JP6646187B1 - 電気光学素子のための複合基板とその製造方法 - Google Patents

電気光学素子のための複合基板とその製造方法 Download PDF

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JP6646187B1
JP6646187B1 JP2019549494A JP2019549494A JP6646187B1 JP 6646187 B1 JP6646187 B1 JP 6646187B1 JP 2019549494 A JP2019549494 A JP 2019549494A JP 2019549494 A JP2019549494 A JP 2019549494A JP 6646187 B1 JP6646187 B1 JP 6646187B1
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electro
refractive index
substrate
interface
layer
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JPWO2020095478A1 (ja
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雄大 鵜野
雄大 鵜野
知義 多井
知義 多井
近藤　順悟
順悟 近藤
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NGK Insulators Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
JP2019549494A 2018-11-08 2019-07-11 電気光学素子のための複合基板とその製造方法 Active JP6646187B1 (ja)

Priority Applications (1)

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JP2020002430A JP7337713B2 (ja) 2018-11-08 2020-01-09 電気光学素子のための複合基板とその製造方法

Applications Claiming Priority (3)

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PCT/JP2018/041548 WO2020095421A1 (ja) 2018-11-08 2018-11-08 電気光学素子のための複合基板とその製造方法
JPPCT/JP2018/041548 2018-11-08
PCT/JP2019/027570 WO2020095478A1 (ja) 2018-11-08 2019-07-11 電気光学素子のための複合基板とその製造方法

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JPWO2020095478A1 JPWO2020095478A1 (ja) 2021-02-15

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US (2) US11150497B2 (https=)
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WO (2) WO2020095421A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021149103A (ja) * 2020-03-16 2021-09-27 日本碍子株式会社 接合体、光導波路基板および光変調器
WO2021235496A1 (ja) * 2020-05-20 2021-11-25 日本碍子株式会社 電気光学素子用複合基板
CN114839716A (zh) * 2022-07-05 2022-08-02 天津华慧芯科技集团有限公司 一种可实现端面低粗糙度的光学调制器结构及制备方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI3798718T3 (fi) * 2018-05-22 2023-07-12 Ngk Insulators Ltd Komposiittialusta sähköoptiselle elementille ja menetelmä saman valmistamiseksi
CN113614292B (zh) * 2019-03-28 2024-08-23 日本碍子株式会社 半导体膜
DE102020211282A1 (de) * 2020-09-09 2022-03-10 Q.ant GmbH Verfahren zum Verbinden eines optischen Kristalls mit einem Substrat

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JPH09211404A (ja) * 1996-01-29 1997-08-15 Tokin Corp 光導波路素子
JP2000275455A (ja) * 1999-03-29 2000-10-06 Sumitomo Osaka Cement Co Ltd 光導波路素子
JP2004145261A (ja) * 2002-05-31 2004-05-20 Matsushita Electric Ind Co Ltd 光学素子およびその製造方法
JP2006284963A (ja) * 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd 光変調器
JP2007264548A (ja) * 2006-03-30 2007-10-11 Sumitomo Osaka Cement Co Ltd 光変調素子
US20070297732A1 (en) * 2006-06-07 2007-12-27 Collinear Corporation Efficient nonlinear optical waveguide using single-mode, high v-number structure
JP2016191823A (ja) * 2015-03-31 2016-11-10 住友大阪セメント株式会社 光変調器モジュール
JP2018093329A (ja) * 2016-12-01 2018-06-14 日本碍子株式会社 弾性波素子

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JP3963313B2 (ja) 2001-09-05 2007-08-22 日本碍子株式会社 光導波路デバイス、光変調器および光変調器の実装構造
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JP4545380B2 (ja) * 2003-01-16 2010-09-15 パナソニック株式会社 光導波路デバイスならびにそれを用いたコヒーレント光源およびそれを備えた光学装置
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JP4658658B2 (ja) * 2005-03-29 2011-03-23 住友大阪セメント株式会社 光変調器
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JPH09211404A (ja) * 1996-01-29 1997-08-15 Tokin Corp 光導波路素子
JP2000275455A (ja) * 1999-03-29 2000-10-06 Sumitomo Osaka Cement Co Ltd 光導波路素子
JP2004145261A (ja) * 2002-05-31 2004-05-20 Matsushita Electric Ind Co Ltd 光学素子およびその製造方法
JP2006284963A (ja) * 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd 光変調器
JP2007264548A (ja) * 2006-03-30 2007-10-11 Sumitomo Osaka Cement Co Ltd 光変調素子
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021149103A (ja) * 2020-03-16 2021-09-27 日本碍子株式会社 接合体、光導波路基板および光変調器
JP7410068B2 (ja) 2020-03-16 2024-01-09 日本碍子株式会社 接合体、光導波路基板および光変調器
WO2021235496A1 (ja) * 2020-05-20 2021-11-25 日本碍子株式会社 電気光学素子用複合基板
JPWO2021235496A1 (https=) * 2020-05-20 2021-11-25
JP2021184075A (ja) * 2020-05-20 2021-12-02 日本碍子株式会社 電気光学素子用複合基板
JP7085599B2 (ja) 2020-05-20 2022-06-16 日本碍子株式会社 電気光学素子用複合基板
JP7199571B2 (ja) 2020-05-20 2023-01-05 日本碍子株式会社 電気光学素子用複合基板
JP2023040025A (ja) * 2020-05-20 2023-03-22 日本碍子株式会社 電気光学素子用複合基板
JP7401639B2 (ja) 2020-05-20 2023-12-19 日本碍子株式会社 電気光学素子用複合基板
US12411367B2 (en) 2020-05-20 2025-09-09 Ngk Insulators, Ltd. Composite substrate for electro-optical element
CN114839716A (zh) * 2022-07-05 2022-08-02 天津华慧芯科技集团有限公司 一种可实现端面低粗糙度的光学调制器结构及制备方法

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Publication number Publication date
EP3879336A4 (en) 2022-09-14
CN114815329B (zh) 2025-10-10
US11150497B2 (en) 2021-10-19
EP3879336B1 (en) 2026-04-29
JP7337713B2 (ja) 2023-09-04
US12025864B2 (en) 2024-07-02
JP2020076998A (ja) 2020-05-21
CN114815329A (zh) 2022-07-29
JPWO2020095478A1 (ja) 2021-02-15
WO2020095421A1 (ja) 2020-05-14
US20210215955A1 (en) 2021-07-15
EP3879336A1 (en) 2021-09-15
WO2020095478A1 (ja) 2020-05-14
CN112955811B (zh) 2022-05-24
CN112955811A (zh) 2021-06-11
US20220004030A1 (en) 2022-01-06

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