JP6402734B2 - Dicing device, blade diagnostic device, blade diagnostic method and program - Google Patents

Description

  The present invention relates to a dicing apparatus, a blade diagnosis apparatus, a blade diagnosis method, and a program, and more particularly to a dicing apparatus, a blade diagnosis apparatus, a blade diagnosis method, and a program for detecting an abnormal state of a blade.

  2. Description of the Related Art A dicing apparatus is known in which a workpiece such as a wafer is cut (diced) by a blade that is rotated at a high speed by a spindle. In such a dicing apparatus, an optical sensor is used to detect blade breakage during dicing.

  For example, Patent Document 1 discloses a dicing apparatus that has a light emitting element and a light receiving element that are opposed to each other with a cutting edge of a cutting blade interposed therebetween, and detects a breakage state of the cutting blade based on the amount of light received by the light receiving element. Has been.

JP 2010-114251 A

  However, although the apparatus described in Patent Document 1 can detect the blade breakage state, it cannot detect blade abnormality such as abnormal wear. Therefore, when an abnormality occurs in the blade, the abnormality is first found by processing the product and confirming the quality. For example, when dicing is performed with a blade that has undergone single wear or medium wear, a defective product called back surface chipping in which chipping occurs on the back surface side of the work chip occurs. Thus, when a blade abnormality was discovered, there was a problem that a defective product had already occurred.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a dicing apparatus, a blade diagnosis apparatus, a blade diagnosis method, and a program for diagnosing a blade by calculating the tip shape of the blade.

  In order to achieve the above object, a blade diagnosis method according to one aspect of the present invention includes a groove forming step of rotating a disk-shaped blade to bring the tip of the blade into contact with a flat plate-shaped workpiece and forming a groove on the workpiece, An image acquisition process for acquiring an image in a plan view of the formed groove, a measurement process for measuring the dimension of the groove from the acquired image, a calculation process for calculating the tip shape of the blade from the measured dimension, and the calculated tip shape And an output process for outputting information.

  According to this aspect, it is possible to diagnose the blade by calculating the tip shape of the blade from the image of the groove formed at the tip of the blade.

  In the blade diagnosis method according to another aspect of the present invention, the calculation step can calculate the tip shape of the blade based on the radius of the blade. Thereby, the tip shape of the blade can be calculated appropriately.

  In the blade diagnosis method according to another aspect of the present invention, the calculation step is performed based on the length in the direction orthogonal to the width direction of the groove at a position separated from the center of the groove by a predetermined distance in the width direction. It is possible to calculate the position of the end of the blade at a position separated by a predetermined distance in the thickness direction. Thereby, the tip shape of the blade can be calculated appropriately.

  In order to achieve the above object, a program according to an aspect of the present invention includes a groove forming step in which a disk-shaped blade is rotated so that the tip of the blade is brought into contact with a flat plate-shaped workpiece to form a groove in the workpiece. An image acquisition process for acquiring an image in a plan view of the groove, a measurement process for measuring the dimension of the groove from the acquired image, a calculation process for calculating the tip shape of the blade from the measured dimension, and information on the calculated tip shape And causing the computer to execute an output step of outputting.

  According to this aspect, it is possible to diagnose the blade by calculating the tip shape of the blade from the image of the groove formed at the tip of the blade.

  In order to achieve the above object, a blade diagnostic apparatus according to an aspect of the present invention includes a groove forming unit that rotates a disk-shaped blade so that the tip of the blade comes into contact with a flat plate-like workpiece, and forms a groove in the workpiece. An image acquisition unit that acquires a planar view image of the formed groove, a measurement unit that measures the groove dimension from the acquired image, a calculation unit that calculates the blade tip shape from the measured dimension, and the calculated tip shape And an output unit for outputting information.

  According to this aspect, it is possible to diagnose the blade by calculating the tip shape of the blade from the image of the groove formed at the tip of the blade.

  In order to achieve the above object, a dicing apparatus according to an aspect of the present invention includes a disk-shaped blade, a control unit for dicing a workpiece with the blade, and a blade diagnosis apparatus.

  According to this aspect, it is possible to diagnose the blade by calculating the tip shape of the blade from the image of the groove formed by the blade.

  According to the present invention, the blade tip can be diagnosed by calculating the tip shape of the blade.

Perspective view showing appearance of dicing machine The perspective view which shows the structure of a process part Block diagram showing the system configuration of the blade diagnostic device Flow chart showing processing of blade diagnosis method Schematic showing the chopping process Schematic showing the chopping process Example of planar view image of kerf formed on workpiece W Another example of a planar view image of the kerf formed on the workpiece W

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[Configuration of dicing equipment]
FIG. 1 is a perspective view showing an external appearance of a dicing apparatus 1 including a blade diagnostic apparatus according to the present embodiment. The dicing apparatus 1 includes a high-frequency motor built-in spindles 22 and 22 that are arranged to face each other and have a disk-shaped blade 21 and a wheel cover (not shown) attached to the tip, and a flat-plate semiconductor wafer W (workpiece) to be diced. An example) of the camera 23, the processing unit 2 having the work table 31 for sucking and holding the workpiece W on a plane parallel to the XY plane, the cleaning unit 52 for spin cleaning the processed semiconductor wafer W, It is composed of a load port 51 on which a cassette containing semiconductor wafers W is placed, a transfer means 53 for transferring semiconductor wafers W, a controller 10 incorporated in the frame of the dicing apparatus 1 and for overall control of the operation of each part. Yes.

  FIG. 2 is a perspective view illustrating a configuration of the processing unit 2. The processing unit 2 is guided by X guides 34 provided on the X base 36, and an X table 33 driven in the X direction indicated by XX in the drawing by a linear motor 35 (an example of an XY direction driving unit). The X table 33 is provided with a work table 31 via a rotary table 32 that rotates in the θ direction.

  On the other hand, the side surface of the Y base 44 provided so as to straddle the linear motor 35 is guided by Y guides 42 and 42 and driven in the Y direction indicated by YY in FIG. 2 by a stepping motor and a ball screw (not shown). Y tables 41 and 41 are provided.

  The Y tables 41 and 41 are respectively provided with Z tables 43 and 43 that are driven in the Z direction by driving means (not shown). Each of the Z tables 43 and 43 is fixed with the spindles 22 and 22 facing each other, and blades 21 and 21 are attached to the respective tips (rotating shafts) of the spindles 22 and 22. Opposed.

  Each Z table 43 is provided with a height detecting means (not shown). The height detection means performs chopping on the workpiece W attracted and held on the workpiece table 31 and detects the height in the Z direction where the workpiece W and the blade edge of the blade 21 are in contact by vibration of the spindle 22 or the like.

  With the structure of the processed portion 2, the blade 21 is rotated at a high speed from 6000 rpm to 80000 rpm by the spindle 22 around a rotation axis parallel to the Y direction. The blade 21 is indexed in the Y direction and cut and fed in the Z direction, and the work table 31 is cut and fed in the X direction. That is, the spindle 22 and the work table 31 move relatively in the direction parallel to the XY plane, and the spindle 22 moves in the Z direction perpendicular to the XY plane. The feed amounts in the X, Y, and Z directions are adjusted by controlling the linear motor 35, a stepping motor and a servo motor (not shown) by the controller 10 (an example of a control unit) shown in FIG.

  The camera 23 fixed to the Z table 43 includes a lens and an image sensor, and images the surface of the workpiece W. An image of the surface of the workpiece W picked up by the camera 23 is input to the controller 10 and various analyzes are performed in the controller 10.

[Blade diagnostic equipment]
FIG. 3 is a block diagram showing a system configuration related to the blade diagnosis apparatus in the dicing apparatus 1. The dicing apparatus 1 includes the processing unit 2 including the blade 21, the spindle 22, the camera 23, the work table 31, and the Z table 43, the controller 10, and the like.

  When performing blade diagnosis, the workpiece W is chopped by the blade 21. In the chopping process, the blade 21 rotated by the spindle 22 is moved by the Z table 43 in the processing part 2 (an example of the groove forming part) in the same manner as the chopping process performed by the height detection performed before the work W is processed. The blade 21 is lowered in the Z direction, the blade tip (tip) of the blade 21 is brought into contact with the workpiece W vertically to form a groove (kerf) of a predetermined depth that does not penetrate the workpiece W, and then the blade 21 is moved to the Z table. 43 is raised in the Z direction. During this time, the X-direction feed and the Y-direction feed of the work table 31 are not performed.

  The camera 23 images the kerf formed on the workpiece W, and inputs the captured kerf image to the controller 10.

  The controller 10 includes an image acquisition unit 11, a measurement unit 12, a calculation unit 13, a diagnosis unit 14, an output unit 15, and the like.

  The image acquisition unit 11 acquires a kerf image captured by the camera 23. The measurement unit 12 measures the dimension of the kerf from the kerf image. The calculation unit 13 calculates the tip shape of the blade 21 from the measured dimensions of the kerf. The diagnosis unit 14 diagnoses whether there is an abnormality in the blade 21 based on the calculated tip shape of the blade 21. The output unit 15 includes a display and the like, and outputs the diagnosis result of the diagnosis unit 14. Details of these processes will be described later.

[Blade diagnosis method]
Next, a blade diagnosis method for detecting an abnormality of the blade 21 used in the dicing apparatus 1 will be described. FIG. 4 is a flowchart showing processing of the blade diagnosis method.

  First, in step S <b> 1 (an example of a groove forming process), the workpiece W is set on the processing portion 2 of the dicing apparatus 1, and the workpiece W is chopped using the blade 21.

  FIG. 5 is a schematic view showing the state of chopping, and is a cross-sectional view in the XZ plane. Here, the radius of the blade 21 is R, and the kerf 100 having a cutting depth D0 is formed in the workpiece W. The cutting depth of chopping (the depth of the kerf 100) can be controlled from the detection result of a height detection means (not shown) and the driving amount of the Z table 43 in the Z direction. That is, the cutting depth D0 is equal to the amount by which the spindle 22 is further lowered in the Z direction from the position where the cutting edge (tip) of the blade 21 touches the workpiece W.

FIG. 6 is a schematic view showing the state of chopping, and is a cross-sectional view in the YZ plane near the tip of the blade 21. Here, the thickness direction of the blade 21 around Y (an example of a predetermined distance) Y1 in the thickness direction from _C by the depth of the kerf 100 in a position away of (Y direction in FIG. 6), i.e. from the upper surface of the workpiece W of the blade 21 The distance to the end is D1, and the distance from the upper surface of the workpiece W to the end of the blade 21 at a position away from the center of the blade 21 in the thickness direction by Y2 is D2. Incidentally, the radius R of the blade 21 shown in FIG. 5 is a design value at the center Y _C in the thickness direction of the blade 21, it may be used a value measured by a known method a radius at the center Y _C.

  Next, in step S2 (an example of an image acquisition process), the upper surface of the work W is placed opposite to the camera 23, and an image of the kerf in plan view formed in step S1 is taken. FIG. 7 is an example of a planar view image of the kerf 100 formed on the workpiece W. The captured image is input to the controller 10.

  Subsequently, in step S3 (an example of a measurement process), the controller 10 measures the dimension of the kerf 100 from the acquired image of the workpiece W.

Here, the center of the kerf 100 in the direction corresponding to the width direction of the blade 21 (the Y direction in FIG. 7, hereinafter referred to as the width direction of the kerf 100) is Y _C , and the direction corresponding to the rotation direction orthogonal to the width direction of the blade 21. The center in the X direction (hereinafter referred to as the length direction of the kerf 100 in FIG. 7) is defined as X _C, and the center X _C and the end of the kerf 100 at a position Y1 away from the center Y _C in the Y direction. Let distance (length) be L1. Similarly, the distance to the end of the central X _C and calf 100 at a position distant in the Y direction by a distance Y2 with respect to the center Y _C and L2.

  Note that the imaging magnification of the camera 23 is known in advance, and the distances Y1, Y2, L1, and L2 are values obtained by converting the dimensions on the image into the actual kerf dimensions.

  Next, in step S4 (an example of a calculation process), the tip shape of the blade 21 is calculated from the dimensions measured in step S3. Here, if the Z position at a certain Y position of the blade 21 can be calculated from the shape of the kerf 100, the tip shape of the blade 21 can be determined. That is, the following formula is established.

The distance from the center Y _C in the width direction of the kerf 100 to the end portion of the center X _C and calf 100 in the longitudinal direction of the kerf 100 in the Y position apart (length) Ln, in the thickness direction of the blade 21 When the depth of the kerf 100 at a position away from the center by Y in the thickness direction is Dn, and generalizing Equations 1 and 2, the following equations can be derived.

  Therefore, in step S3, an arbitrary number of kerfs 100 are divided in the Y direction, and the distance in the X direction is calculated by the divided number, so that the depth Dn of the kerf 100, that is, the end of the blade 21 is calculated. The position can be calculated. The tip shape of the blade 21 can be calculated by extrapolating and interpolating the position of each end.

  Next, in step S5, the diagnosis unit 14 diagnoses whether there is an abnormality in the blade 21 based on the tip shape of the blade 21 calculated in step S4.

  Finally, in step S6 (an example of an output process), the output unit 15 displays this diagnosis result (an example of information on the tip shape) on the display, and ends the diagnosis process.

  Note that the user of the blade diagnosis apparatus may diagnose whether or not there is an abnormality in the blade 21 based on the tip shape of the blade 21 calculated in step S4. In this case, the tip shape and dimensions of the blade 21 calculated by the calculation unit 13 (an example of information on the tip shape) may be output from the output unit 15.

  8A to 8C are diagrams illustrating examples of images in plan view of the kerfs 102, 104, and 106 formed on the workpiece W, respectively. The calculation unit 13 can calculate the amount of one-side wear and the amount of medium wear of the blade 21 from these images. That is, it can be seen that the blade 21 on which the kerf 102 is formed is normal, the blade 21 on which the kerf 104 is formed is partially worn, and the blade 21 on which the kerf 106 is formed is moderately worn. Therefore, the diagnostic unit 14 can detect an abnormal state of the blade 21.

  Thus, by calculating the tip shape of the blade based on the radius R of the blade 21 and the cut depth D0 of the kerf 100, the state of the blade 21 that causes the failure can be detected in advance, and the backside chipping can be detected. Occurrence and the like can be prevented. The calculation of the depth Dn of the kerf 100 may use not the radius R of the blade 21 but the diameter or circumference of the blade 21 correlated with the radius R.

In the present embodiment, the cut depth D0 of the kerf 100 is controlled from the detection result of the height detection means (not shown) and the driving amount of the Z table 43 in the Z direction. It may be calculated. For example, as shown in FIG. 7, by obtaining the distance L0 to the end of the central X _C and calf 100 in the longitudinal direction at the center Y _C in the width direction of the kerf 100, cutting depth D0 is the following formula Can be calculated.

  Further, in the present embodiment, the blade diagnostic apparatus is incorporated in the dicing apparatus 1, but the blade diagnostic apparatus may be configured by a plurality of apparatuses. For example, the kerf 100 is formed on the workpiece W by the blade 21 attached to the dicing apparatus 1, the image of the kerf 100 is captured by the camera 23 different from the dicing apparatus 1, and the image processing apparatus different from the dicing apparatus 1 and the camera 23 is used. The tip shape of the blade 21 may be calculated by diagnosing the abnormality of the blade 21.

  The blade diagnosis method according to the present embodiment is configured as a program for causing a computer to execute the above steps, and is a non-temporary recording medium such as a CD-ROM (Compact Disk-Read Only Memory) that stores the program. It is also possible to configure.

  The technical scope of the present invention is not limited to the scope described in the above embodiment. The configurations and the like in the embodiments can be appropriately combined between the embodiments without departing from the gist of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Dicing apparatus, 2 ... Processing part, 10 ... Controller, 21 ... Blade, 22 ... Spindle, 31 ... Work table, 32 ... Rotary table, 33 ... X table, 35 ... Linear motor, 36 ... X base, 41 ... Y Table, 42 ... Y guide, 43 ... Z table, 44 ... Y base, 51 ... Load port, 52 ... Cleaning section, 53 ... Conveying means, W ... Workpiece

Claims (4)

A groove forming step of rotating a disk-shaped blade to bring the tip of the blade into contact with a plate-shaped workpiece and forming a groove in the workpiece;
An image acquisition step of acquiring an image of the formed groove in plan view;
A measuring step of measuring the dimensions of the groove from the acquired image;
A calculation step of calculating the tip shape of the blade from the measured dimensions;
An output step of outputting information on the calculated tip shape;
With
The calculating step calculates the tip shape of the blade based on the radius of the blade, and is in a direction orthogonal to the width direction of the groove at a position away from the center of the groove by a predetermined distance in the width direction. Based on the length, the position of the end of the blade at a position away from the center of the blade by the predetermined distance in the thickness direction is calculated.
Blade diagnostic method. A groove forming step of rotating a disk-shaped blade to bring the tip of the blade into contact with a plate-shaped workpiece and forming a groove in the workpiece;
An image acquisition step of acquiring an image of the formed groove in plan view;
A measuring step of measuring the dimensions of the groove from the acquired image;
A calculation step of calculating the tip shape of the blade from the measured dimensions;
An output step of outputting information on the calculated tip shape;
A program for causing a computer to execute
The calculating step calculates the tip shape of the blade based on the radius of the blade, and is in a direction orthogonal to the width direction of the groove at a position away from the center of the groove by a predetermined distance in the width direction. Based on the length, the position of the end of the blade at a position away from the center of the blade by the predetermined distance in the thickness direction is calculated.
program. A groove-forming portion that rotates a disk-shaped blade to bring the tip of the blade into contact with a flat plate-shaped workpiece, and forms a groove in the workpiece;
An image acquisition unit for acquiring an image of the formed groove in plan view;
A measurement unit for measuring the dimensions of the groove from the acquired image;
A calculation unit for calculating the tip shape of the blade from the measured dimensions;
An output unit for outputting information on the calculated tip shape;
With
The calculation unit calculates the tip shape of the blade based on the radius of the blade, and is in a direction orthogonal to the width direction of the groove at a position away from the center of the groove by a predetermined distance in the width direction. Based on the length, the position of the end of the blade at a position away from the center of the blade by the predetermined distance in the thickness direction is calculated.
Blade diagnostic device. A disk-shaped blade,
A control unit for dicing the workpiece by the blade;
A blade diagnostic device according to claim 3;
A dicing apparatus comprising:

Images