KR20230021587A - Cutting apparatus - Google Patents

Abstract

In accordance with an objective of the present invention, provided is a cutting device capable of efficiently cleaning a light emitting unit and a light receiving unit, while suppressing the attachment of cutting chips to the light emitting unit and the light receiving unit. In accordance with the present invention, the cutting device includes a cutting blade detection unit (40) having a light emitting unit (42) and a light receiving unit (43) facing each other with a space laid therebetween, into which the tip of a cutting blade for cutting a workpiece is intruded. The cutting blade detection unit (40) includes: a light reception amount measuring unit (45) measuring the amount of light received by the light receiving unit (43); nozzles (a first nozzle (62) and a second nozzle (63)) supply a fluid to end surfaces (42-1, 43-1) of the light emitting unit (42) and the light receiving unit (43); a cleaning water supply path (47) connected to the nozzles through a first valve (47-2); an air supply path (48) connected to the nozzles through a second valve (48-2); and a control unit (49) controlling the opening/closing of the first valve (47-2) and the second valve (48-2) to selectively discharge water, air or a second fluid, from the nozzles.

Description

Cutting device {CUTTING APPARATUS}

The present invention relates to a cutting device.

BACKGROUND OF THE INVENTION [0002] A cutting device is known that cuts various plate-shaped substrates such as semiconductor wafers, resin package substrates, ceramic substrates and glass substrates with a cutting blade along streets. The cutting blade wears out with use, so the depth of cut must be adjusted. Therefore, a non-contact type detection unit that detects the position (origin) of the edge of the blade with an optical sensor has been developed (for example, see Patent Document 1). The cutting blade is lowered and penetrated into the space between the light emitting unit and the light receiving unit until the light reception amount decreases to a predetermined amount, and the position at which the predetermined light reception amount is reached is detected as the origin position of the cutting edge.

Patent Document 1: Japanese Patent No. 4590058

Since the light emitting unit and the light receiving unit are arranged in a processing chamber where cutting is performed, there is a possibility that an atmosphere containing cutting chips or spray may adhere thereto. If cutting chips adhere to the light emitting section or the light receiving section, the amount of light received will change and the detected origin position will fluctuate. Therefore, a mechanism for suppressing the adhesion of cutting chips by continuously spraying water on the light emitting portion and the light receiving portion has been devised. However, there was a problem that the amount of water used was large if water was constantly sprayed, and the amount of water used could be suppressed if supplied intermittently, but the possibility of adhesion of cutting chips remained.

The present invention has been made in view of these problems, and its object is to provide a cutting device capable of efficiently cleaning the light emitting portion and the light receiving portion while suppressing the adhesion of cutting chips to the light emitting portion and the light receiving portion.

In order to solve the above problems and achieve the object, a cutting device of the present invention includes a chuck table for holding a workpiece and a spindle on which a cutting blade for cutting the workpiece held on the chuck table is mounted. A cutting device including a unit, a moving unit for moving the cutting unit up and down, and a cutting blade detecting unit having a light emitting part and a light receiving part facing each other with a space interposed therebetween by an edge of the cutting blade, the cutting blade detecting unit comprising: Silver, a light-receiving amount measuring unit for measuring the light-receiving amount of the light-receiving unit, a nozzle for supplying fluid to the light-emitting unit and end surfaces of the light-receiving unit, a washing water supply path connected to the nozzle through a first valve, and to the nozzle An air supply passage connected through a second valve, and a control unit controlling opening and closing of the first valve and the second valve to selectively eject water, air, or two fluids from the nozzle.

The control unit may control the first valve and the second valve to eject the two fluids from the nozzle periodically or before detecting the cutting blade to clean the light emitting portion and the light receiving portion. .

The cutting blade detection unit includes a blade detection unit inspection unit, wherein the blade detection unit inspection unit includes an appropriate range recording unit for recording an appropriate range of the amount of light received by the light receiving unit corresponding to the type of fluid ejected from the nozzle; A judging unit for determining whether or not the received light amount is within the appropriate range recorded in the appropriate range recording unit for the type of fluid selected by controlling the first valve and the second valve, and if the light received amount is outside the appropriate range, the judgment unit A notification unit for notifying the result may be provided.

The present invention can efficiently clean the light emitting part and the light receiving part while suppressing the adhesion of cutting chips to the light emitting part and the light receiving part.

1 is a perspective view showing a configuration example of a cutting device according to Embodiment 1;
Fig. 2 is a perspective view showing important parts of the cutting device of Fig. 1;
Fig. 3 is a schematic view illustrating important parts of the cutting device of Fig. 1;
Fig. 4 is a table showing the relationship between the opening and closing of valves and the type of fluid ejected from nozzles in the cutting device of Fig. 1;
FIG. 5 is a graph showing a first example of measurement results of the amount of received light obtained by the cutting device of FIG. 1 .
FIG. 6 is a graph showing a second example of measurement results of the amount of received light obtained by the cutting device of FIG. 1 .
FIG. 7 is a graph showing a third example of measurement results of the amount of received light obtained by the cutting device of FIG. 1 .
FIG. 8 is a graph showing a fourth example of the measurement result of the amount of received light obtained by the cutting device of FIG. 1 .
FIG. 9 is a table showing data of an appropriate range of the amount of light received by the light receiving unit corresponding to the type of fluid ejected from the nozzle in the cutting device of FIG. 1 .
Fig. 10 is a perspective view showing important parts of the cutting device according to Embodiment 2;

The form (embodiment) for carrying out this invention is demonstrated in detail, referring drawings. This invention is not limited by the content described in the following embodiment. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. In addition, the structures described below can be appropriately combined. In addition, various omissions, substitutions, or changes can be made in the configuration without departing from the gist of the present invention.

[Embodiment 1]

A cutting device 1 according to Embodiment 1 of the present invention will be described based on the drawings. 1 is a perspective view showing a configuration example of a cutting device 1 according to a first embodiment. FIG. 2 is a perspective view showing parts of a cutting blade 21 and a cutting blade detecting unit 40 which are important parts of the cutting device 1 of FIG. 1 . FIG. 3 is a schematic diagram illustrating important parts of the cutting device 1 of FIG. 1 . Fig. 3 is a top view of a part of the cutting blade detection unit 40 viewed from above, and schematically shows the remaining part in a block diagram or the like. As shown in FIG. 1 , the cutting device 1 includes a chuck table 10, a cutting unit 20, a moving unit 30, a cutting blade detection unit 40, and a control unit 80. do.

In Embodiment 1, the workpiece 100 to be cut by the cutting device 1 is a disk-shaped semiconductor device wafer made of, for example, silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like as a base material, or optical device wafers and the like. As shown in FIG. 1 , in the workpiece 100 , a device 103 is formed in a region partitioned by a plurality of planned division lines 102 formed in a lattice shape on a flat surface 101 . In the first embodiment of the workpiece 100, an adhesive tape 105 is adhered to the back surface 104 of the back surface of the front surface 101, and an annular frame 106 is attached to the outer edge of the adhesive tape 105. However, in the present invention, it is not limited thereto. Further, in the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, or a glass plate.

The chuck table 10 has a disc-shaped frame body in which a concave portion is formed, and a disc-shaped suction portion fitted in the concave portion. The suction part of the chuck table 10 is made of porous ceramic or the like, and is connected to a vacuum suction source (not shown) through a vacuum suction path (not shown). The upper surface of the suction part of the chuck table 10 is a holding surface 11 on which the workpiece 100 is placed and which is suction-held. In the holding surface 11, in Embodiment 1, the workpiece 100 is disposed with the surface 101 facing upward, and the disposed workpiece 100 is passed through the adhesive tape 105 from the back surface 104 side. maintain suction. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to the XY plane, which is a horizontal plane. The chuck table 10 is movable in the X-axis direction, which is one direction of the horizontal direction, by the X-axis moving unit 31 of the moving unit 30, and is vertically movable by a rotation drive source (not shown), and the holding surface 11 It is provided to be rotatable around an axis parallel to the Z-axis direction perpendicular to the axis.

As shown in FIG. 1 , the cutting unit 20 includes a spindle 22 to which a cutting blade 21 is mounted. The cutting blade 21 mounted on the front end of the spindle 22 rotates around the shaft center parallel to the Y-axis direction, which is a separate horizontal direction and orthogonal to the X-axis direction, by the rotational motion of the spindle 22. This is applied to cut the workpiece 100 held on the chuck table 10 . The cutting unit 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 32 of the moving unit 30 with respect to the workpiece 100 held on the chuck table 10, and also moves. It is provided so as to be movable in the Z-axis direction (elevating direction) by the Z-axis moving unit 33 of the unit 30 .

The cutting blade 21 includes an abrasive grain such as diamond or CBN (Cubic Boron Nitride) and a bond material (bonding material) such as metal or resin, and has an annular cutting blade formed to a predetermined thickness. The cutting blade 21 undergoes self-sharpening by wear of the cutting blade during cutting, so that a certain level of cutting performance is always maintained.

The moving unit 30 includes an X-axis moving unit 31 , a Y-axis moving unit 32 , and a Z-axis moving unit 33 . The X-axis moving unit 31 moves the chuck table 10 relative to the cutting unit 20 along the X-axis direction. The Y-axis moving unit 32 and the Z-axis moving unit 33 respectively move the cutting unit 20 relative to the chuck table 10 along the Y-axis direction and the Z-axis direction.

The X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 are X-axis direction position detection units (not shown) that detect the position of the chuck table 10 in the X-axis direction, respectively. A Y-axis direction position detection unit (not shown) that detects the position of the cutting unit 20 in the Y-axis direction and a Z-axis direction position detection unit that detects the position of the cutting unit 20 in the Z-axis direction are provided. The X-axis direction position detection unit, Y-axis direction position detection unit, and Z-axis direction position detection unit each output the detected position to the controller 80 . Further, the Z-axis direction position detection unit outputs the detected position to a front end position detection unit 54 of a cutting blade detection unit 40 described later.

The X-axis direction position detection unit, Y-axis direction position detection unit, and Z-axis direction position detection unit are each a linear scale parallel to the X-axis direction, Y-axis direction, or Z-axis direction, and each X-axis moving unit 31, It is provided to be movable in the X-axis direction, Y-axis direction, and Z-axis direction by the Y-axis movement unit 32 and the Z-axis movement unit 33, and can be configured by a reading head that reads the scale of the linear scale. In addition, the X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit are not limited to a configuration having a linear scale and a read head in the present invention, and each includes an X-axis position detection unit and a Y-axis position detection unit. It may be an encoder installed in the motor of the axial direction position detection unit and the Z-axis direction position detection unit.

The cutting device 1 moves a cutting blade 21 to a workpiece 100 held on a chuck table 10 by an X-axis moving unit 31, a Y-axis moving unit 32 and a Z-axis moving unit 33. is set at a predetermined position with respect to , and the cutting blade 21 is rotated and relatively moved along the line 102 to be divided, so that the workpiece 100 is cut with the cutting blade 21 and the line to be divided ) to form a cutting groove along.

As shown in FIGS. 2 and 3 , the cutting blade detection unit 40 includes a groove member 41, a light emitting unit 42, a light receiving unit 43, a light source 44, and a light receiving amount measuring unit 45. ), a nozzle unit 46, a washing water supply path 47, an air supply path 48, and a control unit 49.

As shown in FIG. 2, the groove member 41 includes a base 41-1 installed upright from the cutting blade detection unit main body 40-1, and a base 41-1 installed upright from the base 41-1. It has a pair of side wall parts 41-2. The pair of side wall portions 41-2 are disposed at intervals in the Y-axis direction, which is the direction of the rotation axis of the cutting blade 21, and the interval between each other is greater than the thickness of the cutting blade of the cutting blade 21. has a wide range. The pair of side wall portions 41-2 form a groove 41-3, which is a space in which the blade tip 25, which is the tip of the lower shaft of the cutting blade of the cutting blade 21 rotating between each other, can enter from above. are doing

As shown in FIG. 2, the light emitting part 42 is provided in one side wall part 41-2. As shown in Fig. 2, the light receiving section 43 is provided on the other side wall section 41-2 at a position facing the light emitting section 42 in the Y-axis direction. In this way, the light emitting part 42 and the light receiving part 43 face each other with the space where the edge 25 of the cutting blade 21 penetrates.

The light emitting unit 42 is optically connected to the light source 44 by an optical fiber or the like, and emits light from the light source 44 toward the light receiving unit 43 . The light-receiving unit 43 has light-receiving elements optically connected by an optical fiber or the like, and receives and detects light generated from the light-emitting unit 42 and reaching the light-receiving unit 43 with the light-receiving element. The light receiving unit 43 is optically connected to the photoelectric conversion unit 51 of the light received amount measuring unit 45 by an optical fiber or the like, and transmits light received from the light emitting unit 42 to the photoelectric conversion unit 51 .

As shown in FIG. 3 , the light-receiving amount measurement unit 45 includes a photoelectric conversion unit 51, a reference voltage setting unit 52, a voltage comparison unit 53, and a tip position detection unit 54. The photoelectric conversion unit 51 outputs to the voltage comparator 53 a voltage corresponding to the amount of light transmitted from the light receiving unit 43 . As the cutting edge 25 of the cutting blade 21 penetrates the groove 41-3, the amount of blocking between the light emitting part 42 and the light receiving part 43 increases, the photoelectric power The output voltage from the conversion section 51 gradually decreases. In Embodiment 1, the photoelectric conversion unit 51 operates at 5 V (maximum voltage) and a light reception rate of 0% when the light reception rate, which is the ratio of the amount of light received by the light receiving unit 43 to the amount of light emitted by the light emitting unit 42, is 100%. When , it outputs a voltage of 0 V (minimum voltage). The photoelectric conversion unit 51 detects when the amount of light received by the light receiving unit 43 reaches a predetermined amount, that is, when the edge 25 of the cutting blade 21 reaches a predetermined position between the light emitting unit 42 and the light receiving unit 43. At this time, the output voltage is set to be a predetermined reference voltage (3 V in Embodiment 1). In this way, the photoelectric conversion unit 51 of the light-receiving amount measurement unit 45 measures the amount of light received by the light-receiving unit 43 by converting the light received by the light-receiving unit 43 into a voltage based on the amount of light received by the light-receiving unit 43. .

The reference voltage setting unit 52 outputs the set predetermined reference voltage to the voltage comparator 53 . The predetermined reference voltage is 3 V as described above in Embodiment 1. The voltage comparator 53 compares the output voltage from the photoelectric conversion unit 51 with the reference voltage set by the reference voltage setting unit 52, so that the output voltage from the photoelectric conversion unit 51 corresponds to the reference voltage. When reached, a signal to that effect is output to the tip position detection unit 54. The tip position detection unit 54 determines the position of the cutting unit 20 in the Z-axis direction from the Z-axis direction position detection unit of the Z-axis movement unit 33 at the time when the signal is output from the voltage comparator 53. Acquire The tip position detection unit 54 detects the acquired position of the cutting unit 20 in the Z-axis direction as the position (tip position) of the edge 25 of the cutting blade 21, and the detected cutting blade 21 The tip position of is output to the controller 80. In this way, the cutting blade detection unit 40 can detect the edge 25 of the cutting blade 21, its position, and approximate values of the diameter of the cutting blade of the cutting blade 21. In addition, the edge 25 of the cutting blade 21, its position, and the diameter of the cutting edge of the cutting blade 21 are all changed by self-sharpening after the cutting blade 21 is worn by cutting processing or the like.

In addition, the light-receiving amount of the light-receiving unit 43 measured by the light-receiving amount measurement unit 45 decreases when the outer edge of the cutting edge of the cutting blade 21 protrudes in the radial direction of the cutting blade 21, and the radial direction If it is depressed, it increases. For this reason, the cutting blade detection unit 40 determines the outer edge of the cutting edge of the cutting blade 21 being mounted on the spindle 22 based on the light received amount of the light receiving unit 43 measured by the light receiving amount measurement unit 45. Planar shapes (such as slits formed in the radial direction and cracks at the tip of the cutting blade) can be detected. In addition, the planar shape of the outer edge of the cutting edge of the cutting blade 21 is changed by self-sharpening after the cutting blade 21 is worn by a cutting process or the like.

The received light amount measurement unit 45 includes a computer system in Embodiment 1. The computer system included in the received light amount measuring unit 45 includes an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), and a storage device having a memory such as ROM (Read Only Memory) or RAM (Random Access Memory). and an input/output interface device. Each function of the photoelectric conversion unit 51, the reference voltage setting unit 52, the voltage comparator 53, and the tip position detection unit 54 is an arithmetic processing unit of the computer system included in the light received amount measurement unit 45, This is realized by executing a computer program stored in the storage device of the computer system included in the light received amount measuring unit 45.

The nozzle unit 46 is provided with the groove member 61, the 1st nozzle 62, the 2nd nozzle 63, and the fluid supply part 64, as shown in FIG.2 and FIG.3. As shown in FIG. 2 , the groove member 61 is provided adjacent to the groove member 41 in the X-axis direction on the cutting blade detection unit main body 40-1. As shown in FIG. 2 , similar to the groove member 41, the groove member 61 includes a base 61-1 installed upright from the cutting blade detection unit main body 40-1, and a base 61 -1), and has a pair of side wall portions 61-2 installed upright. The pair of side wall portions 61-2 are disposed at intervals in the Y-axis direction, which is the direction of the rotation axis of the cutting blade 21, and the interval between each other is greater than the thickness of the cutting blade of the cutting blade 21. It is wide and has a narrower width than the interval between the pair of side wall portions 41-2. The pair of side wall portions 61-2 form a groove 61-3 between them, which is a space through which airflow around the cutting blade 21 generated by rotating the cutting blade 21 can pass from above, there is. That is, the groove 61-3 is narrower than the groove 41-3. The groove 61-3 suppresses the possibility that the airflow is disturbed by passing the airflow around the cutting blade 21 in this way, and thereby, being attracted to the cutting blade 21 by the disturbance of the airflow or the light emitting portion 42 ) or moisture adhering to portions other than the light receiving portion 43 that affect the measurement of the amount of light received by the cutting blade detection unit 40 is suppressed. Both the first nozzle 62 and the second nozzle 63 are examples of nozzles according to the present invention.

As shown in FIG. 3 , the first nozzle 62 is attached to one side wall portion 61-2 at its front end, and is connected to the fluid supply part 64 at its base end through the inside of the groove member 61. has been As shown in FIGS. 2 and 3 , the first nozzle 62 has a front end side of one side wall portion 61-2 and one side wall portion 41-2 of the groove member 41 on the same side. It faces the end face 42-1 of the light emitting part 42 provided in the . The first nozzle 62 passes the fluid supplied to the fluid supply unit 64 to the light emitting unit 42 without crossing the path of the edge 25 of the cutting blade 21 penetrating into the groove 41-3. It is supplied by jetting toward the end face 42-1 of the Here, the same side refers to the same side with respect to the cutting edge 25 of the cutting blade 21 penetrating into the groove 41-3. In addition, the end surface 42-1 of the light emitting portion 42 is the surface facing the inside of the groove 41-3 in the light emitting portion 42, that is, the cutting blade 21 penetrating into the groove 41-3. ) refers to the side facing the edge of the blade (25).

As shown in FIG. 3 , the second nozzle 63 is attached to the side wall portion 61-2 on the other side at its front end, and to the fluid supply section 64 at its base end through the inside of the groove member 61. are connected As shown in FIGS. 2 and 3 , the second nozzle 63 has a front end side of the other side wall portion 41-2 of the groove member 41 on the same side as the other side wall portion 61-2. It faces the end face 43-1 of the light receiving part 43 provided in 2). The second nozzle 63 passes the fluid supplied to the fluid supply unit 64 to the light receiving unit 43 without crossing the path of the edge 25 of the cutting blade 21 penetrating into the groove 41-3. It is ejected and supplied toward the end face 43-1. Here, the end surface 43-1 of the light receiving portion 43 is the surface facing the inside of the groove 41-3 in the light receiving portion 43, that is, the surface of the cutting blade 21 penetrating into the groove 41-3. It refers to the side facing the edge of the blade (25).

The fluid supply part 64 has two connection parts on one side and the other side, respectively. As for the fluid supply part 64, the base end side of the 1st nozzle 62 and the base end side of the 2nd nozzle 63 are each connected to the connection part of two places on one side. In the fluid supply unit 64, the washing water supply path 47 and the air supply path 48 are connected to the first valve 47-2 and the second valve 48-2, respectively, at the two connecting parts on the other side. connected through

The washing water supply path 47 has one end connected to the washing water supply source 47-1 and the other end connected to the fluid supply unit 64 via the first valve 47-2. That is, the washing water supply path 47 is connected to the first nozzle 62 and the second nozzle 63 via the first valve 47-2 and the fluid supply unit 64. The washing water supply path 47, when the first valve 47-2 is open, supplies the washing water supplied from the washing water supply source 47-1 to the fluid supply unit through the first valve 47-2. (64) is supplied. The washing water supplied to the fluid supply unit 64 is supplied to the first nozzle 62 and the second nozzle 63 . In the washing water supply path 47, when the first valve 47-2 is closed, the supply of washing water from the washing water supply source 47-1 to the fluid supply unit 64 is stopped. The washing water supplied from the washing water supply source 47-1 is water (pure water) in Embodiment 1, for example.

The air supply path 48 has one end connected to the air supply source 48-1 and the other end connected to the fluid supply unit 64 via the second valve 48-2. That is, the air supply passage 48 is connected to the first nozzle 62 and the second nozzle 63 via the second valve 48-2 and the fluid supply part 64. In the air supply path 48, when the second valve 48-2 is open, air supplied from the air supply source 48-1 is passed through the second valve 48-2 to the fluid supply unit 64. supply to The air supplied to the fluid supply unit 64 is supplied to the first nozzle 62 and the second nozzle 63 . As for the air supply path 48, when the 2nd valve 48-2 is closed, the supply of air from the air supply source 48-1 to the fluid supply part 64 is stopped. In Embodiment 1, the air supplied from the air supply source 48-1 is, for example, compressed air or compressed inert gas.

FIG. 4 shows the opening and closing of the first valve 47-2 and the second valve 48-2 and ejection from the first nozzle 62 and the second nozzle 63 in the cutting device 1 of FIG. This is a table showing the relationship between the types of fluids that The control unit 49 controls opening and closing of the first valve 47-2 and the second valve 48-2, respectively. The control unit 49 does not supply the washing water from the washing water supply passage 47 to the fluid supply unit 64 when controlling the first valve 47-2 and the second valve 48-2 to close together. Since no air is supplied from the air supply passage 48, neither washing nor air is ejected from the first nozzle 62 and the second nozzle 63, as shown in FIG. The control unit 49 controls the first valve 47-2 to open and the second valve 48-2 to close, the washing water from the washing water supply path 47 to the fluid supply unit 64. Since air is not supplied from the air supply passage 48 while supplying, as shown in FIG. 4 , only the washing water is ejected from the first nozzle 62 and the second nozzle 63 .

The control unit 49 controls the first valve 47-2 to close and the second valve 48-2 to open, the washing water from the washing water supply path 47 to the fluid supply unit 64. Since air is supplied from the air supply passage 48 while not supplying, as shown in FIG. 4 , only air is ejected from the first nozzle 62 and the second nozzle 63 . When the control unit 49 controls the first valve 47-2 and the second valve 48-2 to open together, the washing water is supplied to the fluid supply unit 64 from the washing water supply passage 47 and Since air is also supplied from the air supply passage 48, the washing water supplied from the fluid supply section 64 and the air merge and mix to form a mixed two-fluid (two-fluid in the present invention), as shown in FIG. As such, the mixed two fluids are ejected from the first nozzle 62 and the second nozzle 63. The control unit 49 controls the opening and closing of the first valve 47-2 and the second valve 48-2 in this way, so that from the first nozzle 62 and the second nozzle 63, Washing water, air, or mixed two fluids can be selectively ejected.

The control unit 49, in Embodiment 1, has an arithmetic processing device having a microprocessor such as a CPU, a storage device having a memory such as ROM or RAM, and an input/output interface device, the same as the light received amount measurement unit 45. Including computer systems. As for the function of the control unit 49, in Embodiment 1, the arithmetic processing unit of the computer system included in the control unit 49 executes a computer program stored in the storage device of the computer system included in the control unit 49. realized by doing

In Embodiment 1, the cutting blade detection unit 40 further includes a blade detection unit inspection unit 70 as shown in FIG. 3 . As shown in FIG. 3 , the blade detection unit inspection unit 70 includes an appropriate range recording unit 71, a determining unit 72, and a notification unit 73. The blade detection unit inspecting unit 70 is connected to the light received amount measuring unit 45 and the control unit 49 so that information communication is possible.

5, 6, 7, and 8 show the measurement results of the light-receiving amount of the light-receiving unit 43 obtained by the light-receiving amount measurement unit 45 of the cutting blade detection unit 40 of the cutting device 1 of FIG. 1, respectively. It is a graph showing the first example, the second example, the third example, and the fourth example. The graphs of the first example, second example, third example, and fourth example of the measurement results of the amount of light received by the light receiving unit 43 shown in FIGS. 5, 6, 7, and 8, respectively, are all of the cutting blade detection unit 40 When each component of is all functioning normally, there is no damage or problem, and the cutting blade 21 does not enter the groove 41-3, and light is emitted from the light emitting part 42. , is a graph of the change over time of the output voltage acquired by the light-receiving amount measurement unit 45. In the first example shown in FIG. 5 , the light-received amount measurement unit 45 acquires the light-received amount measurement unit 45 in a state in which nothing is ejected from the first nozzle 62 and the second nozzle 63 . In the second example shown in FIG. 6 , the light-received amount measurement unit 45 acquires only the washing water from the first nozzle 62 and the second nozzle 63 . In the third example shown in FIG. 7 , the received light amount measurement unit 45 acquires only the air from the first nozzle 62 and the second nozzle 63 . In the fourth example shown in FIG. 8 , the light-receiving amount measuring unit 45 acquires the mixed two-fluids from the first nozzle 62 and the second nozzle 63 while ejecting them.

The output voltage obtained by the light-receiving amount measuring unit 45 hardly changes with time as shown in FIG. 5 in a state in which nothing is ejected from the first nozzle 62 and the second nozzle 63, and the voltage ( 81) (in the first embodiment, the same 5 V as the maximum voltage described above). The output voltage obtained by the light-receiving amount measurement unit 45 is that the light from the light-emitting unit 42 toward the light-receiving unit 43 is washed when only the washing water is ejected from the first nozzle 62 and the second nozzle 63. Due to scattering by water mist, as shown in FIG. 6 , it changes rapidly with time, and the voltage 82 smaller than the voltage 81 is taken as the median value, and the voltage 83 larger than the voltage 81 ) as the maximum value and the voltage 84 greater than 0 V as the minimum value, the voltage fluctuation range from the voltage 82 to the voltage 83 and voltage 84 is transitioned as the voltage fluctuation range 91.

The output voltage obtained by the light-receiving amount measuring unit 45 is, as shown in FIG. 7 , when only air is blown from the first nozzle 62 and the second nozzle 63, Similar to the state in which nothing is ejected from the nozzle 63, the voltage 81 changes almost unchanged with time. The output voltage acquired by the light-receiving amount measurement unit 45 is the light that travels from the light-emitting unit 42 toward the light-receiving unit 43 in a state where the mixed two-fluids are ejected from the first nozzle 62 and the second nozzle 63. Due to scattering by the mist of the washing water generated by the mixed two fluids, as shown in FIG. 81) and the voltage 86 smaller than the voltage 83 as the maximum value, and the voltage 87 equal to the voltage 84 as the minimum value, the voltage fluctuation range from the voltage 85 to the voltage 86 and the voltage 87 is transitioned as a voltage fluctuation width 92 smaller than the voltage fluctuation width 91. In this way, the amount of light received (output voltage) of the light receiving unit 43 measured by the light receiving amount measuring unit 45 changes depending on the type of fluid supplied from the first nozzle 62 and the second nozzle 63 .

FIG. 9 shows data of an appropriate range of the amount of light received by the light receiving unit 43 corresponding to the type of fluid ejected from the first nozzle 62 and the second nozzle 63 in the cutting device 1 of FIG. 1 (proper range data). ) is a table representing The appropriate range recording unit 71 records the appropriate range of the light receiving amount of the light receiving unit 43 corresponding to the type of fluid ejected from the first nozzle 62 and the second nozzle 63 . Specifically, the proper range recording unit 71 is an actual light receiving unit ( Based on the measurement result of the amount of light reception in 43), as shown in FIG. 9, the types of fluid ejected from the first nozzle 62 and the second nozzle 63 and the light receiving section 43 corresponding to the type of each fluid Stores appropriate range data in which the appropriate ranges of the received light amount are contrasted with each other. In the example of appropriate range data shown in FIG. 9, the appropriate range recording unit 71 considers the value Δ corresponding to a certain error or deviation in the first example, the second example, the third example, and the fourth example. Depending on the measurement result of the amount of light received by the light receiving unit 43 at normal times shown, the range of the median value of the output voltage obtained by the light received amount measurement unit 45 for each type of fluid, the upper limit of the maximum value, the lower limit of the minimum value, and the range of the voltage fluctuation range The values of the four items are recorded as an appropriate range of the amount of light received by the light receiving unit 43. The appropriate range data recorded by the appropriate range recording unit 71 is recorded by being input to the operator of the cutting device 1 through an input unit not shown in advance.

In addition, the blade detection unit inspection unit 70, in addition to the appropriate range data recorded by the appropriate range recording unit 71, each of the first valve 47-2 and the second valve 48-2 shown in FIG. Data on the relationship between information on opening and closing and the type of fluid ejected from the first nozzle 62 and the second nozzle 63 (valve fluid type collation data) is recorded. In addition, the valve fluid type verification data recorded by the blade detection unit inspection unit 70 is recorded by being input to the operator of the cutting device 1 through an input unit not shown in advance.

The determination part 72 controls the opening and closing of the 1st valve 47-2 and the 2nd valve 48-2 by the control unit 49, and the ejection from the 1st nozzle 62 and the 2nd nozzle 63 It is determined whether or not the amount of light received by the light receiving unit 43 is within the appropriate range recorded by the appropriate range recording unit 71 for the selected fluid type. The determination unit 72 first obtains information on opening and closing of the first valve 47-2 and the second valve 48-2 from the control unit 49, and then, in advance, the blade detection unit inspection unit 70 With reference to the valve fluid type verification data shown in FIG. 4 stored in the valve fluid type verification data, the type of fluid ejected from the first nozzle 62 and the second nozzle 63 matched with the acquired opening/closing information in the valve fluid type verification data. acquire the information of Next, the determination unit 72 obtains, from the light reception amount measurement unit 45 , an output voltage that is the measurement result of the light reception amount of the light reception unit 43 . The determination unit 72 then refers to the appropriate range data shown in FIG. 9 recorded by the appropriate range recording unit 71 in advance, and determines the appropriate range of the light reception amount of the light receiving unit 43 compared with the previously acquired information on the type of fluid. Acquire information. The determination unit 72 determines whether or not the output voltage obtained from the received light amount measuring unit 45 satisfies the condition of the appropriate range of the acquired light received amount of the light receiving unit 43 .

When the determination unit 72 determines that the output voltage acquired from the received light amount measurement unit 45 does not satisfy the condition of the appropriate range, that is, is outside the appropriate range, outputs a determination result indicating that the output voltage is out of the appropriate range to the notification unit 73 do. The notification unit 73 notifies the judgment result received from the determination unit 72 . The determination unit 72 also outputs the determination result of being within the appropriate range to the notification unit 73 when it is judged that the output voltage obtained from the received light amount measurement unit 45 satisfies the condition of the appropriate range, that is, is within the appropriate range. Thus, the determination result may be notified by the notification unit 73.

The determination unit 72 further outputs a command signal related to the control of opening and closing of the first valve 47-2 and the second valve 48-2 to the control unit 49, so that the first nozzle 62 and the type of fluid ejected from the second nozzle 63 is sequentially set to none, washing water, air, and mixed two fluids, and the output voltage acquired from the light-received amount measuring unit 45 for each of these settings is the light-received amount of the light-receiving unit 43 It may be determined sequentially whether or not the conditions within the appropriate range of are satisfied. The determination unit 72 determines which of the washing water supply passage 47 and the air supply passage 48 has caused damage or a problem, based on whether a determination result outside the appropriate range was obtained when the type of fluid was set. It is also possible to determine whether or not there is a high possibility, output the determination result to the notification unit 73, and notify the notification unit 73.

In this way, the blade detection unit inspection unit 70, in the cutting blade detection unit 40, from the first nozzle 62 and the second nozzle 63 to the end surface 42-1 of the light emitting portion 42 and Whether or not the function of ejecting fluid toward the end face 43-1 of the light receiver 43 operates normally, that is, the first valve 47-2 and the second valve 48 controlled by the control unit 49 -2) It is inspected whether the fluid is normally ejected from the first nozzle 62 and the second nozzle 63 according to the opening and closing.

In Embodiment 1, the notification unit 73 is a display unit provided with the display surface side facing outward, a lighting unit, a sound transmission unit, an information communication unit, or the like. The display unit, which is an example of the notification unit 73, is, for example, a liquid crystal display device, and displays a screen relating to the judgment result based on reception of the judgment result of being out of the appropriate range from the judgment unit 72, and displays the judgment result. is notified to the operator so that it can be visually recognized. The lighting unit, which is an example of the notification unit 73, is, for example, a light emitting diode or the like, and based on reception of a determination result from the determination unit 72 that the light emitting diode or the like is out of the appropriate range, the light emitting diode or the like lights up or blinks, the color of light, etc. The judgment result is notified to the operator recognizable. An audio transmission unit, which is an example of the notification unit 73, is, for example, a speaker, and based on reception of the determination result of being outside the appropriate range from the determination unit 72, the operator is notified of the determination result by voice so as to be recognizable. do. The information communication unit, which is an example of the notification unit 73, is connected to information devices such as smart phones, tablets, wearable devices, and computers so that information communication is possible, and reception of a determination result from the determination unit 72 that it is outside the appropriate range Based on this, the determination result is transmitted to these information devices, and the operator is notified of the determination result recognizable by the display unit, the light unit, and the audio transmission unit of these information units.

In the first embodiment, the blade detection unit inspecting unit 70 is the same as the light-receiving amount measurement unit 45 and the control unit 49, a processing unit having a microprocessor such as a CPU, and a memory having a memory such as ROM or RAM. device, and a computer system having an input/output interface device. The function of the appropriate range recording section 71 is realized by the storage device of the computer system included in the blade detection unit inspection section 70 in Embodiment 1. In Embodiment 1, the function of the determination unit 72 is stored in the storage device of the computer system included in the blade detection unit inspection unit 70 by the arithmetic processing unit of the computer system included in the blade detection unit inspection unit 70. It is realized by executing a computer program. The notification unit 73 is connected to enable information communication through an input/output interface device of a computer system included in the blade detection unit inspection unit 70 .

The control unit 80 controls each component of the cutting device 1, respectively, so that the cutting processing of the workpiece 100 by the cutting unit 20 and the cutting blade by the cutting blade detection unit 40 ( 21) of the blade tip 25 and its position, approximate value of the diameter of the cutting blade of the cutting blade 21, detection processing such as the plane shape of the outer edge of the cutting blade of the cutting blade 21, blade detection unit inspection unit ( 70) to perform each operation related to the inspection process of the cutting blade detection unit 40 and the like to the cutting device 1. The controller 80, in Embodiment 1, is the same as the light-receiving amount measurement unit 45, the control unit 49, and the blade detection unit inspection unit 70, and an arithmetic processing device having a microprocessor such as a CPU, ROM or RAM, It includes a storage device having the same memory and a computer system having an input/output interface device. In Embodiment 1, the function of the control unit 80 is realized by the arithmetic processing unit of the computer system included in the control unit 80 executing a computer program stored in the storage device of the computer system included in the control unit 80. .

Next, this specification describes an example of operation processing of the cutting device 1 according to the first embodiment. The cutting device 1 is operated when the main power is switched from OFF to ON, when the chuck table 10 or the cutting blade 21 is exchanged, or a predetermined operation command from the operator of the cutting device 1 or the like. is received, to check whether the shape of the cutting edge of the cutting blade 21 is normal or to adjust the tip position of the cutting blade 21 before starting the cutting process of the workpiece 100. , the edge 25 of the cutting blade 21 is moved to the groove 41-3 of the cutting blade detection unit 40 by the X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33. ), and by the cutting blade detection unit 40, the blade tip 25 of the cutting blade 21 and its position, the approximate value of the diameter of the cutting blade of the cutting blade 21, the A detection process such as the flat shape of the outer edge of the cutting blade is performed.

In Embodiment 1, the control unit 49 of the cutting blade detection unit 40 of the cutting device 1 detects the cutting blade 21 by using a periodic tool or by the tip position detection unit 54 of the cutting blade detection unit 40. Before the treatment, a cleaning treatment for cleaning the end face 42-1 of the light emitting portion 42 and the end face 43-1 of the light receiving portion 43 is performed. Specifically, the control unit 49 of the cutting device 1 first moves the cutting blade 21 upward with respect to the groove 41-3 by the Z-axis moving unit 33 in a state where the first By controlling each of the valve 47-2 and the second valve 48-2 to open together, the end face 42- 1) and the end surface 43-1 of the light receiving unit 43 by spraying the mixed two fluids to the end surface 42-1 of the light emitting unit 42 and the end surface 43-1 of the light receiving unit 43 Clean up. The control unit 49 of the cutting device 1 then switches the first valve 47-2 from open to closed, and from the first nozzle 62 and the second nozzle 63, respectively, the light emitting portion ( 42) and the end surface 42-1 of the light receiving unit 43 by blowing air to the end surface 42-1 of the light emitting unit 42 and the end surface of the light receiving unit 43. The spray of the mixed two fluids in (43-1) removes the mist of the mixed two fluids, that is, water droplets of the washing water. In this way, the cutting blade detection unit 40 of the cutting device 1 cleans the stage of the light emitting part 42 by spraying the mixed two fluids and removing water droplets of the washing water by blowing air. Both the side surface 42-1 and the end surface 43-1 of the light receiving unit 43 are cleanly removed from both cutting chips and water droplets that may adversely affect the detection process of the cutting blade 21. state can be made

The control unit 49 of the cutting device 1 also constantly or intermittently, for example, when cutting the workpiece 100 by the cutting unit 20, etc., the end surface of the light emitting portion 42 (42-1) and the end surface 43-1 of the light receiving part 43 are subjected to a treatment for suppressing the adhesion of cutting chips to suppress the adhesion of chips. Specifically, the control unit 49 of the cutting device 1 opens the first valve 47-2 and controls the second valve 48-2 to close, and the first nozzle 62 and By spraying the washing water from the second nozzle 63 to the end surfaces 42-1 of the light emitting portion 42 and the end surfaces 43-1 of the light receiving portion 43, respectively, the end surfaces of the light emitting portion 42 ( 42-1) and the end surface 43-1 of the light receiving unit 43 are prevented from adhering to cutting chips generated by the cutting process. Moreover, when only the washing water is blown from the 1st nozzle 62 and the 2nd nozzle 63, the quantity of the mist generated is extremely small compared with the case where mixed 2 fluids are blown. For this reason, the control unit 49 of the cutting device 1 generates a large amount of mist by performing this chip adhesion suppression process in which only the washing water is ejected from the first nozzle 62 and the second nozzle 63. It is possible to reduce the chance of ejecting the mixed two fluids. As a result, the cutting device 1 has a large amount of mist generated by the ejection of the mixed two fluids, which crosses the partition of the processing chamber and penetrates into various places in the cutting device 1. There is a possibility that the frame of the cutting device 1 may be cooled and the precision of the cutting process may be affected, or a control board (e.g., a light-receiving amount measuring unit) on which water droplets perform control processing within the cutting device 1 due to this large amount of mist 45, the control unit 49, the blade detection unit inspection unit 70, the control board of the control unit 80), etc., and the possibility of adverse effects can be reduced.

In Embodiment 1, the determination unit 72 of the blade detection unit inspection unit 70 of the cutting device 1, before performing the cleaning process or the chip adhesion suppression process by the periodic or cutting blade detection unit 40, The function of ejecting fluid from the first nozzle 62 and the second nozzle 63 toward the end face 42-1 of the light emitting part 42 and the end face 43-1 of the light receiving part 43 is normal. Check whether it works or not.

In the cutting device 1 according to Embodiment 1 having the configuration described above, the end face 42-1 of the light emitting portion 42 and the end face 43-1 of the light receiving portion 43 of the cutting blade detection unit 40 1), the control unit 49 controls the opening and closing of the first valve 47-2 and the second valve 48-2 to selectively supply washing water, air, or a mixture of these two fluids. 1 nozzle 62 and the 2nd nozzle 63 are provided. Thus, the cutting device 1 according to Embodiment 1 selects the fluid supplied from the first nozzle 62 and the second nozzle 63 according to the purpose, and supplies washing water to the light emitting unit 42 and The adhesion of cutting chips to the light receiving unit 43 is suppressed, and the mixed 2 fluids are supplied to strongly clean the light emitting unit 42 and the light receiving unit 43 to remove the cutting chips adhering to the light emitting unit 42 and the light receiving unit 43. is removed, and air is supplied to remove the mist caused by the mixed two fluids attached to the light emitting part 42 and the light receiving part 43, that is, water droplets of the washing water. In this way, the cutting device 1 according to Embodiment 1 can efficiently clean the light emitting portion 42 and the light receiving portion 43 while suppressing the adhesion of cutting chips to the light emitting portion 42 and the light receiving portion 43. It exerts the action effect that there is.

In addition, in the cutting device 1 according to Embodiment 1, before the cutting blade 21 detection process is performed by the tip position detection unit 54 of the periodic or cutting blade detection unit 40, the light emitting unit 42 A cleaning process for cleaning the end face 42-1 and the end face 43-1 of the light receiving portion 43 is performed. For this reason, the cutting device 1 according to Embodiment 1 reduces the opportunity for cleaning by the operator and increases the accuracy of the detection process of the cutting blade 21 by the cutting blade detection unit 40. can keep

In addition, in the cutting device 1 according to Embodiment 1, the blade detection unit inspection unit 70 measures the light-received amount measurement unit 45 according to the type of fluid supplied from the first nozzle 62 and the second nozzle 63. The end surface 42-1 of the light emitting part 42 and the light receiving part ( 43), it is possible to check whether the function of ejecting fluid toward the end surface 43-1 is working normally, and damage or problems occur in the washing water supply path 47 or the air supply path 48. possibility of doing so can be detected.

[Embodiment 2]

A cutting device 1 according to Embodiment 2 of the present invention will be described based on the drawings. 10 is a perspective view showing important parts of the cutting device 1 according to the second embodiment. In Fig. 10, the same reference numerals are assigned to the same parts as in the first embodiment, and explanations are omitted.

The cutting device 1 according to Embodiment 2 further includes, in Embodiment 1, a protective cover unit 95 that selectively covers the cutting blade detection unit 40 from above, and the other configurations are as in Embodiment 1. is the same as As shown in FIG. 10 , the protective cover unit 95 includes a protective cover main body 96 and a drive unit 97 . A pivoting shaft 98 is attached to one end of the protective cover main body 96, and the pivoting shaft 98 is rotatably supported at both ends of the cutting blade detection unit main body 40-1. The driving unit 97 is controlled by the control unit 49, the drive shaft is connected to the rotational shaft 98, and by driving the rotational shaft 98, the protective cover main body 96 is moved to the cutting blade detection unit 40. An exposure position where the groove member 41 and the groove member 61 of the cutting blade 21 are exposed so that the edge 25 of the cutting blade 21 can penetrate into the groove 41-3, and the groove of the cutting blade detection unit 40 The member 41 and the groove member 61 are moved between a protective position to cover and protect them from the outside.

Next, this specification describes an example of operation processing of the cutting device 1 according to the second embodiment. In the operation process of the cutting device 1 according to Embodiment 2, in Embodiment 1, the chip adhesion suppression process is changed, and other operation processes are the same as those in Embodiment 1. In the processing to suppress adhesion of cutting chips of the cutting device 1 according to Embodiment 2, the control unit 49 of the cutting device 1 performs cutting processing of the workpiece 100 by the cutting unit 20, for example. , etc., the protective cover main body 96 is moved to a protective position by the drive unit 97, and the end face 42-1 of the light emitting section 42 and the light receiving section 43 are moved by the protective cover main body 96. Adherence of cutting chips to the end surface 43-1 is suppressed, and control is performed to open the first valve 47-2 and close the second valve 48-2 periodically, so that the first nozzle 62 and the second nozzle 63 spray the washing water to the end surface 42-1 of the light emitting part 42 and the end surface 43-1 of the light receiving part 43, respectively, so that the light emitting part 42 The adhesion of cutting chips generated by the cutting treatment to the end face 42-1 of the light receiving unit 43 and the end face 43-1 of the light receiving portion 43 is further suppressed.

The cutting device 1 according to Embodiment 2 having the configuration described above, in Embodiment 1, further includes a protective cover unit 95 that selectively covers the cutting blade detection unit 40 from above. Since the other configurations are the same as those of Embodiment 1, the same effects as those of Embodiment 1 are exhibited. In addition, in the cutting device 1 according to Embodiment 2, the end face 42-1 of the light emitting portion 42 and the end face 43-1 of the light receiving portion 43 are formed by the protective cover unit 95. The effect of being able to further suppress adhesion of cutting chips is exhibited.

In addition, this invention is not limited to the said embodiment. That is, various modifications can be made without departing from the gist of the present invention. In Embodiments 1 and 2 described above, the first nozzle 62 capable of selectively ejecting the washing water, air, and the mixed two fluids by the first valve 47-2 and the second valve 48-2 and a second nozzle 63, but also for draining water capable of blowing only air to the end face 42-1 of the light emitting part 42 and the end face 43-1 of the light receiving part 43. Nozzles may be provided separately, and the first valve 47-2 and the second valve 48-2 and the nozzle for draining water may be selectively used.

1: cutting device 10: chuck table
20: cutting unit 21: cutting blade
22: spindle 25: blade tip
30: moving unit 40: cutting blade detection unit
42: light emitting part 42-1, 43-1: end surface
43: light receiving unit 45: light receiving amount measuring unit
47: washing water supply path 47-2: first valve
48: air supply path 48-2: second valve
49: control unit
62: 1st nozzle (an example of a nozzle in the present invention)
63: 2nd nozzle (an example of a nozzle in the present invention)
70: blade detection unit inspection unit 71: proper range recording unit
72: judgment unit 73: notice unit
100: work piece

Claims (3)

A cutting unit having a chuck table for holding a workpiece, a spindle on which a cutting blade for cutting the workpiece held on the chuck table is mounted, a moving unit for moving the cutting unit up and down, and an edge of the cutting blade penetrating the workpiece. A cutting device having a cutting blade detection unit having a light emitting unit and a light receiving unit facing each other with a space therebetween,
The cutting blade detection unit,
a light-received amount measuring unit for measuring the amount of light received by the light-receiving unit;
a nozzle for supplying a fluid to end surfaces of the light emitting part and the light receiving part;
A washing water supply path connected to the nozzle through a first valve;
An air supply path connected to the nozzle through a second valve;
A cutting device comprising a control unit that controls opening and closing of the first valve and the second valve to selectively eject water, air, or two fluids from the nozzle. The method of claim 1, wherein the control unit controls the first valve and the second valve to eject the two fluids from the nozzle periodically or before detecting the cutting blade, A cutting device for cleaning the light receiving unit. The method according to claim 1 or 2, wherein the cutting blade detection unit includes a blade detection unit inspection unit,
The blade detection unit inspection unit,
an appropriate range recording unit for recording an appropriate range of the amount of light received by the light receiving unit corresponding to the type of fluid ejected from the nozzle;
a judging unit for determining whether or not the received light amount is within an appropriate range recorded in the appropriate range recording unit for the type of fluid selected by controlling the first valve and the second valve;
and a notification unit for notifying a judgment result of the determination unit when the light-receiving amount is out of an appropriate range.

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