JP2019198933A - Grinding wheel - Google Patents

Abstract

To provide a grinding wheel having such a structure that even if the grinding wheel is rotated, an RFID tag does not come off a grinding base to be scattered, and radio signal exchange is possible between the RFID tag provided on the grinding base and an information reading/writing device.SOLUTION: A grinding wheel has: an annular base of which a first face side is mounted to a spindle of a grinder; and a grindstone which is annularly arranged on a second face on a side opposite to the first face of the annular base. The wheel has: a recess having an opening at a part of an outer peripheral side face of the annular base; an RFID tag which is provided in the recess, and in which information concerning the grinding wheel is stored; and a non-conductive material which encapsulates the RFID tag in the recess. The recess has an anchor part which is provided at least any one of a side face and a bottom face of the recess, and prevents removal of the non-conductive material from the annular base.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a grinding wheel having an RFID tag in a recess of a grinding base.

  A wafer on which devices such as IC (integrated circuit) and LSI (large-scale integrated circuit) are formed on the front side is ground on the back side of the wafer by a grinding device before being divided into individual devices by the dividing device. Processed to a thickness of.

  The grinding apparatus usually includes a chuck table that sucks and holds a workpiece such as a wafer, a grinding wheel that is disposed above the chuck table and has a grinding wheel fixed to the lower surface of the grinding base, and a spindle that rotates the grinding wheel. With.

  As such a grinding apparatus, there is known a grinding apparatus having a pair of spindles to which a rough grinding wheel for roughly grinding a workpiece and a finish grinding wheel for finish grinding a workpiece are respectively mounted. (For example, refer to Patent Document 1).

  In the grinding apparatus, since the operator manually attaches the grinding wheel to the tip of each spindle, the grinding wheel may be erroneously attached. For example, erroneous mounting such as mounting a grinding wheel for finish grinding at the tip of the spindle for rough grinding and mounting a grinding wheel for rough grinding at the tip of the spindle for finish grinding may occur.

  If the grinding wheel is erroneously mounted, it becomes a problem because rough grinding and finish grinding cannot be performed in the planned order. Therefore, in order to prevent this erroneous mounting, it is known to attach an IC tag or the like having information on the type of each grinding wheel to the outer peripheral side surface of the grinding base of the grinding wheel (see, for example, Patent Document 2).

  However, a problem also arises when an operator erroneously inputs grinding wheel information to the grinding device. For example, if the grinding wheel characteristics and usage history of the grinding wheel are entered incorrectly, the cause can be verified afterwards if the grinding wheel is damaged or the workpiece is damaged by grinding. It becomes difficult.

  Therefore, in order to prevent the grinding wheel information from being erroneously input to the grinding device, a wireless IC tag (sometimes called an RFID tag) capable of recording grinding wheel information is provided in the grinding base of the grinding wheel. Is known (see, for example, Patent Document 3).

JP 2000-288888 A JP2015-226945A JP 2006-51596 A

  However, when a wireless IC tag or the like is attached to the outer peripheral side surface of the grinding base, if the grinding wheel is rotated, the wireless IC tag may be detached from the grinding base due to centrifugal force and scattered. In addition, the grinding base is usually formed of a metal material. When the wireless IC tag is provided in the grinding base in a state of being covered with the outer peripheral side surface of the metal material, the information reading / writing device is mounted on the grinding base. Even if it is close to the outer peripheral side surface of the table, there is a problem that the radio signal with the wireless IC tag is blocked by the metal material of the grinding base and signal communication cannot be performed.

  The present invention has been made in view of such a problem, and even when the grinding wheel is rotated, the RFID tag does not come off from the grinding base and scatter, and the RFID tag provided on the grinding base and the information read / write An object of the present invention is to provide a grinding wheel having a structure capable of exchanging radio signals with a writing device.

  According to one aspect of the present invention, the first surface side is an annular base mounted on the spindle of the grinding device, and the grinding is arranged in an annular shape on the second surface of the annular base opposite to the first surface. A grinding wheel having a grinding wheel, a recess having an opening in a part of an outer peripheral side surface of the annular base, and an RFID tag provided in the recess and storing information of the grinding wheel; A non-conductive material that seals the RFID tag in the recess, and the recess is provided on at least one of a side surface and a bottom surface of the recess, and the non-conductive material is peeled from the annular base. There is provided a grinding wheel having an anchor portion for preventing the above.

  In one embodiment of the present invention, the anchor portion is provided at least on a part of the side surface of the recess, and the side surface of the recess extends from the opening of the recess to the bottom surface of the recess. A slope inclined in a direction toward the outside of the concave portion as it goes is included.

  According to the grinding wheel of the present invention, the concave portion of the annular base has the anchor portion that prevents the non-conductive material from peeling from the annular base, so that the RFID tag can be prevented from coming off from the grinding base and scattering. . Also, the RFID tag provided in the recess of the annular base is sealed with a non-conductive material, and is not covered with a metal material on the outer peripheral side surface of the annular base. Wireless signals can be exchanged with the device.

It is a perspective view of the grinding device concerning the present invention. FIG. 2 (A) is a side view of the wheel base according to the first embodiment of the present invention, and FIG. 2 (B) is a cross-sectional view taken along line AA of FIG. 2 (A). 3A is an enlarged view of a concave portion on the outer peripheral side surface of the wheel base, FIG. 3B is a cross-sectional view taken along line BB in FIG. 3A, and FIG. It is CC sectional drawing of 3 (A). In FIG. 3B, a non-conductive material and an RFID tag are arranged. FIG. 5 (A) is an enlarged view of a recess on the outer peripheral side surface of the wheel base according to the second embodiment of the present invention, and FIG. 5 (B) is a sectional view taken along the line DD in FIG. 5 (A). . It is sectional drawing of the recessed part which concerns on 3rd Embodiment of this invention. FIG. 7A is an enlarged view of a concave portion on the outer peripheral side surface of the wheel base according to the fourth embodiment of the present invention, and FIG. 7B is a cross-sectional view taken along line EE in FIG. . FIG. 8A is a diagram illustrating a first modification of the arrangement of the anchor portion, and FIG. 8B is a diagram illustrating a second modification of the arrangement of the anchor portion. FIG. 9A is an enlarged view of a concave portion on the outer peripheral side surface of the wheel base according to the fifth embodiment of the present invention, and FIG. 9B is a cross-sectional view taken along line FF in FIG. 9A. FIG. 9C is a GG cross-sectional view of FIG.

  FIG. 1 is a perspective view of a grinding apparatus 12 to which a grinding wheel 20 according to the present invention is mounted. The grinding device 12 includes a chuck table (holding means) 14 for sucking and holding the disk-shaped workpiece 11. The chuck table 14 is connected to a rotation mechanism (not shown) such as a motor, and rotates around a rotation shaft 14c substantially parallel to the Z-axis direction.

  Note that the X-axis direction, the Y-axis direction, and the Z-axis direction used in the description of the present specification are perpendicular to each other. It should be noted that the top, bottom, bottom, and the like are merely convenient expressions for specifying the position of the component, and do not necessarily indicate a direction parallel to the direction of gravity.

  The upper surface of the chuck table 14 is a holding surface that sucks and holds the surface side of the workpiece 11. A negative pressure of a suction source acts on the holding surface through a flow path formed inside the chuck table 14, and a suction force for sucking the surface side of the workpiece 11 is generated. The workpiece 11 is typically a semiconductor wafer, a resin substrate, a ceramic substrate, or the like, but may be another plate-like substrate or the like.

  The surface side of the workpiece 11 is fixed to the protective member 21 via an adhesive or the like, for example. The workpiece 11 of the present embodiment is sucked and held on the holding surface via the protective member 21. The protection member 21 is formed in a disk shape that is substantially the same shape as the workpiece 11. As this protective member 21, for example, a resin substrate, an adhesive tape, or the like can be used.

  A grinding mechanism is disposed above the chuck table 14 so as to face the back surface 11 b side of the workpiece 11 held by the chuck table 14. The grinding mechanism includes a spindle 16 that rotates around a rotation axis 20c that is substantially parallel to the Z-axis direction. The spindle 16 is lifted and lowered by a lifting mechanism (not shown). A disc-shaped wheel mount 18 is fixed to the lower end side of the spindle 16.

  A grinding wheel 20 having substantially the same diameter as the wheel mount 18 is mounted on the lower surface of the wheel mount 18. The grinding wheel 20 includes an annular wheel base (annular base) 22 formed of a metal material such as aluminum or stainless steel.

  The wheel base 22 is mounted on the spindle 16 by fixing the upper surface (first surface) 22 a side of the wheel base 22 to the wheel mount 18. A plurality of grinding wheels (grinding stone chips) 24 are provided on a lower surface (second surface) 22 c opposite to the upper surface 22 a of the wheel base 22.

  The upper surface 22a of the wheel base 22 is also called a fixed end surface, and the lower surface 22c is also called a free end surface. It should be noted that since the grinding wheel 24 is provided on the free end surface as described above, the freedom of the free end surface does not mean that nothing is always provided on the end surface.

  Each grinding wheel 24 provided on the lower surface 22c has a substantially rectangular parallelepiped shape, and is arranged in an annular shape in such a manner that a gap is provided between adjacent grinding wheels 24 on the entire circumference of the annular lower surface 22c. Yes.

  The grinding wheel 24 is formed, for example, by mixing abrasive grains such as diamond and CBN (Cubic Boron Nitride) in a binder such as metal, ceramics, and resin. However, there is no limitation on the binder and abrasive grains, and they can be appropriately selected according to the specifications of the grinding wheel 24.

  When the workpiece 11 is ground by the grinding device 12, the spindle 16 is lowered while rotating the chuck table 14 and the spindle 16 in respective predetermined directions, and the grinding wheel 24 is placed on the back surface 11b side of the workpiece 11. Press. Thereby, the workpiece 11 can be ground.

  An outer peripheral side surface 22b and an inner peripheral side surface 22d are provided so as to connect the upper surface 22a and the lower surface 22c of the wheel base 22. Moreover, the recessed part 30 is provided in a part of outer peripheral side surface 22b. The recess 30 is formed, for example, by removing a part of the outer peripheral side surface 22b of the annular member serving as the wheel base 22 to a predetermined depth, and the rotating shaft 20c (same as the spindle 16) of the grinding wheel 20 from the outer peripheral side surface 22b. It is a space that is recessed toward the rotation axis.

  An RFID tag 40 (shown in FIG. 4) in which information on the grinding wheel 20 is stored is provided in the recess 30. Further, a non-conductive material 38 that seals the RFID tag 40 in the recess 30 is provided in the recess 30. Therefore, the nonconductive material 38 is exposed on the outer peripheral side surface 22 b of the recess 30.

  Next, the outline of the wheel base 22 according to the first embodiment of the present invention will be described with reference to FIGS. 2 (A) and 2 (B), and FIGS. 3 (A), 3 (B) and FIG. The details of the recess 30 in the wheel base 22 will be described using 3 (C).

  FIG. 2 (A) is a side view of the wheel base 22 according to the first embodiment of the present invention, and FIG. 2 (B) is a cross-sectional view taken along the line AA in FIG. 2 (A). 3A is an enlarged view of the recess 30-1 on the outer peripheral side surface 22b of the wheel base 22, and FIG. 3B is a cross-sectional view taken along the line BB in FIG. (C) is CC sectional drawing of FIG. 3 (A).

  2A, 2B, 3A, 3B, and 3C, the non-conductive material 38 and the RFID tag 40 provided in the recess 30 are shown. Omitted. Further, it should be noted that the grinding wheel 24 provided on the lower surface 22c of the wheel base 22 is omitted in the drawings other than FIG.

  The concave portion 30 provided on the outer peripheral side surface 22b of the wheel base 22 is a substantially columnar space whose bottom surface 30b has an oval track shape. The inside of the recess 30 is a main part 34 of a space having an oval track-shaped opening 34 c on the outer peripheral side surface 22 b of the wheel base 22. Note that the opening 34c of the main portion 34 is also an opening of the recess 30 because the recess 30 is exposed at the outer peripheral side surface 22b.

  The main portion 34 is a columnar space having an upper and lower surface of an oval track shape, and the side surface 34 a of the columnar space substantially coincides with the side surface 30 a of the recess 30. However, an anchor portion 32 that protrudes from the side surface 34 a of the main portion 34 to the outside of the concave portion 30 is provided at a portion where the side surface 34 a of the main portion 34 and the side surface 30 a of the concave portion 30 do not coincide with each other.

  In the present embodiment, a pair of anchor portions 32 per recess 30 is provided so as to sandwich the main portion 34 in the circumferential direction of the outer peripheral side surface 22 b of the wheel base 22. Each of the pair of anchor portions 32 is a space formed by a part of an inclined columnar shape.

  That is, the central axis 32 c of the substantially cylindrical anchor portion 32 is inclined inward of the recess 30. More specifically, the central axis 32c of the pair of anchor portions 32 intersects at one point with a central straight line 30e that is substantially parallel to a straight line that passes through the center 30c of the opening 34c and is orthogonal to the outer peripheral side surface 22b (FIG. 2 ( 2B, the detailed cross-sectional structure in the recess 30 is omitted in view of easy viewing of the drawing).

  The center axis 32c of the anchor portion 32 intersects the above-described center straight line 30e, and the center axis 32c of the anchor portion 32 and the center straight line 30e form a predetermined acute angle having an angle greater than 0 degrees and less than 90 degrees. In the present embodiment, the acute angle is 25 degrees, but is not limited to this angle.

  In addition, the anchor portion 32 of the present embodiment is more precisely a space obtained by removing an overlapping portion between the inclined cylindrical shape and the oval track-shaped columnar main portion 34 from the cylindrical shape. Therefore, the anchor portion 32 has a side anchor portion 32A that is adjacent to the side surface 34a of the main portion 34 and protrudes to the outside of the recess 30 from the side surface 34a.

  The side anchor portion 32A is provided on the side surface 30a of the concave portion 30, and a part 32s of the inclined surface of the side anchor portion 32A extends from the opening portion of the concave portion 30 (ie, the opening portion 34c of the main portion 34) to the bottom surface of the concave portion 30. As it goes to 30b, it inclines in the direction which goes to the outer side of the recessed part 30. As shown in FIG. The slope is a convex curved surface that is a part of a cylindrical side surface, and a part 32s of the slope is shown by an oblique straight line in FIG.

A part 32 s of the inclined surface passes through the center 30 c of the opening of the recess 30, and is parallel to the upper surface 22 a and the lower surface 22 c of the wheel base 22, in the BB cross section (see FIG. 3B). The upper end 30d is continuously provided between the upper end 30d and the outer end 32d protruding outward from the upper end 30d at a position deeper than the upper end 30d. Therefore, the distance _{L A} between the center straight line 30e to the upper end portion 30d is smaller than the distance _{L B} between the center straight line 30e to the outer end portion 32d.

  Further, the anchor portion 32 includes a bottom surface anchor portion 32 </ b> B that protrudes in the depth direction of the recess 30 from the bottom surface 34 b of the main portion 34 and is provided on the bottom surface 30 b of the recess 30. As shown in FIG. 3B, the bottom anchor portion 32B has the same depth position as the bottom end portion 32e provided at the deepest position in the anchor portion 32, the bottom surface 30b of the concave portion 30, and the bottom surface 34b of the main portion 34. And an inner end portion 32 f located on the innermost side of the recess 30 in the anchor portion 32.

  However, as described above, the anchor portion 32 is not provided so as to surround the entire side surface 34a of the main portion 34, and is provided so as to protrude to the outside of the recess 30 rather than a part of the side surface 34a. . Therefore, the anchor portion 32 does not exist in a CC section (see FIG. 3C) different from the BB section.

  On the bottom surface 30 b of the recess 30, a tag accommodating portion 36 that is a cylindrical space is further provided. The tag accommodating portion 36 is located inside the recessed portion 30 with respect to the inner end portion 32 f of the anchor portion 32. The tag housing portion 36 has a circular opening 36 c at the same depth as the bottom surface 34 b of the main portion 34, and the bottom surface is located at a position protruding from the bottom surface 34 b of the main portion 34 toward the rotating shaft 20 c of the grinding wheel 20. 36b.

  The bottom surface 36 b of the tag accommodating portion 36 is also a part of the bottom surface 30 b of the recess 30. In addition, although the shape of the tag accommodating part 36 of this embodiment is a cylindrical shape, the shape of the tag accommodating part 36 is the shape which can accommodate the RFID tag 40 of the shape whose height and width are several mm and height is about 1 mm, for example. There is no limitation to the columnar shape.

  In the present embodiment, the center of the opening portion 36c of the tag accommodating portion 36 is also coincident with the center 30c of the opening portion (that is, the opening portion 34c) of the concave portion 30, and both are on a central straight line 30e parallel to the X-axis direction. Yes (see FIGS. 3A and 3B). However, the center of the opening 36 c of the tag accommodating portion 36 may be shifted from the center 30 c of the recess 30.

  In this embodiment, it is located at an equal distance from the pair of anchor portions 32, and the center position in the vertical and horizontal directions of the opening of the recess 30 is defined as the center 30c of the opening of the recess 30. It is not limited to this, You may change suitably according to the shape in the main part 34, the tag accommodating part 36, and the anchor part 32, arrangement | positioning, etc.

  As shown in FIG. 2B, the wheel base 22 of the present embodiment has four recesses 30, and each recess 30 is in a line-symmetrical position with respect to the rotation axis 20c of the wheel base 22. Is provided. The depth direction of each recess 30 is substantially parallel to the X-axis direction or the Y-axis direction, and the depth direction of the recess 30-1 and the recess 30-3 facing each other across the rotation shaft 20c is approximately parallel to the X-axis direction. The depth direction of the concave portion 30-2 and the concave portion 30-4 facing each other with the rotation shaft 20c interposed therebetween is substantially parallel to the Y-axis direction.

  In the present embodiment, the non-conductive material 38 and the RFID tag 40 are provided in one of the four recesses 30 in the recess 30-1, and the remaining three recesses 30-2, 30-3, and 30-4 are not. Neither the conductive material 38 nor the RFID tag 40 is provided. Therefore, the interior of the recess 30-1 is heavier than the interiors of the recesses 30-2, 30-3, and 30-4.

  However, by providing a recess from which a part of the annular member serving as the wheel base 22 is removed in the vicinity of the recess 30-1 on the upper surface 22a or in the vicinity of the recess 30-1 where the upper surface 22a and the inner peripheral side surface 22d intersect. The weight of the wheel base 22 near the recess 30-1 is reduced. Thereby, the balance of the wheel base 22 with respect to the rotating shaft 20c can be adjusted, and rotation of the grinding wheel 20 can be stabilized.

  FIG. 4 is a diagram in which the non-conductive material 38 and the RFID tag 40 are arranged in FIG. Note that the non-conductive material 38 of the present embodiment is an ultraviolet curable resin. However, the non-conductive material 38 may be a photocurable resin that is cured by irradiation with visible light other than ultraviolet rays, or may be a thermosetting resin that is cured by heat. Moreover, the natural curable resin which hardens | cures by mixing a main ingredient and a hardening | curing agent may be sufficient.

  The RFID tag 40 is provided in the tag storage unit 36. The RFID tag 40 includes an antenna and an IC, and is a tag that allows an information reading / writing device to read information and write information by wireless communication. The RFID tag 40 is also called an IC tag, an electronic tag, a wireless tag, or a wireless IC tag. The RFID tag 40 may be a passive type or an active type.

  The information of the grinding wheel 20 stored in the RFID tag 40 includes the dimensions of the grinding wheel 24 and the wheel base 22, the grinding wheel component of the grinding wheel 24, the usage history of the grinding wheel 24, and the conditions for dressing the grinding wheel 24. There are restrictions on the use of the grinding wheel 20, the rotational speed of the grinding wheel 20, the product lot number, the presence or absence of holes for supplying grinding water, the availability of auto setup, and the like.

  The sealing procedure for sealing the RFID tag 40 in the recess 30-1 will be briefly described. First, the RFID tag 40 is arranged on the bottom 36 b of the tag housing portion 36. Next, for example, in a state where the oval track-shaped opening of the recess 30-1 is arranged upward so that the depth direction of the recess 30-1 is substantially parallel to the direction of gravity, the recess 30-1 extends from the opening. An ultraviolet curable resin is injected into the inside. However, the depth direction and the gravity direction of the recess 30-1 may not be completely parallel as long as the UV curable resin can be filled in the recess 30-1 without a gap.

  Since the ultraviolet curable resin before curing has fluidity, the ultraviolet curable resin spreads over the entire recess 30-1 including the anchor portion 32. In FIG. 4, the RFID tag 40 of the present embodiment is disposed so as to contact the bottom surface 36 b and the side surface of the tag housing portion 36, but in the depth direction or the front side of FIG. There is a gap between the side surface and the RFID tag 40, and the ultraviolet curable resin can also fill this gap.

  The ultraviolet curable resin is formed from the bottom surface 30b side of the concave portion 30-1 where the bottom surface anchor portion 32B and the tag housing portion 36 are located. 34 gradually fills toward the opening 34c) side.

  In the present embodiment, the distance from the center straight line 30e of the recess 30-1 continuously changes from the inner end 32f to the bottom end 32e of the bottom anchor portion 32B. Further, the center straight line 30e of the recess 30-1 extends from the bottom end portion 32e of the bottom surface anchor portion 32B to the outer end portion 32d of the side surface anchor portion 32A and from the outer end portion 32d to the upper end portion 30d of the side surface anchor portion 32A. The distance from is continuously changing.

  Therefore, first, the bottom anchor portion 32B and the tag accommodating portion 36 are filled with resin, and then the side anchor portion 32A and the main portion 34 are also gradually filled with resin, so that a space not filled with resin (that is, It can suppress or prevent that a void (void) or a bubble) remains in the anchor part 32. FIG. The adhesive force between the non-conductive material 38 and the wheel base 22 can be improved by suppressing or preventing the void or void from remaining.

  After the injection of the ultraviolet curable resin, the nonconductive material 38 is hardened by irradiating the ultraviolet rays toward the opening of the recess 30-1 to cure the resin. By using an ultraviolet curable resin, the resin can be cured by ultraviolet irradiation for several seconds. Thereby, the non-conductive material 38 and the RFID tag 40 are fixed in the recess 30-1 in the wheel base 22.

  Thus, in the recess 30-1, the RFID tag 40 is sealed with the non-conductive material 38 on the outer peripheral side surface 22b of the wheel base 22, and is covered with a metal material on the outer peripheral side surface 22b of the wheel base 22. Therefore, radio signals can be exchanged between the RFID tag 40 and the information reading / writing device without the electromagnetic wave being shielded by the metal material.

  Moreover, a balance member is arrange | positioned in the bottom part 36b of the tag accommodating part 36 of the recessed part 30-2, resin is inject | poured in the recessed part 30-2, and an ultraviolet-ray is irradiated after that. The same procedure is performed also in the recesses 30-3 and 30-4.

  As described above, the concave portion 30 has the anchor portion 32 that protrudes outside the opening portion of the concave portion 30 at a predetermined depth position of the concave portion 30, so that the non-conductive material 38 is peeled off from the wheel base 22. Can be prevented. Therefore, it is possible to prevent the RFID tag 40 or the balance member from separating from the wheel base 22 and scattering.

  Note that the RFID tag 40 of the present embodiment is fixed at least partially in contact with the bottom surface 36b and the side surface of the tag housing portion 36, so even if the non-conductive material 38 is peeled off, the RFID tag It is possible to reduce the possibility that 40 will come off and scatter. That is, by integrally providing the anchor portion 32, the nonconductive material 38, and the tag accommodating portion 36, the RFID tag 40 can be more effectively prevented from being scattered than when the tag accommodating portion 36 is not provided.

  A groove protruding in the depth direction of the recess 30 may be further provided on the bottom surface 30 b of the recess 30 positioned around the tag accommodating portion 36. For example, the grooves are provided discretely or continuously so as to surround the tag housing portion 36. Thereby, the contact area between the wheel base 22 and the non-conductive material 38 can be further increased, so that the adhesive force between the wheel base 22 and the non-conductive material 38 can be improved.

  FIG. 5A is an enlarged view of the recess 30-1 on the outer peripheral side surface 22b of the wheel base 22 according to the second embodiment of the present invention. FIG. 5B is a DD cross-sectional view of FIG. The DD cross section is a cross section that passes through the center 30c of the opening of the recess 30-1 and is parallel to the upper surface 22a and the lower surface 22c of the wheel base 22.

  The anchor part 32 of 2nd Embodiment is provided only in the side surface 30a of the recessed part 30, and is not provided in the bottom face 30b. The anchor portion 32 of the second embodiment is a meshing portion formed by a plurality of triangular prism-shaped grooves provided on the side surface 30a, and the height direction of the triangular prism-shaped grooves is the height of the wheel base 22. It is substantially parallel to the direction (that is, the direction from the upper surface 22a to the lower surface 22c).

  The plurality of grooves are arranged in the depth direction of the recess 30. That is, the anchor portion 32 has irregularities including peaks 32 a and valleys 32 b that are alternately arranged in the depth direction of the recess 30.

  In addition, the peak 32a is a convex part which comprises a meshing part, and corresponds to the side surface 34a of the main part 34 in FIG. The mountain 32a is positioned relatively close to the center straight line 30e in a direction orthogonal to the center straight line 30e passing through the center 30c of the recess 30. On the other hand, the valley 32b is a concave portion that constitutes a meshing portion, and is positioned relatively far from the central straight line 30e in a direction orthogonal to the central straight line 30e.

  As described above, in the second embodiment, a part 32s of the slope extending from the mountain 32a to the valley 32b is directed from the opening of the recess 30 (that is, the opening 34c of the main portion 34) to the bottom surface 30b of the recess 30. As a result, the slope is inclined in the direction toward the outside of the recess 30, and the slope portions 32 s are discretely arranged in the depth direction of the recess 30.

  In the second embodiment, the meshing portion is configured so that the valley 32b is not located on the outer peripheral side surface 22b of the wheel base 22, and the outer peripheral side surface 22b of the wheel base 22 is provided with a mountain 32a of the meshing portion. Is arranged. However, the outer peripheral side surface 22b is not necessarily provided with the mountain 32a, and a portion between the mountain 32a and the valley 32b may be provided.

Such a structure of the engagement portion, in the direction perpendicular to the center straight line 30e, the distance _{L A} from the upper end portion 30d of the recess 30 in the outer peripheral side surface 22b (Mountain 32a) to the center straight line 30e is farthest from the center straight line 30e It becomes smaller than the distance L _B to the valley 32b of the meshing portion. Therefore, also in the second embodiment, the same advantageous effects as those in the first embodiment can be obtained.

  In addition, although the anchor part 32 of 2nd Embodiment is a meshing part comprised by the some triangular prism-shaped groove | channel, in a modification, as for the anchor part 32, a some pyramid-shaped (quadrangular pyramid-shaped) groove | channel is a wheel. The meshing portions may be arranged in the height direction of the base 22 and the depth direction of the recess 30.

The anchor portion 32 in the modification has irregularities including peaks 32 a and valleys 32 b that are alternately arranged in the height direction of the wheel base 22 and the depth direction of the recess 30. However, also in the modification, the mountain 32a is located on the outer peripheral side surface 22b of the wheel base 22 instead of the valley 32b. Thus, the distance _{L A} above can be made smaller than the distance _{L B.}

  FIG. 6 is a cross-sectional view of the recess 30-1 according to the third embodiment of the present invention. FIG. 6 is a cross-sectional view corresponding to the BB cross-sectional view of FIG. The concave portion 30 of the third embodiment does not have the tag accommodating portion 36, and the RFID tag 40 is provided in contact with the bottom surface 30b of the concave portion 30. The third embodiment is different from the first embodiment in that respect, but is otherwise the same as the first embodiment.

  In the third embodiment, the same advantageous effects as those in the first embodiment can be obtained. However, since the tag housing portion 36 is not provided in the third embodiment, a person skilled in the art will be able to obtain a non-conductive material 38. It can be reasonably understood that the effect of preventing the peeling and scattering of the RFID tag 40 is higher in the first embodiment than in the third embodiment.

  FIG. 7 (A) is an enlarged view of the recess 30-1 on the outer peripheral side surface 22b of the wheel base 22 according to the fourth embodiment of the present invention, and FIG. 7 (B) is an E- view of FIG. 7 (A). It is E sectional drawing. The EE cross section is a cross section that passes through the center 30c of the opening of the recess 30-1 and the anchor portion 32 and is parallel to the height direction of the wheel base 22.

  As in the first embodiment, the anchor portion 32 shown in FIGS. 7A, 7B, 8A, and 8B has the center axis 32c on the center 30c side of the recess 30. Part of a tilted cylinder. In the fourth embodiment shown in FIGS. 7A and 7B, the pair of anchor portions 32 is not in the circumferential direction of the outer peripheral side surface 22b of the wheel base 22, but in the height direction of the wheel base 22. The main part 34 is provided so as to be sandwiched from the outside.

Also in the fourth embodiment, the distance L _A1 from the center straight line 30e of the recess 30 to the upper end 30d is smaller than the distance L _B1 from the center straight line 30e of the recess 30 to the outer end 32d. Also in the fourth embodiment, the same advantageous effects as in the first embodiment can be obtained.

  FIG. 8A is a diagram illustrating a first modification of the arrangement of the anchor portion 32. In FIG. 8A, a pair of anchor portions 32 are provided so as to sandwich the main portion 34 from the outside in the circumferential direction of the outer peripheral side surface 22b of the wheel base 22, and yet another pair of anchor portions 32 are The wheel base 22 is provided so as to sandwich the main part 34 from the outside in the height direction.

  FIG. 8B is a diagram illustrating a second modified example of the arrangement of the anchor portions 32. In FIG. 8B, one anchor portion 32 is provided so that the side anchor portion 32A contacts the side surface 34a of the main portion 34 parallel to the upper surface 22a of the wheel base 22, and the side anchor portion 32A is the wheel base. Two anchor portions 32 are provided so as to be in contact with the side surface 34a of the main portion 34 parallel to the lower surface 22c of 22.

  However, the one anchor portion 32 is a line with respect to a straight line (shown by a broken line in FIGS. 8A and 8B) passing through the center 30c of the recess 30 and parallel to the rotation axis 20c of the wheel base 22. The two anchor portions 32 are also provided symmetrically with respect to the straight line.

Also in the modified examples shown in FIGS. 8A and 8B, the distance L _A2 is smaller than the distance L _B2 , and the distance L _A3 is smaller than the distance L _B3 . Therefore, even in the modification shown in FIGS. 8A and 8B, the same advantageous effects as those of the first embodiment can be obtained.

  In the first to fourth embodiments described above and various modifications thereof, the shape of the opening on the outer peripheral side surface 22b of the recess 30 is an oval track shape. However, the shape of the opening is not limited to this, and the circular shape is not limited thereto. It is good. For example, among the four recesses 30 provided symmetrically with respect to the rotation axis 20c of the grinding wheel 20, the shape of the opening of the pair of facing recesses 30 is an oval track shape, and the remaining set of recesses 30 The shape of the opening may be circular.

  Moreover, in the further modification, the anchor part 32 may not be provided in the side surface 30a in the recessed part 30, but may be provided only in the bottom face 30b. That is, the anchor portion 32 may have only the bottom surface anchor portion 32B that protrudes in the depth direction of the recess 30 from the bottom surface 34b of the main portion 34.

  Even in the modified example having the anchor portion 32 only on the bottom surface 30b, the same advantageous effect as that of the first embodiment can be obtained. However, the effect of preventing the non-conductive material 38 and the RFID tag 40 from peeling / scattering is reduced by the depression. Those skilled in the art can reasonably understand that the first embodiment in which the anchor portions 32 are provided on both the side surface 30a and the bottom surface 30b of the 30 is higher than the case in which the anchor portion 32 is provided only on the bottom surface 30b.

  FIG. 9A is an enlarged view of the recess 30-1 on the outer peripheral side surface 22b of the wheel base 22 according to the fifth embodiment of the present invention, and FIG. 9B is F- in FIG. 9A. FIG. 9C is a cross-sectional view taken along the line F-G in FIG. 9A.

  9A, 9B, and 9C are provided in the recess 30-1 as in FIGS. 3A, 3B, and 3C. The nonconductive material 38 and the RFID tag 40 are omitted.

  As for the main part 34 of the recessed part 30-1 of 5th Embodiment, the bottom face 30b is not an oval track shape but circular shape. That is, the main part 34 of the fifth embodiment is a substantially cylindrical space. Although this point is different from the first embodiment, the other points are the same as those of the first embodiment, and the same advantageous effects as in the first embodiment can be obtained in this embodiment.

  In addition, you may combine this embodiment, the above-mentioned 2nd-4th embodiment, and these various modifications. In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 11 Workpiece 11b Back surface 12 Grinding device 14 Chuck table (holding means)
14c Rotating shaft 16 Spindle 18 Wheel mount 20 Grinding wheel 20c Rotating shaft 21 Protective member 22 Wheel base (annular base)
22a Upper surface (first surface)
22b outer peripheral side surface 22c lower surface (second surface)
22d Inner peripheral side surface 24 Grinding wheel (grinding wheel tip)
30, 30-1, 30-2, 30-3, 30-4 Recess 30a Side 30b Bottom 30c Center 30d Upper end 30e Center straight line 32 Anchor part 32A Side anchor part 32B Bottom anchor part 32a Mountain 32b Valley 32c Central axis 32d Outside End part 32e Bottom end part 32f Inner end part 32s Part of slope 34 Main part 34a Side face 34b Bottom face 34c Opening part 36 Tag housing part 36b Bottom face 36c Opening part 38 Non-conductive material 40 RFID tag

Claims (2)

A grinding wheel having an annular base mounted on a spindle of a grinding device on a first surface side, and a grinding wheel arranged in an annular shape on a second surface opposite to the first surface of the annular base. And
A recess having an opening in a part of the outer peripheral side surface of the annular base;
An RFID tag that is provided in the recess and stores information of the grinding wheel;
A non-conductive material that seals the RFID tag in the recess;
Have
The grinding wheel, wherein the concave portion has an anchor portion that is provided on at least one of a side surface and a bottom surface of the concave portion and prevents separation of the non-conductive material from the annular base. The anchor portion is provided on a part of the side surface of the recess;
2. The grinding wheel according to claim 1, wherein the side surface of the recess includes a slope inclined in a direction toward the outside of the recess as it goes from the opening of the recess toward the bottom surface of the recess.