JP2021077830A - Processing device - Google Patents

Abstract

To provide a processing device that can confirm that there is a high possibility that an error has occurred.SOLUTION: A processing device 1 includes a processing unit 10 that processes a workpiece 200 held by a chuck table 40, a determination unit 20 that inspects and determines the processing result of the workpiece 200 by the processing unit 10 or the state of the processing unit 10, and a notification unit 30 that notifies information based on the determination result of the determination unit 20. The determination unit 20 includes a pass/fail tolerance registration unit 21 that registers an allowance for making pass/fail determination in the determination unit 20, and a generation threshold registration unit 22 that registers a threshold value for the number of occurrence of rejection determination per predetermined unit time. The notification unit 30 notifies that the number of occurrences of the rejection determination per predetermined unit time exceeds a threshold value.SELECTED DRAWING: Figure 1

Description

The present invention relates to a processing apparatus.

Processing devices for cutting plate-shaped workpieces such as semiconductor wafers, resin package substrates, glass substrates, and ceramic substrates with cutting blades are known (see, for example, Patent Documents 1 and 2). Further, various processing devices for grinding a work piece with a grinding wheel or laser processing with a laser beam are known.

Japanese Unexamined Patent Publication No. 2008-262983 Japanese Patent No. 2628256

In the processing equipment, during processing, the condition of the workpiece is image-processed and digitized for inspection, and the condition of the processing equipment is inspected by collecting the measured values of various pressure gauges and flowmeters. Even if a machining abnormality occurs, it will be detected as soon as possible, and the machining conditions and tool conditions will be corrected to suppress or reduce the occurrence of abnormalities. However, the permissible value for determining whether or not it is abnormal (pass / fail) is often set strictly in view of safety, and in reality, even if the permissible value is slightly exceeded, processing is often performed without abnormality. In that case, the operator becomes accustomed to the alarm that notifies the occurrence of an abnormality, and there is no sense of discomfort in clearing the alarm and continuing machining, and even if an abnormality really occurs, production continues without noticing it. There was a problem that there was a fear. As described above, with the conventional processing apparatus, it may be difficult to confirm that there is a high possibility that an abnormality has occurred.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a processing apparatus capable of confirming that an abnormality is likely to occur.

In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention has a processing unit for processing a work piece held by a chuck table, and a processing result or a processing unit for the work piece by the processing unit. A processing device including a determination unit that inspects and determines the state of the above and a notification unit that notifies information based on the determination result of the determination unit. The notification unit includes a pass / fail tolerance registration unit for registering the permissible value of the above and a generation threshold registration unit for registering a threshold value for the number of times a rejection determination occurs per predetermined unit time, and the notification unit is the number of occurrences of the rejection determination. Is notified by the notification unit that the threshold value has been exceeded.

A first threshold value and a second threshold value larger than the first threshold value are registered in the generation threshold value registration unit, and the notification unit exceeds the first threshold value and exceeds the second threshold value. Information different from the case may be notified.

The notification unit may have a screen display unit, a voice unit, or an information transmission unit that transmits information to a different processing device or terminal device.

An input unit for inputting processing conditions of the processing unit and a control unit for controlling the input unit are further provided, and the control unit is provided from the input unit when the number of occurrences of the rejection determination exceeds the threshold value. You may set a limit on the input of.

According to the present invention, it can be confirmed that there is a high possibility that an abnormality has occurred.

FIG. 1 is a perspective view showing a configuration example of the processing apparatus according to the first embodiment. FIG. 2 is a plan view illustrating inspection items for calf check in the processing apparatus of FIG. FIG. 3 is a flowchart showing an example of the calf check operation of the processing apparatus of FIG. FIG. 4 is a graph showing data on the number of occurrences of rejection determination per predetermined unit time in the processing apparatus of FIG. FIG. 5 is a flowchart showing an example of the operation of determining the abnormality of the processing apparatus of FIG. FIG. 6 is a cross-sectional view showing a configuration example of the processing apparatus according to the second embodiment. FIG. 7 is a side view showing a configuration example of the processing apparatus of FIG. FIG. 8 is a graph for explaining blade breakage, which is an inspection item of the blade check in the processing apparatus of FIG. FIG. 9 is a graph for explaining the blade consumption amount, which is an inspection item of the blade check in the processing apparatus of FIG.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The processing apparatus 1 according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the processing apparatus 1 according to the first embodiment. The processing apparatus 1 according to the first embodiment cuts the workpiece 200 and performs a so-called calf check on the cutting groove 300 (see FIG. 2) which is a processing result (also referred to as a processing mark) formed by the cutting process. It is a cutting device to do. Hereinafter, a mode in which the processing apparatus 1 according to the first embodiment performs a calf check on a cutting groove 300 formed by cutting will be described.

The processing device 1 is not limited to this in the present invention, and the processing apparatus 1 is applied to the laser processing groove which is a processing result formed by irradiating the workpiece 200 with a laser beam to laser-process the workpiece 200. It may be a laser processing device that performs a so-called calf check. Further, in the present invention, the processing device 1 may be a grinding device that grinds the workpiece 200 with a grinding wheel and inspects the ground surface formed by the grinding process.

In the first embodiment, as shown in FIG. 1, the workpiece 200 to be cut by the processing apparatus 1 is a disk-shaped semiconductor wafer whose base material is, for example, silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. And optical device wafers. In the workpiece 200, the device 203 is formed in a region partitioned by a plurality of scheduled division lines 202 formed in a grid pattern on the flat surface 201. In the workpiece 200, the adhesive tape 205 is attached to the back surface 204 on the back side of the front surface 201, and the annular frame 206 is attached to the outer edge of the adhesive tape 205. The workpiece 200 is not limited to this in the present invention, and may be a rectangular resin package substrate, a glass substrate, a ceramics substrate, or the like having a plurality of devices sealed with resin.

As shown in FIG. 1, the processing apparatus 1 includes a processing unit 10, a chuck table 40, a camera 50, a control unit 60, and a notification unit 30. As shown in FIG. 1, the processing apparatus 1 is a cutting apparatus provided with two processing units 10, that is, a two-spindle dier, a so-called facing dual type cutting apparatus.

Further, as shown in FIG. 1, the processing apparatus 1 further includes an X-axis moving unit 71, a Y-axis moving unit 72, and a Z-axis moving unit 73. The X-axis moving unit 71 processes and feeds the chuck table 40 relative to the processing unit 10 along the X-axis direction, which is one horizontal direction. The Y-axis moving unit 72 indexes and feeds the machining unit 10 along the Y-axis direction, which is another horizontal direction and orthogonal to the X-axis direction, relative to the chuck table 40. The Z-axis moving unit 73 cuts and feeds the machining unit 10 relative to the chuck table 40 along the Z-axis direction orthogonal to both the X-axis direction and the Y-axis direction and parallel to the vertical direction.

The chuck table 40 holds the workpiece 200. The chuck table 40 has a disk-shaped suction portion having a flat holding surface 41 for holding the workpiece 200 formed on the upper surface and made of porous ceramic or the like having a large number of porous holes, and a suction portion having a suction portion at the center of the upper surface. It is a disk shape equipped with a frame body that is fitted and fixed in the recessed portion of the table. The chuck table 40 is movable by the X-axis moving unit 71, and is rotatably provided by a rotation drive source (not shown). In the chuck table 40, the suction portion is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and the workpiece 200 is sucked and held by the entire holding surface 41. Further, as shown in FIG. 1, a plurality of clamp portions 42 for clamping the annular frame 206 are provided around the chuck table 40.

The processing unit 10 processes the workpiece 200 held by the chuck table 40 along the scheduled division line 202 to form a cutting groove 300. The machining unit 10 includes a cutting blade 11, a spindle 12, and a spindle housing 13. The cutting blade 11 is subjected to a rotational motion around the axis parallel to the Y axis to cut the workpiece 200 held by the chuck table 40. The spindle 12 has an axial center provided along the Y-axis direction, and supports the cutting blade 11 so as to be rotatable around the axial center at the tip. The spindle 12 is driven to rotate around the Y-axis by applying a current according to the control of the control unit 60. The spindle housing 13 accommodates the spindle 12 so that it can rotate around the Y axis. In the machining unit 10, the spindle housing 13 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 72 with respect to the workpiece 200 held by the chuck table 40, and the Z-axis moving unit 73 Z. It is provided so as to be movable in the axial direction.

The camera 50 photographs the workpiece 200 held on the chuck table 40. In the first embodiment, the camera 50 is fixed to the processing unit 10 so as to move integrally with the processing unit 10. The camera 50 includes an image pickup element that captures a scheduled division line 202 of the workpiece 200 before cutting and a cutting groove 300 that is a machining mark of the workpiece 200 after cutting, which is held on the chuck table 40. ing. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor.

The camera 50 takes an image of the workpiece 200 before cutting, which is held on the chuck table 40, and obtains an image such as for performing alignment for aligning the workpiece 200 and the cutting blade 11. The image is output to the control unit 60 described later. Further, the camera 50 takes an image of the work piece 200 after the cutting process held on the chuck table 40, and whether the cutting groove 300 is contained in the planned division line 202 or whether a large chipping or the like has occurred. An image is obtained to automatically confirm the above, that is, to perform a so-called calf check, and the obtained image is output to the control unit 60.

The control unit 60 controls each component of the processing device 1 to cause the processing device 1 to perform each operation related to cutting and calf check on the workpiece 200. The control unit 60 includes a computer system in the first embodiment. The control unit 60 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. And have. The arithmetic processing unit executes arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the processing apparatus 1 to each component of the processing apparatus 1 via an input / output interface apparatus. To do.

The control unit 60 includes a determination unit 20. The determination unit 20 inspects the cutting groove 300 of the workpiece 200 formed by processing by the processing unit 10 and determines whether the cutting groove 300 is good or bad. In the first embodiment, the determination unit 20 performs a calf check on the cutting groove 300 formed by cutting the workpiece 200. The determination unit 20 includes a pass / fail tolerance registration unit 21 and an generation threshold value registration unit 22. The pass / fail permissible value registration unit 21 registers the permissible value for determining the pass / fail of the cutting groove 300 of the workpiece 200 by the determination unit 20 for each inspection item of the cutting groove 300. Based on the permissible value registered by the pass / fail permissible value registration unit 21, the determination unit 20 determines whether the cutting groove 300 has passed or the cutting groove 300 has failed for each inspection item. Make a judgment.

The generation threshold value registration unit 22 registers the threshold value of the number of times that the rejection determination per predetermined unit time 111 (see FIG. 4) occurs. In the first embodiment, the generation threshold value registration unit 22 registers a threshold value for the number of occurrences of a common rejection determination for all the inspection items of the cutting groove 300, but the present invention is not limited to this, and the threshold value differs for each inspection item. May be registered.

The determination unit 20 changes the warning level at the time of notification by the notification unit 30 according to the frequency of occurrence per unit time of the rejection determination of each inspection item of the cutting groove 300. In the first embodiment, the warning level is set in five stages of level 1, level 2, level 3, level 4, and level 5 from the one with the lowest possibility that an abnormality has occurred.

In the first embodiment, the function of the determination unit 20 is realized by the arithmetic processing unit of the control unit 60 executing a computer program stored in the storage device. The pass / fail tolerance registration unit 21 and the generation threshold value registration unit 22 are realized by the storage device of the control unit 60. The determination unit 20 is not limited to this in the present invention, and may be realized, for example, based on a computer system independent of the control unit 60.

The notification unit 30 notifies the operator of information based on the determination result of the determination unit 20 and the state of each operation related to cutting and calf check. The notification unit 30 notifies the operator that the number of occurrences of the rejection determination per predetermined unit time 111 exceeds the threshold value registered by the generation threshold value registration unit 22. In the first embodiment, the notification unit 30 notifies the operator more conspicuously according to the warning level set by the determination unit 20.

In the first embodiment, the notification unit 30 includes a screen display unit 31, a voice unit 32, an information transmission unit 33, and an optical notification unit 34, as shown in FIG. Each component of the notification unit 30 is connected to the determination unit 20 in the arithmetic processing unit of the control unit 60 via the input / output interface device of the control unit 60.

The screen display unit 31 displays an image based on the determination result of the determination unit 20, an image of each operation state related to cutting and calf check, and the like. When the screen display unit 31 displays an image based on the determination result, for example, depending on the warning level, the characters to be displayed are enlarged or displayed according to the high possibility that an abnormality has occurred. Blinking, increasing the blinking speed of the display, changing the color of the displayed characters and the entire screen to a conspicuous color, displaying a conspicuous icon, checking the inspection item where the negative judgment occurred and the number of times the negative judgment occurred Notify the operator more prominently by displaying it or the like. In the first embodiment, the screen display unit 31 is composed of a liquid crystal display device or the like.

The voice unit 32 transmits voice based on the determination result of the determination unit 20 and the state of each operation related to cutting and calf check. When transmitting a voice based on the determination result, the voice unit 32 raises the alarm sound or raises the alarm sound, for example, according to the warning level and the possibility that an abnormality has occurred. Change the sound of the alarm sound with the passage of time, speed up the rhythm of the alarm sound, change the rhythm of the alarm sound with the passage of time, and make a voice comment based on the inspection item in which the negative judgment occurred and the number of times the negative judgment occurred. Notify the operator more prominently by notifying the operator. In the first embodiment, the voice unit 32 is composed of a speaker or the like.

The information transmission unit 33 transmits information based on the determination result of the determination unit 20 and information based on each operation state related to cutting and calf check to the processing device 92 or the terminal device 94 different from the processing device 1. , Notifies the operators of the processing device 92 and the terminal device 94. In the first embodiment, the processing device 92 is a cutting device, a laser processing device, a grinding device, or the like. In the first embodiment, the terminal device 94 is a computer system or the like. In the first embodiment, the information transmission unit 33 can notify the operator and the process manager of the processing device 1 of various information about the processing device 1 through the processing device 92 and the terminal device 94.

The light notification unit 34 lights up based on the state of each operation related to cutting and calf check. When the optical notification unit 34 is turned on based on the determination result, for example, depending on the warning level, the blinking speed may be increased, or the optical notification unit 34 may blink, depending on the possibility that an abnormality has occurred. By changing the lit color to a conspicuous color, etc., the operator is notified to be more conspicuous. The light notification unit 34 is composed of a light emitting diode (LED) or the like.

As shown in FIG. 1, the processing apparatus 1 further includes an input unit 39. The input unit 39 is used when the operator inputs and registers information related to the calf check such as the machining conditions of the machining unit 10 and the allowable value and the threshold value. The input unit 39 is controlled by the determination unit 20 of the control unit 60. The determination unit 20 of the control unit 60 can set a limit on the input from the input unit 39. In the first embodiment, the determination unit 20 of the control unit 60 increases the possibility that an abnormality has occurred according to the warning level, so that the input unit 39 becomes more troublesome for the operator. Limit the input from. The determination unit 20 of the control unit 60 performs the next processing unless the operator inputs a predetermined password to the input unit 39, for example, depending on the warning level and the possibility that an abnormality has occurred increases. The input from the input unit 39 is restricted by controlling so as not to proceed to or increasing the number of times the clear button for clearing the alarm sound is selected. In the first embodiment, the input unit 39 is composed of at least one of a touch panel provided on the screen display unit 31 and a keyboard and the like.

Further, as shown in FIG. 1, the processing apparatus 1 includes a cassette 80 for accommodating the workpiece 200 before and after cutting, a temporary placing unit 82 for temporarily placing the workpiece 200 before and after accommodating the cassette 80, and cutting. A cleaning unit 90 for cleaning the workpiece 200 after processing, and a transport unit 85 for transporting the workpiece 200 between the chuck table 40, the cassette 80, the temporary placement unit 82, and the cleaning unit 90 are further provided. The transport unit 85 includes a suction portion that holds the workpiece 200, and the suction portion is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown) to suck the workpiece 200 under the control of the control unit 60. Hold.

At the time of cutting, the processing device 1 takes out one workpiece 200 from the cassette 80 and places it on the holding surface 41 of the chuck table 40. The machining apparatus 1 sucks and holds the workpiece 200 on the holding surface 41 of the chuck table 40, and supplies cutting water from the machining unit 10 to the workpiece 200 while supplying the X-axis moving unit 71, the rotary drive source, and Y. The chuck table 40 and the machining unit 10 are relatively moved along the scheduled split line 202 by the axis moving unit 72 and the Z-axis moving unit 73, and the machining unit 10 cuts the scheduled split line 202 of the workpiece 200. To form a cutting groove 300. When the processing apparatus 1 cuts all the scheduled division lines 202 of the workpiece 200, the workpiece 200 is cleaned by the cleaning unit 90 and then housed in the cassette 80.

In the processing device 1, the determination unit 20 of the control unit 60 inspects the state of the cutting groove 300, which is a processing mark, at an arbitrary timing from the start of processing to the end of processing of one workpiece 200, so-called calf. Perform the check. FIG. 2 is a plan view illustrating inspection items of the calf check in the processing apparatus 1 of FIG. Hereinafter, the details of the calf check performed by the processing apparatus 1 according to the first embodiment will be described with reference to FIG.

As shown in FIG. 2, the inspection items inspected by the determination unit 20 in the calf check according to the first embodiment are the groove width 301 of the cutting groove 300 formed by each machining unit 10 and the cutting formed by each machining unit 10. With the cut position deviation 303, which is the deviation from the width direction center 202-2 of the planned division line 202 of the center 302 in the width direction of the groove 300, and the chipping size 304, which is the length from the edge of the cutting groove 300 of the chipping. is there.

Before cutting, the pass / fail tolerance registration unit 21 has a first tolerance 101, which is a tolerance of the groove width 301, and a groove width 301, which is larger than the first tolerance, as shown in FIG. A second permissible value 102 is registered. The pass / fail permissible value registration unit 21 registers the first permissible value 101 and the second permissible value 102 for the cut position deviation 303 and the chipping size 304 as well as the permissible value of the groove width 301 before cutting. To do. In the first embodiment, the first permissible value 101 is a stricter permissible value (narrower permissible range) than the second permissible value 102, and if it exceeds the permissible value, a condition that may cause an abnormality in the cutting process. It has become. The first permissible value 101 is, in the first embodiment, a permissible value of a standard for which the determination unit 20 makes a negative judgment. Further, the second permissible value 102 is a permissible value looser (wider permissible range) than the first permissible value 101 in the first embodiment, and if it exceeds the permissible value 102, the cutting blade 11 has the width of the planned division line 202. It is a condition that a large abnormality such as cutting the device 203 beyond 202-1 occurs. The second allowable value 102 is, in the first embodiment, a reference allowable value for the determination unit 20 to stop the cutting process.

The generation threshold registration unit 22 has a first threshold 107 (see FIG. 4), which is a threshold for the number of times of rejection determination per predetermined unit time 111, and a second threshold 107 that is larger than the first threshold 107 before cutting. The threshold value 108 is registered.

The operation of the calf check of the processing apparatus 1 according to the first embodiment will be described below. FIG. 3 is a flowchart showing an example of the calf check operation of the processing apparatus 1 of FIG.

As shown in FIG. 3, the determination unit 20 inspects the state of the cutting groove 300 at an arbitrary timing between the start of machining and the end of machining of one workpiece 200 at the time of cutting, so-called calf check. (Step ST11).

In step ST11, first, the determination unit 20 uses the camera 50 to photograph the inspection portion of the calf check on the workpiece 200 after cutting, which is held on the chuck table 40, and performs the calf check at this inspection portion. Get the image for. The determination unit 20 detects each scheduled division line 202 on the workpiece 200 at the time of alignment performed before cutting the workpiece 200 by the machining unit 10, and recognizes the position by coordinates. Therefore, based on this, the photographing area of the camera 50 can be smoothly moved to the inspection point on the scheduled division line 202 in the workpiece 200.

In step ST11, next, the determination unit 20 detects the cutting groove 300 at the inspection point by performing a predetermined image analysis on the image captured and acquired by the camera 50, and the groove width which is an inspection item. The 301, the cut position deviation 303, and the chipping size 304 are derived.

In step ST11, next, the groove width 301, the cut position deviation 303, and the chipping size 304 derived by the determination unit 20 are set for the first allowable value 101 and the second allowable value 101 before cutting, respectively. It is determined whether or not the value 102 is exceeded. After performing step ST11, the determination unit 20 advances the process to step ST12.

The determination unit 20 performs the processing after step ST12 for each inspection item. Hereinafter, the case where the "groove width 301" is determined as the inspection item will be described, and the description for determining the other inspection items is the same as the case where the "groove width 301" is determined, so the description thereof will be omitted.

When the determination unit 20 determines that the groove width 301 exceeds the second permissible value 102 as a result of step ST11 (No in step ST12), it determines that a major abnormality has occurred in the cutting process and processes it. To step ST13. In step ST13, first, the determination unit 20 raises the warning level to the maximum level 5 at once. After that, the determination unit 20 causes the notification unit 30 to notify the notification unit 30 of information based on the determination result regarding the groove width 301 so as to be conspicuous to the operator according to the warning level raised to the maximum level 5 at once. Further, the determination unit 20 sets a limit on the input from the input unit 39 according to the warning level raised to the maximum level 5 at once, and stops the cutting process by the processing unit 10 (step ST13). After performing step ST13, the determination unit 20 ends the flow of the calf check operation according to the first embodiment.

On the other hand, when the determination unit 20 determines as a result of step ST11 that the groove width 301 is equal to or less than the second allowable value 102 (Yes in step ST12), the flow of the calf check operation according to the first embodiment is performed in step ST14. Proceed to. When the determination unit 20 determines that the groove width 301 exceeds the first permissible value 101 (No in step ST14) after the result is Yes in step ST12, the determination unit 20 counts the rejection determination once (step ST15). ), The flow of the calf check operation according to the first embodiment is terminated. In step ST15, the determination unit 20 stores that the rejection determination is counted once in association with the inspection item and the inspection time when the rejection determination occurs.

When the determination unit 20 determines that the groove width 301 is equal to or less than the first allowable value 101 (Yes in step ST14) after the result is Yes in step ST12, the cutting groove 300 to be inspected for the groove width 301 passes. The pass judgment to that effect is given, and the flow of the calf check operation according to the first embodiment is terminated.

FIG. 4 is a graph showing data 110 of the number of occurrences of rejection determination per predetermined unit time 111 in the processing apparatus 1 of FIG. The data 110 of the number of occurrences of the rejection determination is created and stored by the determination unit 20 in step ST15 of the calf check operation of the processing apparatus 1 according to the first embodiment. In the first embodiment, the number of occurrences of the rejection determination per predetermined unit time 111 is the total number of occurrences of the rejection determination for all the inspection items generated within the predetermined unit time 111. The number of occurrences of the rejection determination per predetermined unit time 111 is not limited to this in the present invention, and may be the number of occurrences of the rejection determination within the predetermined unit time 111 for each inspection item.

In the example shown in FIG. 4, the data 110 of the number of occurrences of the rejection determination includes the data 112 in which the number of occurrences of the rejection determination per predetermined unit time 111 is equal to or less than the first threshold value 107, and the rejection determination per predetermined unit time 111. Data 113 in which the number of occurrences of the above exceeds the first threshold value 107 and is equal to or less than the second threshold value 108, and data 114 in which the number of occurrences of the rejection determination per predetermined unit time 111 exceeds the second threshold value 108. Includes.

The operation of determining the abnormality of the processing apparatus 1 according to the first embodiment will be described below. FIG. 5 is a flowchart showing an example of the operation of determining the abnormality of the processing apparatus 1 of FIG. The determination unit 20 executes the operation of determining the abnormality of the processing apparatus 1 at an arbitrary timing during the processing operation based on the data 110 of the number of times the rejection determination occurs. The determination unit 20 is not limited to this in the present invention, and the abnormality determination operation of the processing device 1 may be performed at the timing when the calf check operation of the processing device 1 is performed, and the calf of the processing device 1 may be executed. After performing the check operation, it may be performed at a subsequent timing.

As shown in FIG. 5, the determination unit 20 causes the number of occurrences of the rejection determination per predetermined unit time 111 to exceed the first threshold value 107 and the second threshold value 108 based on the data 110 of the number of occurrences of the rejection determination. It is determined whether or not the data is present (step ST21).

When the determination unit 20 determines as a result of step ST21 that the number of occurrences of the rejection determination per predetermined unit time 111 exceeds the second threshold value 108 (No in step ST22), the frequency of occurrence of the rejection determination is extremely high. It is determined that there is a high possibility that an abnormality has occurred, and a predetermined second treatment is carried out (step ST23). In the predetermined second action, in the first embodiment, the determination unit 20 raises the warning level by two steps, and according to the warning level raised by two steps, the determination unit 20 informs the operator of information based on the determination result so as to be conspicuous. Notify 30. Further, in the predetermined second treatment, after that, the determination unit 20 sets a limit on the input from the input unit 39 according to the warning level raised by two steps, and stops the cutting process by the processing unit 10. After performing the predetermined second treatment, the determination unit 20 ends the flow of the operation for determining the abnormality according to the first embodiment.

On the other hand, when the determination unit 20 determines as a result of step ST21 that the number of occurrences of the rejection determination per predetermined unit time 111 is equal to or less than the second threshold value 108 (Yes in step ST22), the abnormality according to the first embodiment. The flow of the determination operation proceeds to step ST24.

When the determination unit 20 determines that the number of occurrences of the rejection determination per predetermined unit time 111 exceeds the first threshold value 107 after the result is Yes in step ST22 (No in step ST24), the determination unit 20 determines the rejection. It is determined that the frequency of occurrence is relatively high and the possibility that an abnormality has occurred is relatively high, and a predetermined first treatment is performed (step ST25). In the predetermined first process, in the first embodiment, the determination unit 20 raises the warning level by one step, and the information based on the determination result is notified to the operator according to the raised warning level by one step. Notify 30. Further, in the predetermined first treatment, after that, the determination unit 20 sets a limit on the input from the input unit 39 only when the maximum level 5 is reached as a result of raising the warning level by one step, and the processing unit 10 determines. Stop cutting. After performing the predetermined first treatment, the determination unit 20 ends the flow of the operation for determining the abnormality according to the first embodiment.

In the first embodiment, the determination unit 20 notifies different information between the predetermined second treatment in step ST23 and the predetermined first treatment in step ST25, and prompts the operator to perform different treatments. In the predetermined second action of step ST23, the determination unit 20 raises the warning level for the inspection item for which the abnormality determination is performed by one step more than the predetermined first action of step ST25, and provides information so as to be conspicuous to the operator. The notification unit 30 is notified.

When the determination unit 20 determines that the number of occurrences of the rejection determination per predetermined unit time 111 is equal to or less than the first threshold value 107 after the result is Yes in step ST22 (Yes in step ST24), the rejection determination occurs. It is determined that the frequency is sufficiently low, the warning level is lowered by one step, and the flow of the operation for determining the abnormality according to the first embodiment is terminated.

In the processing apparatus 1 according to the first embodiment having the above configuration, the first determination unit 20 that inspects and determines the processing result of the workpiece 200 by the processing unit 10 is registered by the pass / fail tolerance registration unit 21. A pass / fail judgment is made on the machining result based on the permissible value 101 of the above, and the pass / fail judgment generated by this pass / fail judgment is the first threshold value of the number of occurrences of the fail judgment per predetermined unit time 111 registered by the generation threshold registration unit 22. When it is determined whether or not 107 or the second threshold value 108 is exceeded and a determination result indicating that the first threshold value 107 or the second threshold value 108 is exceeded is obtained, the notification unit 30 performs the determination. Notify the operator based on the judgment result to that effect. Therefore, the processing apparatus 1 according to the first embodiment has an effect that the operator can definitely confirm the abnormality when the failure determination occurs frequently and there is a high possibility that the abnormality has occurred. Play.

Further, in the processing apparatus 1 according to the first embodiment, the first threshold value 107 and the second threshold value 108 larger than the first threshold value 107 are registered in the generation threshold value registration unit 22, and the notification unit 30 is the first. Information that differs depending on whether the threshold value 107 is exceeded or the second threshold value 108 is exceeded is notified. Specifically, when the notification unit 30 exceeds the first threshold value 107, the processing device 1 according to the first embodiment notifies according to the warning level raised by one step, and the second threshold value 108 If the value exceeds the above value, a notification is given according to the warning level raised by two levels. Therefore, the processing apparatus 1 according to the first embodiment has the effect of being able to confirm that there is a high possibility that an abnormality has occurred, depending on the frequency of occurrence of the rejection determination.

Further, the processing device 1 according to the first embodiment has an information transmission unit 33 in which the notification unit 30 transmits information to the screen display unit 31, the voice unit 32, or a different processing device 92 or terminal device 94. Therefore, the processing device 1 according to the first embodiment can make the operator confirm that there is a high possibility that an abnormality has occurred due to characters, images, voices, or different processing devices 92 or terminal devices 94. It has an effect.

Further, the processing apparatus 1 according to the first embodiment further includes an input unit 39 for inputting the processing conditions of the processing unit 10 and a control unit 60 for controlling the input unit 39, and the control unit 60 is the number of occurrences of a rejection determination. When exceeds the first threshold value 107 or the second threshold value 108, the input from the input unit 39 is restricted. Therefore, the processing apparatus 1 according to the first embodiment has an effect that the operator can confirm that there is a high possibility that an abnormality has occurred by providing the input restriction.

[Embodiment 2]
The processing apparatus 1-2 according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a cross-sectional view showing a configuration example of the processing apparatus 1-2 according to the second embodiment. FIG. 7 is a side view showing a configuration example of the processing apparatus 1-2 of FIG. FIG. 8 is a graph illustrating blade breakage, which is an inspection item of the blade check in the processing apparatus 1-2 of FIG. FIG. 9 is a graph for explaining the blade consumption amount, which is an inspection item of the blade check in the processing apparatus 1-2 of FIG. In FIGS. 6 to 9, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 6, the machining apparatus 1-2 according to the second embodiment changes the machining unit 10 to the machining unit 10-2 in the machining apparatus 1-1 according to the first embodiment, and functions in the control unit 60. The part has been changed.

As shown in FIGS. 6 and 7, the processing unit 10-2 includes a cutting blade 11, a spindle 12, a spindle housing 13, a blade mount 14, a blade cover 15, and water supply nozzles 16-1, 16-2. A water supply source connecting portion 17, a groove-shaped member 18, and an elevating portion 19 are provided. As shown in FIG. 6, the control unit 60 according to the second embodiment includes a determination unit 20 including a pass / fail tolerance registration unit 21 and an generation threshold value registration unit 22, an open / close instruction unit 61, a light emitting element 62, and a light receiving element 63. The amplifier 64 and the photoelectric conversion unit 65 are provided. The determination unit 20 in the control unit 60 according to the second embodiment is connected to the notification unit 30 as in the first embodiment.

The cutting blade 11 is fixed to the tip of the spindle 12 via a blade mount 14 and is rotated by the spindle 12 which is a rotation axis to cut the workpiece 200. The cutting blade 11 is a so-called hub blade in the second embodiment, and has an annular cutting blade 11-1 and a disk-shaped base 11-2 as shown in FIGS. 6 and 7. The cutting edge 11-1 is provided on the outer peripheral edge of the base 11-2 and projects from the outer peripheral edge of the base 11-2. The cutting edge 11-1 is formed of, for example, abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal and resin, and is formed to have a predetermined thickness. The base 11-2 has an insertion hole for being fixed to the blade mount 14 in the center, and is formed in an annular shape. The base 11-2 is made of a metal such as an aluminum alloy. The cutting blade 11 is not limited to the hub blade in the present invention, and may be a so-called hubless blade composed of only the cutting blade 11-1 having an insertion hole.

The blade mount 14 sandwiches the cutting blade 11 with a disk-shaped flange portion, and the cylindrical boss portion is inserted into the insertion hole and mounted on the tip of the spindle 12, so that the cutting blade 11 is mounted around the axis. It is rotatably attached to the tip of the spindle 12.

The blade cover 15 is attached to the tip end side of the spindle housing 13 and covers the upper side, the front side, and the rear side of the cutting blade 11. The blade cover 15 moves between a closed position that covers the cutting blade 11 and an open position that opens apart from the cutting blade 11 under the control of the open / close instruction unit 61. The blade cover 15 has a plurality of water channels formed therein, and as shown in FIG. 7, water supply nozzles 16-1 and 16-2 are provided at one lower end of the plurality of water channels, and the blade cover 15 is provided with water supply nozzles 16-1 and 16-2. A water supply source connecting portion 17 is provided at the other end of the upper side. The water supply nozzle 16-1 supplies the cutting water supplied from the water supply source connecting portion 17 to the side of the cutting blade 11-1 of the cutting blade 11. The water supply nozzle 16-2 supplies the cutting water supplied from the water supply source connecting portion 17 to the front of the cutting blade 11-1 of the cutting blade 11. The cutting water is, for example, pure water, and its flow rate is controlled by the control unit 60.

As shown in FIG. 6, the groove-shaped member 18 is formed with a groove 18-1 having a width wider than the thickness of the cutting blade 11-1 of the cutting blade 11. The groove-shaped member 18 is provided on the blade cover 15, and the upper end portion of the cutting blade 11-1 is sandwiched by the grooves 18-1. The elevating part 19 moves the groove-shaped member 18 up and down.

As shown in FIG. 6, the groove-shaped member 18 includes a light emitting unit 18-2 and a light receiving unit 18-3. The light emitting unit 18-2 is provided on one side wall of the groove 18-1, and emits light toward the other side wall of the groove 18-1. In the light emitting unit 18-2, the light emitting element 62 is optically connected by an optical fiber or the like, and the light emitted from the light emitting element 62 is emitted. The light receiving unit 18-3 is provided on the other side wall of the groove 18-1 at a position facing the light emitting unit 18-2, and receives the light emitted by the light emitting unit 18-2. In the light receiving unit 18-3, the light receiving element 63 is optically connected by an optical fiber or the like, and the light receiving element 63 detects the light received by the light receiving unit 18-3.

The amplifier 64 adjusts the amount of light emitted from the light emitting unit 18-2 by amplifying the amount of light emitted from the light emitting element 62 according to the control of the determination unit 20. According to the control of the determination unit 20, the photoelectric conversion unit 65 converts the light that has reached the light receiving unit 18-3 detected by the light receiving element 63 into a current signal, and obtains the current value of the received light amount. The photoelectric conversion unit 65 transmits the current value of the received light amount obtained by conversion to the determination unit 20.

The current value of the amount of light received by the determination unit 20 from the photoelectric conversion unit 65 decreases when the outer edge of the cutting blade 11-1 of the cutting blade 11 protrudes in the radial direction of the cutting blade 11, and is recessed in the radial direction. If it is, it will increase. Therefore, the current value of the light receiving amount acquired by the determination unit 20 from the photoelectric conversion unit 65 indicates the planar shape of the outer edge of the cutting blade 11-1 of the cutting blade 11 mounted on the spindle 12.

In the second embodiment, the determination unit 20 inspects and determines the state of the processing unit 10. Specifically, the determination unit 20 performs a blade check for inspecting the state of the cutting blade 11 of the machining unit 10. In the second embodiment, the pass / fail permissible value registration unit 21 registers the permissible value for determining the pass / fail of the cutting blade 11 in the determination unit 20 for each inspection item of the cutting blade 11. In the second embodiment, the generation threshold value registration unit 22 registers a threshold value for the number of occurrences of a common rejection determination for all the inspection items of the cutting blade 11, but the present invention is not limited to this, and the threshold value differs for each inspection item. May be registered.

The inspection items inspected by the determination unit 20 in the blade check according to the second embodiment are blade breakage and blade consumption. The inspection for blade breakage is to inspect whether or not the outer edge of the cutting blade 11-1 of the cutting blade 11 is chipped. The inspection of the blade wear amount is to inspect the wear amount of the cutting blade 11-1 of the cutting blade 11 per fixed time 402 (see FIG. 9).

When the cutting blade 11 is damaged, that is, when the outer edge of the cutting blade 11-1 of the cutting blade 11 is chipped, the determination unit 20 is transferred from the photoelectric conversion unit 65 as shown in FIG. The current value of the amount of received light to be acquired increases in a spike shape according to the size of the chip. In the example shown in FIG. 8, the current value of the light receiving amount acquired by the determination unit 20 from the photoelectric conversion unit 65 increases by the amount of change 401 of the current value due to the chipping generated at the outer edge of the cutting blade 11-1 of the cutting blade 11. doing. In the blade check according to the second embodiment, the determination unit 20 inspects the blade breakage by inspecting the change amount 401 of the current value.

When the cutting blade 11 is worn, that is, when the cutting blade 11-1 of the cutting blade 11 is worn, the amount of light received by the determination unit 20 from the photoelectric conversion unit 65, as shown in FIG. The current value of is gradually increased according to the rate of consumption. In the example shown in FIG. 9, the current value of the light receiving amount acquired by the determination unit 20 from the photoelectric conversion unit 65 increases by the amount of change 403 of the current value per 402 for a certain period of time due to the wear of the cutting blade 11. In the blade check according to the second embodiment, the determination unit 20 inspects the blade consumption amount per fixed time 402 by inspecting the change amount 403 of the current value per fixed time 402. The stepwise change in the current value in FIG. 9 is caused by the vertical position adjustment between the cutting blade 11, the light emitting unit 18-2, and the light receiving unit 18-3 during the blade check.

Similar to the first embodiment, the pass / fail tolerance registration unit 21 according to the second embodiment has the first allowable value for the change amount 401 of the current value and the change amount 403 of the current value per fixed time 402 before cutting. The 101 and the second allowable value 102 are registered. Similar to the first embodiment, the generation threshold value registration unit 22 according to the second embodiment registers the first threshold value 107 and the second threshold value 108 before cutting.

The operation of the processing apparatus 1-2 according to the second embodiment will be described below. At the time of cutting, the determination unit 20 performs a blade check for inspecting the state of the cutting blade 11 of the machining unit 10 at an arbitrary timing from the start of machining of one workpiece 200 to the end of machining.

In the blade check according to the second embodiment, the determination unit 20 positions the groove-shaped member 18 in the vertical direction at the elevating unit 19 so that the cutting blade 11 is located between the light emitting unit 18-2 and the light receiving unit 18-3. Is started from the adjusted state. The determination unit 20 emits light from the light emitting element 62 from the light emitting unit 18-2 in a state where the cutting blade 11 is rotated around the axis, and the light emitted by the light receiving unit 18-3 at the light emitting unit 18-2. To receive light. Then, the determination unit 20 detects the light that has reached the light receiving unit 18-3 by the light receiving element 63, converts the light detected by the light receiving element 63 by the photoelectric conversion unit 65 into a current signal, and obtains the current value of the received light amount. ..

In the blade check according to the second embodiment, next, the determination unit 20 causes the determination unit 20 to perform a predetermined analysis on the current value of the received light amount obtained by the photoelectric conversion unit 65, so that the current increases, for example, in a spike shape. The value change amount 401 and the current value change amount 403 per fixed time 402 are derived. In the blade check according to the second embodiment, the determination unit 20 then sets the derived current value change amount 401 and the current value change amount 403 per fixed time 402 before cutting. It is determined whether or not the first allowable value 101 and the second allowable value 102 are exceeded.

Here, in the blade check according to the second embodiment, when the current value of the received light amount increases in a spike shape by a predetermined amount or more within a predetermined time, the determination unit 20 determines that the blade is partially damaged. Further, in the determination unit 20, when the current value of the received light amount increases by a predetermined amount or more and the state continues for a predetermined time or more corresponding to one round or more of the cutting blade 11, the entire circumference of the cutting blade 11 is damaged. Determined to be in a state. Further, the determination unit 20 determines that the blade is worn out when the current value of the received light amount increases by less than a predetermined amount and the state continues for a predetermined time or more corresponding to one round or more of the cutting blade 11.

In the blade check according to the second embodiment, after that, the determination unit 20 performs the same processing as after the calf check step ST12 according to the first embodiment for the change amount 401 of the current value and the change amount 403 of the current value per fixed time 402. To carry out.

The operation of determining the abnormality of the processing apparatus 1-2 according to the second embodiment will be described below. In the operation of the abnormality determination of the processing device 1-2 according to the second embodiment, the determination unit 20 has the same operation of the abnormality determination of the processing device 1 according to the first embodiment for the two inspection items of the blade breakage and the blade wear amount. Carry out the process.

Further, in the blade check according to the second embodiment, when the current value of the light receiving amount does not increase or decreases continuously for a predetermined time or more, the determination unit 20 of the light emitting unit 18-2 and the light receiving unit 18-3 Since dirt, malfunction of the amplifier 64, etc. are considered, it is determined that an abnormality in acquisition of the current value of the received light amount has occurred. The determination unit 20 treats the occurrence of the abnormality of acquisition of the current value of the received light amount as a rejection determination, and sets the number of occurrences per unit time as the first threshold value 107 and the second threshold value 108 in the same manner as the blade breakage and blade wear. Perform an abnormality judgment with.

The processing device 1-2 according to the second embodiment having the above configuration is the processing device 1 according to the first embodiment in which the inspection items are changed to blade breakage and blade consumption. Therefore, the processing device 1-2 according to the second embodiment has the same effect as that of the processing device 1 according to the first embodiment.

In the first embodiment, the determination unit 20 inspects and determines the processing result of the workpiece 200 by the processing unit 10. Further, in the second embodiment, the determination unit 20 inspects and determines the state of the processing unit 10. In the present invention, the determination unit 20 may inspect and determine the processing result of the workpiece 200 formed by processing by any processing unit 10 or the state of the processing unit 10.

[Modification example]
The processing apparatus according to the first embodiment and the second embodiment of the present invention will be described. In the processing apparatus according to the modified example, the inspection items that the determination unit 20 inspects and determines in the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment are the alignment error, the transfer vacuum error, and the chuck. It was changed to table vacuum error, spindle load current value over, machining water volume error, and water and air pressure abnormality.

In the alignment error inspection item, the determination unit 20 cannot perform alignment because the scheduled division line 202 to be cut cannot be detected in the image of the workpiece 200 before cutting taken by the camera 50. When it is, a negative judgment is issued. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments for the rejection determination of the alignment error by the determination unit 20.

In the inspection item of the transfer vacuum error, the determination unit 20 issues a rejection determination when the air pressure in the vacuum suction path connected to the suction unit of the transfer unit 85 exceeds a predetermined allowable value. The pass / fail tolerance registration unit 21 has a first allowable value and a second allowable value for the air pressure in the vacuum suction path connected to the suction unit of the transport unit 85, as in the first and second embodiments. The two stages of and may be registered, and the determination unit 20 may use these allowable values for the pass / fail determination. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments for the rejection determination of the transport vacuum error by the determination unit 20.

In the inspection item of the chuck table vacuum error, the determination unit 20 issues a rejection determination when the air pressure in the vacuum suction path connected to the suction unit of the chuck table 40 exceeds a predetermined allowable value. The pass / fail tolerance registration unit 21 describes the first allowable value and the second allowable value for the air pressure in the vacuum suction path connected to the suction portion of the chuck table 40, as in the first and second embodiments. The two stages of and may be registered, and the determination unit 20 may use these allowable values for the pass / fail determination. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments for the rejection determination of the chuck table vacuum error by the determination unit 20.

In the inspection item of spindle load current value over, the determination unit 20 issues a rejection determination when the current value loaded when the spindle 12 is rotationally driven around the Y axis exceeds a predetermined allowable value. As in the first and second embodiments, the pass / fail tolerance registration unit 21 registers two stages of the first allowable value and the second allowable value for the current value loaded on the spindle 12. The determination unit 20 may use these allowable values for pass / fail determination. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments with respect to the rejection determination of the spindle load current value overrun by the determination unit 20.

In the inspection item of the processing water amount error, the amount of cutting water supplied by the determination unit 20 from the water supply source connection unit 17 or the amount of cutting water supplied from the water supply nozzles 16-1 and 16-2 is a predetermined allowable value. When the value exceeds, a negative judgment is issued. The pass / fail tolerance registration unit 21 registers two stages of the first allowable value and the second allowable value for the amount of cutting water, as in the first and second embodiments, and determines the determination unit 20. May use these tolerances for pass / fail determination. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments for the rejection determination of the processing water amount error by the determination unit 20.

In the inspection item of water and air pressure abnormality, the determination unit 20 determines the pressure of the cutting water and air supplied from the water supply source connection unit 17, or the cutting water and air supplied from the water supply nozzles 16-1 and 16-2. When the pressure of the above exceeds a predetermined allowable value, a rejection judgment is made. The pass / fail tolerance registration unit 21 registers and determines the pressures of the cutting water and the air in two stages of the first tolerance value and the second tolerance value, as in the first and second embodiments. The unit 20 may use these allowable values for pass / fail determination. The processing apparatus according to the modified example performs the same abnormality determination operation as in the first and second embodiments with respect to the rejection determination of the pressure abnormality of water and air by the determination unit 20.

In the processing apparatus according to the modified example having the above configuration, the inspection items to be inspected and determined by the determination unit 20 in the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment are changed. It is a thing. Therefore, the processing apparatus according to the modified example has the same effects as those of the processing apparatus 1 according to the first embodiment and the processing apparatus 1-2 according to the second embodiment.

The present invention is not limited to the above embodiment. That is, it can be modified in various ways without departing from the gist of the present invention.

1, 1-2 Machining equipment 10 Machining unit 11 Cutting blade 20 Judgment unit 21 Pass / fail tolerance registration unit 22 Occurrence threshold registration unit 30 Notification unit 31 Screen display unit 32 Voice unit 33 Information transmission unit 34 Optical notification unit 39 Input unit 40 Chuck Table 50 Camera 60 Control unit 200 Work piece

Claims (4)

A processing unit that processes the work piece held by the chuck table, a judgment unit that inspects and judges the processing result of the work piece by the processing unit or the state of the processing unit, and information based on the judgment result of the judgment unit. A processing device including a notification unit for notifying
The determination unit
A pass / fail tolerance registration unit for registering an allowance for making a pass / fail judgment in the determination unit,
A generation threshold value registration unit for registering a threshold value for the number of times a rejection determination occurs per predetermined unit time is provided.
The notification unit is a processing device that the notification unit notifies that the number of occurrences of the rejection determination exceeds the threshold value. A first threshold value and a second threshold value larger than the first threshold value are registered in the generation threshold value registration unit.
The processing device according to claim 1, wherein the notification unit notifies different information depending on whether the first threshold value is exceeded or the second threshold value is exceeded. The processing device according to claim 1 or 2, wherein the notification unit has a screen display unit, a voice unit, or an information transmission unit that transmits information to a different processing device or terminal device. An input unit for inputting processing conditions of the processing unit and
A control unit for controlling the input unit is further provided.
The processing device according to claim 1, claim 2 or claim 3, wherein the control unit limits the input from the input unit when the number of occurrences of the rejection determination exceeds the threshold value.

Images