JP7390571B2 - Blade diagnosis method and blade diagnosis device - Google Patents

Description

The present invention relates to a blade diagnosis method and a blade diagnosis apparatus for diagnosing a blade.

BACKGROUND ART Dicing apparatuses are known that cut (dicing) a workpiece such as a wafer using a disk-shaped blade that is rotated at high speed by a spindle. In dicing machines, it is known that the cutting depth of the blade when cutting a workpiece affects the cutting quality, and in recent years, there are some dicing machines that control the cutting height of the blade on the order of 1 μm.

In a dicing device, when the tip of the blade becomes abnormally worn, cutting quality deteriorates, and chipping on the back side in particular may be affected. Therefore, if abnormal wear conditions of the tip shape (shape of the tip) of the blade can be detected in advance, countermeasures such as issuing an error, dressing the blade, or replacing the blade can be taken. becomes possible. As a result, the wafer can be cut using a blade with a good tip shape. Therefore, it is important to accurately measure the radius (outer diameter) and tip shape of the blade and diagnose the blade based on these measurement results.

Patent Document 1 describes a method of measuring and managing the wear amount of the tip shape of a blade using an optical or contact type cutter set.

Patent Document 2 describes a process of forming a detection groove on a part of the surface of a product workpiece using a blade, a process of photographing the detection groove, and a process of detecting the tip shape of the blade based on the photographed image of the detection groove. A method for diagnosing a blade is described, which includes the steps of: comparing the detected tip shape of the blade with the tip shape of a new blade to determine whether or not the blade needs to be replaced.

Patent Document 3 describes a process of chop-cutting the surface of a product workpiece with a blade, a process of photographing a groove formed on the surface of the product workpiece by chop-cutting, and a process of measuring the dimensions of the groove based on the photographed image of the groove. A method for diagnosing a blade is described, which includes the steps of: calculating the tip shape of the blade based on the measurement results of the groove dimensions and the like. In the process of calculating the blade tip shape, the blade tip shape is calculated based on the measured groove dimensions, the known radius of the blade, and the known surface height of the product workpiece (required to determine the depth of cut). Perform calculations.

Japanese Patent Application Publication No. 2003-234309 Japanese Patent Application Publication No. 2010-240776 Japanese Patent Application Publication No. 2017-164843

By the way, in the blade diagnosis method using an optical or contact type cutter set described in Patent Document 1, it is not possible to measure the tip shape (cross-sectional shape) and wear condition of the blade, and to measure the radius of the blade. .

In the blade diagnosis method described in Patent Document 2, the tip shape of the blade is detected based on the photographed image of the detection groove, but on the product workpiece, structures in the street, the state of the workpiece surface film, cutting conditions, etc. This changes the visibility of the detection groove (cutting trace). Further, the shape of the tip of the detection groove itself may not be stable due to the influence of chipping or the like. For this reason, the blade diagnosis method described in Patent Document 2 cannot accurately detect the wear state of the tip shape of the blade. Furthermore, the blade diagnosis method described in Patent Document 2 cannot detect the radius of the blade.

In the blade diagnosis method described in Patent Document 3, it is necessary to accurately measure the radius of the blade and the surface height of the product workpiece in advance, or to have a mechanism (such as an air micro) that accurately measures the radius of the blade and the surface height of the product workpiece. If the surface height (thickness) of the workpiece is unknown, the blade tip shape cannot be measured. Further, if the radius of the blade and the surface height of the product workpiece are not accurately measured in advance, the measurement error in the shape of the tip of the blade will increase.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a blade diagnostic method and a blade diagnostic device that can accurately diagnose a blade.

A blade diagnosis method for achieving the object of the present invention is to perform groove machining in which grooves are formed on the surface by cutting the surface of a flat plate-shaped workpiece with the tip of the blade while rotating a disc-shaped blade. A groove forming process is performed multiple times at the cutting depth position of the blade, a photographic image acquisition process is performed to acquire a photographic image of the groove in plan view for each groove formed by multiple groove machining, and a photographic image acquisition process is performed. A dimension measurement step in which the dimensions of each groove are measured based on the acquired photographic images for each groove, and a calculation step in which the radius and tip shape of the blade are calculated based on the measurement results of the dimensions for each groove in the dimension measurement step. and has.

According to this blade diagnosis method, even if the surface height and cutting depth (thickness, surface height) of the workpiece are unknown, the radius and tip shape of the blade can be calculated accurately.

In the blade diagnosis method according to another aspect of the present invention, the calculation step is based on the measurement result of the dimension of the groove formed by groove processing at an arbitrary time among the plurality of times and the calculation result of the radius of the blade, Calculate the depth of cut of the blade in arbitrary groove machining. Thereby, even if the surface height of the workpiece is unknown, the depth of cut can be calculated accurately.

In the blade diagnosis method according to another aspect of the present invention, the photographed image acquisition step acquires, for each groove, a photographed image including at least one of both ends of the groove.

In the blade diagnosis method according to another aspect of the present invention, the groove forming step involves machining grooves multiple times on a workpiece placed on a sub-table different from the cutting table on which the product work is placed. conduct. This makes it possible to measure the kerf in a stable environment, regardless of the visibility of the product workpiece, and by eliminating the effects of chipping and other cutting characteristics of the product workpiece, allowing accurate calculation of the blade tip shape. be able to.

In the blade diagnosis method according to another aspect of the present invention, in the groove forming step, groove machining is performed a plurality of times at mutually different depths of cut on the same position on the surface of the workpiece, and the groove machining is performed. Increase the depth of cut each time. This makes it possible to reduce the amount of material to be cut.

In the blade diagnosis method according to another aspect of the present invention, in the groove forming step, groove processing is performed multiple times at different depths of cut at different positions on the surface of the workpiece.

A blade diagnostic device for achieving the object of the present invention includes a rotation drive unit that rotates a disc-shaped blade, a relative movement unit that moves the blade relative to a flat plate-shaped workpiece, and a rotation drive unit and a relative movement unit that rotates the blade. Grooving control that controls the moving part to cut the surface of a flat workpiece using the tip of a rotating blade to form grooves on the surface multiple times at different cutting depth positions of the blade. a photographed image acquisition section that acquires a photographic image of the groove in plan view for each groove formed by multiple groove machining; The blade includes a dimension measurement unit that measures the dimensions of each groove, and a calculation unit that computes the radius and tip shape of the blade based on the measurement results of the dimensions of each groove by the dimension measurement unit.

In the blade diagnosis device according to another aspect of the present invention, the calculation unit, based on the measurement result of the dimension of the groove formed by groove processing at an arbitrary time among the plurality of times, and the calculation result of the radius of the blade, Calculate the depth of cut in any groove machining.

The present invention can accurately diagnose blades.

FIG. 2 is a perspective view of a dicing device that cuts a workpiece. It is an external perspective view of a processing part. 3 is an enlarged perspective view of the rotation unit and sub-table in FIG. 2. FIG. FIG. 3 is a functional block diagram of a general control section of the dicing device. FIG. 3 is an explanatory diagram for explaining a first chop cut on a calibration work. FIG. 6 is an explanatory diagram for explaining a second chop cut on a calibration work. FIG. 3 is an explanatory diagram for explaining photographing of a kerf using a microscope 23. FIG. It is an explanatory view for explaining the dimension measurement of the calf by a dimension measurement part. FIG. 6 is an explanatory diagram for explaining calculation of the radius of the blade and the first cutting depth by the calculation unit. FIG. 6 is an explanatory diagram for explaining calculation of the radius and cutting depth at each position in the width direction of the blade by the calculation unit. FIG. 6 is an explanatory diagram for explaining calculation of the actual tip shape of the blade by the calculation unit. It is a flowchart which shows the flow of the blade diagnostic process by a dicing apparatus.

[Configuration of dicing device]
FIG. 1 is a perspective view of a dicing apparatus 10 that cuts a workpiece W (product workpiece) such as a semiconductor wafer. Note that the XYZ axes in the figure are axes that are orthogonal to each other, the XY axes are axes that are parallel to the horizontal direction, and the Z axis is an axis that is orthogonal to the horizontal direction.

The dicing device 10 includes a load port 12, a transport mechanism 14, a processing section 16, and a cleaning section 18. A cassette containing a large number of workpieces W mounted on a frame F is placed in the load port 12. The transport mechanism 14 transports the workpiece W. The processing section 16 performs dicing processing on the workpiece W. The cleaning section 18 spin-cleans the cut workpiece W. Further, inside the casing 10A of the dicing apparatus 10, there is provided an overall control section 60 (see FIG. 4) that controls the operation of each part of the dicing apparatus 10. Note that the overall control unit 60 may be provided outside the housing 10A.

The unprocessed work W stored in the cassette placed on the load port 12 is transported to the processing section 16 by the transport mechanism 14, and is cut or grooved in the processing section 16 to be divided into individual chips. Cutting processing such as machining is performed. The workpiece W processed by the processing section 16 is transported to the cleaning section 18 by the transport mechanism 14, and after being cleaned by the cleaning section 18, the workpiece W is transported by the transport mechanism 14 to the load port 12 and stored in a cassette.

FIG. 2 is an external perspective view of the processing section 16. As shown in FIG. 2 and FIG. 1 described above, the processing section 16 includes a pair of disk-shaped blades 21, a blade cover (not shown), a pair of spindles 22, a pair of microscopes 23, and a workpiece holding device. A cutting table 31 is provided.

The pair of blades 21 are arranged to face each other in the Y-axis direction, and each is held by a spindle 22 so as to be rotatable about a blade rotation axis parallel to the Y-axis direction. The pair of spindles 22 corresponds to the rotation drive unit of the present invention. The pair of spindles 22 have a built-in high frequency motor and rotate the blade 21 at high speed around the blade rotation axis.

The microscope 23 constitutes a part of the photographed image acquisition section of the present invention, and one microscope is provided near each spindle 22. Although not shown, the microscope 23 includes a photographing optical system and an image sensor. Note that the microscope 23 may include a high-magnification microscope and a low-magnification microscope with different imaging magnifications. In addition, in FIG. 2, in order to prevent the drawing from becoming complicated, only the microscope 23 provided near one of the two spindles 22 is illustrated, and the illustration of the microscope 23 provided near the other spindle is omitted. are doing.

The microscope 23 photographs the surface of the workpiece W when cutting the workpiece W. Further, the microscope 23 photographs the surface of the calibration work CW when diagnosing the blade 21, which will be described later.

Further, each spindle 22 and each microscope 23 are held movably in the Y-axis direction and the Z-axis direction via a Y carriage 43, a Z carriage 44, etc., which will be described later.

The cutting table 31 holds the workpiece W by suction on its upper surface. The cutting table 31 is held movably in the X-axis direction by an X carriage 36, which will be described later, and rotatably held by a rotation unit 37, which will be described later.

The processing section 16 is provided with an X base 32, an X guide 34, an X drive section 35, an X carriage 36, and a rotation unit 37. The X base 32 has a flat plate shape extending in the X-axis direction, and an X guide 34 is provided on its upper surface in the Z-axis direction. The X guide 34 has a shape extending in the X-axis direction, and guides the X carriage 36 along the X-axis direction. The X drive section 35 uses, for example, a linear motor, and moves (drives) the X carriage 36 in the X-axis direction along the X guide 34.

The rotation unit 37 is provided on the upper surface of the X carriage 36. Further, a cutting table 31 is provided on the upper surface of the rotation unit 37. The rotation unit 37 includes a rotation drive section (not shown) including a motor, gears, etc., and rotates the cutting table 31 around its rotation axis.

The work W transported from the load port 12 by the transport mechanism 14 is sucked and held by the cutting table 31, and moves and rotates together with the cutting table 31. As a result, rotation of the work W during alignment before cutting, cutting feed of the work W in the X direction during cutting of the work W, etc. are performed via the cutting table 31 and the like.

FIG. 3 is an enlarged perspective view of the rotation unit 37 and sub-table 38 in FIG. 2. As shown in FIG. 3, the rotation unit 37 holds the sub-table 38 at a shifted position in the horizontal direction (X direction in this embodiment) from the cutting table 31 (holds it unrotatably).

The sub-table 38 attracts and holds a flat calibration work CW on its upper surface. The calibration work CW corresponds to the object to be cut in the present invention, and for example, a mirror work (also referred to as a mirror wafer) is used. This calibration work CW is chopped twice (also referred to as chop processing, which corresponds to groove processing in the present invention) using the same blade 21 at different cutting depths during diagnosis of the blade 21, which will be described later.

Further, the processing section 16 is provided with a Y base 41, a Y guide 42, a pair of Y carriages 43, and a pair of Z carriages 44. The Y base 41 has a gate shape that straddles the X base 32 in the Y-axis direction. A Y guide 42 is provided on the side surface of the Y base 41 in the X-axis direction. The Y guide 42 has a shape extending in the Y-axis direction, and guides each of the pair of Y-carriages 43 along the Y-axis direction. The pair of Y carriages 43 are independently driven along the Y guide 42 by a Y drive unit 46 (see FIG. 4) composed of a stepping motor, a ball screw, and the like.

Each of the pair of Y carriages 43 is provided with a Z carriage 44 movable in the Z-axis direction via a Z drive unit 48 (see FIG. 4) formed of a stepping motor or the like. The spindle 22 described above is attached to each Z carriage 44.

When cutting a workpiece W, the blade 21 is index-fed in the Y-axis direction and cut-feeded in the Z-axis direction with respect to the workpiece W held by suction on the cutting table 31. Further, when diagnosing the blade 21, which will be described later, chop-cutting of the blade 21 is performed on the calibration work CW held by suction on the sub-table 38.

The spindle 22, the microscope 23, the Y carriage 43, and the Z carriage 44 are provided in two sets facing each other on the left and right, but since they have similar configurations and functions, the following description will focus on only one of them. .

The dicing apparatus 10 has a function of measuring the radius and tip shape of the blade 21 and diagnosing the blade 21 (hereinafter simply referred to as blade 21 diagnosis) based on these measurement results. As will be described in detail later, the dicing apparatus 10 performs chop-cutting of the calibration work CW by the blade 21 twice at different cutting depths at constant or regular timing. Further, the dicing apparatus 10 uses the microscope 23 to photograph the kerfs 86 and 87 (see FIG. 6) formed on the calibration work CW by each chop cut. Then, the dicing apparatus 10 analyzes the captured image data 88 (see FIG. 4) for each of the kerfs 86 and 87, and performs the above-described diagnosis of the blade 21. Therefore, the dicing device 10 functions as a blade diagnostic device of the present invention.

[Functions of the general control section]
FIG. 4 is a functional block diagram of the overall control section 60 of the dicing apparatus 10. In addition, in FIG. 4, among the plurality of functions of the integrated control unit 60, only the function related to the diagnosis of the blade 21 is illustrated, and the functions related to other control of the dicing apparatus 10 such as cutting of the workpiece W are known. Since this is a technology, illustration is omitted.

As shown in FIG. 4, the overall control unit 60 includes an arithmetic circuit including various processors, memories, and the like. Various processors include CPU (Central Processing Unit), GPU (Graphics Processing Unit), ASIC (Application Specific Integrated Circuit), and programmable logic devices [for example, SPLD (Simple Programmable Logic Devices), CPLD (Complex Programmable Logic Device), and FPGA (Field Programmable Gate Arrays)]. Note that the various functions of the overall control unit 60 may be realized by one processor, or may be realized by a plurality of processors of the same type or different types.

In addition to the previously described microscope 23, X drive section 35, Y drive section 46, and Z drive section 48, the overall control section 60 is connected to an operation section 62, a storage section 64, a display section 66, etc. .

The operation unit 62 uses a keyboard, a mouse, an operation panel, operation buttons, etc., and accepts various operations by an operator. For example, the operation unit 62 accepts a diagnosis start operation for the blade 21 (chop cut start operation).

The storage unit 64 stores a control program (not shown) for the dicing apparatus 10. The storage unit 64 also stores measurement results of the radius and tip shape of the blade 21, diagnosis results of the blade 21, and the like. Furthermore, the storage unit 64 stores relative position information (not shown) indicating the relative positional relationship between the rotation unit 37 and the sub-table 38, and also stores the optical axis (field of view center) of the blade 21 and the microscope 23. Relative position information (not shown) indicating the relative positional relationship between the two is stored in advance.

As the display unit 66, for example, various known monitors such as a liquid crystal display are used. When diagnosing the blade 21, the display section 66 displays the diagnosis results of the blade 21 (including the radius and tip shape of the blade 21) under the control of the general control section 60.

The overall control unit 60 executes a control program (not shown) stored in the storage unit 64 to control the blade rotation control unit 70, movement control unit 72, photographing control unit 74, and image acquisition unit 76 when diagnosing the blade 21. , a dimension measurement section 78, a calculation section 80, and a diagnosis section 82.

The blade rotation control unit 70 controls the rotational drive of the blade 21 by the spindle 22.

The movement control section 72 controls the drive of the X drive section 35, Y drive section 46, and Z drive section 48, which correspond to the relative movement section of the present invention, to keep the blade 21 and the microscope 23 horizontal with respect to the calibration work CW. Controls relative movement in the directions (X-axis direction and Y-axis direction) and relative movement in the vertical direction (Z-axis direction).

The photographing control unit 74 controls photographing by the microscope 23. The image acquisition unit 76 functions as an image input interface that acquires photographed image data 88 output from the microscope 23.

The dimension measurement section 78 , the calculation section 80 , and the diagnosis section 82 execute calculation processing related to diagnosis of the blade 21 based on the captured image data 88 output from the microscope 23 .

<Chop cut>
FIG. 5 is an explanatory diagram for explaining the first chop cut on the calibration work CW. FIG. 6 is an explanatory diagram for explaining the second chop cut on the calibration work CW. In addition, in FIGS. 5 and 6, symbols 5A and 6A indicate side views of the calibration work CW, etc., and symbols 5B and 6B indicate top views of the calibration work CW after chop-cutting.

As shown in FIG. 5 and the previously described FIG. Execution, more specifically, execution of two chop cuts with different depths of cut is controlled.

When the blade rotation control unit 70 and the movement control unit 72 receive a diagnosis start operation for the blade 21 from the operation unit 62, they control the driving of each part and execute the first chop cut.

First, the movement control section 72 drives the X drive section 35 and the Y drive section 46 to align the blade 21 and the calibration work CW on the sub-table 38 in the X-axis direction and the Y-axis direction. Note that the position where the surface of the calibration work CW is to be chopped is not strictly determined, so in the above alignment, if the blade 21 is relatively moved to a position facing the surface of the calibration work CW, good.

For example, the movement control section 72 drives the X drive section 35 to move the X carriage 36 (rotation unit 37) to a predetermined position in the X-axis direction, thereby moving the sub-table 38 (calibration work CW) in the X-axis direction. and the blade 21 are aligned. The movement control unit 72 also controls the position of the sub-table 38 (calibration work CW) and the blade 21 in the Y-axis direction by driving the Y-drive unit 46 to move the blade 21 to a predetermined position in the Y-axis direction. Make adjustments. As a result, the blade 21 is set at a position facing the surface of the calibration work CW.

Next, the blade rotation control section 70 drives the spindle 22 to rotate the blade 21, and the movement control section 72 drives the Z drive section 48 to lower the Z carriage 44 and the blade 21 in the Z-axis direction. As a result, the rotating blade 21 comes into contact with the surface of the calibration work CW perpendicularly, so that the surface of the calibration work CW is cut by the blade 21 .

Then, the movement control unit 72 continues to drive the Z drive unit 48 to prevent the blade 21 from penetrating the calibration work CW based on the position of the sub-table 38 in the Z-axis direction and the thickness of the calibration work CW. After lowering the blade 21 to a predetermined lowering position, the blade 21 is raised in the Z-axis direction. During this time, the movement control unit 72 does not perform relative movement between the blade 21 and the calibration work CW in the X-axis direction and the Y-axis direction. As a result, the surface of the calibration work CW is chopped by the blade 21 with a cutting depth C _in , and a first kerf 86 corresponding to the groove of the present invention is formed on the surface of the calibration work CW. Note that the value of the cutting depth C _in is calculated by a calculation unit 80, which will be described later. This completes the first chop cut.

As shown in FIG. 6, the blade rotation control section 70 and the movement control section 72 control the driving of each section to perform the second chop cut after completing the dimension measurement of the kerf 86, which will be described in detail later.

First, the movement control unit 72 drives at least one of the X drive unit 35 and the Y drive unit 46 to move the blade 21 in the X-axis direction and the Y-axis direction and the non-cutting area (kerf) on the surface of the calibration work CW. 86 is not formed). Note that the position where the second chop cut is performed on the surface of the calibration work CW is set in an area that does not overlap with the kerf 86 in this embodiment.

Next, similarly to the first chop cut, the blade rotation control section 70 drives the spindle 22 to rotate the blade 21, and the movement control section 72 drives the Z drive section 48 to rotate the Z carriage 44 ( The blade 21) is lowered in the Z-axis direction. As a result, the blade 21 cuts the non-cutting area on the surface of the calibration work CW.

Then, the movement control unit 72 continues to drive the Z drive unit 48 to lower the blade 21 to the second lowering position that is predetermined based on the thickness of the calibration work CW, and then moves the blade 21 along the Z axis. to rise in the direction. The descending position during this second chop cut is not particularly limited as long as it is a descending position different from that during the first chop cut, and in this embodiment, for example, the descending position is lower than the first descending position by a difference "dc". It's the location. As a result, the surface of the calibration work CW is chopped by the blade 21 with a cutting depth of "C _in +dc", and a second kerf 87 corresponding to the groove of the present invention is formed on the surface of the calibration work CW. .

The second chop cut is thus completed, and two kerfs 86 and 87 with different cut depths are formed on the surface of the calibration work CW.

<Calf photography>
FIG. 7 is an explanatory diagram for explaining photographing of the calf 86 (the same applies to the calf 87) using the microscope 23. As shown in FIG. 7 and FIG. It controls the photographing of each of the kerfs 86 and 87 in planar view and the acquisition of photographed image data 88. In addition, in FIG. 7, the case where the entirety of the kerfs 86 and 87 does not fall within the imaging range of the microscope 23 will be described as an example.

First, the movement control section 72 drives the X drive section 35 and the Y drive section 46 to align the microscope 23 and one end of the cuff 86 in the X-axis direction and the Y-axis direction. Specifically, the relative positions of the blade 21 and the calibration work CW in the X-axis direction and the Y-axis direction during chop cutting are known. Further, since both the blade 21 (spindle 22) and the microscope 23 are fixed to the Z carriage 44, the relative position of the microscope 23 with respect to the blade 21 is also known. Furthermore, the length of the kerf 86 in the X-axis direction can also be estimated by experiment or simulation. Therefore, based on this alignment information, the movement control unit 72 can align the microscope 23 and one end of the cuff 86.

Next, the photographing control unit 74 controls the microscope 23 to photograph one end of the calf 86 in plan view using the microscope 23 while illuminating the calf 86 with ring illumination or coaxial illumination. As a result, photographed image data 88 of one end of the cuff 86 is input from the microscope 23 to the image acquisition section 76 .

Then, the movement control section 72 drives the X drive section 35 based on the above-mentioned positioning information to align the microscope 23 and the other end of the cuff 86 in the X-axis direction and the Y-axis direction. Further, the photographing control unit 74 controls the microscope 23 to perform photographing of the other end of the calf 86 in plan view using the microscope 23 while illuminating the calf 86 with ring illumination or coaxial illumination. As a result, photographed image data 88 of the other end of the cuff 86 is input from the microscope 23 to the image acquisition section 76 .

Similarly, under the control of the movement control section 72 and the photographing control section 74, the microscope 23 photographs both ends of the calf 87, and the photographed image data 88 of both ends of the calf 87 are input to the image acquisition section 76. executed.

Note that when the entire kerfs 86 and 87 are within the photographing range of the microscope 23, the distance between the microscope 23 and the centers of the kerfs 86 and 87 in both the X-axis direction and the Y-axis direction is determined for each of the kerfs 86 and 87. Along with positioning, the kerfs 86 and 87 are photographed using the microscope 23.

<Measurement of calf dimensions>
FIG. 8 is an explanatory diagram for explaining the dimension measurement of the calves 86 and 87 by the dimension measuring section 78. In order to avoid complicating the explanation, here, the entirety of the kerfs 86 and 87 is within the imaging range of the microscope 23, that is, the image data 88 of the kerf 86 includes images of both ends of the kerf 86. The explanation will be given assuming that the photographed image data 88 of the calf 87 includes images of both ends of the calf 87.

The T-axis direction in FIG. 8 is the width direction of the kerfs 86 and 87 corresponding to the width direction of the blade 21 (substantially the same direction as the Y-axis direction). Further, the width direction center which is the center of the width direction (T axis direction) of the kerfs 86, 87 is defined as Tc (T=0), and the length direction of the kerfs 86, 87 perpendicular to the width direction of the kerfs 86, 87. The center in the length direction (X-axis direction) is defined as Xc (X=0). Note that the widthwise center and lengthwise center of the kerfs 86 and 87 are based on the relative positional relationship between the blade 21 and the calibration work CW during the first and second chop cuts, and the relative positional relationship between the blade 21 and the microscope 23. It can be determined based on the following.

As shown in FIG. 8 and already described FIG. Based on this, the dimensions of both ends of each of the kerfs 86 and 87 are measured.

Specifically, the dimension measuring unit 78 measures the distance X ₁ (T) from the longitudinal center (Xc) of the calf 86 to one end of the calf 86 at each position in the width direction (T-axis direction) of the calf 86. , and the distance X ₁ (T) from the longitudinal center (Xc) to the other end of the cuff 86 are measured using a known method.

Similarly, the dimension measuring unit 78 measures the distance X ₂ (T) from the longitudinal center (Xc) of the calf 87 to one end of the calf 87 at each position in the width direction (T-axis direction) of the calf 87. , and the distance X ₂ (T) from the longitudinal center (Xc) to the other end of the cuff 87 are measured using a known method.

<Calculation of the radius, cutting depth, and tip shape of the blade 21 by the calculation unit>
FIG. 9 is an explanatory diagram for explaining the calculation of the radius R of the blade 21 and the first cutting depth C _in by the calculation unit 80. Note that 9A in the figure indicates the first chop cut, and 9B in the figure indicates the second chop cut. In addition, in FIG. 9, the distance X ₁ (T) at any position in the width direction (T-axis direction) of the kerf 86 is abbreviated as “distance X 1 ”, and the distance X ₁ (T) at any position in the width direction (T-axis direction) of the kerf 87 is The distance X ₂ (T) in is abbreviated as “distance X ₂ ”.

As shown in FIG. 9 and FIG. 4 described above, the calculation unit 80 first calculates the dimension measurement results [distance X ₁ and _distance The radius R at each position in the width direction (T-axis direction) of the blade 21 is calculated based on the difference "dc" in the cutting depth of the blade 21 in the second chop cut. Further, the calculation unit 80 calculates the first cutting depth C _in of the blade 21 at each position based on the calculation result of the radius R at each position of the blade 21 in the width direction. Hereinafter, calculation of the radius R and the cutting depth _C in at an arbitrary position in the width direction of the blade 21 will be explained.

The radius R at any position in the width direction of the blade 21 is determined based on the dimension measurement results for each of the kerfs 86 and 87 (distance X ₁ and distance X ₂ ) by the calculation unit 80 and the depth of cut at the first and second chop cuts. It is expressed by the following formula [Equation 1] based on the values "C _in " and "C _in +dc". Further, the first cutting depth C _in at any position in the width direction of the blade 21 is a line segment ( Based on the angle θ formed by the radius R) and the line segment connecting the center of the kerf 86 and the center of the blade 21 (indicated by a dashed line in the figure), it is expressed by the following formula [Equation 2].

Based on the above formula [Math. 1] and the above [Math. 2] formula, the radius R at any position in the width direction of the blade 21 is expressed by the following formula [Math. 3]. ) is expressed by the following _formula [Equation 4]. The diameter of the blade 21 can be calculated based on the radius R of the blade 21, and the second cutting depth "C _in + dc" of the blade 21 can also be calculated based on the first cutting depth C _in of the blade 21. It is possible to calculate. Alternatively, the second cutting depth "C _in +dc" may be directly calculated using a formula in which "X ₁ " is replaced with "X ₂ " in formula [Equation 4].

FIG. 10 is an explanatory diagram for explaining the calculation of the radius R and the cutting depth C _in at each position in the width direction of the blade 21 by the calculation unit 80. FIG. 11 is an explanatory diagram for explaining the calculation of the actual tip shape of the blade 21 by the calculation unit 80.

As shown in FIG. 10, the calculation unit 80 calculates the measurement result of the distance X ₁ (T) at each position in the width direction of the calf 86 by the dimension measurement unit 78, and the distance X ₂ (T) at each position in the width direction of the calf 87. Based on the measurement result of T) and the difference dc, the calculations of the above [Equation 3] and the above [Equation 4] are repeatedly executed for each position in the width direction of the kerfs 86 and 87. Thereby, the radius R and the cutting depth C _in at each position in the width direction of the blade 21 are calculated.

As shown in FIG. 11, the shape of the kerfs 86 and 87 formed on the surface of the calibration workpiece CW by the blade 21 differs from the actual tip shape of the blade 21 depending on the cutting depth C _in of the blade 21. The shape is stretched in the X-axis direction. Therefore, the calculation unit 80 converts the tip shape of the blade 21 obtained based on the radius R and the cutting depth C _in at each position in the width direction of the blade 21 into the actual tip shape of the blade 21. Note that since the specific conversion method is a well-known technique, a specific explanation will be omitted here.

Returning to FIG. 4, the diagnosis unit 82 diagnoses whether or not there is an abnormality in the blade 21 using a known method based on the tip shape of the blade 21 calculated by the calculation unit 80. For example, when the design value of the radius of the blade 21 is R0, and the radius at each position in the width direction of the blade 21 is R(T), the diagnosis unit 82 determines the radius of the blade 21 at each position in the width direction of the blade 21. The amount of wear [R0-R(T)] is calculated, and the presence or absence of an abnormality in the blade 21 is diagnosed based on the calculation result of the amount of wear at each position. The diagnosis unit 82 then outputs the diagnosis result of the blade 21 to the display unit 66.

[Function of dicing device]
FIG. 12 corresponds to the blade diagnosis method of the present invention, and is a flowchart showing the flow of the blade 21 diagnosis process by the dicing apparatus 10 having the above configuration. As shown in FIG. 12, the operator suction-holds the calibration work CW on the sub-table 38, and then inputs an operation to start diagnosis of the blade 21 to the operation unit 62.

In response to this diagnosis start operation, the movement control unit 72 drives the X drive unit 35 and the Y drive unit 46 to move the blade 21 and the calibration work CW on the sub-table 38 in the X-axis direction and the Y-axis direction. Perform alignment. Next, the blade rotation control unit 70 drives the spindle 22 to rotate the blade 21. Further, the movement control section 72 drives the Z drive section 48 to lower the blade 21 to a predetermined lowering position, and then raises the blade 21. As a result, as shown in FIG. 5 described above, the surface of the calibration work CW is chopped by the blade 21 at the cutting depth C _in , and the first kerf 86 is formed on the surface of the calibration work CW. (Step S1 corresponds to the groove forming step of the present invention).

After forming the kerf 86, as shown in FIG. 7 described above, the movement control section 72 drives the X drive section 35 and the Y drive section 46 based on the respective positioning information described above to move in the X-axis direction and The microscope 23 and one end of the cuff 86 are aligned in the Y-axis direction. Next, the photography control unit 74 controls the microscope 23 to cause the microscope 23 to photograph one end of the calf 86 in plan view. As a result, photographed image data 88 of one end of the cuff 86 is inputted from the microscope 23 to the image acquisition unit 76 (step S2, corresponding to the photographed image acquisition step of the present invention).

Then, the movement control section 72 drives the X drive section 35 based on each positioning information described above to align the microscope 23 and the other end of the cuff 86 in the X-axis direction and the Y-axis direction. The photographing control unit 74 also controls the microscope 23 to cause the microscope 23 to photograph the other end of the cuff 86 in plan view. Thereby, the photographed image data 88 of the other end of the cuff 86 is inputted from the microscope 23 to the image acquisition section 76 (step S2, corresponding to the photographed image acquisition step of the present invention).

When the image acquisition unit 76 acquires the photographed image data 88 of both ends of the calf 86, the dimension measurement unit 78 calculates the previously described image data 88 based on the known photographing magnification of the microscope 23 and the photographed image data 88 of both ends of the calf 86. As shown in FIG. 8, the distance X ₁ (T) at each position in the width direction of the cuff 86 is measured (step S3, corresponding to the dimension measurement step of the present invention).

After completing the dimension measurement of the calf 86, the movement control unit 72 drives at least one of the X drive unit 35 and the Y drive unit 46 to move the blade 21 in the X-axis direction and the Y-axis direction and the surface of the calibration work CW. Perform alignment with the non-cutting area. Next, the blade rotation control unit 70 drives the spindle 22 to rotate the blade 21. Further, the movement control section 72 drives the Z drive section 48 to lower the blade 21 to a lowered position that is further lower than the first lowered position by a difference dc, and then raises the blade 21. As a result, as shown in FIG. 6 described above, the surface of the calibration work CW is chopped by the blade 21 at the cutting depth C _in +dc, and a second kerf 87 is formed on the surface of the calibration work CW. (Step S4, which corresponds to the groove forming step of the present invention).

After the formation of the kerf 87, as shown in FIG. 23 is performed to photograph both ends of the cuff 87 in a plan view (step S5, corresponding to the photographed image acquisition step of the present invention). Photographed image data 88 of both ends of the calf 87 are output from the microscope 23 to the image acquisition section 76 .

When the image acquisition unit 76 acquires the photographed image data 88 of both ends of the calf 87, the dimension measurement unit 78 calculates the size as described above based on the known photographing magnification of the microscope 23 and the photographed image data 88 of both ends of the calf 87. As shown in FIG. 8, the distance X ₂ (T) at each position in the width direction of the cuff 87 is measured (step S6, corresponding to the dimension measurement step of the present invention).

After completing the dimension measurement of the kerfs 87, the calculation unit 80 calculates the dimensional measurement results [distances X ₁ (T), X ₂ (T )] and the above-mentioned cut depth difference "dc", the radius R at each position in the width direction of the blade 21 is calculated using the above formula [Equation 3] (step S7). Thereby, even if the surface height (thickness) and cutting depth C _in of the calibration work CW are unknown, the radius R at each position in the width direction of the blade 21 can be calculated.

Next, the calculation unit 80 calculates the above [[ _distance The cutting depth _C in at each position in the width direction of the blade 21 is calculated using the equation (4) (step S8).

Then, as shown in FIG. 11 described above, the calculation unit 80 calculates the tip shape of the blade 21 obtained based on the radius R and the cutting depth C _in at each position in the width direction of the blade 21. into the actual tip shape (step S9). Note that steps S7 to S9 correspond to calculation steps of the present invention.

When the shape of the tip of the blade 21 is calculated by the calculation section 80, the diagnosis section 82 diagnoses whether or not there is an abnormality in the blade 21 using a known method based on the shape of the tip of the blade 21, and displays the diagnosis result on the display section 66. Output (step S10).

Note that the order of each process may be changed as appropriate. For example, first perform chop cutting (step S1 and step S4), then perform photographing (step S2 and step S5), and then perform dimension measurement (step S3). After performing step S6), the steps after step S7 may be performed.

[Effects of this embodiment]
As described above, in the dicing apparatus 10 of the present embodiment, the blade 21 chops the calibration work CW twice at different cutting depths, photographs each of the kerfs 86 and 87 with the microscope 23, and By measuring the dimensions of each kerf 86, 87 based on the captured image data 88 of each kerf 86, 87, the width of the blade 21 can be measured even if the surface height and cutting depth C _in of the calibration work CW are unknown. The radius R and the cutting depth C _in at each position in the direction can be calculated accurately. As a result, even with a device that is not equipped with a mechanism (such as an air micro) to measure the surface height (cutting depth) of the calibration work CW, the radius R and tip shape of the blade 21 can be determined based on the shape of the kerfs 86 and 87. Desired. Thereby, the blade 21 can be diagnosed accurately.

Furthermore, as shown in Table 1 below, for example, if the radius R and cutting depth C _in of the blade 21 are calculated using the conventional method based only on the photographed image data 88 of the kerf 86 formed in the first chop cut, , a first calculation result (R=55.50mm, C _in =0.500mm) and a second calculation result (R=54.96mm, C _in =0.505mm) are obtained. In this case, the radius R and cutting depth C _in of the blade 21 are not determined to be one, and it is not possible to determine whether the first calculation result or the second calculation result is correct.

On the other hand, as shown in Table 2 below, the radius R of the blade 21 and the cutting depth C _in are determined based on the captured image data 88 of the kerfs 86 and 87 formed in the first and second chop cuts. By performing the calculation, the radius R and the cutting depth C _in of the blade 21 are determined to be either the first calculation result or the second calculation result. Therefore, in this embodiment, since the radius R and the cutting depth C _in at each position in the width direction of the blade 21 can be calculated accurately, the blade 21 can be diagnosed accurately.

Moreover, even if the thickness (surface height) of the calibration work CW changes due to the temperature characteristics of the calibration work CW, the radius R and tip shape of the blade 21 can be accurately determined. Furthermore, even if the radius R of the blade 21 changes greatly due to rapid wear of the blade 21, or if the radius R of the blade 21 is unknown, such as when using a used blade 21, the radius R of the blade 21 can be changed in this embodiment. R can be calculated accurately, and the cutting depth C _in and tip shape can be accurately determined. As a result, the blade 21 can be diagnosed accurately.

Furthermore, by observing the kerfs 86 and 87 with the calibration workpiece CW on the sub-table 38, the influence of cutting characteristics of the workpiece W such as chipping can be eliminated regardless of the visibility of the workpiece W (product workpiece). Therefore, measurements of the kerfs 86 and 87 can be performed in a stable environment. Thereby, the tip shape of the blade 21 can be calculated accurately. As a result, the blade 21 can be diagnosed accurately.

[others]
In the embodiment described above, the alignment between the blade 21 and the calibration work CW and the alignment between the microscope 23 and the kerfs 86 and 87 are automatically performed, but these alignments are performed manually by the operator on the operation unit 62. You can also run it with

In the above embodiment, both ends of the kerfs 86 and 87 are photographed using the microscope 23 (see FIG. 7), but only one end (the other end) of each may be photographed. That is, at least one of both ends of each of the kerfs 86 and 87 is photographed using the microscope 23.

In the above embodiment, the calibration workpiece CW on the sub-table 38 was explained as an example of the workpiece to be cut in the present invention. Although the measurement accuracy is inferior to the above embodiment, the workpiece W (product A workpiece) may be used as the object to be cut in the present invention.

In the above embodiment, the first chop cut and the second chop cut on the surface of the calibration work CW are performed at different positions on the surface of the calibration work CW. It may be done at the same position on the surface. In this case, after photographing the kerf 86 formed by the first chop cut with the microscope 23, the second chop cut is performed with a deeper cutting depth than the first chop cut. Thereby, the amount of calibration work CW used can be reduced. Note that even when the chop cut is performed three or more times, the depth of cut is increased each time the chop cut is performed.

In the embodiment described above, the calibration work CW is chopped twice at different depths of cut, but the calibration work CW may be chopped three or more times. In this case, the dimensions of each kerf are measured based on the captured image data 88 of three or more types of kerfs, and the radius R and cutting depth C at each position in the width direction of the blade 21 are determined based on the dimensional measurement results of each kerf. Calculate _in .

10... Dicing device 21... Blade 22... Spindle 23... Microscope 31... Cutting table 35... Control section 74...Photography control section 76...Image acquisition section 78...Dimension measurement section 80...Calculation section 86, 87...Curf 88...Photographed image data

Claims (9)

Grooving is performed by cutting the surface of a flat plate-shaped workpiece with the tip of the blade while rotating a disc-shaped blade to form a groove on the surface a plurality of times at different cutting depths of the blade. process and
a photographed image acquisition step of acquiring a photographed image of the groove in plan view for each of the grooves formed by the groove processing a plurality of times;
a dimension measuring step of measuring the dimensions of the groove for each groove based on the photographed image of each groove acquired in the photographed image acquisition step;
Calculating the radius of the blade based on the formation results of the plurality of grooves with different cutting depths of the blade in the groove forming step and the measurement results of the dimensions of the plurality of grooves with different depths in the dimension measurement step. a calculation process to
has
The calculating step is based on the measurement result of the dimension of the groove formed by the groove machining an arbitrary time among the plurality of times and the calculation result of the radius of the blade. A blade diagnosis method for calculating the cutting depth of the blade. The blade diagnosis method according to claim 1, wherein the photographed image acquisition step acquires, for each groove, the photographed image including at least one of both ends of the groove. 3. The blade tip shape acquired in the photographed image acquisition step is converted into the actual blade tip shape based on the calculation results of the cutting depth and the radius of the blade in the calculation step. Blade diagnostic method described in. Any one of claims 1 to 3, wherein the groove forming step performs the groove machining a plurality of times on the cut object placed on a sub-table different from a cutting table on which a product work is placed. The blade diagnosis method according to item 1. In the groove forming step, the groove processing is performed a plurality of times at different depths of cut on the same position on the surface of the workpiece, and the depth of cut is increased each time the groove processing is performed. The blade diagnosis method according to any one of claims 1 to 4. The blade diagnosis according to any one of claims 1 to 4, wherein the groove forming step performs the groove processing a plurality of times at mutually different cutting depths at mutually different positions on the surface of the cut object. Method. A rotation drive unit that rotates a disc-shaped blade;
a relative movement unit that moves the blade relative to a flat plate-shaped workpiece;
The rotary drive unit and the relative movement unit are controlled to perform grooving, which involves cutting the surface of a flat plate-shaped workpiece with the tip of the rotating blade to form a groove on the surface, with different cuts made by the blades. A groove formation control unit that performs groove formation multiple times at depth;
a photographed image acquisition unit that acquires a photographed image of the groove in plan view for each of the grooves formed by the plurality of groove processing;
a dimension measuring unit that measures the dimensions of the groove for each groove based on the captured image of each groove acquired by the captured image acquisition unit;
The radius of the blade is determined based on the formation results of the plurality of grooves with different cutting depths of the blade by the groove formation control unit and the measurement results of the dimensions of the plurality of grooves with different depths by the dimension measurement unit. an arithmetic unit that performs calculations;
Equipped with
The calculation unit performs the groove machining at the arbitrary time based on the measurement result of the dimension of the groove formed by the groove machining at an arbitrary time among the plurality of times and the calculation result of the radius of the blade. A blade diagnostic device that calculates the depth of cut. According to claim 7, the captured image acquisition unit converts the acquired tip shape of the blade into an actual tip shape of the blade based on the calculation results of the cutting depth and the radius of the blade by the calculation unit. blade diagnostic equipment. When the center in the length direction of the groove perpendicular to the width direction of the groove in a plan view is set as the center in the length direction, the dimension measuring unit measures the width of the groove as the dimension for each groove. measuring the distance from the longitudinal center to the longitudinal end of the groove at each position in the direction;
The blade diagnostic device according to claim 7 or 8, wherein the calculation unit calculates the radius and tip shape of the blade based on the measurement result of the dimension measurement unit and the depth of cut for each groove processing.

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