JP2017168484A - Dicing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dicing machine capable of reducing the labor and time required for inputting blade information at a time of replacing a blade and preventing a drop in throughput caused by blade replacement.SOLUTION: A dicing apparatus 10 reads a barcode 52 provided on a blade 12 with a barcode reader 54 provided. Blade information corresponding to a blade identification code of the barcode 52 read by the barcode reader 54 is read by a reading unit 58 from a storage unit 56 and a control unit 26 controls a processing unit 18 on the basis of the read blade information.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus that cuts a workpiece with a blade while relatively moving a workpiece such as a semiconductor wafer and a rotating blade.

  In the semiconductor manufacturing process, various processes are performed on the surface of the semiconductor wafer to manufacture a plurality of semiconductor elements having electronic devices. Each chip of the semiconductor element is inspected for electrical characteristics by an inspection device, and then divided for each chip by a high-speed rotating blade of a dicing device.

  Since the blade wears with the passage of processing time, it is replaced with a new blade. Further, when the type of workpiece is changed, the blade may be replaced with another type of blade corresponding to the workpiece. When the blade is exchanged in this way, the shape of the blade before and after the exchange is different. Therefore, an operation of registering blade information regarding the shape of the blade after the exchange in the dicing apparatus is performed. The dicing device continues the cutting process by controlling the cutting depth of the blade with respect to the workpiece based on the registered blade information after replacement.

  Patent Document 1 discloses a dicing apparatus (processing apparatus) that performs blade replacement work using an operation screen for blade replacement. In this dicing apparatus, when a blade is replaced, information such as lot ID, new / old information, blade outer diameter, blade thickness, flange outer diameter, etc. is input as blade information in accordance with the displayed operation screen. It is like that.

  Also known as blades are electrodeposition blades in which diamond abrasive grains and CBN (Cubic Boron Nitride) abrasive grains are electrodeposited with nickel, and metal resin bond blades bonded with a resin mixed with metal powder, etc. It has been known. The size of the blade is variously selected depending on the processing content. When dicing a normal semiconductor wafer, a blade having a diameter of 50 to 60 mm and a thickness of about 30 μm is used.

JP 2009-194326 A

  However, in the dicing apparatus disclosed in Patent Document 1, every time the blade is replaced, the operator must input blade information using the operation screen, and the dicing apparatus must be stopped during the input operation. I don't get it.

  Further, the blade information required when processing is performed by the dicing apparatus is not limited to the information disclosed in Patent Document 1, and for example, in the case of an electrodeposition blade, the type of abrasive grains and the grain size of the abrasive grains (Count), concentration (content ratio), etc. may be required. In the case of a resin bond blade, in addition to abrasive grains, the type of binder may be required.

  As described above, the conventional dicing apparatus has a problem in that the entire throughput is lowered because it takes time and labor to input blade information when replacing the blade.

  The present invention has been made in view of such circumstances, and reduces the labor and time required for blade information input work when replacing a blade, and prevents a decrease in throughput due to blade replacement. An object of the present invention is to provide a dicing apparatus that can be used.

  In order to achieve the above object, one aspect of a dicing apparatus according to the present invention is a processing unit that cuts a workpiece with a blade while relatively moving the workpiece and the blade, and an identification medium provided in the blade. An identification medium reading means for reading an identification medium on which the blade identification code is recorded, storage means for storing blade information corresponding to the plurality of blades in association with the blade identification code, and a plurality of blades stored in the storage means A reading unit that reads blade information corresponding to the blade identification code read by the identification medium reading unit, and a control unit that controls the processing unit based on the blade information read by the reading unit. .

  In one aspect of the dicing apparatus according to the present invention, the identification medium is preferably a bar code or a two-dimensional code.

  In one aspect of the dicing apparatus according to the present invention, it is preferable that the blade information includes at least one information of an outer diameter of the blade portion of the blade, a thickness of the blade portion, and a protruding amount of the blade portion.

  In one aspect of the dicing apparatus according to the present invention, the storage means is preferably an internal storage medium provided inside the main body of the dicing apparatus.

  In one aspect of the dicing apparatus according to the present invention, the storage means is preferably an external storage medium configured to be detachable from the main body of the dicing apparatus.

  In one aspect of the dicing apparatus according to the present invention, the storage means is preferably an external storage device connected to the dicing apparatus via a network.

  According to the present invention, it is possible to reduce the labor and time required for inputting blade information when replacing a blade, and to prevent a decrease in throughput due to blade replacement.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment. The perspective view which shows the structure of the process part of the dicing apparatus shown in FIG. (A) is a plan view of the blade, (B) is a cross-sectional view of the blade The block diagram which showed the structure for reading the barcode provided in the braid | blade among the dicing apparatuses of 1st Embodiment. The figure which showed an example of the blade information memorize | stored in the memory | storage part The block diagram which showed the structure of the dicing apparatus of 2nd Embodiment. The block diagram which showed the structure of the dicing apparatus of 3rd Embodiment.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<First Embodiment>
First, the dicing apparatus 10 according to the first embodiment will be described with reference to FIG. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the first embodiment.

  As shown in FIG. 1, the dicing apparatus 10 according to the first embodiment is a dicing apparatus called a twin spindle dicer in which a pair of blades 12 and 12 are arranged to face each other. The dicing apparatus 10 includes a pair of high-frequency motor built-in spindles 14 each having a blade 12 mounted at the tip, and a work table 16 on which a semiconductor wafer W, which is a workpiece, is placed and sucks and holds the semiconductor wafer W. The processing part 18 which has is provided. The processing unit 18 cuts the semiconductor wafer W with the blade 12 while relatively moving the semiconductor wafer W and the blade 12.

  The dicing apparatus 10 includes a cleaning unit 20 that spin-cleans a processed semiconductor wafer W, a load port 22 on which a cassette that stores a plurality of semiconductor wafers W is placed, and a transport that transports the semiconductor wafers W. The devices 24 are respectively arranged at predetermined positions. Further, the dicing apparatus 10 incorporates a control unit (control means) 26 that comprehensively controls the operation of each member of the dicing apparatus 10.

  FIG. 2 is a perspective view showing the structure of the processing portion 18.

  As shown in FIG. 2, the processing unit 18 includes an X table 34. The X table 34 is guided by X guides 30 and 30 provided on the X base 28 and is driven by the linear motor 32 in the X direction indicated by an arrow XX. A rotary table 36 that rotates in the θ direction is fixed on the upper surface of the X table 34, and the work table 16 is provided on the rotary table 36. Therefore, the work table 16 is moved in the X direction by the X table 34 and rotated in the θ direction by the rotary table 36.

  In addition, the processing unit 18 includes a Y base 38 configured in a gate shape so as to straddle the X base 28. A pair of Y tables 42 and 42 are provided on the wall surface of the Y base 38. The pair of Y tables 42 and 42 are guided by Y guides 40 and 40 fixed to the wall surface of the Y base 38, and are driven in the Y direction indicated by arrows Y-Y by a driving device including a stepping motor and a ball screw (not shown). Is done.

  The Y tables 42 and 42 are provided with Z tables 44 and 44, respectively. The Z tables 44, 44 are guided by a Z guide (not shown) provided on the Y table 42, and are driven in the Z direction indicated by an arrow ZZ by a driving device including a stepping motor and a ball screw (not shown). The spindles 14 and 14 are fixed to the Z tables 44 and 44 so as to face each other, and the blades 12 and 12 attached to the tip portions of the spindles 14 and 14 are arranged to face each other.

  With the configuration of the processing section 18, the blades 12 and 12 are indexed in the Y direction and cut and fed in the Z direction, and the work table 16 is cut and fed in the X direction and rotated in the θ direction. These operations are controlled by the control unit 26 (see FIG. 1). In particular, since the amount of cut in the Z direction is controlled according to the amount of protrusion of the blade portion of the blade 12, a new one is obtained as the blade 12 is replaced. The amount of protrusion of the correct blade is input to the control unit 26 of the dicing apparatus 10. The protrusion amount of the blade portion of the blade 12 will be described later.

  The aforementioned X direction refers to one direction in the horizontal direction, and the Y direction refers to a direction orthogonal to the X direction in the horizontal direction. Further, the Z direction indicates a vertical direction orthogonal to the X direction and the Y direction, respectively, and the θ direction indicates a rotation direction with the vertical axis as a central axis.

  FIG. 3A is a front view of the blade 12, and FIG. 3B is a cross-sectional view of the blade 12.

  As shown in FIGS. 3A and 3B, the blade 12 has a blade portion 48 attached to the outer peripheral edge portion of one end face of a hub (also referred to as a flange) 50 made of an aluminum alloy or the like. Composed. The blade portion 48 is provided on the hub 50 by electroforming abrasive grains such as diamond. Further, a mounting hole 46 for mounting the blade 12 on the spindle 14 of the dicing apparatus 10 is provided at the center of the hub 50.

  The blade part 48 is a part cut into the workpiece W. The thickness t (also referred to as blade thickness) of the blade portion 48 is configured to be at least thinner than the thickness of the workpiece W. For example, when cutting a workpiece W having a thickness of 100 μm, the thickness t of the blade portion 48 is preferably 50 μm or less, more preferably 30 μm or less, and even more preferably 10 μm or less. Further, the cross-sectional shape of the blade portion 48 may be a straight shape having a uniform thickness or a tapered shape in which the thickness gradually decreases toward the outer periphery.

  Here, a value obtained by subtracting the outer diameter φ2 of the hub 50 from the outer diameter φ1 of the blade portion 48 is the protrusion amount a of the blade portion 48 described above. The protrusion amount “a” of the blade portion 48 decreases as the machining time elapses, and is reset by replacing the blade 12 with a new blade 12.

  Since the protrusion amount a of the blade portion 48 is a large element for controlling the cutting amount in the Z direction as described above, a detection device that detects the position of the blade edge of the blade 12 even during processing with the same blade 12. The protrusion amount of the blade portion is indirectly measured, and the measured protrusion amount is updated to the control unit 26. Further, when the blade 12 is replaced, the protrusion amount of the blade portion of the blade after the replacement is reset to the control unit 26. In the case of a new blade 12, the protrusion amount a of the blade portion 48 is specified as a catalog value.

  By the way, the blade 12 in this embodiment is provided with a barcode 52 as shown in FIG. The bar code 52 is provided on the surface of the hub 50 of the blade 12 and is configured as an identification medium on which a blade identification code for identifying the blade 12 is recorded. That is, the bar code 52 includes information for individually identifying the blade from the plurality of blades 12.

  The dicing apparatus 10 of the present embodiment has the following configuration in order to read the barcode 52 provided on the blade 12.

  FIG. 4 is a block diagram showing a configuration for reading the barcode 52 provided on the blade 12 in the dicing apparatus 10 of the first embodiment.

  As shown in FIG. 4, the dicing apparatus 10 according to the first embodiment includes a barcode reader (identification medium reading means) 54 that reads a barcode 52 (that is, a blade identification code) provided on the blade 12, and a plurality of barcode readers 52. A storage unit 56 that stores blade information corresponding to each blade 12 in association with the blade identification code described above, and a blade identification code read by the barcode reader 54 from a plurality of blade information stored in the storage unit 56 And a control unit 26 for controlling the processing unit 18 based on the blade information read by the reading unit 58. In addition, the memory | storage part 56 in 1st Embodiment is provided in the inside of the main body of the dicing apparatus 10, and is an example of the memory | storage means (internal storage medium) of this invention.

  The blade information includes at least the outer diameter φ1 of the blade portion 48 of the blade 12, the thickness t of the blade portion 48, and the protrusion amount a of the blade portion 48. The particle size (count), concentration (content), and type of binder may be included. The blade information may be a catalog value or detailed information measured after the blade 12 is manufactured.

  FIG. 5 is a diagram illustrating an example of blade information stored in the storage unit 56.

  As shown in FIG. 5, the storage unit 56 stores blade information corresponding to a plurality of blades 12 as tabular data associated with blade identification codes.

  Here, in FIG. 5, the three-digit numbers (001, 002, 003 to nnn) shown in the item “ID” (identification) column are blades that are identification information for individually identifying the plurality of blades 12. As blade information associated with the blade identification code, the blade outer diameter φ1 (mm), the blade thickness t (μm), the blade protrusion a (mm), abrasive grains, particle size, concentration The degree, binder, etc. are stored.

  For example, when the blade identification code of the barcode 52 read by the barcode reader 54 is “001”, the reading unit 58 reads the blade corresponding to the blade identification code (ID) “001” from the storage unit 56. Information (blade part outer diameter φ1 (mm), blade part thickness t (μm), blade part protrusion amount a (mm), abrasive grains, particle size, degree of concentration, binder) is read. Then, the control unit 26 stores the blade information read by the reading unit 58 in a RAM (Random Access Memory) 60 of the control unit 26 and controls the processing unit 18 based on the blade information stored in the RAM 50.

  In FIG. 5, the case where the ID is a three-digit number is shown as an example as the blade identification code. However, the number is not limited to this, and may be a number of other digits, for example. Further, the information is not particularly limited as long as it can identify the blades 12 individually. For example, it may be a graphic such as ◯ Δ □, a symbol such as an alphabet, a number, a color, or a combination thereof.

  With the above configuration, in the dicing apparatus 10 of the first embodiment, when the blade 12 is replaced from an old one to a new one (including a case where the blade 12 is newly attached), the barcode 52 provided on the blade 12 is used. Is read by the bar code reader 54 provided in the dicing apparatus 10, the blade information corresponding to the read blade identification code (ID) is read from the storage unit 56 by the reading unit 58. Then, the control unit 26 controls the processing unit 18 based on the blade information read by the reading unit 58. The timing at which the barcode 52 of the blade 12 is read by the barcode reader 54 may be before the blade 12 is attached to the spindle 14 or after it is attached.

  The specific control of the processing unit 18 by the control unit 26 is as follows. When the processing unit 18 is driven in the Y direction or the Z direction, the read blade information, that is, the blade part outer diameter φ1, the blade part thickness t, and the blade part. The amount of movement in the Y direction or the Z direction is adjusted with reference to the protrusion amount a. Thereby, the cutting process specialized for the blade 12 becomes possible.

  As described above, according to the dicing apparatus 10 of the first embodiment, the blade information corresponding to the plurality of blades 12 is stored in the storage unit 56 of the dicing apparatus 50 and the barcode 52 read by the barcode reader 54 is stored. Based on the blade identification code, blade information corresponding to the blade 12 is automatically read, and processing is performed based on the read blade information. Therefore, it is possible to reduce the labor and time required for inputting blade information when replacing the blade 12, and to prevent a decrease in throughput due to the replacement of the blade 12. As a result, the operating time of the dicing apparatus 10 can be increased, and the overall throughput can be improved.

<Second Embodiment>
Next, a second embodiment of the present invention will be described. Hereinafter, description of parts common to the above-described embodiment will be omitted, and description will be made focusing on characteristic parts of the present embodiment.

  FIG. 6 is a block diagram showing the configuration of the dicing apparatus 10A of the second embodiment. In FIG. 6, the same or similar components as those in FIG. 4 are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 6, in the dicing apparatus 10A of the second embodiment, blade information corresponding to a plurality of blades 12 is stored in a memory card (external storage medium) 62 in association with the blade identification code described above.

  Therefore, the dicing apparatus 10 </ b> A is read via the bar code reader 54 that reads the bar code 52 provided on the blade 12, the card reader 64 that reads the blade information stored in the memory card 62, and the card reader 64. A reading unit 58 that reads blade information corresponding to the blade identification code read by the barcode reader 54 from the plurality of blade information, and the processing unit 18 is controlled based on the blade information read by the reading unit 58. And a control unit 26.

  In the memory card 62, blade information (see FIG. 5) similar to that in the first embodiment described above is stored in association with each blade identification code (ID).

  The memory card 62 is an example of an external storage medium that can be detachably mounted from the dicing apparatus 10A. For example, various memory cards such as an SD (Secure Digital) card and an SDHC (Secure Digital High Capacity) card can be applied. In addition, a stick-shaped USB (Universal Serial Bus) memory can also be applied.

  With the above configuration, in the dicing apparatus 10A of the second embodiment, when the blade 12 is replaced with a new one, the barcode 52 of the blade 12 is read by the barcode reader 54 provided in the dicing apparatus 10A. The reading unit 58 reads the blade information corresponding to the read blade identification code (ID) from the memory card 62 via the card reader 64. Then, the control unit 26 controls the processing unit 18 based on the read blade information. Since the specific control of the processing unit 18 by the control unit 26 is the same as that of the dicing apparatus 10 of the first embodiment, the description thereof is omitted here.

  As described above, according to the dicing device 10A of the second embodiment, the same effects as those of the first embodiment described above can be obtained, and a plurality of memory cards 62 that can be detachably attached to the dicing device 10A can be provided. Since the blade information corresponding to the blade 12 is stored, the memory card 62 can be carried to a place different from the dicing apparatus 10A, and operations such as inputting and editing blade information to the memory card 62 can be performed. In addition, it is possible to improve convenience.

<Third Embodiment>
Next, a third embodiment of the present invention will be described. Hereinafter, description of parts common to the above-described embodiment will be omitted, and description will be made focusing on characteristic parts of the present embodiment.

  FIG. 7 is a block diagram showing a configuration of a dicing apparatus 10B according to the third embodiment. In FIG. 7, the same or similar components as those in FIG. 4 are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 7, in the dicing apparatus 10 </ b> B of the third embodiment, blade information corresponding to a plurality of blades 12 is stored in a server (external storage device) 66 in association with the aforementioned blade identification code. The server 66 is provided at a position distant from the dicing apparatus 10B, and is connected to the dicing apparatus 10B via a wired or wireless network.

  Therefore, the dicing apparatus 10B includes a barcode reader 54 that reads the barcode 52 provided in the blade 12, a communication unit (communication control unit) 68 for transmitting and receiving various data between the server 66, and a communication unit. Based on the reading unit 58 that reads out blade information corresponding to the blade identification code read by the barcode reader 54 from the plurality of blade information read through the reading unit 68 and the blade information read out by the reading unit 58. And a control unit 26 for controlling the processing unit 18.

  The server 66 stores blade information (see FIG. 5) similar to that of the first embodiment described above in association with each blade identification code (ID).

  With the above configuration, in the dicing device 10B of the third embodiment, when the blade 12 is replaced with a new one, the barcode 52 of the blade 12 is read by the barcode reader 54 provided in the dicing device 10B. Blade information corresponding to the read blade identification code (ID) is read from the server 66 by the reading unit 58 via the communication unit 68. Then, the control unit 26 controls the processing unit 18 based on the read blade information. Since the specific control of the processing unit 18 by the control unit 26 is the same as that of the dicing apparatus 10 of the first embodiment, the description thereof is omitted here.

  As described above, according to the dicing device 10B of the third embodiment, the same effects as those of the second embodiment described above can be obtained, and the server 66 can be connected to the server 66 from a position different from the dicing device 10 via a network (not shown). Thus, it is possible to perform operations such as inputting and editing blade information to the server 66, and it is possible to improve workability and convenience.

(Other)
In each of the above-described embodiments, the barcode 52 is shown as an example of the identification medium provided on the blade 12, but the present invention is not limited to this. That is, it is sufficient if it includes a blade identification code that can identify a specific blade from among the plurality of blades 12, and may be a two-dimensional code, for example. Moreover, as long as it can be recognized as a blade identification code, for example, a figure such as ◯ Δ □, a symbol such as an alphabet, a number, a color, or a combination thereof may be used. Furthermore, the identification medium may be provided on the blade 12 by a sticking method, or may be provided directly on the blade 12 by imprinting on the blade 12 or the hub 50.

  An RFID (Radio Frequency Identifier) tag may be applied as the identification medium. Since the barcode and the two-dimensional code are printed matter, the writing information cannot be changed. However, since the RFID tag can write the information, the history information (the usage time and the dicing device used) of the blade 12 is specified. It is possible to write an identification symbol) as a blade identification code. Further, since the RFID tag can be read even if it is dirty, a reading / writing device (also referred to as a reader / writer) can be installed in the processing unit 18 to read blade information recorded on the RFID tag. That is, the blade information recorded on the RFID tag can be read even in the processing portion 18 in an environment where cutting water, cooling water, and cutting powder are scattered. Furthermore, in the case of an RFID tag, history information on the process of using the blade 12 can be written by the reader / writer without removing the blade 12 from the spindle 14.

  W ... Work, 10 ... Dicing machine, 10A ... Dicing machine, 10B ... Dicing machine, 12 ... Blade, 14 ... Spindle, 16 ... Work table, 18 ... Working part, 20 ... Washing part, 22 ... Load port, 24 ... Transport Device: 26 ... Control unit, 28 ... X base, 30 ... X guide, 32 ... Linear motor, 34 ... X table, 36 ... Rotary table, 38 ... Y base, 40 ... Y guide, 42 ... Y table, 44 ... Z Table, 46 ... Mounting hole, 48 ... Blade part, 50 ... Hub, 52 ... Bar code, 54 ... Bar code reader, 56 ... Storage part, 58 ... Reading part, 60 ... RAM, 62 ... Memory card, 64 ... Card reader , 66 ... server, 68 ... communication section

Claims (6)

A machining section that cuts the workpiece with the blade while relatively moving the workpiece and the blade;
An identification medium provided on the blade, an identification medium reading means for reading the identification medium on which a blade identification code is recorded;
Storage means for storing blade information corresponding to a plurality of blades in association with the blade identification code;
Reading means for reading blade information corresponding to the blade identification code read by the identification medium reading means from among the plurality of blade information stored in the storage means;
Control means for controlling the processing unit based on the blade information read by the reading means;
A dicing apparatus comprising: The identification medium is a barcode or a two-dimensional code.
The dicing apparatus according to claim 1. The blade information includes information on at least one of the outer diameter of the blade portion of the blade, the thickness of the blade portion, and the protruding amount of the blade portion,
The dicing apparatus according to claim 1 or 2. The storage means is an internal storage medium provided in the dicing apparatus.
The dicing apparatus according to any one of claims 1 to 3. The storage means is an external storage medium configured to be detachable from the dicing apparatus.
The dicing apparatus according to any one of claims 1 to 3. The storage means is an external storage device connected to the dicing device via a network.
The dicing apparatus according to any one of claims 1 to 3.

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