JP7407567B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device.

2. Description of the Related Art Processing apparatuses that cut plate-shaped workpieces, such as semiconductor wafers, resin package substrates, glass substrates, and ceramic substrates, with cutting blades are known (for example, see Patent Documents 1 and 2). Furthermore, various processing devices are known that grind a workpiece with a grinding wheel or perform laser processing with a laser beam.

JP2008-262983A Patent No. 2628256

In processing equipment, during processing, the condition of the workpiece is image-processed, digitized, and inspected, and the condition of the processing equipment is inspected by collecting measured values from various pressure gauges and flow meters. If a machining abnormality occurs, it can be detected as soon as possible, and the machining conditions and tool conditions can be corrected to prevent or reduce the occurrence of the abnormality. However, tolerance values for determining whether or not there is an abnormality (pass/fail) are often set strictly from the viewpoint of safety, and in reality, even if the tolerance values are slightly exceeded, processing is often performed without any abnormality. In this case, operators become accustomed to alarms that notify them of abnormalities, and feel comfortable clearing the alarm and continuing machining, and even if an abnormality has indeed occurred, they will continue production without noticing it. The problem was that there was fear. As described above, with conventional processing equipment, it may be difficult to confirm that there is a high possibility that an abnormality has occurred.

The present invention has been made in view of such problems, and its purpose is to provide a processing device that can confirm that there is a high possibility that an abnormality has occurred.

In order to solve the above-mentioned problems and achieve the objects, the processing apparatus of the present invention includes a processing unit that processes a workpiece held on a chuck table, and a processing result of the workpiece by the processing unit or the processing unit. A processing device comprising: a determination unit that inspects and determines the state of the machine; and a notification unit that notifies information based on the determination result of the determination unit, wherein the determination unit is configured to make a pass/fail determination. a pass/fail tolerance value registration unit that registers a pass/fail tolerance value registration unit, and an occurrence threshold registration unit that registers a threshold value for the number of times a pass/fail determination occurs per predetermined unit time; The notifying unit notifies that the occurrence threshold has exceeded the threshold, a first threshold and a second threshold larger than the first threshold are registered in the occurrence threshold registration unit, and the notifying unit notifies that the occurrence threshold has exceeded the threshold. Different information is reported depending on whether the first threshold value is exceeded or the second threshold value is exceeded .

Moreover, in order to solve the above-mentioned problems and achieve the purpose, the processing apparatus of the present invention includes a processing unit that processes a workpiece held on a chuck table, and a processing result or result of processing the workpiece by the processing unit. A processing device comprising: a determination unit that inspects and determines the state of a processing unit; and a notification unit that notifies information based on the determination result of the determination unit, the determination unit making a pass/fail determination. a pass/fail tolerance value registration unit that registers an allowable value for the pass/fail determination, and an occurrence threshold registration unit that registers a threshold for the number of times a failure determination occurs per predetermined unit time; The notification section notifies that the number of occurrences exceeds the threshold value, and further includes an input section for inputting processing conditions of the processing unit, and a control unit that controls the input section. When the number of times a negative determination occurs exceeds the threshold value, a limit is placed on the input from the input section.

Moreover, in order to solve the above-mentioned problems and achieve the purpose, the processing apparatus of the present invention includes a processing unit that processes a workpiece held on a chuck table, and a processing result or result of processing the workpiece by the processing unit. A processing device comprising: a determination unit that inspects and determines the state of a processing unit; and a notification unit that notifies information based on the determination result of the determination unit, the determination unit making a pass/fail determination. a pass/fail tolerance value registration unit that registers an allowable value for the pass/fail determination, and an occurrence threshold registration unit that registers a threshold for the number of times a failure determination occurs per predetermined unit time; The notification unit notifies that the number of occurrences exceeds the threshold, a first threshold and a second threshold larger than the first threshold are registered in the occurrence threshold registration unit, and the notification unit: an input section that notifies different information depending on whether the first threshold value is exceeded or the second threshold value exceeded and inputs processing conditions of the processing unit; and a control unit that controls the input section; The control unit further includes, when the number of occurrences of the applicability determination exceeds the threshold value, limits the input from the input unit.

The notification unit may include a screen display unit, an audio unit, or an information transmission unit that transmits information to a different processing device or terminal device .

The present invention can confirm that there is a high possibility that an abnormality has occurred.

FIG. 1 is a perspective view showing a configuration example of a processing device according to a first embodiment. FIG. 2 is a plan view illustrating inspection items of a kerf check in the processing apparatus of FIG. 1. FIG. FIG. 3 is a flowchart showing an example of the kerf check operation of the processing apparatus shown in FIG. FIG. 4 is a graph showing data on the number of times a negative judgment occurs per predetermined unit time in the processing apparatus shown in FIG. FIG. 5 is a flowchart illustrating an example of the abnormality determination operation of the processing apparatus shown in FIG. FIG. 6 is a sectional view showing a configuration example of a processing device according to the second embodiment. FIG. 7 is a side view showing an example of the configuration of the processing apparatus shown in FIG. 6. FIG. FIG. 8 is a graph illustrating blade damage, which is an inspection item of the blade check in the processing apparatus shown in FIG. FIG. 9 is a graph illustrating the amount of blade wear, which is an inspection item of the blade check in the processing apparatus shown in FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus 1 according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 1 according to the first embodiment. The processing apparatus 1 according to the first embodiment cuts the workpiece 200 and performs a so-called kerf check on the cutting grooves 300 (see FIG. 2), which are the processing results (also referred to as processing marks) formed by cutting. This is a cutting device. Below, a description will be given of a mode in which the processing apparatus 1 according to the first embodiment performs a kerf check on the cutting groove 300 formed by cutting.

Note that the processing device 1 is not limited to this in the present invention, and the processing device 1 is capable of laser processing the workpiece 200 by irradiating the workpiece 200 with a laser beam, and processing a laser processing groove that is a processing result formed by the laser processing. It may also be a laser processing device that performs a so-called kerf check. Further, in the present invention, the processing device 1 may be a grinding device that grinds the workpiece 200 with a grinding wheel and inspects the ground surface formed by the grinding process.

In the first embodiment, the workpiece 200 cut by the processing apparatus 1 is, as shown in FIG. 1, a disk-shaped semiconductor wafer whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. and optical device wafers. A device 203 is formed on a workpiece 200 in an area defined by a plurality of dividing lines 202 formed in a lattice shape on a flat surface 201 . The workpiece 200 has an adhesive tape 205 attached to the back surface 204 on the back side of the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. Note that the workpiece 200 is not limited to this in the present invention, and may be a rectangular resin package substrate, a glass substrate, a ceramic substrate, or the like having a plurality of devices sealed with resin.

The processing apparatus 1 includes a processing unit 10, a chuck table 40, a camera 50, a control unit 60, and a notification section 30, as shown in FIG. As shown in FIG. 1, the processing device 1 is a so-called facing dual type cutting device that includes two processing units 10, that is, a two-spindle dicer.

Further, the processing apparatus 1 further includes an X-axis movement unit 71, a Y-axis movement unit 72, and a Z-axis movement unit 73, as shown in FIG. The X-axis moving unit 71 processes and feeds the chuck table 40 along the X-axis direction, which is one horizontal direction, relative to the processing unit 10. The Y-axis moving unit 72 indexes and feeds the processing unit 10 relative to the chuck table 40 along the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction. The Z-axis moving unit 73 cuts and feeds the processing unit 10 relative to the chuck table 40 along the Z-axis direction, which is orthogonal to both the X-axis direction and the Y-axis direction and parallel to the vertical direction.

The chuck table 40 holds the workpiece 200. The chuck table 40 has a flat holding surface 41 for holding the workpiece 200 formed on the upper surface, and a disk-shaped suction part made of porous ceramic or the like having a large number of porous holes, and the suction part located at the center of the upper surface. It is disc-shaped and includes a frame that is fitted into the recess and fixed. The chuck table 40 is movable by an X-axis moving unit 71 and rotatably provided by a rotational drive source (not shown). The chuck table 40 has a suction section connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and suctions and holds the workpiece 200 on the entire holding surface 41 . Further, around the chuck table 40, as shown in FIG. 1, a plurality of clamp parts 42 for clamping the annular frame 206 are provided.

The processing unit 10 forms cutting grooves 300 by processing the workpiece 200 held by the chuck table 40 along the planned dividing line 202 . The processing unit 10 includes a cutting blade 11, a spindle 12, and a spindle housing 13. The cutting blade 11 is rotated around an axis parallel to the Y-axis to cut the workpiece 200 held on the chuck table 40 . The spindle 12 has an axial center along the Y-axis direction, and supports the cutting blade 11 rotatably around the axial center at its tip. The spindle 12 is driven to rotate around the Y-axis by applying a current under the control of the control unit 60. The spindle housing 13 accommodates the spindle 12 so as to be rotatable around the Y-axis. The processing unit 10 is provided with a spindle housing 13 that is movable in the Y-axis direction by a Y-axis movement unit 72 with respect to a workpiece 200 held on a chuck table 40, and a Z-axis movement unit 73 that moves the spindle housing 13 in the It is provided so as to be freely movable in the axial direction.

The camera 50 photographs the workpiece 200 held on the chuck table 40. In the first embodiment, the camera 50 is fixed to the processing unit 10 so as to move integrally with the processing unit 10. The camera 50 includes an image sensor that captures an image of the planned dividing line 202 of the workpiece 200 before cutting, which is held on the chuck table 40, and the cutting groove 300, which is a machining mark on the workpiece 200 after cutting. ing. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor.

The camera 50 captures an image of the workpiece 200 held on the chuck table 40 before cutting, and obtains an image for performing alignment to align the workpiece 200 and the cutting blade 11. The resulting image is output to a control unit 60, which will be described later. The camera 50 also images the cut workpiece 200 held on the chuck table 40 to check whether the cutting groove 300 is within the planned dividing line 202 and whether there are any large chips or the like. An image is obtained to perform a so-called kerf check to automatically check the kerf, and the obtained image is output to the control unit 60.

The control unit 60 controls each component of the processing apparatus 1 and causes the processing apparatus 1 to perform various operations related to cutting and kerf checking on the workpiece 200. Control unit 60 includes a computer system in the first embodiment. The control unit 60 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output interface device. and has. The arithmetic processing device performs arithmetic processing according to the computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input/output interface device. do.

The control unit 60 includes a determination section 20. The determination unit 20 inspects the cut grooves 300 of the workpiece 200 formed by processing by the processing unit 10, and determines whether the cut grooves 300 are good or bad. In the first embodiment, the determination unit 20 performs a kerf check on the cut groove 300 formed by cutting the workpiece 200. The determination unit 20 includes a pass/fail tolerance value registration unit 21 and an occurrence threshold registration unit 22. The pass/fail tolerance value registration unit 21 registers a tolerance value for determining pass/fail of the cut groove 300 of the workpiece 200 by the determination unit 20 for each inspection item of the cut groove 300. The determination unit 20 makes a pass judgment that the cut groove 300 passes, or a failure judgment that the cut groove 300 fails, for each inspection item, based on the allowable value registered by the pass/fail allowable value registration unit 21. Give a verdict.

The occurrence threshold registration unit 22 registers a threshold for the number of times a negative determination occurs per predetermined unit time 111 (see FIG. 4). In the first embodiment, the occurrence threshold registration unit 22 registers a common threshold for the number of occurrences of failure judgment for all inspection items of the cutting groove 300, but the present invention is not limited to this, and may register a different threshold for each inspection item. may be registered.

The determination unit 20 changes the warning level at which the notification unit 30 issues a notification, depending on the frequency of occurrence per unit time of failure determination for each inspection item of the cutting groove 300. In the first embodiment, the warning level is set in five levels: level 1, level 2, level 3, level 4, and level 5, from the lowest possibility that an abnormality has occurred.

In the first embodiment, the function of the determination unit 20 is realized by the arithmetic processing device of the control unit 60 executing a computer program stored in a storage device. The pass/fail tolerance value registration unit 21 and the occurrence threshold value registration unit 22 are realized by the storage device of the control unit 60. Note that the determination unit 20 is not limited to this in the present invention, and may be realized based on a computer system independent of the control unit 60, for example.

The notification unit 30 notifies the operator of information based on the determination result of the determination unit 20 and the status of each operation related to cutting and kerf checking. The notification unit 30 notifies the operator that the number of times a negative determination occurs per predetermined unit time 111 exceeds the threshold registered by the occurrence threshold registration unit 22. In the first embodiment, the notifying unit 30 notifies the operator in a more conspicuous manner according to the warning level set by the determining unit 20.

In the first embodiment, the notification section 30 includes a screen display unit 31, an audio unit 32, an information transmission unit 33, and an optical notification unit 34, as shown in FIG. Each component of the notification section 30 is connected to the determination section 20 in the arithmetic processing unit of the control unit 60 via the input/output interface device of the control unit 60.

The screen display unit 31 displays images based on the determination results of the determination section 20, images of the state of each operation related to cutting and kerf checking, and the like. When displaying an image based on the determination result, the screen display unit 31 may, for example, increase the size of displayed characters or change the display depending on the warning level and the possibility that an abnormality has occurred. blinking or increasing the flashing speed of the display, changing the displayed characters and the color of the entire screen to a more conspicuous color, displaying a conspicuous icon, and displaying the inspection items that have failed and the number of times they have occurred. The notification is made more conspicuous to the operator by displaying the information or the like. In the first embodiment, the screen display unit 31 is configured by a liquid crystal display device or the like.

The audio unit 32 transmits audio based on the determination result of the determination unit 20 and the status of each operation related to cutting and kerf checking. When transmitting a sound based on the determination result, the audio unit 32 may, for example, increase the volume of the alarm sound or raise the alarm sound depending on the warning level and the possibility that an abnormality has occurred. Change the sound over time, speed up the rhythm of the alarm sound, change the rhythm of the alarm sound over time, and voice comments based on the test items that failed or the number of times the failure occurred. The notification is made more conspicuous to the operator by, for example, notifying the operator. In the first embodiment, the audio unit 32 is composed of a speaker or the like.

The information transmitting unit 33 transmits information based on the determination result of the determination unit 20 and information based on the state of each operation regarding cutting and kerf checking to a processing device 92 different from the processing device 1 or a terminal device 94. , the operator of the processing device 92 and the terminal device 94 is notified. In the first embodiment, the processing device 92 is a cutting device, a laser processing device, a grinding device, or the like. In the first embodiment, the terminal device 94 is a computer system or the like. In the first embodiment, the information transmitting unit 33 can notify the operator and process manager of the processing device 1 of various information regarding the processing device 1 through the processing device 92 and the terminal device 94.

The light notification unit 34 lights up based on the status of each operation related to cutting and kerf checking. When the light notification unit 34 turns on the light based on the determination result, for example, depending on the warning level, it may blink or increase the blinking speed depending on the possibility that an abnormality has occurred. By changing the lighting color to a more conspicuous color, etc., the notification is made more conspicuous to the operator. The light notification unit 34 is composed of a light emitting diode (LED) or the like.

The processing device 1 further includes an input section 39, as shown in FIG. The input unit 39 is used by the operator to input and register information regarding the machining conditions of the machining unit 10 and the kerf check such as allowable values and threshold values. The input section 39 is controlled by the determination section 20 of the control unit 60. The determination section 20 of the control unit 60 can set limits on the input from the input section 39. In the first embodiment, the determination unit 20 of the control unit 60 controls the input unit 39 so that the input becomes more troublesome for the operator as the possibility that an abnormality occurs increases depending on the warning level. Set limits on input from. For example, depending on the warning level, the determination unit 20 of the control unit 60 controls the input unit 39 to perform the next process if the operator does not input a predetermined password. The input from the input unit 39 is limited by controlling the user not to proceed to the next step or increasing the number of times the clear button is selected to clear the alarm sound. In the first embodiment, the input unit 39 includes at least one of a touch panel provided on the screen display unit 31, a keyboard, and the like.

As shown in FIG. 1, the processing apparatus 1 also includes a cassette 80 that accommodates the workpieces 200 before and after cutting, a temporary storage unit 82 that temporarily stores the workpieces 200 before and after the cassette 80 is accommodated, and It further includes a cleaning unit 90 that cleans the workpiece 200 after processing, and a transport unit 85 that transports the workpiece 200 between the chuck table 40, the cassette 80, the temporary storage unit 82, and the cleaning unit 90. The transport unit 85 includes a suction section that holds the workpiece 200, and the suction section is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and suctions the workpiece 200 under the control of the control unit 60. Hold.

In the processing apparatus 1, during cutting, the transport unit 85 takes out one workpiece 200 from the cassette 80 and places it on the holding surface 41 of the chuck table 40. The processing device 1 sucks and holds the workpiece 200 on the holding surface 41 of the chuck table 40 and supplies cutting water from the processing unit 10 to the workpiece 200 while moving the X-axis moving unit 71, the rotational drive source, and the Y The chuck table 40 and the processing unit 10 are relatively moved along the dividing line 202 by the axis moving unit 72 and the Z-axis moving unit 73, and the processing unit 10 cuts the dividing line 202 of the workpiece 200. A cutting groove 300 is formed using the following steps. After cutting all of the scheduled dividing lines 202 of the workpiece 200, the processing apparatus 1 cleans the workpiece 200 with the cleaning unit 90, and then stores the workpiece 200 in the cassette 80.

The processing apparatus 1 has a so-called kerfing system in which the determination section 20 of the control unit 60 inspects the state of cutting grooves 300, which are processing marks, at arbitrary timing from the start of processing to the end of processing of one workpiece 200. Carry out checks. FIG. 2 is a plan view illustrating inspection items of the kerf check in the processing apparatus 1 of FIG. 1. Below, details of the kerf check performed by the processing apparatus 1 according to the first embodiment will be explained using FIG. 2.

The inspection items inspected by the determination unit 20 in the kerf check according to the first embodiment are, as shown in FIG. Cut position deviation 303, which is the deviation of the widthwise center 302 of the groove 300 from the widthwise center 202-2 of the dividing line 202, and chipping size 304, which is the length of the chipping from the edge of the cutting groove 300. be.

As shown in FIG. 2, the pass/fail tolerance registration unit 21 registers a first tolerance value 101, which is a tolerance value for the groove width 301, and a tolerance value for the groove width 301, which is larger than the first tolerance value, as shown in FIG. A certain second tolerance value 102 is registered. The pass/fail tolerance value registration unit 21 also registers the first tolerance value 101 and the second tolerance value 102 for the cut position deviation 303 and the chipping size 304 before cutting, similarly to the tolerance value for the groove width 301. do. In the first embodiment, the first tolerance value 101 is a tolerance value that is stricter (the tolerance range is narrower) than the second tolerance value 102, and if it is exceeded, it is a condition that may cause an abnormality in the cutting process. It becomes. In the first embodiment, the first tolerance value 101 is a standard tolerance value by which the determination unit 20 makes a negative determination. Further, in the first embodiment, the second tolerance value 102 is a tolerance value that is looser (has a wider tolerance range) than the first tolerance value 101, and if it is exceeded, the cutting blade 11 is This is a condition in which a major abnormality such as cutting the device 203 beyond 202-1 occurs. In the first embodiment, the second tolerance value 102 is a reference tolerance value at which the determination unit 20 stops cutting.

The occurrence threshold registration unit 22 registers a first threshold 107 (see FIG. 4), which is a threshold for the number of occurrences of rejection per predetermined unit time 111, and a second threshold, which is larger than the first threshold 107, before the cutting process. The threshold value 108 is registered.

The kerf check operation of the processing apparatus 1 according to the first embodiment will be described below. FIG. 3 is a flowchart showing an example of the kerf check operation of the processing apparatus 1 shown in FIG.

As shown in FIG. 3, the determination unit 20 performs a so-called kerf check that inspects the state of the cutting groove 300 at any timing from the start of machining to the end of machining of one workpiece 200 during cutting. (Step ST11).

In step ST11, first, the determination unit 20 uses the camera 50 to photograph the kerf check inspection location on the cut workpiece 200 held on the chuck table 40, and performs the kerf check at this inspection location. Get the image for. Note that during alignment performed before cutting the workpiece 200 by the processing unit 10, the determination unit 20 detects each planned dividing line 202 on the workpiece 200 and recognizes the position using coordinates. Therefore, based on this, the imaging area of the camera 50 can be smoothly moved to the inspection location on the planned dividing line 202 in the workpiece 200.

In step ST11, next, the determination unit 20 performs a predetermined image analysis on the image taken and acquired by the camera 50 to detect the cut groove 300 at the inspection location, and detects the groove width, which is an inspection item. 301, cut position deviation 303, and chipping size 304 are derived.

In step ST11, the determining unit 20 then determines that the derived groove width 301, cut position deviation 303, and chipping size 304 are based on the first tolerance value 101 and the second tolerance value set before cutting, respectively. It is determined whether the value exceeds 102 or not. After executing step ST11, the determination unit 20 advances the process to step ST12.

The determination unit 20 performs the processes from step ST12 onwards for each inspection item. Hereinafter, the case where "groove width 301" is determined as an inspection item will be described, and the explanation for determining other inspection items will be omitted because it is the same as the case where "groove width 301" is determined.

If the determination unit 20 determines that the groove width 301 exceeds the second tolerance value 102 as a result of step ST11 (No in step ST12), it determines that a major abnormality has occurred in the cutting process, and performs processing. Proceed to step ST13. In step ST13, the determination unit 20 first raises the warning level to the maximum level 5 at once. Thereafter, the determination unit 20 causes the notification unit 30 to notify the operator of information based on the determination result regarding the groove width 301 in a way that is noticeable to the operator in accordance with the warning level that is raised to the maximum level 5 at once. In addition, the determination unit 20 limits the input from the input unit 39 in accordance with the warning level that has been raised to the maximum level 5 at once, and stops the cutting process by the processing unit 10 (step ST13). After performing step ST13, the determination unit 20 ends the kerf check operation flow according to the first embodiment.

On the other hand, if the determination unit 20 determines that the groove width 301 is equal to or less than the second allowable value 102 as a result of step ST11 (Yes in step ST12), the determination unit 20 changes the flow of the kerf check operation according to the first embodiment to step ST14. Proceed to. If the determination unit 20 determines that the groove width 301 exceeds the first allowable value 101 after determining Yes in step ST12 (No in step ST14), the determination unit 20 counts the negative determination once (step ST15). ), the flow of the kerf check operation according to the first embodiment ends. In addition, in step ST15, the determination unit 20 stores the fact that one negative determination was counted in association with the inspection item and the examination time when the negative determination occurred.

If the determination unit 20 determines that the groove width 301 is less than or equal to the first tolerance value 101 after determining Yes in step ST12 (Yes in step ST14), the cut groove 300 to be inspected passes the inspection with respect to the groove width 301. A pass judgment is issued to that effect, and the flow of the kerf check operation according to the first embodiment is ended.

FIG. 4 is a graph showing data 110 on the number of times a negative determination occurs per predetermined unit time 111 in the processing apparatus 1 of FIG. The data 110 of the number of occurrences of failure determination is created and stored by the determination unit 20 in step ST15 of the kerf check operation of the processing apparatus 1 according to the first embodiment. In the first embodiment, the number of times a negative determination occurs per predetermined unit time 111 is the total number of times a negative determination occurs for all inspection items that occur within the predetermined unit time 111. Note that the number of times a negative determination occurs per predetermined unit time 111 is not limited to this in the present invention, and may be the number of times a negative determination occurs within a predetermined unit time 111 for each inspection item.

In the example shown in FIG. 4, the data 110 of the number of occurrences of negative judgments includes data 112 in which the number of occurrences of negative judgments per predetermined unit time 111 is equal to or less than the first threshold value 107, and data 112 of the number of occurrences of negative judgments per predetermined unit time 111. data 113 in which the number of occurrences exceeds the first threshold 107 and is less than or equal to the second threshold 108, and data 114 in which the number of occurrences of negative judgments per predetermined unit time 111 exceeds the second threshold 108. Contains.

The abnormality determination operation of the processing apparatus 1 according to the first embodiment will be described below. FIG. 5 is a flowchart illustrating an example of the abnormality determination operation of the processing apparatus 1 of FIG. The determination unit 20 performs an abnormality determination operation of the processing apparatus 1 at an arbitrary timing during the processing operation based on the data 110 of the number of occurrences of failure determination. Note that the determination unit 20 in the present invention is not limited to this, and may perform the operation of determining the abnormality of the processing device 1 at the same time as the kerf check operation of the processing device 1. It may be performed at a subsequent timing after the check operation is performed.

As shown in FIG. 5, the determination unit 20 determines whether the number of occurrences of a rejection per predetermined unit time 111 exceeds a first threshold 107 and a second threshold 108, based on data 110 on the number of occurrences of a rejection. It is determined whether or not (step ST21).

If the determining unit 20 determines as a result of step ST21 that the number of occurrences of negative determinations per predetermined unit time 111 exceeds the second threshold 108 (No in step ST22), the determination unit 20 determines that the frequency of occurrence of negative determinations is extremely high. It is determined that there is a very high possibility that an abnormality has occurred, and a predetermined second action is taken (step ST23). In the predetermined second action, in the first embodiment, the determination unit 20 raises the warning level by two levels, and transmits information based on the determination result to the notifying unit in a way that is conspicuous to the operator in accordance with the two-level raised warning level. 30 will be notified. Further, in the predetermined second action, the determination unit 20 then limits the input from the input unit 39 according to the warning level raised by two levels, and stops the cutting process by the processing unit 10. After the determination unit 20 performs the predetermined second treatment, the determination unit 20 terminates the flow of the abnormality determination operation according to the first embodiment.

On the other hand, if the determining unit 20 determines as a result of step ST21 that the number of occurrences of negative determinations per predetermined unit time 111 is equal to or less than the second threshold value 108 (Yes in step ST22), the determination unit 20 determines that the abnormality according to the first embodiment The flow of the determination operation proceeds to step ST24.

If the determination unit 20 determines that the number of occurrences of rejection per predetermined unit time 111 exceeds the first threshold 107 (No in step ST24) after determining Yes in step ST22, the determination unit 20 determines that the number of occurrences of rejection per predetermined unit time 111 exceeds the first threshold 107 (No in step ST24). It is determined that the frequency of occurrence is relatively high and the probability that an abnormality has occurred is relatively high, and a predetermined first action is taken (step ST25). In the first predetermined process, in the first embodiment, the determination unit 20 raises the warning level by one level, and, in accordance with the raised warning level by one level, transmits information based on the determination result to the notifying unit in a way that is conspicuous to the operator. 30 will be notified. Further, in the predetermined first action, the determination unit 20 then limits the input from the input unit 39 only when the warning level reaches the maximum level 5 as a result of raising the warning level by one level, and the processing unit 10 Stop cutting. After implementing the predetermined first treatment, the determination unit 20 ends the flow of the abnormality determination operation according to the first embodiment.

In the first embodiment, the determination unit 20 notifies the operator of different information for the predetermined second action in step ST23 and the predetermined first action in step ST25, and prompts the operator to take different actions. In the predetermined second action in step ST23, the determination unit 20 raises the warning level for the inspection item for which abnormality has been determined by one level more than in the predetermined first action in step ST25, and displays the information conspicuously to the operator. The notification section 30 is made to notify.

If the determining unit 20 determines that the number of occurrences of a negative determination per predetermined unit time 111 is equal to or less than the first threshold value 107 (Yes in step ST24) after determining Yes in step ST22, the determination unit 20 determines that a negative determination has occurred. It is determined that the frequency is sufficiently low, the warning level is lowered by one level, and the flow of the abnormality determination operation according to the first embodiment is ended.

In the processing apparatus 1 according to the first embodiment having the above-described configuration, the determination unit 20 that inspects and determines the processing result of the workpiece 200 by the processing unit 10 uses the first pass/fail tolerance value registration unit 21 registered A pass/fail judgment is made on the machining result based on the allowable value 101 of the pass/fail judgment, and the failure judgment generated by this pass/fail judgment is the first threshold of the number of occurrences of the failure judgment per predetermined unit time 111 registered by the occurrence threshold registration unit 22. 107 or the second threshold 108, and if a determination result is obtained that the first threshold 107 or the second threshold 108 is exceeded, the notification unit 30 Based on the determination result, the operator is notified. Therefore, the processing device 1 according to the first embodiment has the effect that when the frequency of occurrence of negative judgment is high and there is a high possibility that an abnormality has occurred, the operator can confirm the abnormality without error. play.

Further, in the processing apparatus 1 according to the first embodiment, the first threshold 107 and the second threshold 108 larger than the first threshold 107 are registered in the occurrence threshold registration unit 22, and the notification unit 30 registers the first threshold 108. Different information is reported depending on whether the second threshold value 107 is exceeded or the second threshold value 108 is exceeded. Specifically, in the processing apparatus 1 according to the first embodiment, when the first threshold value 107 is exceeded, the notification unit 30 issues a notification according to the warning level raised by one level, and the second threshold value 108 is raised. If it exceeds the warning level, a notification will be issued according to the warning level raised by two levels. For this reason, the processing apparatus 1 according to the first embodiment has the advantage that it can be confirmed that there is a high possibility that an abnormality has occurred, depending on the frequency of occurrence of a negative determination.

Furthermore, in the processing apparatus 1 according to the first embodiment, the notification section 30 includes a screen display unit 31, an audio unit 32, or an information transmission unit 33 that transmits information to a different processing apparatus 92 or terminal device 94. Therefore, the processing device 1 according to the first embodiment can make the operator confirm that there is a high possibility that an abnormality has occurred using text, images, audio, or a different processing device 92 or terminal device 94. It has an effect.

The processing apparatus 1 according to the first embodiment further includes an input section 39 for inputting processing conditions of the processing unit 10, and a control unit 60 for controlling the input section 39. exceeds the first threshold 107 or the second threshold 108, the input from the input unit 39 is restricted. For this reason, the processing apparatus 1 according to the first embodiment has the effect that by providing input restrictions, the operator can confirm that there is a high possibility that an abnormality has occurred.

[Embodiment 2]
A processing apparatus 1-2 according to a second embodiment of the present invention will be explained based on the drawings. FIG. 6 is a sectional view showing an example of the configuration of the processing device 1-2 according to the second embodiment. FIG. 7 is a side view showing an example of the configuration of the processing device 1-2 shown in FIG. FIG. 8 is a graph illustrating blade damage, which is an inspection item of the blade check in the processing apparatus 1-2 of FIG. FIG. 9 is a graph illustrating the amount of blade wear, which is an inspection item of the blade check in the processing apparatus 1-2 of FIG. In FIGS. 6 to 9, the same parts as in Embodiment 1 are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 6, the processing apparatus 1-2 according to the second embodiment is the same as the processing apparatus 1-1 according to the first embodiment, except that the processing unit 10 is changed to a processing unit 10-2, and the functions in the control unit 60 are changed. This section has been changed.

As shown in FIGS. 6 and 7, the processing unit 10-2 includes a cutting blade 11, a spindle 12, a spindle housing 13, a blade mount 14, a blade cover 15, and water supply nozzles 16-1 and 16-2. , a water supply source connection part 17 , a groove-like member 18 , and an elevating part 19 . As shown in FIG. 6, the control unit 60 according to the second embodiment includes a determination section 20 including a pass/fail tolerance value registration section 21 and an occurrence threshold registration section 22, an opening/closing instruction section 61, a light emitting element 62, and a light receiving element 63. , an amplifier 64 , and a photoelectric conversion section 65 . The determination section 20 in the control unit 60 according to the second embodiment is connected to the notification section 30 similarly to the first embodiment.

The cutting blade 11 is fixed to the tip of a spindle 12 via a blade mount 14, and is rotated by the spindle 12 serving as a rotation axis to cut the workpiece 200. The cutting blade 11 in the second embodiment is a so-called hub blade, and as shown in FIGS. 6 and 7, it has an annular cutting blade 11-1 and a disc-shaped base 11-2. The cutting blade 11-1 is provided on the outer periphery of the base 11-2 and protrudes from the outer periphery of the base 11-2. The cutting blade 11-1 is made of, for example, abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bond material (binding material) such as metal or resin, and is formed to have a predetermined thickness. The base 11-2 has an insertion hole in the center for fixing to the blade mount 14, and is formed in an annular shape. The base 11-2 is made of metal such as aluminum alloy, for example. Note that the cutting blade 11 is not limited to a hub blade in the present invention, and may be a so-called hubless blade consisting only of the cutting blade 11-1 having an insertion hole.

The blade mount 14 holds the cutting blade 11 between its disc-shaped flange parts, and the cylindrical boss part is inserted into an insertion hole and attached to the tip of the spindle 12, thereby moving the cutting blade 11 around the axis. The spindle 12 is rotatably attached to the tip of the spindle 12.

The blade cover 15 is attached to the tip side of the spindle housing 13 and covers the upper, front, and rear sides of the cutting blade 11. The blade cover 15 moves between a closed position where it covers the cutting blade 11 and an open position where it separates from the cutting blade 11 and opens under the control of the opening/closing instruction section 61. The blade cover 15 has a plurality of water channels formed therein, and as shown in FIG. A water supply connection part 17 is provided at the other end of the upper side. The water supply nozzle 16-1 supplies cutting water supplied from the water supply connection part 17 to the side of the cutting edge 11-1 of the cutting blade 11. The water supply nozzle 16-2 supplies cutting water supplied from the water supply connection part 17 to the front of the cutting edge 11-1 of the cutting blade 11. The cutting water is, for example, pure water, and its flow rate is controlled by the control unit 60.

As shown in FIG. 6, the groove member 18 is formed with a groove 18-1 having a width wider than the thickness of the cutting edge 11-1 of the cutting blade 11. The groove-like member 18 is provided on the blade cover 15, and the upper end of the cutting blade 11-1 is sandwiched between the groove 18-1. The elevating section 19 moves the groove member 18 up and down.

As shown in FIG. 6, the groove-shaped member 18 includes a light emitting section 18-2 and a light receiving section 18-3. The light emitting section 18-2 is provided on one side wall of the groove 18-1 and emits light toward the other side wall of the groove 18-1. The light emitting unit 18-2 has a light emitting element 62 optically connected to it by an optical fiber or the like, and emits light from the light emitting element 62. The light receiving section 18-3 is provided on the other side wall of the groove 18-1 at a position facing the light emitting section 18-2, and receives the light emitted by the light emitting section 18-2. The light receiving section 18-3 is optically connected to a light receiving element 63 through an optical fiber or the like, and the light receiving element 63 detects the light received by the light receiving section 18-3.

The amplifier 64 adjusts the amount of light emitted from the light emitting section 18-2 by amplifying the amount of light emitted from the light emitting element 62 under the control of the determining section 20. The photoelectric conversion unit 65 converts the light detected by the light receiving element 63 and reached the light receiving unit 18-3 into a current signal under the control of the determining unit 20, and obtains a current value of the amount of light received. The photoelectric conversion section 65 transmits the current value of the amount of received light obtained by the conversion to the determination section 20 .

The current value of the amount of received light that the determination unit 20 acquires from the photoelectric conversion unit 65 decreases when the outer edge of the cutting blade 11-1 of the cutting blade 11 protrudes in the radial direction of the cutting blade 11 and is recessed in the radial direction. If it is, it will increase. Therefore, the current value of the amount of received light that the determination unit 20 acquires from the photoelectric conversion unit 65 indicates the planar shape of the outer edge of the cutting blade 11-1 of the cutting blade 11 that is attached to the spindle 12.

In the second embodiment, the determination unit 20 inspects and determines the state of the processing unit 10. Specifically, the determination unit 20 performs a blade check to inspect the state of the cutting blade 11 of the processing unit 10. In the second embodiment, the pass/fail tolerance registration unit 21 registers a tolerance value for determining pass/fail of the cutting blade 11 in the determination unit 20 for each inspection item of the cutting blade 11. In the second embodiment, the occurrence threshold registration unit 22 registers a common threshold for the number of occurrences of failure judgment for all inspection items of the cutting blade 11, but the present invention is not limited to this, and may register a different threshold for each inspection item. may be registered.

The inspection items that the determination unit 20 inspects in the blade check according to the second embodiment are blade damage and blade wear amount. The blade damage inspection is to check whether or not the outer edge of the cutting edge 11-1 of the cutting blade 11 is chipped. The blade wear amount test is to check the wear amount of the cutting edge 11-1 of the cutting blade 11 per a certain period of time 402 (see FIG. 9).

When the cutting blade 11 is damaged, that is, when the outer edge of the cutting blade 11-1 of the cutting blade 11 is chipped, the determination unit 20 detects the damage from the photoelectric conversion unit 65 as shown in FIG. The current value of the amount of received light to be acquired increases in a spike shape depending on the size of the chip. In the example shown in FIG. 8, the current value of the amount of received light that the determination unit 20 acquires from the photoelectric conversion unit 65 increases by the amount of change in current value 401 due to the chipping that occurs at the outer edge of the cutting blade 11-1 of the cutting blade 11. are doing. In the blade check according to the second embodiment, the determination unit 20 inspects blade damage by inspecting the amount of change 401 in the current value.

When the cutting blade 11 is worn out, that is, when the cutting edge 11-1 of the cutting blade 11 is worn out, as shown in FIG. The current value of increases gradually depending on the rate of consumption. In the example shown in FIG. 9, the current value of the amount of received light that the determination unit 20 acquires from the photoelectric conversion unit 65 increases by the amount of change in current value 403 per certain period of time 402 due to wear and tear on the cutting blade 11. In the blade check according to the second embodiment, the determination unit 20 examines the amount of blade wear per certain period of time 402 by checking the amount of change 403 in the current value per certain period of time 402 . Note that the stepwise change in current value in FIG. 9 is caused by vertical position adjustment of the cutting blade 11, the light emitting section 18-2, and the light receiving section 18-3 during the blade check.

Similar to the first embodiment, the pass/fail tolerance registration unit 21 according to the second embodiment sets a first tolerance value for the amount of change in current value 401 and the amount of change in current value per certain period of time 402 403 before cutting. 101 and a second tolerance value 102 are registered. Similar to the first embodiment, the occurrence threshold registration unit 22 according to the second embodiment registers the first threshold 107 and the second threshold 108 before cutting.

The operation of the processing apparatus 1-2 according to the second embodiment will be described below. The determination unit 20 performs a blade check to inspect the state of the cutting blade 11 of the processing unit 10 at an arbitrary timing from the start of processing to the end of processing of one workpiece 200 during cutting.

In the blade check according to the second embodiment, the determination section 20 determines the vertical position of the groove member 18 in the lifting section 19 so that the cutting blade 11 is located between the light emitting section 18-2 and the light receiving section 18-3. is started from the adjusted state. The determination section 20 emits light from the light emitting element 62 from the light emitting section 18-2 while the cutting blade 11 is rotated around the axis, and the light receiving section 18-3 detects the light emitted from the light emitting section 18-2. receives light. Then, the determination unit 20 detects the light that has reached the light receiving unit 18-3 using the light receiving element 63, converts the light detected by the light receiving element 63 into a current signal using the photoelectric conversion unit 65, and obtains a current value of the amount of light received. .

In the blade check according to the second embodiment, next, the determination unit 20 performs a predetermined analysis on the current value of the amount of received light obtained by the photoelectric conversion unit 65, thereby determining the current value when the current increases in a spike shape, for example. A value change amount 401 and a current value change amount 403 per fixed time 402 are derived. In the blade check according to the second embodiment, next, the determination unit 20 determines that the derived amount of change in current value 401 and the amount of change in current value per certain period of time 402 403 are set before the cutting process. It is determined whether the first tolerance value 101 and the second tolerance value 102 are exceeded.

Here, in the blade check according to the second embodiment, the determining unit 20 determines that the blade is partially damaged when the current value of the amount of light received increases by a predetermined amount or more in a spike shape within a predetermined time. Further, the determination unit 20 determines that if the current value of the amount of light received increases by a predetermined amount or more and this state continues for a predetermined time or more equivalent to one revolution of the cutting blade 11 or more, the entire circumference of the cutting blade 11 is damaged. It is determined that the state is the same. Further, the determining unit 20 determines that the blade is worn out when the current value of the amount of received light increases by less than a predetermined amount and this state continues for a predetermined time period or more corresponding to one revolution of the cutting blade 11 or more.

In the blade check according to the second embodiment, the determination unit 20 then performs the same processing as after step ST12 of the kerf check according to the first embodiment, regarding the amount of change in current value 401 and the amount of change in current value per certain period of time 402 403. Implement.

The abnormality determination operation of the processing apparatus 1-2 according to the second embodiment will be described below. In the abnormality determination operation of the processing apparatus 1-2 according to the second embodiment, the determination unit 20 performs the same operation as the abnormality determination operation of the processing apparatus 1 according to the first embodiment regarding the two inspection items of blade damage and blade wear amount. Perform processing.

Further, in the blade check according to the second embodiment, if the current value of the amount of received light does not increase or decreases continuously for a predetermined time or more, the determination unit 20 determines that the light emitting unit 18-2 and the light receiving unit 18-3 Since dirt, a malfunction of the amplifier 64, etc. are possible causes, it is determined that an abnormality has occurred in the acquisition of the current value of the amount of received light. The determination unit 20 treats the occurrence of an abnormality in obtaining the current value of the received light amount as a negative determination, and sets the number of occurrences per unit time to the first threshold 107 and the second threshold 108, similarly to blade damage and blade wear. Perform abnormality judgment.

The processing apparatus 1-2 according to the second embodiment having the above configuration is the processing apparatus 1 according to the first embodiment except that the inspection items are changed to blade damage and blade wear amount. Therefore, the processing apparatus 1-2 according to the second embodiment has the same effects as the processing apparatus 1 according to the first embodiment.

In the first embodiment, the determination unit 20 inspects and determines the result of processing the workpiece 200 by the processing unit 10. Further, in the second embodiment, the determination unit 20 inspects and determines the state of the processing unit 10. Note that, in the present invention, the determination unit 20 may inspect and determine the processing result of the workpiece 200 formed by processing by any processing unit 10 or the state of the processing unit 10.

[Modified example]
A processing apparatus according to a modification of Embodiment 1 and Embodiment 2 of the present invention will be described. In the processing apparatus according to the modified example, in the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment, the inspection items inspected and determined by the determination unit 20 are alignment errors, conveyance vacuum errors, and chucks. The changes were made for table vacuum error, spindle load current value overflow, machining water amount error, and abnormal water and air pressure.

In the alignment error inspection item, the determination unit 20 determines that alignment cannot be performed due to the inability to detect the planned division line 202 to be cut in the image of the workpiece 200 before cutting taken by the camera 50. Make a negative judgment when In the processing apparatus according to the modification, the determination unit 20 performs the same abnormality determination operation as in Embodiment 1 and Embodiment 2 regarding the determination of whether or not an alignment error occurs.

In the conveyance vacuum error inspection item, the determination section 20 issues a negative determination when the air pressure in the vacuum suction path connected to the suction section of the conveyance unit 85 exceeds a predetermined allowable value. Note that the pass/fail tolerance value registration unit 21 stores a first tolerance value and a second tolerance value for the air pressure in the vacuum suction path connected to the suction section of the transport unit 85, as in the first and second embodiments. The determination unit 20 may register these two levels and use these tolerance values for pass/fail determination. In the processing apparatus according to the modified example, the determination unit 20 performs the same abnormality determination operation as in Embodiment 1 and Embodiment 2 regarding the determination of whether or not a conveyance vacuum error occurs.

In the chuck table vacuum error inspection item, the determination section 20 issues a negative determination when the air pressure in the vacuum suction path connected to the suction section of the chuck table 40 exceeds a predetermined allowable value. Note that the pass/fail tolerance value registration unit 21 stores a first tolerance value and a second tolerance value for the air pressure in the vacuum suction path connected to the suction part of the chuck table 40, as in the first and second embodiments. The two stages may be registered, and the determination unit 20 may use these tolerance values for pass/fail determination. In the processing apparatus according to the modification, the determination unit 20 performs the same abnormality determination operation as in the first and second embodiments regarding determination of whether or not a chuck table vacuum error occurs.

In the inspection item of spindle load current value over, the determination unit 20 issues a negative determination when the current value applied when the spindle 12 is rotated around the Y-axis exceeds a predetermined allowable value. Note that the pass/fail tolerance value registration unit 21 registers two stages of the first tolerance value and the second tolerance value with respect to the current value loaded by the spindle 12, as in the first embodiment and the second embodiment. The determination unit 20 may use these tolerance values for pass/fail determination. In the processing apparatus according to the modification, the determination unit 20 performs the same abnormality determination operation as in the first and second embodiments regarding determination of whether or not the spindle load current value has exceeded.

In the machining water amount error inspection item, the determination unit 20 determines whether the amount of cutting water supplied from the water supply connection unit 17 or the amount of cutting water supplied from the water supply nozzles 16-1, 16-2 is within a predetermined allowable value. A negative judgment is issued when the value is exceeded. Note that the pass/fail tolerance value registration unit 21 registers two levels of the first tolerance value and the second tolerance value regarding the amount of cutting water, and the judgment unit 20 may use these tolerance values for pass/fail determination. In the processing apparatus according to the modified example, the determination unit 20 performs the same abnormality determination operation as in Embodiment 1 and Embodiment 2 regarding the determination of whether or not there is a processing water amount error.

In the inspection item of water and air pressure abnormality, the determination unit 20 checks the pressure of cutting water and air supplied from the water supply connection unit 17, or the pressure of cutting water and air supplied from the water supply nozzles 16-1 and 16-2. A negative judgment is made when the pressure exceeds a predetermined allowable value. Note that the pass/fail tolerance value registration unit 21 registers two levels of the first tolerance value and the second tolerance value regarding the pressure of cutting water and air, and makes a determination. The unit 20 may use these tolerance values for pass/fail determination. In the processing apparatus according to the modified example, the determination unit 20 performs the same abnormality determination operation as in Embodiment 1 and Embodiment 2 regarding determination of whether there is an abnormality in water or air pressure.

The processing apparatus according to the modified example having the above configuration is different from the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment, in which the inspection items that are inspected and determined by the determination unit 20 are changed. It is something. Therefore, the processing apparatus according to the modified example has the same effects as the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention.

1,1-2 Processing equipment 10 Processing unit 11 Cutting blade 20 Judgment section 21 Pass/fail tolerance value registration section 22 Occurrence threshold registration section 30 Notification section 31 Screen display unit 32 Audio unit 33 Information transmission unit 34 Optical notification unit 39 Input section 40 Chuck Table 50 Camera 60 Control unit 200 Workpiece

Claims (4)

A processing unit that processes a workpiece held by a chuck table, a determination unit that inspects and determines the processing result of the workpiece by the processing unit or the state of the processing unit, and information based on the determination result of the determination unit. A processing device comprising: a notification unit configured to notify the
The determination unit is
a pass/fail tolerance value registration unit that registers a tolerance value for making a pass/fail determination in the determination unit;
an occurrence threshold registration unit that registers a threshold for the number of times a negative determination occurs per predetermined unit time;
The notification unit notifies that the number of occurrences of the applicability determination exceeds the threshold;
A first threshold and a second threshold larger than the first threshold are registered in the occurrence threshold registration unit,
The notification unit is a processing device that reports different information depending on whether the first threshold value is exceeded or the second threshold value is exceeded . A processing unit that processes a workpiece held by a chuck table, a determination unit that inspects and determines the processing result of the workpiece by the processing unit or the state of the processing unit, and information based on the determination result of the determination unit. A processing device comprising: a notification unit configured to notify the
The determination unit is
a pass/fail tolerance value registration unit that registers a tolerance value for making a pass/fail determination in the determination unit;
an occurrence threshold registration unit that registers a threshold for the number of times a negative determination occurs per predetermined unit time;
The notification unit notifies that the number of occurrences of the applicability determination exceeds the threshold;
an input section for inputting processing conditions of the processing unit;
further comprising a control unit that controls the input section,
The control unit is a processing device that limits input from the input unit when the number of occurrences of the applicability determination exceeds the threshold value . A processing unit that processes a workpiece held by a chuck table, a determination unit that inspects and determines the processing result of the workpiece by the processing unit or the state of the processing unit, and information based on the determination result of the determination unit. A processing device comprising: a notification unit that notifies
The determination unit is
a pass/fail tolerance value registration unit that registers a tolerance value for making a pass/fail determination in the determination unit;
an occurrence threshold registration unit that registers a threshold for the number of times a negative determination occurs per predetermined unit time;
The notification unit notifies that the number of occurrences of the applicability determination exceeds the threshold;
A first threshold and a second threshold larger than the first threshold are registered in the occurrence threshold registration unit,
The notification unit reports different information depending on whether the first threshold value is exceeded or the second threshold value is exceeded;
an input section for inputting processing conditions of the processing unit;
further comprising a control unit that controls the input section,
The control unit is a processing device that limits input from the input unit when the number of occurrences of the applicability determination exceeds the threshold value . 4. The processing device according to claim 1 , wherein the notification section includes a screen display unit, an audio unit, or an information transmission unit that transmits information to a different processing device or terminal device.

Images