JP6234066B2 - Processing equipment - Google Patents

Description

  The present invention relates to a processing apparatus.

  In the manufacturing process of semiconductor devices and electronic components, a plate-shaped workpiece made of various materials such as semiconductor wafers and ceramic substrates is ground to a predetermined thickness by grinding with a grinding wheel mounted on the spindle of a grinding machine. Then, it is divided into individual device chips by a cutting blade or a laser processing device mounted on the spindle of the cutting device. These processing devices are used by a plurality of workers, but in order to leave messages for a plurality of workers, it is necessary to disseminate precautions etc. by attaching a commercially available message board to the devices. ing. In addition, a system has been developed that informs the mobile phone of a given operator that the processing device has been stopped if the processing device stops due to some trouble. It is possible to contact (Patent Document 1).

JP 2008-129323 A

  However, information that should be communicated when changing workers, such as troubles that might occur frequently and how to deal with them, and information on work to be performed in the near future, should be logged by someone. It was necessary to check and write on a message board or the like to make it known. In addition, when the work to be performed is limited by the worker, it is necessary to distinguish what information is to be transmitted to which worker, and if the necessary information is not provided for each worker, the information is correctly displayed. There was a possibility not to be transmitted.

  An object of the present invention is to provide a processing apparatus that can appropriately provide information to an operator.

A processing apparatus of the present invention is a processing apparatus including a chuck table that holds a workpiece, and a processing unit that processes the workpiece held on the chuck table. Input means for inputting, display means for displaying the machining conditions input by the input means, reading means for reading the identification code for identifying the worker and identifying the worker, and control means for controlling each component The control means stores an advice information storage unit that stores a plurality of pieces of advice information to be displayed on the display means, and a process storage that stores various error occurrences of the processing apparatus and the occurrence time of the errors as process information. A totaling unit for totaling the processing information of the worker specified by the reading means stored in the processing storage unit, and the advice information corresponding to the totaling result of the totaling unit, An advice information selection unit that displays the advice information for the worker identified in (1) on the display means, and the advice information selection unit includes an error generated by the identified worker during the previous work. It is characterized in that advice information for avoiding the occurrence of occurrence is selected.

  A processing apparatus according to the present invention includes a reading unit that reads an identification code that identifies an operator to identify the worker, and a control unit that controls each component. The control unit stores an advice information storage unit that stores a plurality of pieces of advice information to be displayed on the display unit, a processing storage unit that stores the processing performed by the processing apparatus and the generation time of the processing as processing information, and the processing storage unit. The totaling unit that aggregates the processing information of the worker specified by the reading means and the advice information corresponding to the totaling result of the totaling unit are selected, and the advice information for the worker specified by the reading means is displayed on the display means An advice information selection unit. According to the processing apparatus according to the present invention, there is an effect that information can be appropriately provided to an operator.

FIG. 1 is a perspective view showing a processing apparatus according to the embodiment. FIG. 2 is a block diagram according to the embodiment. FIG. 3 is a diagram illustrating the barcode reader according to the embodiment. FIG. 4 is a diagram illustrating a method of reading the identification code by the bar code reader according to the embodiment.

  Hereinafter, a processing apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by this embodiment. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same.

[Embodiment]
The embodiment will be described with reference to FIGS. 1 to 4. The present embodiment relates to a processing apparatus. 1 is a perspective view showing a processing apparatus according to an embodiment of the present invention, FIG. 2 is a block diagram according to the embodiment, FIG. 3 is a view showing a barcode reader according to the embodiment, and FIG. 4 is an embodiment. It is a figure which shows the reading method of the identification code by the barcode reader which concerns on.

  As shown in FIG. 1, the processing apparatus 1 according to the embodiment includes a chuck table 3, a processing means 10, a display monitor 4, a barcode reader 5, and a control means 30. The display monitor 4 of the present embodiment has a function as an input unit and a function as a display unit. Further, the barcode reader 5 of the present embodiment is a component of the reading unit. As illustrated in FIG. 2, the control unit 30 includes an advice information storage unit 31, a processing storage unit 32, and a totaling unit 33.

  Returning to FIG. 1, the chuck table 3, the display monitor 4, the barcode reader 5, the processing means 10, and the control means 30 are each disposed in the main body 2 of the processing apparatus 1. The main body 2 is a box-shaped housing. The chuck table 3 holds the workpiece W. The chuck table 3 of the embodiment sucks and holds the workpiece W on the holding surface 3a. The holding surface 3a communicates with a suction source, and sucks and holds the workpiece W by a negative pressure supplied from the suction source. The chuck table 3 is rotatable around the Z axis.

  The workpiece W is, for example, a semiconductor wafer or an optical device wafer. The workpiece W is placed on the chuck table 3 and held by the chuck table 3 in a state where the workpiece W is adhered to the annular frame F via the adhesive tape T, for example.

  The processing means 10 processes the workpiece W held on the chuck table 3. The processing means 10 according to the embodiment is a cutting means and has a cutting blade 11. The processing means 10 performs a cutting process on the workpiece W with the rotating cutting blade 11. The processing apparatus 1 includes an X-axis moving unit that moves the chuck table 3 relative to the main body 2 in the X-axis direction. The processing apparatus 1 includes a Y-axis moving unit that moves the processing unit 10 relative to the main body 2 in the Y-axis direction, and a Z-axis moving unit that moves the processing unit 10 relative to the main body 2 in the Z-axis direction. Have The processing apparatus 1 processes the workpiece W held on the chuck table 3 by relatively moving the chuck table 3 and the processing means 10 by each moving means.

  The display monitor 4 has a function as an input means for an operator to input machining conditions of the machining means 10 and a function as a display means for displaying the machining conditions input by the input means. The display monitor 4 of the present embodiment includes a monitor screen 41 having a touch panel as input means. The front surface of the monitor screen 41 is a touch panel. The operator can input various information including processing conditions by operating the touch panel.

  Further, the monitor screen 41 displays the processing conditions input by the input means. The monitor screen 41 can display various information including processing conditions. Further, the monitor screen 41 of the present embodiment has a function of displaying advice information for the worker. The display monitor 4 is disposed on the side surface or the front surface of the main body 2, for example.

  The control means 30 controls each component of the processing apparatus 1. The control means 30 is an electronic control unit having a computer, for example. The control unit 30 according to the embodiment controls the moving unit, the chuck table 3, the processing unit 10, the display monitor 4, and the barcode reader 5 according to the X axis, the Y axis, and the Z axis.

  The bar code reader 5 reads an identification code for identifying an operator. In the present embodiment, the reading means is configured to include the control means 30 and the barcode reader 5. The control means 30 identifies the worker based on the identification code read by the barcode reader 5. For example, the barcode reader 5 is disposed in the vicinity of the display monitor 4 in the main body 2. The barcode reader 5 is connected to the control means 30 via the display monitor 4. Details of reading the identification code by the barcode reader 5 will be described later.

  As shown in FIG. 2, the control means 30 includes an advice information storage unit 31, a processing storage unit 32, a totaling unit 33, an advice information selecting unit 34, a totaling item storage unit 35, and an operator information storage unit 36. And have.

  The advice information storage unit 31 stores a plurality of pieces of advice information to be displayed on a monitor screen 41 as a display unit. The advice information storage unit 31 stores various kinds of predetermined advice information. The stored advice information includes, for example, information related to errors that frequently occur in the processing device 1, information related to errors that occurred when the operator has operated the processing device 1 in the past, and replacement of the cutting blade 11. Information related to the time is included. Further, the advice information may include information related to the operation time of the worker and statistical information related to the operation time of the worker.

  The process storage unit 32 stores the process performed by the processing apparatus 1 and the generation time (occurrence date and time) of the process as process information. The process storage unit 32 stores the process codes a, b, c, d, e, f, g,... Of each process in association with the generation time of each process. The process storage unit 32 stores the generated processes in time series. The process storage unit 32 stores, for example, all logs (events) related to the processing apparatus 1 as process information. The process stored by the process storage unit 32 includes, for example, the occurrence of various errors such as an alignment error and a kerf check error. The processing stored in the processing storage unit 32 includes, for example, the start and end of alignment, the start and end of cutting, the start and end of kerf check, the start and end of use of the processing apparatus 1 by each worker, and setup. Various logs are included.

  The worker information storage unit 36 stores information about workers who are allowed to log in to the processing apparatus 1. The worker information storage unit 36 stores at least an identification code that identifies the worker. The identification code is, for example, a combination of numbers and symbols and is individually assigned to each worker.

  The total item storage unit 35 stores each worker in association with processing for totaling the worker. For example, when it is determined that the processes of a, b, c, d, e, f, and g are to be totaled for the worker A, the total item storage unit 35 stores the worker A and the processes a and b. , C, d, e, f, g are stored in association with each other.

  The totaling unit 33 totals the processing information of the worker specified by the reading unit stored in the processing storage unit 32. Here, the identification of the operator by the reading means will be described. As shown in FIG. 3, the barcode reader 5 includes a barcode reading unit 51. The barcode reader 5 reads the barcode 62 on the ID card 6 carried by each worker. On the main body 61 of the ID card 6, a barcode 62 and a photograph 63 of an operator are arranged. The barcode reader 51 scans the barcode 62 and decodes the acquired optical signal into an identification code.

  The barcode reader 5 can be attached to and detached from the main body 2 of the processing apparatus 1. The bar code reader 5 exchanges information with the display monitor 4 and the control means 30 by wired or wireless communication. The barcode reading unit 51 has a light receiving window 52. Inside the barcode reading unit 51, a light source unit, a light receiving unit, and the like are arranged. The barcode reader 51 receives light incident through the light receiving window 52. When reading the barcode 62 of the ID card 6, the operator makes the light receiving window 52 face the barcode 62 as shown in FIG. 4. The barcode reader 51 reads the barcode 62 and decodes the acquired optical signal into an identification code. The bar code reader 5 outputs the decrypted identification code. In the present embodiment, the identification code output from the barcode reader 5 is sent to the control means 30 via the display monitor 4.

  When the control unit 30 acquires the identification code output from the bar code reader 5, the control unit 30 identifies the worker based on the acquired identification code and information stored in the worker information storage unit 36. When the acquired identification code matches the identification code of any worker stored in the worker information storage unit 36, the control unit 30 permits the worker to log in to the processing apparatus 1. An operator who is permitted to log in can operate the processing apparatus 1 within a predetermined range of operation contents. The operation content permitted for each worker can be acquired from, for example, the total item storage unit 35. For example, the worker A is permitted to perform operations related to the processes a, b, c, d, e, f, and g. As an example, when the process a relates to alignment, the worker A can execute an operation related to alignment.

  When the operator is permitted to log in to the processing apparatus 1, the totaling unit 33 of the control unit 30 totals the processing information of the worker specified by the reading unit stored in the processing storage unit 32. The totaling unit 33 extracts the processes to be totaled for the identified worker from the processes stored in the processing storage unit 32. For example, when the identified worker is the worker K, the totaling unit 33 acquires items to be totaled for the worker K from the total item storage unit 35. When the processes to be totaled for the worker K are the processes a, d, e, f, and g, the totaling unit 33 among the processes stored in the process storage unit 32, the processes a, d, e, f, and g is extracted and tabulated.

  The aggregation executed by the aggregation unit 33 may include, for example, calculation of the number of occurrences of each process, the occurrence frequency per time, the occurrence interval, and the increase / decrease thereof. The totalization executed by the totalization unit 33 may include calculation of time required for each process and increase / decrease thereof. Further, the totalization performed by the totalization unit 33 may include calculation of times when various replacement operations and maintenance should be performed.

  The totaling unit 33 performs processing that occurs while the identified worker operates the processing device 1 and other processing, for example, processing that occurs while another worker operates the processing device 1. And may be tabulated separately. Thereby, it is possible to select advice suitable for the identified worker.

  In addition, the totaling unit 33 performs processing that has occurred up to the present after the identified operator has finished (logged out) the operation of the processing apparatus 1 last, processing that has occurred during a predetermined operating time, etc. The processing that occurred most recently may be aggregated. Thereby, advice based on the situation of the latest processing device 1 can be given to the specified worker.

  The advice information selection unit 34 selects advice information corresponding to the tabulation result of the tabulation unit 33, and displays the advice information for the worker specified by the reading unit on the display unit. The advice information may include a greeting. For example, when the same error has frequently occurred most recently, the advice information selection unit 34 selects advice information to that effect and displays the advice information on the display monitor 4. For example, the advice information selection unit 34 advises that the error W frequently occurs when the frequency of occurrence of the error W is greater than or equal to a threshold value or when the error W occurs at an interval of less than a predetermined time. Is selected.

  Moreover, when the replacement time of parts is approaching, the advice information selection unit 34 selects advice information indicating that the replacement time of parts is approaching. For example, when the replacement time of the cutting blade 11 is approaching, the advice information selection unit 34 selects advice information indicating that blade replacement is approaching, and displays the advice information on the display monitor 4. The replacement time of the cutting blade 11 is predicted based on, for example, the processing distance and the amount of wear of the cutting blade 11. It is possible to prepare for replacement work by giving advance advice to the operator that the cutting time of the cutting blade 11 and the like is near. Thereby, the fall of the operation rate of the processing apparatus 1 can be suppressed.

  Moreover, the advice information selection part 34 selects the advice information based on the error which occurred when the specified worker was working in the past. The advice information selection unit 34, for example, if an error Y has occurred when the specified operator has operated the machining device 1 last time, “The error Y occurred during the previous work. The advice information “Let's be careful” is selected, and the advice information is displayed on the display monitor 4.

  Further, the advice information selection unit 34 selects advice information useful for avoiding errors and reducing processing time. For example, when the identified worker causes an alignment error during the previous work, the advice information selection unit 34 selects advice information that avoids the occurrence of the error. As an example, when an alignment error due to an image processing error has occurred, the advice information selection unit 34 selects advice information about an appropriate value as a setting value for image processing during alignment.

  The advice information selection unit 34 stores an appropriate value in advance as a set value for image processing during alignment. The processing storage unit 32 stores processing related to input / change of setting values related to image processing. The advice information selection unit 34 recommends that an appropriate value be used for the operator when a setting value related to image processing is manually set and an error related to image processing has occurred. Select advice information to that effect. Thereby, the operator can not only know the cause of the error but also know how to avoid the error. The operator can learn how to avoid errors without checking the manual, which is advantageous for improving the proficiency level of the operator.

  Various setting values related to the processing conditions and the like include suitable values according to the type of the processing apparatus 1 and the workpiece W to be processed. Adjustment of the setting value has a know-how part, and it takes a lot of time for an operator with a low level of proficiency to gain experience and acquire know-how. According to the processing apparatus 1 according to the present embodiment, it is possible to advise the worker on appropriate settings based on the stored processing, and the proficiency level of the worker can be improved in a short time. . In addition, when an error occurs, the advice information for avoiding the error is displayed, so that operations that the operator is not good at can be reduced.

  Moreover, the advice information selection part 34 selects the advice information which can shorten required time, when the time required for a certain process is long. For example, when the specified operator performs alignment at the time of the previous work and the alignment time is longer than a predetermined time, advice information on a method for shortening the alignment time is selected. For example, since the height position of the alignment target varies, it may take a long time to detect the alignment target. When the alignment time is long, the advice information selection unit 34 selects advice information such as “let's check the alignment target”, for example.

  As described above, according to the processing apparatus 1 according to the present embodiment, advice information can be appropriately displayed to the worker. After identifying the worker, the processing device 1 performs analysis required for each worker from the already recorded operation record, and automatically displays advice information useful to the worker from the analysis result. . Thus, the operator can automatically obtain useful advice.

[First Modification of Embodiment]
In the above embodiment, the reading unit is configured to include the barcode reader 5 and the control unit 30, but for example, the barcode reader 5 may function alone as the reading unit. For example, the barcode reader 5 may have a function of acquiring the worker identification code from the worker information storage unit 36 and specifying the worker based on the read identification code. In addition, the reading unit may include another reading mechanism instead of the barcode reader 5. The reading means may include, for example, a communication device that reads an identification code by communication, a card reader that reads an electromagnetically recorded identification code, and the like. Further, the reading means may read the physical feature as an identification code.

[Second Modification of Embodiment]
The timing at which the counting unit 33 counts the processing information of the identified worker may be other than when logging in. For example, while the operator is operating the processing apparatus 1, the processing information of the operator may be aggregated as appropriate. The timing for displaying the advice information on the display monitor 4 may be other than at the time of login. For example, the advice information selection unit 34 may select advice information and display the advice information on the display monitor 4 each time the totaling unit 33 totals the processing information. In this way, for example, when an error occurs, it is possible to promptly display advice information for dealing with the error.

[Third Modification of Embodiment]
The totaling unit 33 may total the change in time required for the same processing for one worker. For example, transitions such as alignment time and time required for blade replacement may be aggregated. When the required time has been shortened, the advice information selection unit 34 may display advice information indicating that the skill is improved for the worker.

[Fourth Modification of Embodiment]
In the above embodiment, the processing means 10 of the processing apparatus 1 is a cutting means, but the processing apparatus 1 may include a grinding means, a polishing means, a laser processing means, or the like instead of the cutting means.

[Fifth Modification of Embodiment]
The processing information stored in the processing storage unit 32 may include an instruction content by the operator. For example, manually input content of setting values related to processing and image processing may be stored in the processing storage unit 32. In this case, it is possible to select advice information that advises to use an appropriate value when the manual condition setting content is not appropriate. When the set value by the worker stored in the processing storage unit 32 is different from the stored appropriate value, the advice information selecting unit 34 recommends that the worker use an appropriate value. Select advice information.

  The contents disclosed in the above embodiments and modifications can be executed in appropriate combination.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 3 Chuck table 4 Display monitor 5 Bar code reader 10 Processing means 30 Control means 31 Advice information storage part 32 Processing storage part 33 Total part 34 Advice information selection part 35 Total item storage part 36 Worker information storage part W Workpiece object

Claims (1)

A processing apparatus comprising: a chuck table that holds a workpiece; and a processing unit that processes the workpiece held on the chuck table,
Input means for inputting the processing conditions of the processing means;
Display means for displaying the machining conditions input by the input means;
Reading means for identifying the worker by reading the identification code for identifying the worker;
Control means for controlling each component, and
The control means includes
An advice information storage unit for storing a plurality of pieces of advice information to be displayed on the display means;
A processing storage unit that stores the occurrence of various errors of the machining apparatus and the occurrence time of the error as processing information;
A totaling unit for totalizing the processing information of the worker specified by the reading means stored in the processing storage unit;
An advice information selection unit that selects the advice information corresponding to the tabulation result of the tabulation unit and displays the advice information for the worker specified by the reading unit on the display unit;
The advice information selection unit is a processing device that selects advice information that avoids the occurrence of an error generated by the identified worker during the previous work .

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