JP6844985B2 - How to use the dressing board - Google Patents

Description

The present invention relates to a dressing board for sharpening a cutting blade for cutting an workpiece such as a semiconductor wafer and a method of using the sharpening board.

Wafers, in which devices such as ICs and LSIs are partitioned by scheduled division lines and formed on the surface, are divided into individual devices by a cutting device equipped with a rotatable cutting blade, and are used in electrical equipment such as mobile phones and personal computers. To.

The cutting device rotatably provides a chuck table for holding the waha, a cutting means for cutting the waha held on the chuck table, and the chuck table and the cutting means are relatively cut and fed. A cutting feed means, an index feed means for relatively indexing and feeding the chuck table and the cutting means, a cutting feed means for relatively cutting and feeding the chuck table and the cutting means, and a region to be cut. The wafer can be divided into individual devices with high accuracy, which is generally composed of an imaging means for detection (see, for example, Patent Document 1).

The cutting blades provided in the cutting means are an electrocast blade in which diamond abrasive grains and the like are hardened by nickel plating, a metal blade in which diamond abrasive grains and the like are hardened by a metal bond, and a resin in which diamond abrasive grains and the like are hardened by a resin bond. In addition to the type of blade and the like, it is selected from various cutting blades configured under many conditions such as the size of abrasive grains, the length and width of the cutting blade.

When starting to use these cutting blades, it is known that a dummy wafer made of a material similar to the material of the wafer is used as a dressing board to sharpen the wafer in order to improve the compatibility with the wafer. (See, for example, Patent Document 2). In addition, when the cutting ability is reduced due to blinding during cutting, the cutting ability is appropriately sharpened by a dressing board called a dressing board in order to regain the cutting ability of the cutting blade (this is called "retouching"). (Sometimes.) Is also done (see, for example, Patent Document 3).

Japanese Unexamined Patent Publication No. 05-315444 Japanese Patent No. 5541657 Japanese Unexamined Patent Publication No. 2006-218571

As mentioned above, there are many types of cutting blades such as material and size of abrasive grains, and in order to use these cutting blades in good condition at all times, appropriate sharpening corresponding to the type of cutting blade is required. Must be sharpened using a board. However, it is complicated to manage which cutting blade the plurality of dressing boards prepared for corresponding to a large number of cutting blades correspond to, and if the management is neglected, the cutting is performed by the wrong dressing board. This leads to sharpening of the blade, which causes problems such as damage to the cutting blade and abnormal wear of the cutting blade.

The present invention has been made in view of the above facts, the main technical problem provides a method of using a dressing board, which can perform dressing by using appropriate dressing board according to the type of the cutting blade There is.

To solve the above object, according to the present invention, there is provided a dressing board that performs conditioning of the cutting blade for cutting the workpiece, a plurality of grooves in the edge portion of the outer periphery is formed, the number of the groove or type of fit cutting blades with spacing functions as one-dimensional bar code, dressing conditions, the type of dressing board, the dressing board information on sharpening of the cutting blades is displayed that contains at least one of the thickness of the dressing board It is a method of use, in which the blade type registration step of registering the type of the cutting blade equipped in the cutting device to the control means of the cutting device by the operator, and the imaging means of the cutting device to register a plurality of grooves of the prepared dressing board. The cutting blade registered by the sharpening information registration step and the blade type registration step in which the information on the dressing is read by transmitting the image information captured by imaging to the control means and the information on the sharpening is registered in the control means. The control means determines whether or not the dressing board is compatible with the cutting blade based on the type of the dressing and the information on the dressing registered by the dressing information registration step, and the result obtained by the judgment step. Based on the above, a method of using a dressing board including at least a display step in which the control means displays a conformity or nonconformity on the display means is provided.

The method of using the dressing board configured based on the present invention includes a blade type registration step in which the type of the cutting blade equipped in the cutting device is registered by the operator in the control means of the cutting device, and a plurality of prepared dressing boards. captured by the imaging means of the cutting device grooves reads information about dressing by sending to the control unit to the image information captured by the toothing information registering step in which information about the said purpose stand is registered in the control means, the blade type a judgment step of whether the control means said purpose stand board based on the information about the dressing registered by type and said purpose fresh information registration step of cutting blade registered by the registration step are compatible with the cutting blade to determine, Based on the result obtained by the determination step, the control means includes at least a display step for displaying the conformity or nonconformity on the display means, so that the operator does not have to perform complicated confirmation work. It is possible to confirm whether or not the dressing board is suitable for the cutting blade, and it is possible to perform proper dressing.

It is a perspective view of the dressing board constructed according to this invention, and the cutting apparatus equipped with the cutting blade which is sharpened by using the dressing board. It is explanatory drawing for demonstrating the dressing information registration step in the usage method of the dressing board carried out by the cutting apparatus shown in FIG. It is explanatory drawing for demonstrating the cutting feed process performed by the cutting apparatus shown in FIG.

Hereinafter, a preferred embodiment of a dressing board configured according to the present invention and a method of using the dressing board will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a perspective view of a cutting apparatus equipped with a cutting blade that is sharpened using a dressing board configured according to the present invention. The cutting device in the illustrated embodiment includes a device housing 2 having a substantially rectangular parallelepiped shape. In the device housing 2, the cover table 3 and the chuck table 4 for holding the workpiece are movably arranged in the direction indicated by the arrow X, which is the cutting feed direction. The cover table 3 is provided with an opening 31 in the center, and the chuck table 4 is rotatably arranged by a rotation mechanism (not shown) by inserting the opening 31. The chuck table 4 is provided with a suction chuck 41 on the upper surface thereof, and the work piece is suction-held by operating a suction means (not shown) on the holding surface which is the upper surface of the suction chuck 41. .. The cover table 3 and the chuck table 4 configured in this way can be moved in the cutting feed direction indicated by the arrow X by a cutting feed means (not shown). On the upper surface of the device housing 2 incorporating the spindle unit 6, display means 9 for displaying various information based on a signal from a control means described later is erected, and work information, information related to sharpening described later, and the like are erected. Is displayed.

The cover table 3 is provided with a holding table 5 that holds a sharpening board for sharpening the cutting blade described later. The holding table 5 is formed in a rectangular shape and is provided on a holding base 51 arranged on the spindle unit 6 side adjacent to the chuck table 4. The upper surface 5a, which is the holding surface of the holding table 5, is set to have the same height as the upper surface of the suction chuck 41. It is designed to suck and hold by operating.

The spindle unit 6 as a cutting means is mounted on a moving base (not shown) and is moved and adjusted in the direction indicated by the arrow Y which is the indexing direction and the direction indicated by the arrow Z which is the cutting direction, and the spindle housing 61. It is provided with a rotary spindle 62 rotatably supported by the rotary spindle 62 and a cutting blade 63 mounted on the front end portion of the rotary spindle 62. As the cutting blade 63, an electroformed blade in which abrasive grains are bonded to the side surface of a base made of aluminum or the like by metal plating such as nickel is used. The spindle unit 6 as a cutting means configured in this way is moved in the indexing feed direction indicated by arrow Y in FIG. 1 by an indexing feed means (not shown), and is indicated by an arrow Z in FIG. 1 by a cutting feed means (not shown). It can be moved in the notch feed direction.

The cutting apparatus according to the illustrated embodiment includes an alignment means 7 for photographing the surface of a work piece held on the chuck table 4 and detecting a region to be cut by the cutting blade 63. The alignment means 7 includes an image pickup means composed of optical means such as a microscope and a CCD camera, and sends the captured image information to a control means 20 (see FIG. 2) described later. The control means 20 is composed of a computer, and temporarily stores a central processing unit (CPU) that performs arithmetic processing according to a control program, a read-only memory (ROM) that stores a control program and the like, detected detection values, arithmetic results, and the like. It is equipped with a readable and writable random access memory (RAM) for storing in, an input interface, and an output interface (details are not shown).

In the cassette mounting area 11a of the device housing 2, a cassette mounting table 11 for mounting a cassette for accommodating a work piece is arranged. The cassette mounting table 11 is configured to be movable in the vertical direction by an elevating means (not shown). A cassette 12 for accommodating a work piece is placed on the cassette mounting table 11. Further, in the device housing 2, the work piece stored in the cassette 12 placed on the cassette mounting table 11 is carried out to the temporary placing table 13 and the carrying-out means 14 and the temporary placing table 13 are carried out. The first transport means 15 for transporting the workpiece on the chuck table 4, the cleaning means 16 for cleaning the workpiece machined on the chuck table 4, and the workpiece machined on the chuck table 4. A second transport means 17 for transporting the work piece to the cleaning means 16 is provided.

Next, a sharpening board 10 for sharpening the cutting blade 63 shown in FIG. 1 will be described.

The dressing board 10 shown in FIG. 1 is formed in a rectangular shape, and information on dressing is displayed in an edge portion located at the outer peripheral edge of the surface 10a, for example, a predetermined area 100 (lower left position in the illustrated embodiment) shown by a dotted line. Therefore, a plurality of grooves 102 are formed. The plurality of grooves 102 are carved with the number of grooves corresponding to the information to be displayed and the intervals between the grooves according to a predetermined rule. Information on the dressing includes the type of the dressing board (model number, etc.), the type of cutting blade to which the dressing board is suitable, the dressing conditions, the thickness of the dressing board, and the like. In particular, if the thickness of the dressing board is recorded in advance, it is preferable that the dressing work is included as a condition related to the dressing because the dressing work is efficiently executed. The thickness of the dressing board is measured by measuring the thickness of the manufactured dressing board with a micrometer or the like, and the measured thickness information is converted into a plurality of grooves 102 and engraved. The measured thickness of the dressing board 10 is, for example, 1045 μm in the illustrated embodiment. Further, as a predetermined rule for forming the plurality of grooves 102 described above, a rule used in a so-called one-dimensional barcode can be used. The dressing board 10 configured in this way is placed on the upper surface 5a, which is the holding surface of the holding table 5 shown in FIG. 1, and is sucked and held by operating a suction means (not shown).

Next, a method of using the dressing board as described above in the cutting apparatus described above will be described below.
When cutting a work piece by the cutting device, a cutting blade 63 suitable for the work piece is attached to the spindle unit 6 of the cutting device. Here, the operator performing the work executes a blade type registration step of registering the type of the cutting blade 63 represented by the model number or the like of the mounted cutting blade 63 in the control means 20 of the cutting device. As a method of executing the blade type registration step, the operator inputs the model number (for example, "ZH-SD3000") displayed on the cutting blade 63 from the keyboard of the cutting device, or the cutting blade 63. By reading the barcode sticker or the like attached to the cutting blade 63 with a barcode reader (not shown), the information of the cutting blade 63 is transmitted to the control means 20 and registered in the random access memory (RAM), and the blade type registration step is completed. ..

It is assumed that the timing at which the blade type registration step is executed or the timing at which sharpening is required arrives after the cutting process is continuously executed. The operator prepares the dressing board 10 as necessary, places it on the holding surface 5a of the holding table 5 at a predetermined position, reads the information of the plurality of grooves 102 engraved on the dressing board 10, and registers it in the control means 20. Perform the sharpening information registration step. It should be noted that sharpening is not always required at the timing when the cutting blade 63 is attached, and it is periodically performed when the cutting blade 63 is used for a predetermined time or at the discretion of the operator or the control means 20 according to the predetermined machining amount. is there.

To execute the dressing information registration step, a cutting feed means (not shown) is operated, and the holding table 5 on which the dressing board 10 is held is positioned directly under the alignment means 7 as shown in FIG. Then, the alignment means 7 is operated to image a predetermined area 100 secured at the edge portion of the dressing board 10, and the captured image information is sent to the control means 20. The control means 20 processes the images of the plurality of grooves 102 sent from the alignment means 7, reads information on the dressing (model number, thickness, etc. of the cutting blade to which the dressing board 10 fits), and obtains a random access memory (RAM). Store in a predetermined storage area. In this way, information on dressing such as the type and thickness of the cutting blade suitable for the dressing board 10 held in the holding table 5 is registered in the random access memory (RAM) of the control means 20. The random access memory (RAM) of the control means 20 stores in advance the cutting depth (for example, 50 μm) when sharpening the cutting blade 63.

Next, whether or not the dressing board 10 conforms to the registered cutting blade 63 based on the information on the type of cutting blade registered in the control means 20 and the information on the dressing of the dressing board 10 in the dressing information registration step. Perform a decision step to determine. As described above, in the predetermined storage area of the random access memory (RAM) of the control means 20, a cutting blade suitable for the type of the dressing board 10 placed on the holding table 5 is registered, and the determination step. By executing, it is determined by executing the control program stored in advance in the control means 20 whether or not the dressing board 10 conforms to the model number (ZH-SD3000) of the cutting blade 63 mounted on the cutting device. can do.

When the above determination step is executed, the display step of displaying the result on the display means 9 shown in FIG. 2 is executed. In the example shown in the figure, the type of cutting blade suitable for the dressing board 10 placed on the holding table 5 is displayed on the left side of the screen of the display means 9, and the cutting blade 63 currently mounted on the cutting device is displayed on the right side. As a result of judging the conformity of, "OK" is displayed. As a result, the operator can easily confirm that the dressing board 10 is compatible with the cutting blade 63 currently mounted, and the dressing work can be started. The specific mode of displaying the conformity or nonconformity of the result determined by the determination step on the display means is not limited to the above-described embodiment, and is indicated as, for example, "conformity" or "nonconformity". It can also be displayed as "○" or "×".

As described above, when the compatibility between the cutting blade 63 and the dressing board 10 is determined, the cutting blade 63 is actually sharpened. The specific method will be described with reference to FIGS. 2 and 3.
In order to sharpen the cutting blade 63 using the sharpening board 10 held by the holding table 5, a cutting feed means (not shown) is operated to move the holding table 5 holding the sharpening board 10 to the cutting work area, and FIG. As shown in the figure of the dressing board 10, the left end is positioned slightly to the right of the cutting blade 63. Then, the cutting feed means (not shown) is operated to position the lower end of the outer peripheral edge of the cutting blade 63 at a predetermined cutting depth position from the surface 10a of the sharpening board 10. At this time, since it is stored in the random access memory (RAM) of the control means 20 that the thickness of the dressing board 10 is 1045 μm, the control means 20 holds the lower end of the outer peripheral edge of the cutting blade 63 as the holding table 5. By positioning it at a position d (= 995 μm) above the origin position in contact with the upper surface 5a, which is the holding surface of the cutting blade 63, the lower end of the outer peripheral edge of the cutting blade 63 is positioned at a cutting depth position of 50 μm from the surface 10a of the sharpening board 10. be able to. In this way, since the cutting blade 63 is positioned at the cutting depth position based on the thickness information of the dressing board 10 held in the holding table 5 stored in the random access memory (RAM) of the control means 20, the dressing board 10 Even if the thickness is not within the permissible range, the cutting blade 63 can be positioned at an appropriate cutting depth position.

When the above-described cutting feed step is performed, the holding table 5 holding the sharpening board 10 by operating the cutting feed means (not shown) while rotating the cutting blade 63 in the direction indicated by the arrow 63a is set to the left in FIG. Moves at the feed speed of. As a result, the cutting blade 63 can cut and sharpen the dressing board 10 with an appropriate cutting depth (50 μm).

The present invention is not limited to the above-described embodiment, and various modifications can be assumed. In the above-described embodiment, when reading the plurality of grooves 102 formed on the outer peripheral edge portion of the dressing board 10, the imaging function of the alignment means 7 provided in advance in the cutting device is used, but the present invention is not limited to this. , Another reading means for reading the plurality of grooves 102, for example, a reading means having a function equivalent to that of a barcode reader may be used. In that case, it is not always necessary to suck and hold the dressing board 10 on the holding table 5, and while the operator holds it by hand, hold the handy type reading means over the predetermined area 100 of the dressing board 10 to display information on the dressing. You may read it.

Further, in the method of using the dressing board in the above-described embodiment, the type of cutting blade itself suitable for the dressing board 10 is read as information on the dressing by the plurality of grooves 102 of the dressing board 10, and the registered cutting blade type. By the dressing information registration step, it is determined whether or not the dressing board is compatible with the cutting blade, but the present invention is not limited to this, and for example, the type of the dressing board 10 and the dressing board 10 are compatible with the control means 20 in advance. By registering the combination table with the type of cutting blade, it is possible to obtain information on the cutting blade suitable for the dressing board 10 by reading only the type of the dressing board 10 from the plurality of grooves 102, and cutting. It is possible to determine whether or not the cutting blade 63 is compatible with the cutting blade 63 mounted on the apparatus. By doing so, the information displayed by the plurality of grooves 102 can be simplified, and erroneous determination can be prevented.

In the dressing board 10 of the above-described embodiment, information on the thickness is displayed by a plurality of grooves 102 formed on the outer peripheral edge portion, but it is not always essential to display the information on the thickness. If the cutting device is provided with a detecting means capable of detecting the thickness of the dressing board 10, it may be omitted. Further, as the information regarding the dressing displayed by the plurality of grooves 102, a plurality of dressing conditions may be displayed. For example, if it is desired to change the cutting depth at the time of sharpening, the number of cuttings, etc. depending on the type of the sharpening board 10 and the type of cutting blade suitable for it, the appropriate cutting depth and sharpening corresponding to the matching blade are set as the sharpening conditions. Information about the number of cuts in time and the like may be displayed by a plurality of grooves 102 of the dressing board 10 and registered in the control means 20 by reading the grooves 102. In short, the information regarding the dressing displayed by the plurality of grooves 102 can be appropriately selected according to the convenience of the operator, and some information necessary for carrying out the dressing work is displayed. You can enjoy the effect of the invention of the dressing board provided based on the invention.

2: Equipment housing 3: Cover table 4: Chuck table 5: Holding table 6: Spindle unit 63: Cutting blade 7: Alignment means 9: Display means 10: Sharpening board 100: Predetermined area 102: Multiple grooves

Claims (1)

A plurality of grooves are formed on the edge portion of the outer periphery, the type of compatible cutting blade number or spacing of the groove is to function as a one-dimensional bar code, dressing conditions, the type of dressing board, either at least the thickness of the dressing board How to use a sharpening board that displays information about sharpening cutting blades that include a bar code.
A blade type registration step for registering the type of cutting blade equipped in the cutting device in the control means of the cutting device by the operator, and a blade type registration step.
A plurality of grooves of the prepared dressing board are imaged by the imaging means of the cutting device, and the image information captured is sent to the control means to read the information on the dressing, and the information on the dressing is registered in the control means. Information registration step and
Judgment that the control means determines whether or not the dressing board is compatible with the cutting blade based on the type of the cutting blade registered by the blade type registration step and the information on the dressing registered by the dressing information registration step. Steps and
A method of using a dressing board including at least a display step in which a control means displays a conformity or nonconformity on a display means based on the result obtained by the determination step .