JP6640160B2 - 成膜装置及び成膜方法 - Google Patents
成膜装置及び成膜方法 Download PDFInfo
- Publication number
- JP6640160B2 JP6640160B2 JP2017172348A JP2017172348A JP6640160B2 JP 6640160 B2 JP6640160 B2 JP 6640160B2 JP 2017172348 A JP2017172348 A JP 2017172348A JP 2017172348 A JP2017172348 A JP 2017172348A JP 6640160 B2 JP6640160 B2 JP 6640160B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- film forming
- reaction gas
- film
- processing container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims description 186
- 239000000758 substrate Substances 0.000 claims description 73
- 238000012545 processing Methods 0.000 claims description 56
- 239000012495 reaction gas Substances 0.000 claims description 47
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910052724 xenon Inorganic materials 0.000 claims description 7
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 5
- 229910004261 CaF 2 Inorganic materials 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000000862 absorption spectrum Methods 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 description 120
- 238000011156 evaluation Methods 0.000 description 62
- 238000009792 diffusion process Methods 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 14
- 238000012360 testing method Methods 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 238000009826 distribution Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 5
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 5
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 4
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 4
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 238000005121 nitriding Methods 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 238000002835 absorbance Methods 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- -1 for example Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000002779 inactivation Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- SEEPANYCNGTZFQ-UHFFFAOYSA-N sulfadiazine Chemical compound C1=CC(N)=CC=C1S(=O)(=O)NC1=NC=CC=N1 SEEPANYCNGTZFQ-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02277—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition the reactions being activated by other means than plasma or thermal, e.g. photo-CVD
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
真空雰囲気を形成するための処理容器と、
前記処理容器内に設けられた基板の載置部と、
前記処理容器内に原料ガスを供給するための原料ガス供給部と、
前記処理容器内に窒素を含む反応ガスを供給するための反応ガス供給部と、
前記反応ガス供給部から供給される反応ガスに水素ガスを混合する水素ガス供給部と、
前記反応ガスが前記原料ガスと反応する前に反応ガスと水素ガスとを混合した混合ガスを励起するための紫外線照射部と、を備え、
前記紫外線照射部の紫外線が前記載置部上の基板に照射されないように構成されていることを特徴とする。
処理容器内の載置部に基板を載置する工程と、
次いで前記処理容器内を真空雰囲気とした状態で、処理容器内に原料ガスを供給する工程と、
前記反応ガスに水素ガスを混合する工程と、
前記反応ガスが前記原料ガスと反応する前に前記反応ガスと水素ガスとの混合ガスを紫外線により励起する工程と、
励起された混合ガスを前記処理容器内に供給する工程と、を含み、
前記紫外線が前記載置部上の基板に照射されないことを特徴とする。
処理容器1の底面には排気口14が設けられている。排気口14には排気管15の一端が接続されており、排気管15の他端側は排気口14側から圧力調整16バルブ、開閉バルブ17が介設され、真空排気機構である真空排気部18に接続されている。
次いで、バルブV61を開き、Si2H6ガス導入路61から、シャワーヘッド7にSi2H6ガスを例えば0.5sccmの流量で供給する。Si2H6ガスは、シャワーヘッド7の下方側拡散室10Bにて水平方向に拡散し、Si2H6ガス吐出孔72から処理容器1内に供給される。またバルブV51及びV53を開き、NH3ガスを100sccmの流量、添加ガスであるH2ガスを300sccmの流量で供給する。これによりNH3ガスと、H2ガスと、は、混合された混合ガスとなり、紫外線照射部3に供給される。さらにNH3ガス導入路51からシャワーヘッド7に、さらにキセノンエキシマランプ32によりNH3ガス導入路51に波長172nmの紫外線を照射する。
これに対してSi2H6ガスと反応する前のNH3ガスを紫外線の照射により励起することで、NH3を適度に活性化することができる。このように構成することで、励起されたNH3がウエハWまで到達し、例えば350℃程度の低い加熱温度であっても、励起されたNH3と、Si2H6とが反応することより、ウエハWに強度の高いシリコン窒化膜を成膜することができる。
また反応ガスと共にH2ガスを流さない場合においてもSiN膜を成膜することはできるため効果はあるが、後述の実施例2に示すように反応ガスと共にH2ガスを流し、反応ガスとH2ガスとの混合ガスに紫外線を照射することにより、よりエッチング耐性の高いSiN膜を得ることができるためより一層好ましい。
また本発明は、原料ガスと、反応ガスとを交互に複数回供給して、ウエハWへの原料ガスの吸着と、その原料ガスと反応ガスとの反応を繰り返して、例えば1分子層ずつSiNを堆積し、SiN膜を成膜するいわゆるALD(Atomic Layer Deposition)法に適用してもよい。
本発明の実施の形態の効果を検証するために以下の試験を行った。図3は評価試験用の成膜装置を示す。図3に示すように評価試験用の成膜装置は、例えば真空容器で構成された反応室101を備え、反応室101内には、例えば長さ6cmの帯型形状の評価用基板100を載置する載置台200が設けられている。また載置台200には、図示しないヒータが埋設されており、載置台に載置された基板、例えば評価用基板を100℃から450℃の間の所定の設定温度で加熱できるように構成されている。反応室101における評価用基板100の長さ方向一端側の側面には、図1に示したNH3ガス導入路51の下流側端部が接続されている。またNH3ガス導入路51には、図1に示したNH3ガス導入路51と同様にキセノンエキシマランプ32を用いた紫外線照射部300が介設され、反応室101にNH3ガスを導入するためのNH3ガス導入路51を流れるガスにキセノンエキシマランプ32により紫外線を照射するように設けられている。なお図3に示した評価用の成膜装置においては、紫外線照射部300におけるキセノンエキシマランプ32紫外線が照射される位置に窓部33が形成され、窓部33を通過する紫外線の強度を検出する紫外線測定部34が設けられている。
先ず実施例の説明を行う前に、評価試験用の成膜装置の特性を調べる予備試験について説明する。予備試験として、評価試験用の成膜装置を用いて、評価用基板100に成膜処理を行い、評価用基板100の加熱温度(評価用基板100の加熱温度)に対して、評価用基板100に成膜される膜の膜厚分布を調べた。
上述の評価試験用の成膜装置において、成膜処理における評価用基板100の温度を常温(25℃)、100℃、200℃、300℃、350℃、400℃及び450℃に設定して成膜を行った。成膜処理を行うにあたって、反応室101内の圧力を133Paに設定し、NH3ガスを40sccm、Si2H6ガスを0.5sccm、の流量で60分供給した。
[実施例1−1]
評価用基板100の加熱温度を400℃に設定し、反応室101内の圧力を133Paに設定し、NH3ガスを100sccm、H2ガスを300sccm、Si2H6ガスを0.5sccmの流量で60分供給して実施の形態に示した成膜処理を行った例を実施例1−1とした。
[実施例1−2]
評価用基板100の加熱温度を350℃に設定し、NH3ガスの流量を78sccmとしたことを除いて実施例1−1と同様に成膜処理を行った例を実施例1−2とした。
[実施例1−3]
評価用基板100の加熱温度を200℃に設定したことを除いて実施例1−2と同様に成膜処理を行った例を実施例1−3とした。
[実施例2−1]
評価用基板の加熱温度を400℃に設定し、反応室101内の圧力を133Paに設定し、NH3ガスを100sccm、H2ガスを300sccm、Si2H6ガスを1.0sccmの流量で60分供給して実施の形態に示した成膜処理を行った例を実施例2−1とした。
[実施例2−2〜2−4]
供給したガスの流量比を後述の表1に示すように設定した他は実施例2−1と同様に処理を行った例を夫々実施例2−2〜2−4とした。
[表1]
2 載置台
3 紫外線照射部
7 シャワーヘッド
9 制御部
10A 上方側拡散室
10B 下方側拡散室
14 排気口
26 ヒータ
51 NH3ガス導入路
61 Si2H6ガス導入路
W ウエハ
Claims (9)
- シリコンを含む原料ガスと窒素を含む反応ガスとを反応させて基板上にシリコン窒化膜を成膜するための装置において、
真空雰囲気を形成するための処理容器と、
前記処理容器内に設けられた基板の載置部と、
前記処理容器内に原料ガスを供給するための原料ガス供給部と、
前記処理容器内に窒素を含む反応ガスを供給するための反応ガス供給部と、
前記反応ガス供給部から供給される反応ガスに水素ガスを混合する水素ガス供給部と、
前記反応ガスが前記原料ガスと反応する前に反応ガスと水素ガスとを混合した混合ガスを励起するための紫外線照射部と、を備え、
前記紫外線照射部の紫外線が前記載置部上の基板に照射されないように構成されていることを特徴とする成膜装置。 - 前記紫外線照射部は、反応ガスと水素ガスとを混合した混合ガスを前記処理容器内に導入するためのガス導入路に紫外線を照射するように設けられていることを特徴とする請求項1に記載の成膜装置。
- 前記紫外線照射部から照射される紫外線の主たる波長は、反応ガス供給部により供給される反応ガスの吸収スペクトルとなる波長に対応して選択されることを特徴とする請求項1または2に記載の成膜装置。
- 前記反応ガスは、アンモニアガスであり、前記紫外線照射部から照射される紫外線の主たる波長は105nm以上220nm以下の長さであることを特徴とする請求項3に記載の成膜装置。
- 前記紫外線照射部はキセノンエキシマランプにより構成されることを特徴とする請求項4に記載の成膜装置。
- 前記紫外線照射部から照射される紫外線が反応ガスが照射される前に透過する紫外線照射窓を備え、
前記紫外線照射窓は、SiO2、LiF、MgF2及びCaF2のいずれかにより構成されることを特徴とする請求項1ないし5のいずれか一項に記載の成膜装置。 - 成膜処理を行う処理雰囲気の温度は、25℃〜600℃であることを特徴とする請求項1ないし6のいずれか一項に記載の成膜装置。
- 成膜処理を行う処理雰囲気の温度は、200〜600℃であることを特徴とする請求項1ないし6のいずれか一項に記載の成膜装置。
- シリコンを含む原料ガスと窒素を含む反応ガスとを反応させて基板上にシリコン窒化膜を成膜する成膜方法において、
処理容器内の載置部に基板を載置する工程と、
次いで前記処理容器内を真空雰囲気とした状態で、処理容器内に原料ガスを供給する工程と、
前記反応ガスに水素ガスを混合する工程と、
前記反応ガスが前記原料ガスと反応する前に前記反応ガスと水素ガスとの混合ガスを紫外線により励起する工程と、
励起された混合ガスを前記処理容器内に供給する工程と、を含み、
前記紫外線が前記載置部上の基板に照射されないことを特徴とする成膜方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017172348A JP6640160B2 (ja) | 2017-09-07 | 2017-09-07 | 成膜装置及び成膜方法 |
CN201811000943.9A CN109468613A (zh) | 2017-09-07 | 2018-08-30 | 成膜装置以及成膜方法 |
US16/123,416 US10559460B2 (en) | 2017-09-07 | 2018-09-06 | Film forming apparatus and film forming method |
KR1020180106869A KR102351565B1 (ko) | 2017-09-07 | 2018-09-07 | 성막 장치 및 성막 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017172348A JP6640160B2 (ja) | 2017-09-07 | 2017-09-07 | 成膜装置及び成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019049016A JP2019049016A (ja) | 2019-03-28 |
JP6640160B2 true JP6640160B2 (ja) | 2020-02-05 |
Family
ID=65517314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017172348A Active JP6640160B2 (ja) | 2017-09-07 | 2017-09-07 | 成膜装置及び成膜方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10559460B2 (ja) |
JP (1) | JP6640160B2 (ja) |
KR (1) | KR102351565B1 (ja) |
CN (1) | CN109468613A (ja) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57161518A (en) * | 1981-03-31 | 1982-10-05 | Anritsu Corp | Self modulating spectrometer |
JPH1098032A (ja) * | 1996-09-20 | 1998-04-14 | Hitachi Ltd | 薄膜形成方法及び薄膜形成装置 |
US6576564B2 (en) * | 2000-12-07 | 2003-06-10 | Micron Technology, Inc. | Photo-assisted remote plasma apparatus and method |
JP5079949B2 (ja) * | 2001-04-06 | 2012-11-21 | 東京エレクトロン株式会社 | 処理装置および処理方法 |
JP2004128195A (ja) * | 2002-10-02 | 2004-04-22 | Oki Electric Ind Co Ltd | 保護膜の製造方法 |
JP2010103484A (ja) | 2008-09-29 | 2010-05-06 | Adeka Corp | 半導体デバイス、その製造装置及び製造方法 |
JP5865583B2 (ja) * | 2010-10-04 | 2016-02-17 | ウシオ電機株式会社 | 排ガスの無触媒脱硝方法および装置 |
JP5941653B2 (ja) * | 2011-02-24 | 2016-06-29 | 東京エレクトロン株式会社 | シリコン窒化膜の成膜方法及びシリコン窒化膜の成膜装置 |
CN103196554B (zh) * | 2013-03-14 | 2015-02-25 | 合肥京东方光电科技有限公司 | 光源光强均一性测调系统及测调方法 |
US9435031B2 (en) * | 2014-01-07 | 2016-09-06 | International Business Machines Corporation | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same |
CN103820772B (zh) * | 2014-02-12 | 2016-07-06 | 清华大学 | 去除pecvd装置的电荷的系统及其控制方法 |
-
2017
- 2017-09-07 JP JP2017172348A patent/JP6640160B2/ja active Active
-
2018
- 2018-08-30 CN CN201811000943.9A patent/CN109468613A/zh active Pending
- 2018-09-06 US US16/123,416 patent/US10559460B2/en active Active
- 2018-09-07 KR KR1020180106869A patent/KR102351565B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2019049016A (ja) | 2019-03-28 |
US10559460B2 (en) | 2020-02-11 |
US20190074177A1 (en) | 2019-03-07 |
CN109468613A (zh) | 2019-03-15 |
KR102351565B1 (ko) | 2022-01-17 |
KR20190027753A (ko) | 2019-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10497561B2 (en) | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | |
US8685832B2 (en) | Trench filling method and method of manufacturing semiconductor integrated circuit device | |
US20190311898A1 (en) | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | |
JP2010183069A (ja) | 半導体装置の製造方法及び基板処理装置 | |
US20110318940A1 (en) | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | |
WO2007139141A1 (ja) | 絶縁膜の形成方法および半導体装置の製造方法 | |
WO2006049199A1 (ja) | 絶縁膜形成方法および基板処理方法 | |
JP7224217B2 (ja) | 成膜方法及び成膜装置 | |
JP2016096331A (ja) | 流動性膜の硬化浸透深度の改善及び応力調整 | |
US20200194251A1 (en) | Conformal oxidation processes for 3d nand | |
TWI742327B (zh) | 半導體裝置之製造方法、基板處理方法、基板處理裝置及程式 | |
KR102314998B1 (ko) | 실리콘막의 형성 방법 및 형성 장치 | |
TW201528370A (zh) | 用於增加硬度及模數的低k膜之以二氧化碳及一氧化碳介入的固化 | |
US20210082685A1 (en) | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | |
JP6640160B2 (ja) | 成膜装置及び成膜方法 | |
WO2022085498A1 (ja) | 成膜方法及び成膜装置 | |
JP7300970B2 (ja) | 基板処理方法及び基板処理装置 | |
JP6867548B2 (ja) | 基板処理装置、半導体装置の製造方法及びプログラム | |
WO2019181603A1 (ja) | 基板処理装置、半導体装置の製造方法及びプログラム | |
WO2023047497A1 (ja) | 基板処理装置、プラズマ生成装置、半導体装置の製造方法およびプログラム | |
JP5746744B2 (ja) | 半導体装置の製造方法及び基板処理装置 | |
JP6242283B2 (ja) | 成膜方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180810 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20180810 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20180810 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190718 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190730 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190927 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191203 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191225 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6640160 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |