JP2008071023A - Inspection information providing system and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To surely provide information about the inspection of a working tool to a user of the working tool to allow the user to use the inspection information provided, without placing a burden on the user or manufacturer of the tool. <P>SOLUTION: In the manufacturer's computer 4, a storage means 41 stores the identification information of the working tool and the inspection information of the working tool in association with each other. When specific identification information is sent from a user's computer 3, an inspection information retrieval means 42 retrieves inspection information corresponding to the identification information and sends the inspection information to the user's computer 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a system and method in which a manufacturer provides inspection information on a machining tool to a user.

  In various types of processing apparatuses, processing is performed with a mounted processing tool. For example, in a grinding apparatus that grinds a wafer or the like, a grinding wheel provided with a grinding wheel is a processing tool, and in a cutting apparatus that cuts a wafer or the like, a cutting blade is configured to protrude from the outer periphery of a circular base. The blade is a processing tool, and all the processing tools are provided to the user from the manufacturer as consumables.

  There is a slight manufacturing error in each processing tool, and this error also affects the processing accuracy. Therefore, when providing a user with a processing tool as a consumable, the manufacturer provides inspection information on the processing tool to the user as a quality assurance. The inspection information is provided to the user by handing over a document on which the inspection information is written, passing a recording medium on which a file is recorded, or sending an electronic file by electronic mail.

  In the example of the cutting apparatus, the inspection information includes the width of the cutting groove formed by cutting using the cutting blade of each cutting blade (kerf width), the inner diameter formed at the center of the base and inserted into the spindle, It is constituted by the outer diameter of the cutting blade.

  On the user side, the operator inputs the provided inspection information into a control device or the like that controls the processing apparatus. And the control apparatus ensures the precision of a process by utilizing the input data for the control at the time of a process. In some cases, the inspection information is provided as a barcode. In this case, the inspection information is input to the control device or the like by reading the barcode on the user side (see, for example, Patent Document 1).

JP 2001-144034 A

  However, even if the inspection information is sent in writing, a recording medium, or an e-mail, the operator must input the inspection information to the control device or the like on the user side, which is a heavy burden. On the other hand, on the maker side, inspection information must be individually created for each user and each processing tool, and inspection information for a processing tool different from the delivered processing tool may be erroneously sent. In addition, when inspection information is provided by a recording medium or electronic mail, a file having a compatible data format must be created, which is a heavy burden.

  Therefore, the problem to be solved by the present invention is to reliably provide the user with the inspection information of the processing tool without burdening both the user side and the manufacturer side of the processing apparatus, and to provide the inspection information provided to the user. To make it available on the side.

  1st invention is the inspection information which transmits the inspection information of a processing tool from the maker side computer to the user side computer, comprising a maker side computer and a user side computer connected via communication means. In the providing system, the computer on the manufacturer side stores storage means for storing the identification information attached corresponding to the processing tool and the inspection information of the processing tool in association with each other, and inspection information corresponding to the specific identification information. Inspection information retrieval means for retrieving from the storage means, and information transmission means for transmitting the identification information and the retrieved inspection information to the user side computer, wherein the user side computer obtains the inspection information. Input means used for inputting the identification information, identification information transmitting means for transmitting the identification information to the manufacturer's computer, mail Receiving information storage means for receiving and storing the identification information and the inspection information transmitted from the computer on the side, and the inspection information retrieval means retrieves the inspection information corresponding to the identification information transmitted by the identification information transmission means Then, the information transmission means transmits the inspection information to the user computer.

  When the processing tool is a cutting blade composed of a circular base and an annular cutting blade protruding from the outer periphery of the circular base, the inspection information includes a measured value of the protruding amount of the cutting blade, and the cutting blade. It is desirable that at least the measured value of the width of the cutting groove formed by cutting the workpiece by the above. In this case, the computer on the user side reads the information on the measured value of the protruding amount of the cutting blade or the measured value of the width of the cutting groove from the received information storage means, and performs numerical control of the processing device on which the processing tool is mounted. It is desirable to provide a control means.

  It is desirable that the identification information is composed of serial number information given to each processing tool and password information for obtaining inspection information.

  A second invention is an inspection information providing method for providing inspection information of a processing tool constituting a processing apparatus to a user side computer from a maker side computer via a communication means. The identification information given in correspondence with the processing tool and the inspection information are associated with each other and stored in the storage means. The identification information transmitted from the computer on the user side is received, and the inspection information corresponding to the identification information is stored in the storage means. The identification information and the searched inspection information are transmitted to the user computer, and the user computer receives the inspection information transmitted from the manufacturer computer.

  When the processing tool is a cutting blade composed of a circular base and an annular cutting blade protruding from the outer periphery of the circular base, the inspection information includes a measured value of the protruding amount of the cutting blade, and the cutting blade. It is desirable that at least the measured value of the width of the cutting groove formed by cutting the workpiece by the above. In this case, the computer on the user side performs numerical control of the processing device on which the processing tool is mounted using information on the measured value of the cutting edge protrusion or the measured value of the width of the cutting groove included in the received inspection information. It is desirable to do.

  It is desirable that the identification information is composed of serial number information given to each processing tool and password information for obtaining inspection information.

  According to the present invention, inspection information on a machining tool is stored in a computer on the manufacturer side, and identification information on the machining tool is transmitted from the computer on the user side, whereby the inspection information on the processing tool can be acquired as electronic data. Inspection information can be reliably provided for each user and each processing tool, and for the user, the inspection information can be obtained as electronic data. Moreover, the acquired data can be used for processing control as it is.

  The inspection information providing system 1 shown in FIG. 1 is configured by connecting a user side computer 3 that controls a user side processing apparatus 2 and a manufacturer side computer 4 via a communication means 5 such as the Internet. Information can be exchanged between the computer 4 and the manufacturer computer 4. In the example of FIG. 1, the user side computer 3 is provided outside the processing apparatus 2, but the user side computer 3 may be built in the processing apparatus 2.

  The processing device 2 is a device that cuts a wafer or the like, and a chuck table 20 that holds the wafer W integrated with the frame F via the tape T, and a cutting means that cuts the wafer W held on the chuck table 20. 21. A bar code reader 22 is provided on the front side of the apparatus. Information recognized by the barcode reader 22 can be transferred to the user side computer 3. Note that the barcode reader 22 may be provided outside the processing apparatus 2.

  As shown in FIG. 2, the cutting means 21 includes a spindle 24 rotatably supported by a housing 23, a processing tool 25 attached to the spindle 24, and a nut 26 for fixing the processing tool 25 to the spindle 24. Consists of The processing tool 25 is a cutting blade composed of a circular base 250 in which a central hole 250 a for inserting the spindle 24 is formed at the center, and an annular cutting blade 251 protruding from the outer periphery of the circular base 250. Yes, it is a consumable that is replaced according to the degree of wear of the cutting blade 251. The operation of the cutting means 21 is controlled by the user computer 3.

  As shown in FIG. 3, the center hole 250a formed in the circular base 250 has an inner diameter R1 corresponding to the outer diameter of the spindle 24 shown in FIG. Further, the cutting blade 251 that is fixed to the peripheral edge of the circular base 250 and protrudes to the outer peripheral side has an outer diameter R2. Since manufacturing errors may occur in the inner diameter R1 and the outer diameter R2, the inner diameter R1 and the outer diameter R2 are measured for each processing tool.

  The cutting blade 251 protrudes from the outer periphery of the circular base 250 by about several mm. Since a manufacturing error may occur in the protrusion amount, the protrusion amount is individually measured as the blade tip protrusion amount P. Although the thickness of the cutting blade 251 is exaggerated in FIG. 3, the thickness is actually formed to be about several tens of μm.

  For each processing tool 25, as shown in FIG. 4, a cutting blade 251 that rotates at high speed is cut into the wafer W to form the kerf G shown in FIG. 5, and the width L of the formed kerf G is reduced. By measuring, it is indirectly understood whether or not the thickness of the cutting blade 251 is within an allowable error range. Such work is performed for all processing tools to be shipped.

  Each processing tool 25 is accommodated in, for example, an individual case 6 shown in FIG. 6 and delivered to the user. As shown in FIG. 7, the individual case 6 is provided with a barcode 60 indicating a production number as identification information corresponding to each processing tool. As shown in FIG. 8, when a plurality of processing tools are accommodated together in the large case 7, a serial number barcode 70 is provided on the large case 7 as identification information corresponding to the stored processing tools. Is attached. That is, the barcode 70 attached to the large case 7 is a parent code, and the barcode 60 attached to the individual case 6 is a child code.

  The maker-side computer 4 shown in FIG. 1 has a function as a Web server and can provide information according to access from a user. As shown in FIG. 9, the manufacturer-side computer 4 includes an input unit 40 used to input identification information and inspection information attached to the processing tool, and inspection information input from the input unit 40 as identification information of the processing tool. Storage unit 41 that stores the information in association with each other, inspection information search unit 42 that searches for inspection information corresponding to specific identification information from storage unit 41, and information that associates the identification information with the searched inspection information Information transmitting means 43 for transmitting to the computer 3 is provided. In the storage means 41, processing tool identification information and inspection information such as measurement values are stored in association with each other. The inspection information includes, for example, the inner diameter R1 and outer diameter R2 shown in FIG. 3, the kerf width L shown in FIG. These values are input from the input unit 40 and stored in the storage unit 41.

  As shown in FIG. 9, the user side computer 3 includes an input unit 30 used for inputting identification information for obtaining examination information, and an identification for transmitting the identification information input from the input unit 30 to the manufacturer side computer 4. Information transmitting means 31, display means 32 for receiving and displaying information transmitted from the maker side computer 4, and received information storage means 33 for receiving and storing identification information and inspection information transmitted from the maker side computer 4. And a machining control means 34 for controlling the machining apparatus 2.

  The operator on the user side operates the input means 30 to input identification information corresponding to the machining tool for which inspection information is to be acquired. Here, when the processing tool is accommodated in the large case 7 as in the example of FIG. 8, the input unit 30 first reads the parent code 70 as the identification information. The input means 30 in this case is the barcode reader 22 shown in FIG. Instead of the barcode reader 22, the value of the parent code 70 can be input from an input means such as a keyboard.

  When the user-side computer 3 accesses and connects to the manufacturer-side computer 4 via the communication means 5, for example, menu screen information is transmitted to the user-side computer 3, and the menu screen 8 shown in FIG. Is displayed. When the operator of the user side computer 3 operates the input means 30 and selects “Precision processing tool inspection table search”, the manufacturer side computer 4 then sends screen information for prompting the input of the identification number to the user side computer 3. For example, the input screen 9 shown in FIG.

  When the operator of the user side computer 3 reads the barcode 70 shown in FIG. 8 using the barcode reader 22 shown in FIG. 1 or inputs the parent code information by an input means such as a keyboard, the read information is read. The parent code information is transmitted to the manufacturer computer 4 via the communication unit 5 by the identification information transmission unit 31. The identification information read from the input means 30 can include password information for obtaining inspection information along with the manufacturing number. In this case, the manufacturer-side computer 4 collates the received password with a previously stored password, and if both passwords match, access to the manufacturer-side computer 4 is permitted.

  In the manufacturer-side computer 4 that has received the parent code information, the inspection information search means 42 searches the storage means 41, and the information transmission means 43 associates the identification information corresponding to the parent code information with the inspection information, and the user side computer. 3 to send. The user computer 3 that has received this information causes the display means 32 to display list information in which the machining tool identification information and the inspection information are associated with each other as shown in the display example 10 of FIG. In display example 10, the parent code is displayed as “BOX No.” and the identification information and inspection information of a plurality of processing tools housed in the large case 7 whose “BOX No.” is “WH0401010001AA” are displayed. Has been. The identification information and the inspection information of the plurality of machining tools are stored in the reception information storage unit 33. Not all identification information and inspection information, but the operator operates the input means 30 to select one or more machining tools from the displayed information, and identification information and inspection information of the selected machining tool May be stored in the received information storage means 33.

  In the display example 10 of FIG. 12, a serial number is used as identification information. On the other hand, the inspection information includes information on the kerf width value, the degree of concentration pass / fail, the value of the blade tip amount, the pass / fail of the outer periphery during rotation, the pass / fail for the inner diameter, the pass / fail for the outer diameter, the pass / fail for the appearance inspection, Consists of.

  The processing control means 32 can be used for numerical control in processing by reading the inspection information from the reception information storage means 33. For example, in the display example 10, when the identification information and the inspection information of the processing tool having the manufacturing number “H04010100102” are stored in the reception information storage unit 32, when the wafer is cut using the processing tool, the reception information It is assumed that the value of the kerf width “0.036 mm” constituting the inspection information is read from the storage means 32, and the width of the kerf actually formed by cutting the wafer street becomes 0.036 [mm]. Numerical control of the cutting means 21 shown in FIG. 2 can be performed.

  In the above example, since the processing tool is accommodated in the large case 7, the barcode attached to the large case 7 is transmitted to the manufacturer computer 4 as identification information, and all the processing tools accommodated in the large case are stored. Although the inspection information is stored in the reception information storage means 32, the identification information when the processing tool is accommodated only in the individual case 6 and not accommodated in the large case 7 is only the production number information, or the production number information and the password. Information. In this case, when the identification information is transmitted from the user side computer 3, only the identification information and the inspection information of the processing tool are displayed on the display unit 31.

It is explanatory drawing which shows an example of the apparatus structure of a test | inspection information provision system. It is a disassembled perspective view which shows an example of a structure of a cutting means. It is a side view which shows a cutting blade. It is sectional drawing which shows schematically the state which forms a kerf on a wafer. It is sectional drawing which shows the kerf formed in the wafer. It is a perspective view which shows a cutting blade and an individual case. It is a top view which shows an individual case. It is a perspective view which shows a large sized case. It is a block diagram which shows an example of a function structure of a test | inspection information provision system. It is explanatory drawing which shows an example of a menu screen. It is explanatory drawing which shows an example of an input screen. It is explanatory drawing which shows the example of a display of a user side computer.

Explanation of symbols

1: Inspection information providing system 2: Processing device 20: Chuck table 21: Cutting means 22: Bar code reader (input means)
23: Housing 24: Spindle 25: Processing tool 250: Circular base 251: Cutting blade 26: Nut 3: User computer 30: Input means 31: Identification information transmission means 32: Display means 33: Received information storage means 34: Processing Control means 4: Manufacturer side computer 40: Input means 41: Storage means
42: Inspection information search means 43: Information transmission means 5: Communication means 6: Individual case 60: Bar code 7: Large case 70: Bar code 8: Menu screen 9: Input screen 10: Display example

Claims (8)

This is an inspection information providing system in which a manufacturer's computer and a user's computer are connected via communication means, and the inspection information of a processing tool is transmitted from the manufacturer's computer to the user's computer. And
The manufacturer's computer stores, from the storage means, storage means for storing the identification information attached corresponding to the processing tool and the inspection information of the processing tool in association with each other, and inspection information corresponding to the specific identification information. Inspection information search means for searching, and information transmission means for transmitting the identification information and the searched inspection information to the computer on the user side,
The computer on the user side includes input means used for inputting identification information of a machining tool for which inspection information is to be acquired, identification information transmission means for transmitting the identification information to the manufacturer side computer, and the manufacturer side computer. Receiving information storage means for receiving and storing the identification information and the inspection information transmitted from
An inspection information providing system in which the inspection information search unit searches for inspection information corresponding to the identification information transmitted by the identification information transmission unit, and the information transmission unit transmits the inspection information to the computer on the user side. The processing tool is a cutting blade composed of a circular base and an annular cutting blade protruding from the outer periphery of the circular base,
The inspection according to claim 1, wherein the inspection information includes at least a measured value of a protruding amount of the cutting blade and a measured value of a width of a cutting groove formed by cutting a workpiece with the cutting blade. Information provision system.   The computer on the user side performs numerical control of a processing device on which the processing tool is mounted by reading out information on the measurement value of the protrusion amount of the cutting blade or the measurement value of the width of the cutting groove from the reception information storage unit The inspection information providing system according to claim 2, further comprising a control unit.   4. The inspection information providing system according to claim 1, wherein the identification information includes manufacturing number information attached to each processing tool and password information for acquiring the inspection information. An inspection information providing method for providing inspection information of a processing tool from a manufacturer computer to a user computer via communication means,
In the manufacturer's computer, the identification information assigned to the processing tool is associated with the inspection information and stored in the storage means, and the identification information transmitted from the user's computer is received and the identification information is received. Search for the inspection information corresponding to the information from the storage means, and send the identification information and the searched inspection information to the computer on the user side,
A method for providing inspection information, wherein the user computer receives inspection information transmitted from the manufacturer computer. The processing tool is a cutting blade composed of a circular base and an annular cutting blade protruding from the outer periphery of the circular base,
The inspection according to claim 5, wherein the inspection information includes at least a measured value of a protruding amount of the cutting blade and a measured value of a width of a cutting groove formed by cutting a workpiece with the cutting blade. How to provide information.   The computer on the user side performs numerical control of the processing device on which the processing tool is mounted using information on the measured value of the protruding amount of the cutting blade or the measured value of the width of the cutting groove included in the received inspection information. The inspection information providing method according to claim 6.   The inspection information providing system according to claim 5, 6 or 7, wherein the identification information includes manufacturing number information attached to each processing tool and password information for acquiring the inspection information.

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