JP2021186940A - Processing device - Google Patents

Abstract

To display on a display unit a remaining number of workpieces that can be processed with a processing grindstone.SOLUTION: A processing device for processing a workpiece includes: a processing unit that processes the workpiece by use of a processing grindstone; and a control unit 44 that controls each of composing elements. The control unit includes: a consumption amount calculation unit 60 that calculates an amount of consumption of the processing grindstone when the work-piece is processed with the processing grindstone; a total consumption amount calculation unit 64 that calculates, as a total amount of consumption, the total of the amounts of consumption of the processing grindstone; an average consumption amount storage unit 66 that stores, as an average amount of consumption, the average of the amounts of consumption of the processing grindstone for processing workpieces; a processable remaining number calculation unit 68 that calculates a remaining amount of a blade edge by subtracting the total amount of consumption from the limit amount of consumption of the processing grindstone and divides the remaining amount of the blade edge by the average amount of consumption to calculate a remaining number of workpieces processable with the processing grindstone; and a display control unit 70 that displays the processable remaining number on the display unit.SELECTED DRAWING: Figure 4

Description

The present invention relates to a processing apparatus for processing a work piece by bringing a rotating processing grindstone into contact with the work piece.

In the manufacturing process of device chips used in electronic devices such as mobile phones and computers, first, a plurality of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed on the surface of a wafer made of a semiconductor. Next, the wafer is ground from the back surface side to be thinned to a predetermined thickness, and the wafer is divided for each device to form individual device chips.

Machining such as grinding and splitting of a wafer is performed by various processing devices including a chuck table that holds the wafer and a processing unit that processes the wafer held by the chuck table. The processing unit includes a processing grindstone that contacts a work piece such as a wafer to process the work piece, and a spindle that is connected to the processing grindstone and rotates the processing grindstone.

The workpiece to be machined by the processing apparatus is accommodated in a cassette capable of accommodating a plurality of the workpieces and carried into the processing apparatus. There is known a processing apparatus that automatically executes a series of steps from carrying out a plurality of wafers housed in a cassette one after another, processing them, and returning them to the cassette again. The type of such processing equipment is called a fully automatic type, and such processing is called fully automatic processing.

When the work piece is repeatedly processed with the processing grindstone, the processing grindstone is consumed and the cutting edge is shortened, and eventually the processing grindstone cannot perform normal processing. Therefore, the required cutting edge length is set for the remaining amount of the cutting edge of the processing grindstone. If the remaining amount of the cutting edge of the processing grindstone is less than the required cutting edge length, it is not possible to properly process the workpiece with the processing grindstone as it is, so it is necessary to replace the processing grindstone. Therefore, there is known a processing apparatus having a function of measuring the amount of consumption of the processing grindstone and issuing a warning when the remaining amount of the cutting edge is less than the required cutting edge length (see Patent Document 1).

Japanese Unexamined Patent Publication No. 2014-37045

The machining equipment shall be stopped while performing the machining grindstone replacement operation. Therefore, if the remaining amount of the cutting edge of the processing grindstone becomes less than the required cutting edge length during the fully automatic processing and a warning is issued, the fully automatic processing will be stopped until the replacement work of the processing grindstone is completed. In the fully automatic processing, even if the processing of a part of the workpiece contained in the cassette is completed, the cassette cannot be carried out from the processing apparatus until the processing of all the workpieces is completed. Therefore, when the fully automatic processing is stopped, the processing efficiency of the workpiece is significantly lowered.

Therefore, even if a warning is issued during the fully automatic processing, it is conceivable to continue the fully automatic processing until the processing of all the workpieces is completed. However, in this case, processing is continued with a processing grindstone of a quality that does not meet the required level, which may cause processing defects. Also, in this case, the processing grindstone will be replaced after the cassette is carried out, but the operator forgets that the warning was issued and the worker carries in a new cassette to the processing equipment, and the next fully automatic processing is performed. In some cases, it will start.

Therefore, before starting full-automatic machining, we would like to understand whether the remaining amount of the cutting edge of the grindstone falls below the required cutting edge length and a warning is issued during the full-automatic machining, and take measures in advance. There is a request.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a processing apparatus capable of calculating the remaining number of workpieces that can be processed from the remaining amount of the cutting edge of the processing grindstone.

According to one aspect of the present invention, it is a processing apparatus for processing a work piece, and has a chuck table having a holding surface for holding the work piece and a spindle on which a processing grindstone is mounted at the tip. The processing grindstone is rotated to rotate the processing grindstone to process the workpiece with the processing grindstone, a control unit for controlling each component, and a display unit, and the control unit is to be processed. When an object is machined with the processing grindstone, the consumption amount calculation unit that calculates the consumption amount of the processing grindstone and the consumption amount calculation unit accumulates the consumption amount each time the consumption amount calculation unit calculates the consumption amount of the processing grindstone. The consumable amount storage unit that stores the consumable amount, the total consumable amount calculation unit that calculates the total consumable amount of the processing grindstone that the consumable amount storage unit accumulates and stores as the total consumable amount, and the work piece are processed. The average consumption amount storage unit that stores the average of the consumption amount of the processing grindstone as the average consumption amount, and the total consumption amount is subtracted from the limit consumption amount of the processing wheel to calculate the remaining amount of the cutting edge, and the remaining amount of the cutting edge is calculated. It is characterized by including a processable remaining number calculation unit for calculating the processable remaining number of the processing grindstone by dividing by the average consumption amount, and a display control unit for displaying the processable remaining number on the display unit. Processing equipment is provided.

Preferably, the control unit has a warning threshold storage unit that stores a warning threshold set for the processable remaining number, and a warning unit that issues a warning when the processable remaining number is less than the warning threshold value. Further prepare.

Further, preferably, the warning unit has a function of changing all or part of the background color of the display screen of the display unit, a function of displaying a warning text on the display screen of the display unit, and a function of lighting an alarm lamp. , And one or more of the functions that cause the speaker to emit an alarm sound to issue the warning.

Further, preferably, when the outer diameter size of the workpiece is changed, the processable remaining number calculation unit processes the remaining amount of the cutting edge and the workpiece having the changed outer diameter size. It has a function of calculating the new average consumption amount of the processed grindstone and the new processable remaining number of the processed grindstone for processing the workpiece related to the changed outer diameter size based on the new average consumption amount.

Alternatively, preferably, when the processing conditions of the workpiece are changed, the processable remaining number calculation unit is the remaining amount of the cutting edge and the processing grindstone that processes the workpiece under the changed machining conditions. Based on the new average consumption amount, it has a function of calculating the number of remaining workable grindstones for processing the workpiece under the changed processing conditions.

Preferably, the machining feed unit further comprises a machining feed unit that feeds the machining unit and the chuck table in a machining feed direction that is relatively close to each other and separates from each other, and the machining unit has a spindle along the machining feed direction. It has a function to grind the workpiece held by the chuck table from the first thickness to the second thickness by being machined and fed by the machined feed unit while rotating the machined grindstone by rotating. The consumable amount calculation unit reduces the difference between the first thickness and the second thickness from the machining feed amount of the machining feed unit when the machining unit grinds the workpiece, and reduces the machining grindstone. The consumption amount of the above is calculated.

Alternatively, preferably, the machining unit rotates the spindle to rotate the grindstone, and the cutting edge of the grindstone is cut into the workpiece held by the chuck table to cut the workpiece. It has an approach groove into which the processing grindstone enters, and a light emitting portion and a light receiving portion arranged so as to sandwich the approach groove, and light is emitted from the light emitting portion to the light receiving portion. It is provided with a cutting edge position detecting unit that detects the cutting edge position of the processing grindstone by allowing the processing grindstone to enter the approach groove while irradiating, and the consumption amount calculation unit is the processing grindstone detected by the cutting edge position detecting unit. The consumption amount of the processing grindstone is calculated based on the change amount of the cutting edge position.

In the processing apparatus according to one aspect of the present invention, the control unit accumulates and stores the consumption amount of the processing grindstone mounted on the spindle of the processing unit to calculate the total consumption amount, and the total consumption amount is calculated from the limit consumption amount of the processing grindstone. Calculate the remaining amount of the cutting edge by reducing the amount. Then, by dividing the remaining amount of the cutting edge by the average consumption amount when the workpiece is machined with the grindstone, the number of workpieces that can be machined with the grindstone is calculated, and the calculated remaining number that can be machined is displayed. To display.

Therefore, the worker who operates the processing apparatus can determine whether or not the number of workpieces accommodated in the cassette is larger than the remaining number that can be processed when the cassette is carried into the processing apparatus. For example, if the number of workpieces stored in the cassette is larger than the remaining number that can be processed, the consumption amount of the processing grindstone reaches the limit consumption amount during the fully automatic processing. Therefore, the worker can take measures such as leaving the work piece in the cassette as many as the workable remaining amount and taking out other work pieces from the cassette in advance, or replacing the work grindstone first.

By taking such measures before starting full-auto machining, the consumption of the grindstone does not reach the limit consumption during full-auto machining, so there is no need to stop full-auto machining, and machining can be performed. It is not necessary to continue processing the workpiece with a processing wheel in an unsuitable state.

Therefore, according to one aspect of the present invention, there is provided a processing apparatus capable of calculating the remaining number of workpieces that can be processed from the remaining amount of the cutting edge of the processing grindstone.

It is a perspective view which shows typically the structure of the grinding apparatus (processing apparatus). It is a perspective view which shows typically the grinding unit (machining unit) which machined a work piece. It is sectional drawing which shows typically the grinding unit (machining unit) which machined a work piece. It is a block diagram which shows an example of the structure of a control unit schematically. FIG. 5A is a flowchart schematically showing the operation flow of the control unit, and FIG. 5B is a flowchart schematically showing the operation flow of the warning unit. It is a top view which shows schematically the display unit which displays the remaining number which can be processed. It is a top view which shows schematically the display unit which displays the processable remaining number for each processing condition. It is a top view which shows schematically the display unit which displays a warning text. It is a perspective view which shows typically the structure of the cutting apparatus (machining apparatus). FIG. 10A is a perspective view schematically showing the cutting edge position detecting unit, and FIG. 10B is a side view and a block diagram schematically showing the configuration of the cutting edge position detecting unit. It is a graph which shows typically the change of the voltage value of the electric signal which a photoelectric conversion part emits.

An embodiment of the present invention will be described with reference to the drawings. The processing apparatus according to this embodiment processes a workpiece such as a wafer made of a semiconductor. First, the workpiece will be described. FIG. 1 includes a perspective view schematically showing the back surface 1b side of the workpiece 1.

The workpiece 1 is a wafer made of, for example, Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductor material. Alternatively, it is a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz. The glass is, for example, alkaline glass, non-alkali glass, soda-lime glass, lead glass, borosilicate glass, quartz glass and the like.

A plurality of devices such as ICs and LSIs are formed on the surface 1a of the workpiece 1. Then, by dividing the workpiece 1 for each device, individual device chips can be formed. If the workpiece 1 is ground and thinned before the workpiece 1 is divided, the workpiece 1 can be divided thereafter to form a thin device chip. However, the device may not be formed on the surface 1a of the workpiece 1.

The processing device according to the present embodiment includes a grinding device that grinds the workpiece 1 from the back surface 1b side with a grinding wheel (machining wheel), a cutting device that cuts the workpiece 1 with a cutting blade (machining wheel), and the like. Is. However, the processing apparatus according to this embodiment is not limited to this. First, the processing apparatus according to the present embodiment will be described by taking the case of the grinding apparatus 2 shown in FIG. 1 and the like as an example.

In the grinding device 2, the back surface 1b is ground with the back surface 1b side of the workpiece 1 exposed upward. That is, when the workpiece 1 is ground, the surface 1a side of the workpiece 1 is supported by the chuck table 8 described later. At this time, if the surface 1a and the holding surface 8a of the chuck table 8 are in direct contact with each other, the surface 1a may be damaged.

Therefore, in order to protect the surface 1a when grinding the workpiece 1, a tape-shaped protective member 3 is previously attached to the surface 1a of the workpiece 1. The protective member 3 includes, for example, a base material layer and a glue layer formed on the base material layer.

The workpiece 1 is housed in, for example, cassettes 28a and 28b capable of accommodating a plurality of workpieces 1 and transported, and is carried into the grinding apparatus 2. The grinding device 2 includes a base 4 that supports each component. Cassette mounting tables 26a and 26b are arranged at the front end of the base 4.

The transfer robot 30 is installed at a position adjacent to the cassette mounting bases 26a and 26b on the base 4. The transfer robot 30 carries out the workpiece 1 from the cassettes 28a and 28b mounted on the cassette mounting tables 26a and 26b, and puts the work piece 1 on a positioning table 32 provided at a position adjacent to the transfer robot 30 on the base 4. The workpiece 1 is conveyed.

The positioning table 32 has a plurality of positioning pins arranged in an annular shape. When the workpiece 1 is placed in the central mounting area, the positioning table 32 positions the workpiece 1 at a planned position by moving the positioning pins in the radial direction in conjunction with each other. .. A loading arm 34 and an unloading arm 36 are provided at positions adjacent to the positioning table 32 on the upper surface of the base 4. The workpiece 1 whose position has been adjusted by the positioning table 32 is conveyed by the loading arm 34.

A disk-shaped turntable 6 is rotatably provided on the central upper surface of the base 4 in a horizontal plane. The upper surface of the turntable 6 is provided with, for example, three chuck tables 8 separated from each other by 120 degrees in the circumferential direction. By rotating the turntable 6, each chuck table 8 can be moved.

Each chuck table 8 has a suction path (not shown) at one end connected to a suction source (not shown), and the other end of the suction path is connected to a holding surface 8a on the chuck table 8. .. FIG. 3 includes a cross-sectional view schematically showing the chuck table 8. The holding surface 8a is composed of, for example, the upper surface of the porous member 8b. The chuck table 8 operates the suction source when the workpiece 1 is placed on the holding surface 8a, and applies a negative pressure to the workpiece 1 through the porous member 8b to cause the workpiece 1 to act. Can be sucked and held.

The chuck table 8 is fixed on a table support base 8d provided on the upper surface of the turntable 6. A table rotation motor 8e fixed on the turntable 6 is connected to the lower surface of the table support 8d via a spindle. When the table rotation motor 8e is operated, the chuck table 8 fixed to the table support base 8d rotates around the table rotation shaft 8c that intersects the holding surface 8a.

The loading / unloading of the workpiece 1 to / from the chuck table 8 is carried out in the loading / unloading area 6a shown in FIG. In the carry-in / carry-out area 6a, the workpiece 1 can be carried into the chuck table 8 by the loading arm 34, and the workpiece 1 can be carried out from the chuck table 8 by the unloading arm 36.

When grinding the workpiece 1, the workpiece 1 is loaded onto the chuck table 8 located in the carry-in / carry-out region 6a by the loading arm 34, and then the turntable 6 is rotated to rotate the chuck table 8. Move to the rough grinding area 6b.

On the outside of the turntable 6 on the rear upper surface of the base 4, a first grinding unit (machining) for rough grinding the back surface 1b side of the workpiece 1 held by the chuck table 8 located in the rough grinding region 6b. Unit) 10a is arranged. After the rough grinding of the workpiece 1 is performed, the turntable 6 is rotated to move the chuck table 8 to the finish grinding region 6c adjacent to the rough grinding region 6b.

On the outside of the turntable 6 on the rear upper surface of the base 4, a second grinding unit (machining) for finish grinding the back surface 1b side of the workpiece 1 held by the chuck table 8 located in the finish grinding area 6c. Unit) 10b is arranged. In the second grinding unit 10b, the workpiece 1 is finish-ground. After the finish grinding of the workpiece 1 is performed, the turntable 6 is rotated to return the chuck table 8 to the carry-in / carry-out area 6a, and the workpiece 1 is carried out from the chuck table 8 by the unloading arm 36. ..

A spinner cleaning device 38 for cleaning and drying the ground workpiece 1 is disposed in the vicinity of the unloading arm 36 on the upper surface of the base 4 and the transfer robot 30. Then, the workpiece 1 washed and dried by the spinner cleaning device 38 is conveyed from the spinner cleaning device 38 by the transfer robot 30 and accommodated in the cassettes 28a and 28b mounted on the cassette mounting tables 26a and 26b.

The grinding device 2 will be further described with reference to FIGS. 1 and 3. A column 22a is erected at the rear of the base 4. On the front surface of the column 22a, a grinding feed unit (machining feed unit) 24a that movably supports the first grinding unit 10a along the grinding feed direction (machining feed direction) is arranged. The grinding feed unit 24a includes a spindle 50 along the vertical direction, a servomotor 48 connected to the upper end of the spindle 50, and a servodriver 46 connected to the servomotor 48.

The servo driver 46 sends a signal to the servo motor 48 to control the servo motor 48. The servo driver 46 is, for example, a PC (Personal Computer) or a microcomputer equipped with a CPU (Central Processing Unit), a main memory, a storage device, and the like. The storage device stores software that realizes the functions of the servo driver 46. The servo driver 46 functions as a concrete means in which the software and the hardware resources cooperate by operating the CPU or the like according to the software.

A nut portion 52 arranged on the back surface of the elevating plate 54 is screwed into the spindle 50. When the servo driver 46 commands the servo motor 48 to operate the servo motor 48, the spindle 50 rotates and the elevating plate 54 including the nut portion 52 moves up and down. A first grinding unit 10a is fixed to the front surface of the elevating plate 54.

The first grinding unit 10a includes a spindle 14a extending along the vertical direction and a spindle motor 12a connected to the upper end of the spindle 14a. A disk-shaped wheel mount 16a is arranged at the lower end (tip) of the spindle 14a. A disk-shaped grinding wheel 18a is mounted on the lower surface of the wheel mount 16a. A plurality of grinding wheels (processing grindstones) 20a arranged in an annular shape are fixed to the lower surface of the grinding wheel 18a.

When the spindle motor 12a is operated, the grinding wheel 18a rotates around the wheel rotation shaft 12c along the grinding feed direction (machining feed direction). When grinding (machining) the workpiece 1 in the rough grinding region 6b, first, the grinding wheel 18a is rotated around the wheel rotation shaft 12c to move the grinding grindstone 20a along the annular trajectory, and the chuck table is used. 8 is rotated around the table rotation shaft 8c.

Then, the grinding feed unit 24a is operated to lower the first grinding unit 10a, and the grinding wheel 20a is brought into contact with the back surface 1b of the workpiece 1 held by the chuck table 8. The grinding wheel 20a is formed by, for example, abrasive grains made of diamond or the like dispersed in a binder. Abrasive grains are appropriately exposed from the binder on the contact surface of the grinding wheel 20a in contact with the workpiece 1, and the exposed abrasive grains come into contact with the workpiece 1 to grind the workpiece 1. ..

Further, on the front surface of the column 22b, a grinding feed unit (machining feed unit) 24b that movably supports the second grinding unit 10b along the grinding feed direction (machining feed direction) is arranged. The grinding feed unit 24b is configured in the same manner as the grinding feed unit 24a. Further, the second grinding unit 10b includes a spindle 14b along the vertical direction and a spindle motor 12b connected to the upper end of the spindle 14b, similarly to the first grinding unit 10a.

A disk-shaped wheel mount 16b is disposed at the lower end (tip) of the spindle 14b, and a grinding wheel 18b is fixed to the lower surface of the wheel mount 16b. A plurality of grinding wheels (processing grindstones) 20b arranged in an annular shape are mounted on the lower surface of the grinding wheel 18b. Further, also in the second grinding unit 10b, when the spindle motor 12b is operated, the grinding wheel 18b rotates around the wheel rotation axis along the grinding feed direction (machining feed direction).

When grinding the workpiece 1 in the finish grinding region 6c, the grinding wheel 18b is rotated to rotate the grinding wheel 20b, and the chuck table 8 is rotated. Then, when the grinding feed unit 24b is operated to lower the second grinding unit 10b and the grinding wheel 20b is brought into contact with the back surface 1b of the workpiece 1 held on the chuck table 8, the workpiece 1 is brought into contact with the workpiece 1. Grinded from the back surface 1b side.

In the rough grinding of the workpiece 1 using the first grinding unit 10a, the grinding feed by the grinding feed unit 24a is performed at a relatively high speed to grind the workpiece 1. In rough grinding, most of the thickness of the workpiece 1 that is ground and removed by the grinding device 2 is efficiently removed. In the finish grinding of the workpiece 1 using the second grinding unit 10b, the grinding feed by the grinding feed unit 24b is performed at a relatively low speed to grind the workpiece 1. In finish grinding, the workpiece 1 is ground with high accuracy to the planned finish thickness.

A first thickness measuring unit 40 for measuring the thickness of the workpiece 1 roughly ground by the first grinding unit 10a is arranged in the vicinity of the rough grinding region 6b on the upper surface of the base 4. There is. The first thickness measuring unit 40 is, for example, a contact type thickness measuring unit. However, the first thickness measuring unit 40 is not limited to the contact type thickness measuring unit, and may be another type of thickness measuring instrument.

As shown in FIGS. 2 and 3, the first thickness measuring unit 40 comes into contact with the back surface 1b of the workpiece 1 and measures the height of the back surface 1b, and the chuck table 8 and the first probe 40a. A second probe 40b that comes into contact with the holding surface 8a and measures the height of the holding surface 8a is provided. Further, it includes a post 40c that supports the first probe 40a and the second probe 40b. The first thickness measuring unit 40 can calculate the thickness of the workpiece 1 from the difference between the height of the back surface 1b of the workpiece 1 and the height of the holding surface 8a of the chuck table 8.

In the vicinity of the finish grinding region 6c on the upper surface of the base 4, a non-contact second thickness measuring unit 42 that measures the thickness of the workpiece 1 that is finish-ground by the second grinding unit 10b is provided. It is arranged. The second thickness measuring unit 42 measures the height of the back surface 1b of the workpiece 1 by, for example, irradiating the back surface 1b of the workpiece 1 with a laser beam and detecting the reflected laser beam. Laser thickness measuring unit (spectral interference laser displacement meter). However, the second thickness measuring unit 42 is not limited to this.

When the thickness measuring units 40 and 42 are used, the workpiece 1 can be ground until the thickness of the workpiece 1 reaches a predetermined thickness while monitoring the thickness of the workpiece 1. Further, the thickness measuring units 40 and 42 can also be used for measuring the consumption amount of the grinding wheel (machining wheel) 20a and 20b as described later.

The contact mode between the grinding wheels 20a and 20b at the time of grinding the workpiece 1 and the workpiece 1 will be described. As shown in FIG. 3, in the grinding apparatus 2, the holding surface 8a of the chuck table 8 has a conical shape with an extremely small inclination, and the annular track on which the grinding wheels 20a and 20b move is the holding surface 8a of the chuck table 8. It is set to pass above the center. When grinding the workpiece 1, the grinding wheels 20a and 20b come into contact with the workpiece 1 in an arcuate region overlapping the annular track extending from the center of the holding surface 8a of the chuck table 8 to the outer peripheral portion.

When grinding the workpiece 1, the grinding wheels 18a and 18b rotate around the wheel rotation shaft 12c, and the chuck table 8 rotates around the table rotation shaft 8c that intersects the holding surface 8a of the chuck table 8. .. Therefore, various parts of the back surface 1b of the workpiece 1 approach the arcuate region one after another, and the entire back surface 1b of the workpiece 1 is ground.

The grinding device 2 further includes a control unit 44 that controls each component of the grinding device 2. The control unit 44 controls the turntable 6, the chuck table 8, the grinding feed units 24a and 24b, the grinding units 10a and 10b, the servo driver 46, the thickness measuring units 40 and 42, and the like. Further, the control unit 44 controls the transfer robot 30, the positioning table 32, the loading arm 34, the unloading arm 36, the spinner cleaning device 38, and the like.

The control unit 44 is composed of a computer including a processing device such as a CPU and a storage device such as a flash memory. By operating the processing device according to software such as a program stored in the storage device, the control unit 44 functions as a concrete means in which the software and the processing device (hardware resource) cooperate with each other.

When grinding the workpiece 1 is performed, the control unit 44 rotates the chuck table 8 and the grinding units 10a and 10b, respectively. The control unit 44 commands the servo driver 46 to operate the servomotor 48 to move the chuck table 8 and the spindles 14a and 14b included in the grinding units 10a and 10b relative to each other in the direction of approaching each other. Let's get started.

The target thickness of the workpiece 1 is registered in advance in the control unit 44, and the control unit 44 controls the thickness measuring units 40 and 42 to determine the thickness of the workpiece 1 to be ground. Measure. Then, when the thickness of the workpiece 1 reaches the target thickness, the control unit 44 commands the servo driver 46 to stop the servomotor 48. Then, the grinding of the workpiece 1 is completed.

Further, the grinding device 2 includes a display unit 56 provided on the surface of a housing covering each component, an input device (input interface) that can be used by an operator when inputting various commands, and a grinding device 2. It is provided with an alarm lamp 58 that informs the state by the color of the lamp that lights the state. For example, the display unit 56 is a liquid crystal display, and a touch panel serving as an input device may be superimposed on the display unit 56. That is, the display unit 56 may be a display with a touch panel. Various information and operation screens are displayed on the display unit 56.

In the grinding device 2, a plurality of workpieces 1 housed in the cassettes 28a and 28b are pulled out one after another, automatically ground (processed), washed, and returned to the cassettes 28a and 28b. The grinding device (machining device) 2 capable of automatically performing such a series of machining is called a fully automatic type.

When the machining of the workpiece 1 is repeated with the grinding device 2, the grinding wheels (machining wheels) 20a and 20b are consumed, the cutting edge becomes shorter and thinner, and eventually the grinding wheels 20a and 20b cannot perform normal machining. Become. Therefore, the usage limit length is set for the remaining amount (thickness) of the cutting edge of the grinding wheels 20a and 20b, and if the remaining amount of the cutting edge of the grinding wheels 20a and 20b is equal to or less than the usage limit length, replacement is necessary. It becomes.

However, if the replacement work is to be performed while the fully automatic processing is being performed, the fully automatic processing must be stopped. In this case, it takes a long time to finish the processing of all the workpieces 1 housed in the cassettes 28a and 28b until the cassettes 28a and 28b are carried out, and the processing efficiency is lowered. Therefore, in order to take measures in advance so that the remaining amount of the cutting edge does not reach the usage limit length during full-automatic machining, the remaining number of workpieces 1 that can be machined with the grinding wheels 20a and 20b is worked in advance. There is a request to let the members understand.

Therefore, the processing apparatus according to the present embodiment monitors the wear state of the grinding wheels (machining wheels) 20a and 20b, and calculates the remaining number of workpieces 1 that can be processed by the grinding wheels 20a and 20b (the remaining number that can be processed). And display it on the display unit 56. Hereinafter, the processing apparatus (grinding apparatus 2) according to the present embodiment will be described with a focus on the elements related to the display of the remaining number that can be processed. The function of calculating the remaining number that can be processed is mainly realized by the configuration of the control unit 44. FIG. 4 is a block diagram schematically showing the configuration of the control unit 44.

The control unit 44 includes a consumption amount calculation unit 60 that calculates the consumption amount of the grinding wheels (machining wheels) 20a and 20b when the workpiece 1 is processed by the grinding wheels (machining wheels) 20a and 20b. The consumption amount calculation unit 60 calculates the consumption amount by using, for example, the thickness measuring units 40 and 42 and the servo drivers 46 of the grinding feed units 24a and 24b.

When grinding the workpiece 1 with the grinding wheels 20a and 20b from the first thickness before grinding to the second thickness which is the target thickness, the workpiece 1 The amount of decrease in thickness and the amount of lowering of the grinding wheels 20a and 20b by the grinding feed units 24a and 24b (grinding feed amount) do not match. This is because the grinding wheels 20a and 20b are consumed and become thinner while the workpiece 1 is being ground.

That is, when the workpiece 1 has a second thickness, the grinding feed units 24a and 24b have a height corresponding to the removal thickness of the workpiece 1 and a consumable thickness of the grinding wheels 20a and 20b. The grinding wheels 20a and 20b are lowered at a corresponding height. In other words, when the grinding of the workpiece 1 is completed, if the difference between the first thickness and the second thickness is subtracted from the lowering amount (machining feed amount) of the grinding wheels 20a and 20b, the grinding wheel 20a, The consumption amount of 20b can be calculated. The consumption amount calculation unit 60 calculates the consumption amount by such a method.

The control unit 44 includes a consumption amount storage unit 62 that accumulates and stores the consumption amount each time the consumption amount calculation unit 60 calculates the consumption amount of the grinding wheels (machining wheels) 20a and 20b. Further, the control unit 44 includes a total consumption amount calculation unit 64 that calculates the total consumption amount of the grinding wheels (machining wheels) 20a and 20b accumulated and stored by the consumption amount storage unit 62 as the total consumption amount.

The consumable amount storage unit 62 accumulates and stores, for example, the consumable amount of the grinding wheels 20a and 20b when each workpiece 1 is ground after the use of the grinding wheels 20a and 20b is started. Then, the total consumption amount calculation unit 64 calculates, for example, the consumption amount after the use of the grinding wheels 20a and 20b is started by adding the consumption amounts accumulated in the consumption amount storage unit 62 as the total consumption amount. The calculated total consumption amount may be stored in the consumption amount storage unit 62.

The consumable amount storage unit 62 does not need to store all the consumable amounts of the grinding wheels 20a and 20b. When the consumption amount storage unit 62 stores the total consumption amount calculated by the total consumption amount calculation unit 64, it is sufficient to further store the consumption amount calculated by the consumption amount calculation unit 60 next. In this case, the total consumption amount calculation unit 64 can newly calculate the total consumption amount by adding the consumption amount to the past total consumption amount stored in the consumption amount storage unit 62.

The control unit 44 further includes an average consumption storage unit 66 that stores the average of the consumption of the grinding wheels (machining wheels) 20a and 20b for processing the workpiece 1 as the average consumption. The average consumption storage unit 66 calculates and stores, for example, the average consumption of the grinding wheels 20a and 20b stored in the consumption storage unit 62.

By the way, the consumption amount of the grinding wheels (machining wheels) 20a and 20b in grinding (machining) is the type and outer diameter size of the workpiece 1, the types of the grinding wheels 20a and 20b to be used, and the rotation of the grinding wheels 20a and 20b. It changes depending on the machining conditions such as speed and machining feed speed. If these processing conditions are constant, the amount of consumption of the grinding wheels 20a and 20b in grinding is also substantially constant. Therefore, the average consumption amount empirically derived based on the past results may be registered in the average consumption amount storage unit 66 for each of various processing conditions.

The control unit 44 further calculates the remaining number of machines that can be processed for the grinding wheels (machining wheels) 20a and 20b, which is the remaining number of the workpiece 1 that can be processed until the remaining amount of the cutting edge reaches the limit consumption amount. A number calculation unit 68 is provided. The processable remaining number calculation unit 68 calculates the remaining amount of the cutting edge by subtracting the total consumption amount from the limit consumption amount of the grinding wheels (machining wheels) 20a and 20b, and divides the remaining amount of the cutting edge by the average consumption amount. The remaining number of grindstones (processed grindstones) 20a and 20b that can be processed is calculated.

When the grinding wheels 20a and 20b are consumed, they become thin and the cutting edge becomes short, and it becomes impossible to secure the required cutting edge length, which is the minimum cutting edge length required for appropriately processing the workpiece 1. Here, the required cutting edge length is, for example, 1000 μm. The limit consumption amount is a numerical value calculated by subtracting the required cutting edge length from the initial cutting edge length of the cutting edges of the grinding wheels 20a and 20b. The grinding wheels 20a and 20b can normally grind the workpiece 1 until the total consumption reaches the limit consumption.

The limit consumption amount is set for each of the various grinding wheels 20a and 20b. Alternatively, a common initial cutting edge length, a required cutting edge length, and a limit consumption amount may be set for the various grinding wheels 20a and 20b according to the standard. In the control unit 44, the initial cutting edge length, the required cutting edge length, the limit consumption amount, and the like of the grinding wheels 20a and 20b mounted on the grinding units 10a and 10b are registered in advance.

The processable remaining number calculation unit 68 calculates the processable remaining number from these values, the total consumption amount calculated by the total consumption amount calculation unit 64, and the average consumption amount stored in the average consumption amount storage unit 66. calculate. Then, the control unit 44 further includes a display control unit 70 for displaying the calculated remaining number of machines that can be processed on the display unit 56. When the remaining number of machines that can be processed is displayed on the display unit 56, the operator who operates the grinding device (processing device) 2 can grasp the remaining number of machines that can be processed of the grinding wheels 20a and 20b.

Here, a series of operation flows of the control unit 44 until the remaining number that can be processed is displayed on the display unit 56 will be summarized. FIG. 5A is a flowchart showing a flow of a method of displaying the remaining number of machines that can be processed on the display unit 56. The control unit 44 calculates and stores the consumption amount of the grinding wheels 20a and 20b each time the grinding wheels 20a and 20b process the workpiece 1, and adds the stored consumption amounts to calculate the total consumption amount. (S10).

Next, the total amount of wear is subtracted from the limit amount of wear of the grinding wheels 20a and 20b to calculate the remaining amount of the cutting edge (S20). Then, the remaining amount of the cutting edge is divided by the average consumption amount to calculate the remaining number of grindstones 20a and 20b that can be processed (S30). After that, the display unit 56 is controlled to display the calculated remaining number of workable elements on the display unit 56 (S40).

An operator who visually recognizes the number of workable remaining pieces displayed on the display unit 56 can determine, for example, whether or not fully automatic machining to be performed by the grinding device 2 is possible. That is, the number of workpieces 1 housed in the cassettes 28a and 28b to be mounted on the cassette mounting tables 26a and 26b is compared with the number of workable remaining pieces, and the number of workable remaining pieces is insufficient. If so, consider measures. The measures include, for example, replacing the grinding wheels 20a and 20b in advance, reducing the number of workpieces 1 housed in the cassettes 28a and 28b, and the like.

When such measures are taken, the consumption amount of the grinding wheels 20a and 20b does not reach the limit consumption amount during the fully automatic processing. That is, it is not necessary to stop the grinding device 2 while the fully automatic machining is being performed, and it is not necessary to continue grinding the workpiece 1 with the grinding wheels 20a and 20b that have been consumed in excess of the limit consumption amount.

FIG. 6 is a plan view schematically showing a display unit 56 that displays the remaining number that can be processed. The display unit 56 shown in FIG. 6 displays an information display screen 76 showing the state and the like of each part of the grinding device 2. As shown in FIG. 6, the information display screen 76 includes a configuration diagram 80 of each component of the grinding device 2, and the operator selects a specific component using the configuration diagram 80. More detailed information can be displayed on the display unit 56 and the components can be operated.

As shown in FIG. 6, the information display screen 76 includes displays 78a and 78b of the remaining number of grinding wheels 20a and 20b mounted on the two grinding units 10a and 10b, respectively. It should be noted that the display unit 56 does not need to display both of the display 78a and 78b of the remaining number of grindstones 20a and 20b that can be processed, and may display either one. If the lowest processable remaining number among the processable remaining numbers is displayed, the operator can appropriately determine whether or not full-automatic processing can be performed.

In the grinding device (machining device) 2, the machining of the workpiece 1 of the same type is not always carried out continuously, and the type of the workpiece 1 is changed during the use of the grinding wheels 20a and 20b. It may be changed or the processing conditions may be changed. In this case, when processing a new type of workpiece 1 or processing workpiece 1 under new processing conditions, the average consumption amount used to calculate the remaining number that can be processed is applied as it is. Therefore, it is not possible to newly calculate the remaining number that can be processed.

Therefore, in the grinding apparatus (processing apparatus) 2 according to the present embodiment, instead of the average consumption amount used in the calculation up to that point, the grinding wheel 20a in the new type of workpiece 1 or in the new processing conditions, The new average consumption, which is the average consumption of 20b, is used in the calculation. For example, when the outer diameter size of the workpiece 1 is changed, the outer diameter size of the workpiece 1 that has been machined up to that point is compared with the outer diameter size of the workpiece 1 that is newly machined. Calculate the new average consumption.

That is, when the workpiece 1 is machined under the same machining conditions by changing only the area of the back surface 1b which is the surface to be ground of the workpiece 1, the average consumption of the grinding wheels 20a and 20b is the area of the back surface 1b. It tends to change in proportion to. For example, if the outer diameter size of the workpiece 1 is doubled, the area of the back surface 1b is quadrupled, so that the new average consumption is expected to be four times the conventional average consumption. As described above, the new average consumption amount can be calculated based on the outer diameter size of the workpiece 1.

Then, when the outer diameter size of the workpiece 1 is changed, the processable remaining number calculation unit 68 processes the remaining amount of the cutting edge and the grinding wheel 1 related to the changed outer diameter size. (Processing grindstone) The new average consumption amount of 20a and 20b, and the remaining number of new processing possible can be calculated based on the new average consumption amount. Further, the display control unit 70 replaces the newly processable remaining number of the grinding wheels (machining wheels) 20a and 20b for processing the workpiece 1 having the changed outer diameter size with the conventional processable remaining number. Display on the display unit 56.

In addition, the processable remaining number calculation unit 68 may acquire the new average consumption amount of the grinding wheels (machining wheels) 20a and 20b for machining the workpiece 1 having the changed outer diameter size by another method. .. For example, the average consumption amount storage unit 66 may store in advance the average consumption amount of the grinding wheels 20a and 20b in the workpiece 1 having various outer diameter sizes. In this case, the processable remaining number calculation unit 68 reads out the average consumption amount of the grinding wheels 20a and 20b for processing the workpiece 1 having the changed outer diameter size from the average consumption amount storage unit 66.

Further, the average consumption amount storage unit 66 may store the average consumption amount of the grinding wheels (machining wheels) 20a and 20b for each machining condition of the workpiece 1. Then, when the machining conditions of the workpiece 1 are changed, the processable residual number calculation unit 68 processes the remaining amount of the cutting edge and the grinding wheels 20a and 20b for machining the workpiece 1 under the changed machining conditions. The new average consumption amount and the remaining number of new processes that can be processed are calculated based on. Then, the display control unit 70 causes the display unit 56 to display the remaining number of grinding wheels 20a and 20b for processing the workpiece 1 under the changed processing conditions.

As described above, the processing apparatus according to the present embodiment recalculates the remaining number of grinding wheels (machining wheels) 20a and 20b that can be processed when the outer diameter size of the workpiece 1 and the machining conditions are changed. It can be displayed on the display unit 56. When the control unit 44 receives an instruction to change the outer diameter size of the workpiece 1 or change the machining conditions, the control unit 44 calculates the remaining number of new machines that can be machined and displays them on the display unit 56.

FIG. 7 is a plan view schematically showing the display unit 56 that displays the machining condition selection screen 82. For example, the machining condition selection screen 82 includes a plurality of machining condition options 84a and 84b, as well as displays 78c and 78d of the remaining number of grinding wheels 20a and 20b that can be machined under the machining conditions according to the respective options 84a and 84b. You may.

Further, when the remaining number of grinding wheels (machining wheels) 20a and 20b that can be processed is small, the grinding apparatus (processing apparatus) 2 according to the present embodiment warns the user of the processing apparatus to deal with it. It may have a function to promote. Next, the configuration for issuing a warning will be described. As shown in FIG. 4, the control unit 44 has a warning threshold value storage unit 72 that stores a warning threshold value set for the workable remaining number, and a warning that issues a warning when the workable remaining number is less than the warning threshold value. A unit 74 is provided.

The warning threshold value stored in the warning threshold value storage unit 72 may be arbitrarily set by the user of the grinding device 2. For example, the warning threshold is set to the maximum number of workpieces 1 accommodated in the cassettes 28a and 28b mounted on the cassette mounting tables 26a and 26b. For example, when the maximum number of workpieces 1 that can be accommodated in the cassettes 28a and 28b is 25, 25 is stored as a warning threshold in the warning threshold storage unit 72.

Then, the warning unit 74 issues a warning when the processable remaining number calculated by the processable remaining number calculation unit 68 is less than 25. This is because the consumption amount of the grinding wheels 20a and 20b may reach the limit consumption amount during the fully automatic processing of the plurality of workpieces 1 housed in the cassettes 28a and 28b. The warning unit 74 calls attention to the operator by issuing a warning.

The warning unit 74 issues a warning through the components of the grinding device 2. That is, the warning unit 74 has a function of issuing a warning to the constituent elements of the grinding device 2. For example, the warning unit 74 may have a function of changing all or part of the background color of the display screen of the display unit 56, or a function of displaying a warning text on the display screen of the display unit 56. A warning may be issued depending on the function.

FIG. 8 is a plan view schematically showing the display unit 56 displaying the warning text 86. The operator who visually recognizes the warning sentence 86 shown in FIG. 8 understands that the remaining number of grindstones 20a that can be processed in the first grinding unit 10a represented by the name of the Z1-axis wheel is equal to or less than the warning threshold value. do. The warning unit 74 may change the background color of the display screen of the display unit 56 displaying the warning text 86 to a color such as yellow or red, or may blink a specific color.

Further, the warning unit 74 may issue a warning by another method. For example, the warning unit 74 has a function of lighting the alarm lamp 58 (see FIG. 1), and may issue a warning to the operator by lighting the red lamp or the yellow lamp of the alarm lamp 58. Further, the grinding device 2 may further include a speaker capable of emitting a warning sound. Then, the warning unit 74 may issue a warning by causing the speaker to emit an alarm sound. The warning unit 74 can issue a warning by one or more of these functions.

Here, in the processing apparatus according to the present embodiment, the operation flow when the warning unit 74 issues a warning will be described. FIG. 5B is a flowchart showing a procedure in which the warning unit 74 issues a warning. First, it is determined whether or not the processable residual number calculated by the processable residual number calculation unit 68 is less than the warning threshold value stored in the warning threshold value storage unit 72 (S50). Then, when the number of workable remaining pieces is less than the warning threshold value, a warning is issued (S60). If the remaining number that can be processed is not less than the warning threshold value, no warning is issued.

Up to this point, the processing apparatus according to the present embodiment has been described by taking the case of the grinding apparatus 2 as an example, but the processing apparatus is not limited to this in the present embodiment. Next, a case where the processing apparatus according to the present embodiment is a cutting apparatus for cutting the workpiece 1 with an annular cutting blade (machining grindstone) will be described. FIG. 9 is a perspective view schematically showing the cutting device 88. In FIG. 9, a cassette mounting table on which a cassette for accommodating the workpiece 1 is placed, a cleaning unit for cleaning the workpiece 1 after machining, a transport unit for transporting the workpiece 1, a display unit, and the like are omitted. Has been done.

As shown in FIG. 9, the cutting device 88 includes a base 90 that supports each component. An X-axis moving table 92 and an X-axis moving mechanism for moving the X-axis moving table 92 in the X-axis direction (machining feed direction) are provided in the upper center of the base 90. The X-axis moving mechanism is covered by a drainage channel 106. The X-axis moving mechanism includes a pair of X-axis guide rails 98 parallel to the X-axis direction, and an X-axis moving table 92 is slidably attached to the X-axis guide rail 98.

A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 92, and an X-axis ball screw 100 parallel to the X-axis guide rail 98 is screwed into the nut portion. An X-axis pulse motor 102 is connected to one end of the X-axis ball screw 100. When the X-axis ball screw 100 is rotated by the X-axis pulse motor 102, the X-axis moving table 92 moves in the X-axis direction along the X-axis guide rail 98.

A chuck table 94 for sucking and holding the workpiece 1 is provided on the X-axis moving table 92. The chuck table 94 is connected to a rotation drive source (not shown) such as a motor, and can rotate around a rotation axis perpendicular to the upper surface of the chuck table 94. Further, the chuck table 94 is fed in the X-axis direction by the X-axis moving mechanism described above.

The surface (upper surface) of the chuck table 94 is a holding surface 94a that sucks and holds the workpiece. The holding surface 94a is connected to a suction source (not shown) via a flow path (not shown) formed inside the chuck table 94. The workpiece 1 is carried into the cutting apparatus 88 in an integrated state with a tape having a diameter larger than the outer diameter of the workpiece 1 and an annular frame for holding the workpiece 1 via the tape. Ru. A clamp 96 for fixing the frame is arranged around the holding surface 94a.

On the upper surface of the base 90, a support structure 108 that supports two cutting units 104 that cut the workpiece 1 is arranged so as to straddle the X-axis moving mechanism. At the upper part of the front surface of the support structure 108, there are an indexing feed unit 112 that moves the two cutting units 104 in the Y-axis direction (indexing feed direction) and a cutting feed unit 116 that moves the two cutting units 104 in the Z-axis direction (cutting feed direction). It is provided.

The indexing feed unit 112 is a ball screw type moving mechanism similar to the X-axis moving mechanism, and moves the Y-axis moving plate 110 along the Y-axis direction. Further, the notch feed unit 116 is also a ball screw type moving mechanism similar to the X-axis moving mechanism, and moves the Z-axis moving plate 114 along the Z-axis direction.

At the bottom of each of the two Z-axis moving plates 114, there is a cutting unit (machining unit) 104 that processes the workpiece 1 and an imaging unit (camera) 118 that can image the workpiece 1 held on the chuck table 94. And are fixed. If the Y-axis moving plate 110 is moved in the Y-axis direction, the cutting unit 104 and the imaging unit 118 are moved in the Y-axis direction (indexing feed direction), and if the Z-axis moving plate 114 is moved in the Z-axis direction, The cutting unit 104 and the imaging unit 118 move in the Z-axis direction (cutting feed direction).

The cutting unit 104 includes a spindle 104c (see FIG. 10B) along the Y-axis direction parallel to the holding surface 94a of the chuck table 94, and an annular cutting blade mounted on the tip of the spindle 104c (see FIG. 10B). It has a machined grindstone) 104a (see FIG. 10B). A rotary drive source (not shown) such as a motor is connected to the other end side of the spindle 104c, and when the rotary drive source is operated to rotate the spindle 104c, the cutting blade 104a rotates around the spindle 104c. do.

The cutting blade 104a has, for example, a disk-shaped base. A substantially circular mounting hole penetrating the base is provided in the central portion of the base, and the tip of the spindle 104c is passed through the mounting hole to mount the cutting blade 104a on the spindle 104c. An annular cutting edge (grinding stone portion) for cutting into the workpiece 1 is fixed to the outer peripheral portion of the base. The cutting edge has an abrasive grain such as diamond and a binder for dispersing and fixing the abrasive grain. The binder is formed of, for example, a material such as metal or resin.

The workpiece 1 is held on the chuck table 94 with the surface 1a exposed upward. When cutting the workpiece 1, the image pickup unit 118 recognizes the position of the scheduled division line set in advance on the surface 1a of the workpiece 1. Then, the chuck table 94 is rotated so that the extension direction of the scheduled division line matches the machining feed direction of the cutting device 88. Then, the cutting blade 104a is positioned above the extension line of the planned division line of the workpiece 1.

When the cutting blade 104a is rotated by rotating the spindle 104c and the cutting edge of the cutting blade 104a is brought into contact with the workpiece 1, the workpiece 1 is cut. At this time, the height of the cutting unit 104 is adjusted so that the lower end 104b (see FIG. 10B) of the cutting edge of the cutting blade 104a is at a height lower than the back surface (lower surface) of the workpiece 1. .. The cut feed unit 116 includes, for example, a position recognition unit (not shown) that recognizes the height of the cutting unit 104, and positions the cutting unit 104 at a predetermined height position.

Then, the X-axis moving mechanism is operated to move the chuck table 94 in the machining feed direction to feed the machining, and the cutting blade 104a is cut into the workpiece 1 to cut the workpiece 1. After cutting the workpiece 1 along one scheduled division line, the indexing feed unit is operated to index and feed the cutting unit 104, and then the chuck table 94 is machined and fed again along the other scheduled division lines. The workpiece 1 is cut. In this way, the cutting device 88 cuts the workpiece 1 one after another.

The cutting device 88 further includes a control unit 122. The control unit 122 has a function of controlling each component of the cutting device 88 such as the cutting unit 104, the chuck table 94, each moving mechanism, the image pickup unit 118, and the cutting edge position detecting unit 120 (described later). The function of the control unit 122 is realized, for example, as software of a computer for controlling a device.

That is, the control unit 122 is configured by a computer including a processing device such as a CPU and a storage device such as a flash memory. By operating the processing device according to software such as a program stored in the storage device, the control unit 122 functions as a concrete means in which the software and the processing device (hardware resource) cooperate with each other.

When the cutting of the workpiece 1 using the cutting blade 104a is repeated, the cutting edge of the cutting blade 104a is gradually consumed, and the diameter of the cutting blade 104a is gradually reduced. In this case, the height position of the lower end 104b of the cutting edge of the cutting blade 104a gradually rises.

Therefore, after cutting the workpiece 1 with the cutting blade 104a so that the lower end 104b of the cutting edge of the cutting blade 104a is positioned at a height lower than the back surface (lower surface) of the workpiece, a setup step is performed periodically. Is carried out. In the setup process, the height position of the cutting unit 104 when the height of the lower end 104b of the cutting edge of the cutting blade 104a is positioned below the back surface (lower surface) of the workpiece 1 is the height suitable for cutting. Detected as a position.

A cutting edge position detecting unit 120 is arranged in the vicinity of the cutting unit 104 of the cutting device 88. The cutting edge position detection unit 120 is used in the setup process. FIG. 10A is a perspective view schematically showing the cutting edge position detecting unit 120, and FIG. 10B is a side view schematically showing the cutting edge position detecting unit 104 and the cutting edge position detecting unit 120. include.

The main body 124 of the cutting edge position detecting unit 120 is provided with an approach groove 126 that opens upward. When using the cutting edge position detecting unit 120, the cutting blade 104a is positioned above the approach groove 126, the cutting feed unit is operated to lower the cutting blade 104a, and the cutting blade 104a is made to enter the approach groove 126. ..

A light emitting unit 130 is provided on one side wall of the approach groove 126, and a light receiving unit 132 is provided on the other side wall of the approach groove 126 at a position facing the light emitting unit 130. That is, the light emitting unit 130 and the light receiving unit 132 face each other with the approach groove 126 interposed therebetween. The light emitting unit 130 includes a light emitting window 130b and a light source 130a connected to the light emitting window 130b via an optical fiber or the like, and when the light source 130a is operated, light is emitted from the light emitting window 130b. A dimmer (not shown) having a function of adjusting the amount of light emitted is connected to the light source 130a.

The light receiving unit 132 includes a light receiving window 132b and a photoelectric conversion unit 132a connected to the light receiving window 132b via an optical fiber or the like. The light that reaches the light receiving window 132b is received by the photoelectric conversion unit 132a, and an electric signal having a voltage value corresponding to the amount of light received is output from the photoelectric conversion unit 132a. The photoelectric conversion unit 132a is electrically connected to the control unit 122, and sends the electric signal to the control unit 122.

The light emitting window 130b and the light receiving window 132b are provided at substantially the same predetermined height position. The cutting edge position detecting unit 120 is provided with a cover 128 that can be opened and closed to protect the light emitting unit 130 and the light receiving unit 132 when the cutting edge position detecting unit 120 is not in use. When using the cutting edge position detecting unit 120, the cover 128 is opened in advance to expose the main body 124.

The main body 124 is further provided with a plurality of fluid ejection nozzles facing the light emitting window 130b or the light receiving window 132b. When a fluid such as air or water is ejected from the fluid ejection nozzle, dirt adhering to the light emitting window 130b and the light receiving window 132b can be removed.

When the cutting edge position detection unit 120 detects the lower end 104b of the cutting edge of the cutting blade 104a, the light source 130a is operated to radiate light from the light emitting window 130b, and the light is irradiated to the light receiving window 132b of the light receiving unit 132 to irradiate the light receiving window 132b. The light is received by the photoelectric conversion unit 132a connected to the light source 132a. The photoelectric conversion unit 132a includes a light receiving element such as a CMOS sensor or a CCD sensor, converts the light into an electric signal having a voltage value corresponding to the amount of light received, and sends the electric signal to the control unit 122.

When the cutting blade 104a is lowered toward the approach groove 126, the light radiated from the light emitting window 130b is gradually blocked by the cutting blade 104a, reaches the light receiving window 132b, and is received by the photoelectric conversion unit 132a. The amount of light received gradually decreases. Therefore, by analyzing the electric signal output from the photoelectric conversion unit 132a with the control unit 122, the height position of the lower end 104b of the cutting edge of the cutting blade 104a can be detected.

Then, the height position of the cutting unit 104 when the amount of received light received by the photoelectric conversion unit 132a becomes a reference amount of light received so that it can be confirmed that the lower end 104b of the cutting edge has reached the predetermined height position. Is detected as the reference height position. Then, based on the detected reference height position of the cutting unit 104, a height position suitable for cutting in which the cutting unit 104 should be positioned when cutting the workpiece is calculated.

The graph shown in FIG. 11 is a graph schematically showing an example of time change of the voltage value of the electric signal sent from the photoelectric conversion unit 132a to the control unit 122 when the cutting edge of the cutting blade 104a is made to enter the approach groove 126. be. In FIG. 11, the voltage value corresponding to the light receiving amount in the initial state before the light receiving amount decreases is set to 5V. FIG. 11 schematically shows the time change 144 of the voltage value. However, the voltage value is not limited to this.

When the cutting edge of the cutting blade 104a enters the approach groove 126 and the light hits the cutting blade 104a, the amount of light received decreases and the voltage value decreases. Eventually, the light is completely blocked by the cutting blade 104a. In the example shown in FIG. 11, the voltage value corresponding to the amount of light received when the light does not reach the light receiving window 132b due to the cutting blade 104a is set to 0V. However, the voltage value is not limited to this.

A reference voltage value 146 is preset in the voltage value of the electric signal output from the photoelectric conversion unit 132a. In the example shown in FIG. 11, the reference voltage value 146 is set to 3V. However, the reference voltage value 146 is not limited to this. In the setup step, the cutting unit 104 is gradually lowered, and the height position of the cutting unit 104 when the voltage value reaches the reference voltage value 146 is detected as the reference height position.

The control unit 122 has, for example, a voltage value comparison unit 134 that compares the voltage value of the electric signal output from the photoelectric conversion unit 132a with the reference voltage value 146, and a reference voltage value registration unit 136 in which the reference voltage value 146 is registered. And. Further, the control unit 122 includes a cutting unit height detecting unit 138 connected to the cutting feed unit 116. The cutting unit height detecting unit 138 detects the height of the cutting unit 104 when the voltage value of the electric signal reaches the reference voltage value 146 by the voltage value comparing unit 134, and utilizes it in the setup process.

The control unit 122 includes a cutting unit height control unit 140 that controls the cutting feed unit 116 to control the height of the cutting unit 104. When the workpiece 1 is cut by the cutting blade (grinding stone) 104a, the cutting unit height control unit 140 positions the lower end 104b of the cutting edge of the cutting blade 104a below the back surface (lower surface) 1b of the workpiece 1. The cut feed unit 116 is controlled so as to be.

In this way, the setup process can be carried out by using the cutting edge position detection unit 120. The cutting edge position detection unit 120 so that the lower end 104b of the cutting edge of the cutting blade 104a is positioned at a predetermined height position even when the cutting of the workpiece 1 is started using the unused cutting blade 104a. Is used.

Here, when the cutting of the workpiece 1 is repeated with the cutting blade (machining wheel) 104a, the cutting edge of the cutting blade 104a is consumed and the diameter of the cutting edge of the cutting blade 104a becomes smaller. Even if the height of the cutting unit 104 is adjusted by performing the setup process, the consumption of the cutting edge reaches the limit consumption amount, and the diameter of the cutting edge is the minimum required cutting edge length for appropriate cutting. If it is less than the above, the workpiece 1 cannot be properly cut by the cutting blade 104a.

Therefore, it is necessary to periodically replace the cutting blade (machining wheel) 104a also in the cutting device 88. However, if the consumption amount of the cutting blade 104a reaches the limit consumption amount while the plurality of workpieces 1 are fully automatically processed, the fully automatic processing is stopped and the cutting blade 104a is replaced, resulting in higher processing efficiency. descend.

Therefore, even in the cutting device 88, there is a problem that the remaining number of cutting blades 104a that can be machined is to be grasped before the fully automatic machining is performed. Therefore, in the cutting apparatus (machining apparatus) 88 according to the present embodiment, the consumption amount of the cutting blade (machining grindstone) 104a is measured by using the cutting edge position detecting unit 120, and the remaining number that can be processed is calculated.

The control unit 122 of the cutting device 88 capable of calculating the remaining number that can be machined has the same configuration as the control unit 44 of the grinding device 2 shown in FIG. That is, the control unit 122 includes a consumption amount storage unit 62, a total consumption amount calculation unit 64, an average consumption amount storage unit 66, a processable remaining number calculation unit 68, and a display control unit 70. Further, the warning threshold storage unit 72 and the warning unit 74 may be provided. Further, as shown in FIG. 10B, a consumption amount calculation unit 60a is provided.

In the cutting device 88, a setup process is carried out by the cutting edge position detecting unit 120 in order to cope with the wear of the cutting blade 104a. After performing the setup process, the cutting unit 104 is positioned at a new height position different from the height position previously positioned at the time of machining. The amount of wear on the cutting edge of the cutting blade 104a corresponds to the amount of change in the height of the cutting unit 104 before and after the setup process.

Therefore, the consumption amount calculation unit 60a calculates the amount of change in the positioned height of the cutting unit 104 before and after the setup process as the consumption amount of the cutting blade 104a. Further, the average wear amount of the cutting blade 104a is calculated by dividing the wear amount by the number of workpieces 1 cut by the time the setup step is performed. Then, the control unit 122 calculates the machineable remaining number of the cutting blade (machining wheel) 104a in the same manner as the control unit 44 of FIG. 4, and displays the machineable remaining number on the display unit (not shown) of the cutting device 88. Let me.

The operator who visually recognizes the display unit can replace the cutting blade 104a in advance or process the work housed in the cassette so that the consumption amount of the cutting blade 104a does not reach the limit consumption amount during the fully automatic processing. Measures such as reducing the number of objects 1 can be implemented. Further, in the cutting device 88 as well, a warning may be issued when the remaining number of machines that can be machined is less than the warning threshold value, as in the grinding device 2.

The present invention is not limited to the description of the above embodiment, and can be modified in various ways. In the above embodiment, the case where the warning threshold value of the remaining number of machines that can be processed stored in the warning threshold value storage unit 72 is set to the maximum number of workpieces 1 that can be accommodated in the cassettes 28a and 28b has been described. The embodiment is not limited to this.

For example, the warning threshold value may be set to a number exceeding the maximum number of workpieces 1 that can be accommodated in the cassettes 28a and 28b. For example, when the remaining number that can be processed is less than the maximum number, it is necessary to replace the processing grindstone in the very near future. However, since it may take time to prepare a new machined grindstone, if the warning threshold value is set to the maximum number, the machined grindstone may not be replaced immediately even if the warning unit 74 issues a warning.

Therefore, it is advisable to set the warning threshold value in consideration of the preparation time of the new machined grindstone. For example, if the warning threshold value is set to twice the maximum number, even if a warning is issued by the warning unit 74, the machining apparatus can perform full-automatic machining at least once. In this case, since a new processing grindstone can be prepared during this fully automatic processing, the processing grindstone can be replaced immediately after the fully automatic processing is completed. As described above, in the processing apparatus according to one aspect of the present invention, the warning threshold value can be set to an arbitrary value.

In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

1 Work piece 1a Front surface 1b Back surface 3 Protective member 2 Grinding device 4,90 Base 6 Turntable 6a Carry-in / carry-out area 6b Rough grinding area 6c Finish grinding area 8 Chuck table 8a Holding surface 8b Porous member 8c Table rotation shaft 8d Table support 8e Table rotation motor 10a, 10b Grinding unit 12a, 12b Spindle motor 12c Wheel rotation shaft 14a, 14b Spindle 16a, 16b Wheel mount 18a, 18b Grinding wheel 20a, 20b Grinding grindstone 22a, 22b Column 24a, 24b Grinding feed unit 26a, 26b Cassette mount 28a, 28b Cassette 30 Transfer robot 32 Positioning table 34 Loading arm 36 Unloading arm 38 Spindle cleaning device 40, 42 Thickness measuring unit 40a, 40b Probe 40c Post 44 Control unit 46 Servo driver 48 Servo motor 50 Spindle 52 Nut part 54 Elevating plate 56 Display unit 58 Alarm lamp 60, 60a Consumption amount calculation unit 62 Consumption amount storage unit 64 Total consumption amount calculation unit 66 Average consumption amount storage unit 68 Processable remaining number calculation unit 70 Display control unit 72 Warning Threshold storage unit 74 Warning unit 76 Information display screen 78a, 78b, 78c, 78d Display of remaining number that can be processed 80 Configuration diagram 82 Processing condition selection screen 84a, 84b Choices 86 Warning text 88 Cutting device 92 X-axis moving table 94 Chuck table 94a Holding surface 96 Clamp 98 Guide rail 100 Ball screw 102 Pulse motor 104 Cutting unit 104a Cutting blade 104b Cutting edge lower end 104c Spindle 106 Drainage channel 108 Support structure 110, 114 Moving plate 112 Indexing feed unit 116 Cutting feed unit 118 Imaging unit (camera)
120 Cutting edge position detection unit 122 Control unit 124 Main body 126 Entrance groove 128 Cover 130 Light emitting unit 130a Light source 130b Light emitting window 132 Light receiving unit 132a Photoelectric conversion unit 132b Light receiving window 136 Reference voltage value registration unit 138 Cutting unit height detection unit 140 Cutting unit height Control unit 144 Time change of voltage value 146 Reference voltage value

Claims (7)

It is a processing device that processes the workpiece,
A chuck table with a holding surface for holding the work piece,
A machining unit having a spindle on which a machining wheel is mounted at the tip, and rotating the spindle to rotate the machining wheel to machine a workpiece with the machining wheel.
A control unit that controls each component and
With a display unit,
The control unit is
A consumption amount calculation unit that calculates the consumption amount of the processing grindstone when the workpiece is processed by the processing grindstone, and
Each time the consumption amount calculation unit calculates the consumption amount of the processing grindstone, the consumption amount storage unit accumulates and stores the consumption amount, and
A total consumption amount calculation unit that calculates the total consumption amount of the processing grindstone accumulated and stored by the consumption amount storage unit as a total consumption amount, and a total consumption amount calculation unit.
An average consumption storage unit that stores the average consumption of the processing grindstone that processes the workpiece as the average consumption, and an average consumption storage unit.
The remaining amount of the cutting edge is calculated by subtracting the total amount of consumption from the limit consumption amount of the processing grindstone, and the remaining amount of the cutting edge is divided by the average amount of consumption to calculate the remaining number of machines that can be processed. Calculation unit and
A processing apparatus including a display control unit for displaying the remaining number of machines that can be processed on the display unit. The control unit is
A warning threshold storage unit that stores a warning threshold set for the remaining number that can be processed, and a warning threshold storage unit.
The processing apparatus according to claim 1, further comprising a warning unit that issues a warning when the remaining number of processes that can be processed becomes less than the warning threshold value. The warning part is
A function to change all or part of the background color of the display screen of the display unit, a function to display a warning message on the display screen of the display unit, a function to turn on an alarm lamp, and a function to emit an alarm sound to a speaker. The processing apparatus according to claim 2, wherein the warning is issued by one or more of the functions. When the outer diameter size of the workpiece is changed, the processable residual number calculation unit determines the remaining amount of the cutting edge and the new average of the processed grindstone that processes the workpiece related to the changed outer diameter size. 1. The processing apparatus according to any one of 3. When the processing conditions of the workpiece are changed, the processable residual number calculation unit determines the remaining amount of the cutting edge and the new average consumption amount of the processing grindstone for processing the workpiece under the changed machining conditions. According to any one of claims 1 to 3, it has a function of calculating the number of new processable remaining number of the processing grindstone that processes the workpiece under the changed processing conditions. The processing equipment described. Further, a machining feed unit for feeding the machining unit and the chuck table in the machining feed direction in which they are relatively close to each other and separated from each other is provided.
The machining unit first rotates the workpiece held by the chuck table by being fed by the machining feed unit while rotating the grindstone by rotating the spindle along the machining feed direction. Has the function of grinding from the thickness of
The consumable amount calculation unit reduces the difference between the first thickness and the second thickness from the processing feed amount of the processing feed unit when the processing unit grinds the workpiece, and reduces the difference between the first thickness and the second thickness of the processing grindstone. The processing apparatus according to claim 1, wherein the consumption amount is calculated. The machining unit has a function of cutting the workpiece by rotating the spindle to rotate the grindstone and cutting the cutting edge of the grindstone into the workpiece held by the chuck table. Have and
It has an approach groove into which the processing grindstone enters, and a light emitting portion and a light receiving portion arranged so as to sandwich the approach groove. It is equipped with a cutting edge position detection unit that detects the cutting edge position of the processing grindstone by allowing the processing wheel to enter.
The processing according to claim 1, wherein the consumption amount calculation unit calculates the consumption amount of the processing grindstone based on the change amount of the cutting edge position of the processing grindstone detected by the cutting edge position detecting unit. Device.

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