JP2006051596A - Grinding wheel tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a grinding wheel tool allowing confirmation of the characteristic of a grinding wheel such as a manufacturing condition after used, and recording of a use history of the grinding wheel. <P>SOLUTION: This tool imparts prescribed machining to a workpiece. In the tool, a radio IC tag 3 from/to which information can be read and written by non-contact is embedded. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a grindstone tool that includes a grindstone such as a resinoid grindstone that is formed by kneading abrasive grains into a bond material, molded into a predetermined shape, and fired, and performs predetermined processing on a workpiece.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially disc-shaped semiconductor wafer, and circuits such as ICs, LSIs, etc. are partitioned in these partitioned regions. Form. The semiconductor wafer thus formed is ground to a predetermined thickness by grinding the back surface thereof with a grinding device, and then cut along the planned division lines and divided into individual semiconductor chips.

A grinding wheel is used for grinding the back surface of the semiconductor wafer described above, and a grinding wheel blade is also used for cutting along the planned dividing line of the semiconductor wafer. In these processes, grindstones having respective characteristics are used depending on the purpose of the process. As a grindstone used for a grindstone or a grindstone blade, a resinoid grindstone obtained by kneading and molding abrasive grains into a bond material depending on the material of a workpiece is used. (For example, see Patent Document 1 and Patent Document 2.)
JP 2004-181575 A JP-A-8-224730

  Thus, as described above, the resinoid grindstone is manufactured by kneading the abrasive grains into the bond material, molding it into a predetermined shape and firing it, so that the furnace temperature in the manufacturing process, the grindstone fired in the firing furnace The quality may vary depending on the manufacturing conditions such as the number, position in the furnace, and weather. However, the quality of the grindstone cannot be confirmed when it is manufactured. Therefore, it is difficult to verify the cause of the resinoid grindstone when it is broken during use or the work piece is damaged.

  Also check the characteristics of the electroformed wheel blade mounted on the base and the grinding wheel installed on the base, such as the thickness of the cutting edge, the amount of blade tip, the size and concentration of abrasive grains, etc. It is difficult to verify causes such as breakage during use and damage to the workpiece.

  In addition, users who use grindstones such as resinoid grindstones, electroformed grindstone blades, etc., use the grindstone, the type of workpiece processed, the amount of grindstone wear, the remaining amount of grindstone, the life of the grindstone, the date and time when the grindstone was used , Equipment that uses a grindstone, the name of the operator who uses the grindstone, information on the situation of trouble, etc. are recorded for each grindstone, but it is bothersome to record the history of use of these grindstones and difficult to record reliably There is a problem that.

  The present invention has been made in view of the above facts, and its main technical problem is to provide a grindstone tool capable of confirming the characteristics of a grindstone such as manufacturing conditions after use or recording the use history of the grindstone. There is.

In order to solve the main technical problem, according to the present invention, a grindstone tool for performing predetermined processing on a workpiece,
A wireless IC tag that can read and write information without contact is embedded in the grindstone tool.
A grindstone tool is provided.

The grindstone tool includes a resinoid grindstone in which abrasive grains are kneaded with a bond material, molded and fired, and the wireless IC tag is embedded in the resinoid grindstone. The wireless IC tag is embedded in a non-use area of the grindstone.
The grindstone tool includes a base and a grindstone mounted on the base, and the wireless IC tag is embedded in the base.
The characteristics of the grindstone are recorded on the wireless IC tag. In addition, the use history of the grindstone is recorded on the wireless IC tag.

  In the grindstone tool according to the present invention, since a wireless IC tag capable of reading and writing information without contact is embedded, the work was performed by storing the characteristics of the grindstone and the use history of the grindstone in the wireless IC tag. Even later, the characteristics of the grindstone stored in the wireless IC tag and the usage history of the grindstone can be read out. Therefore, if the grindstone tool breaks during use or damages the work piece, the cause is verified by reading and checking the grindstone characteristics and the grindstone usage history stored in the wireless IC tag. It becomes possible.

  Hereinafter, a preferred embodiment of a grindstone tool configured according to the present invention will be described in more detail with reference to the accompanying drawings.

FIG. 1 shows a grinding wheel provided with a grinding wheel as a first embodiment of a grinding wheel tool constructed according to the present invention.
The grinding wheel 2 shown in FIG. 1 includes an annular grindstone base 21 and a plurality of segments made up of a grinding grindstone 22 mounted on the lower surface of the grindstone base 21. The grinding wheel 22 is made of a resinoid grindstone in which abrasive grains are kneaded with a resin bond material, molded into a rectangular parallelepiped shape and fired. As shown in FIG. 2, the grinding wheel 22 made of a resinoid wheel has a recess 221 on the upper end surface which is a non-use area, and the wireless IC tag 3 is embedded in the recess 221. The wireless IC tag 3 includes a memory that can read and write information in a non-contact manner using radio waves or electromagnetic waves.

  The wireless IC tag 3 embedded in the recess 221 of the grinding wheel 22 in this way stores the characteristics of the resinoid wheel when embedded in the grinding wheel 22. That is, as shown in FIG. 3, a radio wave signal related to the characteristics of the resinoid wheel is transmitted from the controller 4 to the wireless IC tag 3 embedded in the grinding wheel 22 through the antenna 5 serving as a read / write head. The characteristics of the resinoid grindstone can be stored. The characteristics of the resinoid grindstone include production history (temperature of the firing furnace, firing time, number of resinoid grindstones fired in the firing furnace, position in the furnace, weather, etc.), grindstone components (type of abrasive grains, degree of concentration, Bond type, etc.), lot number, application, shape / dimension, outer diameter of the grindstone base 21, the number of grindstones mounted on the grindstone base 21, and the like.

  Since the characteristics of the resinoid wheel are stored in the wireless IC tag 3 embedded in the grinding wheel 22 as described above, even after performing the grinding operation using the grinding wheel 2 to which the grinding wheel 22 is attached, The characteristics of the resinoid grindstone stored in the wireless IC tag 3 can be read out. Therefore, when the grinding wheel 22 is broken during use or the work piece is damaged, the cause can be verified by reading and checking the characteristics of the resinoid wheel stored in the wireless IC tag 3. It becomes possible.

  In addition, the wireless IC tag 3 embedded in the grinding wheel 22 is supplied with the use time of the grinding wheel, the type of workpiece processed, the wear amount of the grinding wheel, the remaining amount of the grinding wheel, the grinding wheel from the user or the control means of the grinding device. The usage history of the grindstone such as the life of the grindstone, the date and time when the grindstone was used, the device using the grindstone, the name of the operator who used the grindstone, and the trouble situation can be recorded. Thus, by recording the usage history of the grinding wheel 22, if the grinding wheel 22 breaks during use or damages the workpiece, the usage history of the grinding wheel 22 stored in the wireless IC tag is recorded. By reading and confirming, it is possible to verify the cause.

Next, a second embodiment of a grindstone tool configured according to the present invention will be described with reference to FIG.
In the embodiment shown in FIG. 4, the present invention is applied to a grindstone blade 61 as a cutting tool provided in a spindle unit 6 of a cutting apparatus that cuts a semiconductor wafer or the like along a predetermined division line. The grindstone blade 61 is made of a resinoid grindstone in which abrasive grains are kneaded into a resin bond material, molded into a ring shape and fired. An annular grindstone blade 61 made of a resinoid grindstone is provided with a hole 611 in an inner peripheral portion which is a non-use area, and the wireless IC tag 3 is embedded in the hole 611. As described above, the wireless IC tag 3 includes a memory that can be read and rewritten without contact using radio waves or electromagnetic waves. As described above, the wireless IC tag 3 embedded in the grindstone blade 61 has characteristics of the resinoid grindstone as described above when it is embedded in the grindstone blade 61 or when it is mounted on a spindle unit of a cutting apparatus described later. The manufacturing history, grinding wheel component, lot number, shape dimensions, etc. are stored.

  As described above, the annular grindstone blade 61 made of the resinoid grindstone in which the wireless IC tag 3 is embedded is mounted on the mounter 63 mounted on the rotary spindle 62 constituting the spindle unit 6 of the cutting apparatus. That is, after the annular grindstone blade 61 is fitted to the cylindrical tool mounting portion 613 of the mounter 63 and the clamping member 64 is fitted, the fastening ring 65 is screwed to the male screw portion formed on the mounter 63. Thus, the cutting blade 61 is mounted on the mounter 63.

  As described above, the characteristics of the resinoid grindstone are stored in the wireless IC tag 3 embedded in the grindstone blade 61. Therefore, after the grindstone blade 61 is mounted on the spindle unit 6 of the cutting apparatus and the cutting operation is performed. Also, the characteristics of the resinoid grindstone stored in the wireless IC tag 3 can be read out. Therefore, when the grindstone blade 61 breaks during use or damages the workpiece, the cause can be verified by reading and checking the characteristics of the resinoid grindstone stored in the wireless IC tag 3. It becomes possible.

  In addition, by recording the above-described usage history of the grindstone blade 61 in the wireless IC tag 3 embedded in the grindstone blade 61, when the grindstone blade 61 is damaged during use or the work piece is damaged, the wireless IC tag 3 is wirelessly connected. By reading and confirming the usage history stored in the IC tag, the cause can be verified.

Next, a third embodiment of a grindstone tool configured according to the present invention will be described with reference to FIG. Since the grinding wheel 2 in the embodiment shown in FIG. 5 has substantially the same configuration except that the mounting position of the wireless IC tag 3 is different from that of the grinding wheel 2 shown in FIG. 1, the grinding wheel shown in FIG. The same members as those of the wheel 2 will be described with the same reference numerals.
The grinding wheel 2 shown in FIG. 5 includes an annular grindstone base 21 and a plurality of segments made up of a grinding grindstone 22 mounted on the lower surface of the grindstone base 21 as in the embodiment shown in FIG. ing. The grinding wheel 22 is made of a resinoid grindstone in which abrasive grains are kneaded with a resin bond material, molded into a rectangular parallelepiped shape and fired. In the grinding wheel 2 in the embodiment shown in FIG. 5, a concave portion 211 is formed in the outer peripheral portion of an annular grindstone base 21, and the wireless IC tag 3 is embedded in the concave portion 211 and molded with a synthetic resin or the like. The wireless IC tag 3 stores the above-described characteristics of the resinoid grindstone and can record the above-described usage history. Since the rotation balance of the grinding wheel 2 slightly changes when the wireless IC tag 3 is embedded in the annular grindstone base 21, the wireless IC tag 3 is buried in the annular grindstone base 21 and is 180 degrees offset from the position. It is desirable to arrange the balance member 212 at the position where it is positioned.

Next, a fourth embodiment of a grindstone tool configured according to the present invention will be described with reference to FIG.
In FIG. 6, abrasive grains are fixed to the side surface of a disk-shaped base 71 made of aluminum by nickel plating, and the outer peripheral portion of the base 71 is removed by etching to protrude a grindstone blade 72 serving as a cutting edge. An electroformed grinding wheel 7 is shown. A concave portion 711 is formed at a predetermined portion of the base 71 in the electroformed grindstone blade 7 configured as described above, and the wireless IC tag 3 is embedded in the concave portion 711 and molded with synthetic resin or the like. The wireless IC tag 3 stores characteristics such as the thickness of the grindstone blade 72, the amount of cutting edge, the size and concentration of abrasive grains, and the use history described above. Since the rotational balance of the electroformed grinding wheel 7 is slightly changed by embedding the wireless IC tag 3 in the disk-shaped base 71, the wireless IC tag 3 is embedded in the base 71 and displaced 180 degrees from the position. It is desirable to arrange the balance member 712 at the position.

1 is a perspective view of a grinding wheel provided with a grinding wheel as a first embodiment of a grinding wheel tool constructed according to the present invention. FIG. The perspective view of the grinding wheel which consists of a resinoid grindstone which comprises the grinding wheel shown in FIG. The schematic block diagram of the system which memorize | stores information in the radio | wireless IC tag embed | buried under the grinding wheel which consists of a resinoid grindstone which comprises the grinding wheel shown in FIG. The disassembled perspective view of the spindle unit of the cutting apparatus which mounts | wears with the cutting blade which consists of a resinoid grindstone as 2nd embodiment of the grindstone tool comprised according to this invention. The perspective view of the grinding wheel as 3rd embodiment of the grindstone tool comprised according to this invention. The perspective view of the electroformed grindstone blade as 4th embodiment of the grindstone tool comprised according to this invention.

Explanation of symbols

2: Grinding wheel 21: Annular grindstone base 22: Grinding grindstone 221: Concavity 3: Wireless IC tag 4: Controller 5: Antenna 6: Spindle unit of cutting device 61: Cutting blade 611: Hole 62: Rotating spindle 63: Mounter 63
64: Clamping member 65: Fastening ring 7: Electroformed grinding wheel blade 71: Disc-shaped base 711: Recess 72: Grinding wheel blade

Claims (6)

A grindstone tool for performing predetermined processing on a workpiece,
A wireless IC tag that can read and write information without contact is embedded in the grindstone tool.
A whetstone tool characterized by that.   The grindstone tool according to claim 1, wherein the grindstone tool includes a resinoid grindstone formed by kneading abrasive grains into a bond material, fired, and the wireless IC tag is embedded in the resinoid grindstone.   The grindstone tool according to claim 2, wherein the wireless IC tag is embedded in a non-use area of the grindstone.   The grindstone tool according to claim 1, wherein the grindstone tool includes a base and a grindstone mounted on the base, and the wireless IC tag is embedded in the base.   The grindstone tool according to any one of claims 1 to 4, wherein characteristics of the grindstone are recorded on the wireless IC tag.   The grindstone tool according to any one of claims 1 to 4, wherein a use history of the grindstone is recorded on the wireless IC tag.

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