JP6636238B2 - プラズモン界面とその製造方法 - Google Patents

プラズモン界面とその製造方法 Download PDF

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Publication number
JP6636238B2
JP6636238B2 JP2014164626A JP2014164626A JP6636238B2 JP 6636238 B2 JP6636238 B2 JP 6636238B2 JP 2014164626 A JP2014164626 A JP 2014164626A JP 2014164626 A JP2014164626 A JP 2014164626A JP 6636238 B2 JP6636238 B2 JP 6636238B2
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layer
thin film
optical waveguide
plasmon
metal component
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Japanese (ja)
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JP2015041107A5 (https=
JP2015041107A (ja
Inventor
クリストファー・フレッド・カイメル
ジョン・ブライアン・ヒューグレイ
ジョアン・ホセ・ベセラ
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General Electric Co
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General Electric Co
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/26Anodisation of refractory metals or alloys based thereon
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1226Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B32B2037/243Coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00Coating on the layer surface
    • B32B2255/20Inorganic coating
    • B32B2255/205Metallic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00Coating on the layer surface
    • B32B2255/28Multiple coating on one surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/412Transparent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00Optical elements

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
JP2014164626A 2013-08-20 2014-08-13 プラズモン界面とその製造方法 Active JP6636238B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/970,852 US9465160B2 (en) 2013-08-20 2013-08-20 Plasmonic interface and method of manufacturing thereof
US13/970,852 2013-08-20

Publications (3)

Publication Number Publication Date
JP2015041107A JP2015041107A (ja) 2015-03-02
JP2015041107A5 JP2015041107A5 (https=) 2017-09-14
JP6636238B2 true JP6636238B2 (ja) 2020-01-29

Family

ID=51298566

Family Applications (1)

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JP2014164626A Active JP6636238B2 (ja) 2013-08-20 2014-08-13 プラズモン界面とその製造方法

Country Status (6)

Country Link
US (1) US9465160B2 (https=)
EP (1) EP2840422A3 (https=)
JP (1) JP6636238B2 (https=)
KR (1) KR20150021477A (https=)
CA (1) CA2859421A1 (https=)
TW (1) TWI657278B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10026421B1 (en) * 2016-02-18 2018-07-17 Seagate Technology Llc Hyperbolic metamaterial-based near-field transducer for heat assisted magnetic recording head
RU2689479C1 (ru) * 2017-12-28 2019-05-28 Общество с ограниченной ответственностью "СУАЛ-ПМ" Способ получения плазмонной пленочной структуры из аддитивных порошков на основе алюминия
KR102732518B1 (ko) * 2019-01-03 2024-11-20 삼성전자주식회사 Sers 패치 및 이를 적용한 라만 분광 시스템
CN111766661A (zh) * 2020-06-28 2020-10-13 武汉邮电科学研究院有限公司 一种等离激元波导的制备方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194785A (en) 1986-09-08 1988-03-16 Gen Electric Plc Compounds which produce non-linear optical LB films
JP3876303B2 (ja) * 2002-01-17 2007-01-31 独立行政法人産業技術総合研究所 極微小光導波路およびその製造方法
JP3837508B2 (ja) 2002-06-14 2006-10-25 独立行政法人産業技術総合研究所 表面プラズモン励起性貴金属微粒子状薄膜
US7265845B2 (en) 2003-01-27 2007-09-04 Lake Shore Cryotronics, Inc. Surface corrugation enhanced magneto-optical indicator film
JP2005010025A (ja) 2003-06-19 2005-01-13 Tama Tlo Kk 光ファイバセンサおよびこれを用いた測定方法
KR100546773B1 (ko) 2003-09-18 2006-01-26 한국전자통신연구원 누설 플라즈몬 모드 커플러 및 이를 이용한 광자기 픽업헤드용 편광 측정 모듈
US20060169592A1 (en) * 2005-01-31 2006-08-03 Hewlett-Packard Development Company, L.P. Periodic layered structures and methods therefor
JP2008059691A (ja) * 2006-08-31 2008-03-13 Tdk Corp 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置
KR100783365B1 (ko) 2006-09-29 2007-12-07 한국전자통신연구원 광도파로 소자
US20080093744A1 (en) * 2006-10-23 2008-04-24 Wang Lorraine C Anodization
JP2008176209A (ja) 2007-01-22 2008-07-31 Fdk Corp 表面プラズモンによる光結合デバイス
JP2008275972A (ja) * 2007-05-01 2008-11-13 Fujifilm Corp プラズモン導波路とその製造方法
TW200912279A (en) * 2007-09-14 2009-03-16 Council Of Agriculture Executive Yuan Optical waveguide-type surface plasma resonance sensing device
JP2009076166A (ja) 2007-09-21 2009-04-09 Sony Corp 光アシスト型磁気ヘッド装置、光アシスト型磁気記録装置及び光アシスト磁気記録方法
US20110250402A1 (en) * 2008-06-02 2011-10-13 Applied Biosystems, Llc Localization of near-field resonances in bowtie antennae: influence of adhesion layers
US20100118243A1 (en) * 2008-11-12 2010-05-13 Debasis Majumdar Polymeric conductive donor and transfer method
JP5183541B2 (ja) 2009-03-23 2013-04-17 愛三工業株式会社 燃料性状判定装置
US8054147B2 (en) 2009-04-01 2011-11-08 General Electric Company High voltage switch and method of making
US20100259826A1 (en) 2009-04-10 2010-10-14 Lightwave Power, Inc. Planar plasmonic device for light reflection, diffusion and guiding
US8040761B2 (en) * 2009-06-24 2011-10-18 Tdk Corporation Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween
JP5452140B2 (ja) 2009-09-03 2014-03-26 日本航空電子工業株式会社 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法
US8385021B2 (en) * 2010-03-12 2013-02-26 Tdk Corporation Temperature assisted magnetic recording element having grounded near field light generator
US8077558B1 (en) 2010-05-24 2011-12-13 Tdk Corporation Thermally-assisted magnetic recording head including plasmon generator
US8349198B2 (en) 2010-06-14 2013-01-08 Headway Technologies, Inc. Method of manufacturing near-field light generator including waveguide and plasmon generator
KR101257309B1 (ko) * 2011-11-11 2013-04-23 한국과학기술연구원 광섬유 표면 플라즈몬 공진 센서 및 이를 이용한 센싱 방법

Also Published As

Publication number Publication date
US9465160B2 (en) 2016-10-11
EP2840422A2 (en) 2015-02-25
JP2015041107A (ja) 2015-03-02
US20150055924A1 (en) 2015-02-26
TWI657278B (zh) 2019-04-21
CA2859421A1 (en) 2015-02-20
TW201520621A (zh) 2015-06-01
EP2840422A3 (en) 2015-06-03
KR20150021477A (ko) 2015-03-02

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