JP6637368B2 - 光導波路装置及びその製造方法 - Google Patents

光導波路装置及びその製造方法 Download PDF

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Publication number
JP6637368B2
JP6637368B2 JP2016076337A JP2016076337A JP6637368B2 JP 6637368 B2 JP6637368 B2 JP 6637368B2 JP 2016076337 A JP2016076337 A JP 2016076337A JP 2016076337 A JP2016076337 A JP 2016076337A JP 6637368 B2 JP6637368 B2 JP 6637368B2
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layer
core
protective layer
optical waveguide
core layer
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Japanese (ja)
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JP2017187620A (ja
JP2017187620A5 (enExample
Inventor
和尚 山本
和尚 山本
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2016076337A priority Critical patent/JP6637368B2/ja
Priority to US15/454,440 priority patent/US9983368B2/en
Publication of JP2017187620A publication Critical patent/JP2017187620A/ja
Publication of JP2017187620A5 publication Critical patent/JP2017187620A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4274—Electrical aspects
    • G02B6/428—Electrical aspects containing printed circuit boards [PCB]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2016076337A 2016-04-06 2016-04-06 光導波路装置及びその製造方法 Active JP6637368B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016076337A JP6637368B2 (ja) 2016-04-06 2016-04-06 光導波路装置及びその製造方法
US15/454,440 US9983368B2 (en) 2016-04-06 2017-03-09 Optical waveguide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016076337A JP6637368B2 (ja) 2016-04-06 2016-04-06 光導波路装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2017187620A JP2017187620A (ja) 2017-10-12
JP2017187620A5 JP2017187620A5 (enExample) 2019-02-28
JP6637368B2 true JP6637368B2 (ja) 2020-01-29

Family

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Family Applications (1)

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JP2016076337A Active JP6637368B2 (ja) 2016-04-06 2016-04-06 光導波路装置及びその製造方法

Country Status (2)

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US (1) US9983368B2 (enExample)
JP (1) JP6637368B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7358224B2 (ja) * 2019-12-09 2023-10-10 新光電気工業株式会社 光モジュール及びその製造方法
JP2022084183A (ja) 2020-11-26 2022-06-07 新光電気工業株式会社 光導波路装置、光通信装置及び光導波路装置の製造方法
US20230091050A1 (en) * 2021-09-20 2023-03-23 Intel Corporation Optical waveguides within a glass substrate to optically couple dies attached to the glass substrate
JP2024012820A (ja) * 2022-07-19 2024-01-31 新光電気工業株式会社 光導波路搭載基板、及び光通信装置
CN115657226B (zh) * 2022-10-26 2023-06-23 之江实验室 一种硅基光交换芯片的光电扇出结构及其制备方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19826648B4 (de) * 1998-06-16 2005-07-28 Siemens Ag Schaltungsträger mit einer optischen Schicht und optoelektronisches Bauelement
JP2005062557A (ja) * 2003-08-15 2005-03-10 Canon Inc 光素子装置、それを用いた二次元光導波路素子及び光電融合配線基板
US7263256B2 (en) * 2004-04-02 2007-08-28 Samsung Electronics Co., Ltd. Optical connection block, optical module, and optical axis alignment method using the same
TWI390264B (zh) * 2004-11-17 2013-03-21 Hitachi Chemical Co Ltd A photoelectric hybrid circuit mounting substrate and a transfer device using the same
KR100770853B1 (ko) * 2006-02-09 2007-10-26 삼성전자주식회사 광 모듈
KR100818622B1 (ko) * 2006-08-14 2008-04-01 삼성전기주식회사 광 인쇄회로기판 및 그 제작방법
JP4983269B2 (ja) * 2007-01-18 2012-07-25 オムロン株式会社 光伝送モジュール、電子機器、及び光伝送モジュールの製造方法
JP5064109B2 (ja) * 2007-05-11 2012-10-31 新光電気工業株式会社 光導波路及びその製造方法、並びに光電気混載基板及びその製造方法
JP5155596B2 (ja) * 2007-05-14 2013-03-06 新光電気工業株式会社 光電気混載基板の製造方法
JP5614018B2 (ja) * 2009-09-17 2014-10-29 日立化成株式会社 光導波路及び光電気複合基板の製造方法並びにそれにより得られる光導波路及び光電気複合基板
JP2011118163A (ja) 2009-12-03 2011-06-16 Shinko Electric Ind Co Ltd 光電気モジュール及びその製造方法並びに光電気モジュール基板
JP5395734B2 (ja) * 2010-05-07 2014-01-22 新光電気工業株式会社 光電気複合基板の製造方法
JP5479310B2 (ja) * 2010-12-03 2014-04-23 新光電気工業株式会社 光導波路及びその製造方法と光導波路装置
JP2013003224A (ja) * 2011-06-14 2013-01-07 Shinko Electric Ind Co Ltd 光導波路及びその製造方法と光導波路装置
US9442251B2 (en) * 2012-01-10 2016-09-13 Hitachi Chemical Company, Ltd. Optical waveguide with mirror, optical fiber connector, and manufacturing method thereof
JP5834926B2 (ja) * 2012-01-11 2015-12-24 日立化成株式会社 光ファイバコネクタの製造方法
JP2015004855A (ja) * 2013-06-21 2015-01-08 日立化成株式会社 ミラー付き光導波路及びその製造方法
JP2015043050A (ja) * 2013-07-23 2015-03-05 日立化成株式会社 光導波路及びその製造方法

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Publication number Publication date
US20170293096A1 (en) 2017-10-12
JP2017187620A (ja) 2017-10-12
US9983368B2 (en) 2018-05-29

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