kerf 100, the tip shape of the blade 12 can be determined. That is, the following equation holds.

The distance from the center Y _C in the width direction of the kerf 100 to the end portion of the center X _C and calf 100 in the longitudinal direction of the kerf 100 in the Y position apart (length) Ln, the blade 12 in the thickness direction When the depth of the kerf 100 at a position away from the center by Y in the thickness direction is Dn and the formulas [1] and [2] are generalized, the following formula can be derived.

  Therefore, by dividing the kerf 100 by an arbitrary number in the Y direction and calculating the distance in the X direction by the number of divisions, the depth Dn of the kerf 100, that is, the position of the end of the blade 12 is determined by the number of divisions. Can be calculated. Then, by interpolating (interpolating or extrapolating) the position of each end, the tip shape of the blade 12 can be calculated.

  As described above, the blade tip shape information detecting section 62 can acquire blade tip shape information. It should be noted that the form of the blade tip shape information only needs to include information indicating the blade tip shape, and the form of the information is not particularly limited. For example, the coordinates of the position of each end of the blade 12 are the blade tip shape. Used as information.

(Step S24: update process)
Next, the blade tip shape information detection unit 62 updates the blade tip shape information stored in the storage unit 56 as a part of the blade information to the blade tip shape information detected in the detection step (Step S20). Thus, the latest blade tip shape information is stored in the storage unit 56 as a part of the blade information.

(Step S26: Blade information writing step)
Next, the control unit 26 controls the reader / writer 54 and writes the blade information stored in the storage unit 56 to the RFID tag 52 by the reader / writer 54. Thus, this flowchart ends.

  FIG. 10 is a diagram illustrating another example of a kerf image captured by the camera 19. The blade tip shape information detection unit 62 can calculate the amount of partial wear and the amount of medium wear of the blade 12 from the kerf images shown in FIGS. That is, it can be seen that the blade 12 forming the kerf 102 is normal, the blade 12 forming the kerf 104 is partially worn, and the blade 12 forming the kerf 106 is moderately worn. Therefore, the blade diagnosis unit 66 can detect the presence or absence of an abnormal state of the blade 12 from the kerf image captured by the camera 19, and can diagnose whether the blade 12 is usable.

  By acquiring the tip shape information of the blade based on the kerf image captured by the camera 19 in this manner, the state of the blade 12 that causes a processing defect can be detected in advance, and the chip may be cracked or chipped. Can be prevented beforehand.

  In the present embodiment, the calculation of the depth Dn of the kerf 100 is performed based on the radius R of the blade 12. However, the present invention is not limited to this. For example, the diameter or the circumference of the blade 12 correlated with the radius R is used. You may.

Further, in the present embodiment, the cutting depth D0 of the kerf 100 is calculated from the detection result of the cutting edge position detecting means and the driving amount of the Z table 44 in the Z direction, but an image of the kerf 100 in plan view (kerf image). May be used for calculation. For example, as shown in FIG. 9, by obtaining the distance L0 to the end of the central X _C and calf 100 in the longitudinal direction at the center Y _C in the width direction of the kerf 100, cutting depth D0 is the following formula Can be calculated.

  Next, effects of the present embodiment will be described.

  In the present embodiment, blade information is automatically read from the RFID tag 52 provided on the blade 12, and cutting is performed based on the read blade information. Since the RFID tag 52 includes blade tip shape information as a part of the blade information, it is possible to diagnose whether the blade can be used based on the blade tip shape information before cutting is performed. Thus, it is possible to save time and effort for blade inspection required when reusing the blade. Therefore, the labor and time involved in replacing the blade 12 can be reduced, and the overall throughput can be improved.

  In this embodiment, the RFID tag 52 includes blade use history information (including the integrated processing time and the integrated processing distance of the blade 12) as a part of the blade information. The diagnosis accuracy of the blade 12 can be improved by diagnosing whether the blade is usable based on the history information.

  In this embodiment, the blade information can be read and written to the RFID tag 52 by the reader / writer 54 in a non-contact manner, so that the blade information can be read and written even in an environment where cutting water, cooling water, and cutting powder are scattered. It is.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and various improvements and modifications may be made without departing from the spirit of the present invention. .

W: Work, 10: Dicing device, 12: Blade, 14: Spindle, 16: Work table, 18: Processing unit, 19: Camera, 20: Cleaning unit, 22: Load port, 24: Transport device, 26: Control unit , 28: X base, 30: X guide, 32: Linear motor, 34: X table, 36: Rotary table, 38: Y base, 40: Y guide, 42: Y table, 44: Z table, 46: Mounting hole , 48 ... blade part, 50 ... hub, 52 ... RFID tag, 54 ... reader / writer, 56 ... storage part, 62 ... blade tip shape information detection part, 64 ... blade use history management part, 100 ... calf

Claims (6)

A dicing apparatus for cutting the work by the blade while relatively moving the work and the blade,
Blade information reading means for reading blade information from an RFID tag provided on the blade,
Storage means for storing the blade information read by the blade information reading means,
Control means for controlling a relative position between the work and the blade based on the blade information stored in the storage means,
The blade information includes blade tip shape information indicating the tip shape of the blade,
Before the cutting is performed, a diagnostic unit that diagnoses whether or not the blade can be used based on the blade tip shape information,
Dicing equipment. Imaging means for imaging a kerf formed on the work or the dummy work by the blade,
Detecting means for detecting the blade tip shape information based on a captured image of the kerf captured by the image capturing means,
Update means for updating the blade information stored in the storage means using the blade tip shape information detected by the detection means,
Blade information writing means for writing the blade information stored in the storage means to the RFID tag,
The dicing apparatus according to claim 1, comprising: The blade information includes blade usage history information indicating the usage history of the blade,
The diagnosis unit diagnoses whether the blade is usable based on the blade use history information,
The dicing apparatus according to claim 1. A dicing method for cutting the work by the blade while relatively moving the work and the blade,
A blade information reading step of reading blade information from an RFID tag provided on the blade,
A storage step of storing the blade information read by the blade information reading step,
A dicing step of performing the cutting while controlling a relative position between the work and the blade based on the blade information stored in the storage step,
With
The blade information includes blade tip shape information indicating the tip shape of the blade,
Before the cutting is performed, comprising a diagnostic step of diagnosing whether the blade is usable based on the blade tip shape information,
Dicing method. An imaging step of imaging a kerf formed on the work or the dummy work by the blade,
A detection step of detecting the blade tip shape information based on a captured image of the kerf in the imaging step,
An update step of updating the blade information stored in the storage step using the blade tip shape information detected in the detection step,
A blade information writing step of writing the blade information stored in the storage step or updated in the update step to the RFID tag,
The dicing method according to claim 4, comprising: The blade information includes blade usage history information indicating the usage history of the blade,
The diagnosing step diagnoses whether the blade is usable based on the blade use history information,
The dicing method according to claim 4.

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