JP2015041107A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2015041107A5 JP2015041107A5 JP2014164626A JP2014164626A JP2015041107A5 JP 2015041107 A5 JP2015041107 A5 JP 2015041107A5 JP 2014164626 A JP2014164626 A JP 2014164626A JP 2014164626 A JP2014164626 A JP 2014164626A JP 2015041107 A5 JP2015041107 A5 JP 2015041107A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- optical waveguide
- thin film
- metal component
- plasmon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 50
- 239000010410 layer Substances 0.000 claims 45
- 230000003287 optical effect Effects 0.000 claims 31
- 229910052751 metal Inorganic materials 0.000 claims 29
- 239000002184 metal Substances 0.000 claims 29
- 239000010409 thin film Substances 0.000 claims 24
- 238000000034 method Methods 0.000 claims 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 10
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 10
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 9
- 238000007743 anodising Methods 0.000 claims 8
- 238000000151 deposition Methods 0.000 claims 6
- 229910052782 aluminium Inorganic materials 0.000 claims 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 5
- 229910052715 tantalum Inorganic materials 0.000 claims 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 239000012790 adhesive layer Substances 0.000 claims 3
- 239000010408 film Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 238000002048 anodisation reaction Methods 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/970,852 US9465160B2 (en) | 2013-08-20 | 2013-08-20 | Plasmonic interface and method of manufacturing thereof |
| US13/970,852 | 2013-08-20 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015041107A JP2015041107A (ja) | 2015-03-02 |
| JP2015041107A5 true JP2015041107A5 (https=) | 2017-09-14 |
| JP6636238B2 JP6636238B2 (ja) | 2020-01-29 |
Family
ID=51298566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014164626A Active JP6636238B2 (ja) | 2013-08-20 | 2014-08-13 | プラズモン界面とその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9465160B2 (https=) |
| EP (1) | EP2840422A3 (https=) |
| JP (1) | JP6636238B2 (https=) |
| KR (1) | KR20150021477A (https=) |
| CA (1) | CA2859421A1 (https=) |
| TW (1) | TWI657278B (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10026421B1 (en) * | 2016-02-18 | 2018-07-17 | Seagate Technology Llc | Hyperbolic metamaterial-based near-field transducer for heat assisted magnetic recording head |
| RU2689479C1 (ru) * | 2017-12-28 | 2019-05-28 | Общество с ограниченной ответственностью "СУАЛ-ПМ" | Способ получения плазмонной пленочной структуры из аддитивных порошков на основе алюминия |
| KR102732518B1 (ko) * | 2019-01-03 | 2024-11-20 | 삼성전자주식회사 | Sers 패치 및 이를 적용한 라만 분광 시스템 |
| CN111766661A (zh) * | 2020-06-28 | 2020-10-13 | 武汉邮电科学研究院有限公司 | 一种等离激元波导的制备方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2194785A (en) | 1986-09-08 | 1988-03-16 | Gen Electric Plc | Compounds which produce non-linear optical LB films |
| JP3876303B2 (ja) * | 2002-01-17 | 2007-01-31 | 独立行政法人産業技術総合研究所 | 極微小光導波路およびその製造方法 |
| JP3837508B2 (ja) | 2002-06-14 | 2006-10-25 | 独立行政法人産業技術総合研究所 | 表面プラズモン励起性貴金属微粒子状薄膜 |
| US7265845B2 (en) | 2003-01-27 | 2007-09-04 | Lake Shore Cryotronics, Inc. | Surface corrugation enhanced magneto-optical indicator film |
| JP2005010025A (ja) | 2003-06-19 | 2005-01-13 | Tama Tlo Kk | 光ファイバセンサおよびこれを用いた測定方法 |
| KR100546773B1 (ko) | 2003-09-18 | 2006-01-26 | 한국전자통신연구원 | 누설 플라즈몬 모드 커플러 및 이를 이용한 광자기 픽업헤드용 편광 측정 모듈 |
| US20060169592A1 (en) * | 2005-01-31 | 2006-08-03 | Hewlett-Packard Development Company, L.P. | Periodic layered structures and methods therefor |
| JP2008059691A (ja) * | 2006-08-31 | 2008-03-13 | Tdk Corp | 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置 |
| KR100783365B1 (ko) | 2006-09-29 | 2007-12-07 | 한국전자통신연구원 | 광도파로 소자 |
| US20080093744A1 (en) * | 2006-10-23 | 2008-04-24 | Wang Lorraine C | Anodization |
| JP2008176209A (ja) | 2007-01-22 | 2008-07-31 | Fdk Corp | 表面プラズモンによる光結合デバイス |
| JP2008275972A (ja) * | 2007-05-01 | 2008-11-13 | Fujifilm Corp | プラズモン導波路とその製造方法 |
| TW200912279A (en) * | 2007-09-14 | 2009-03-16 | Council Of Agriculture Executive Yuan | Optical waveguide-type surface plasma resonance sensing device |
| JP2009076166A (ja) | 2007-09-21 | 2009-04-09 | Sony Corp | 光アシスト型磁気ヘッド装置、光アシスト型磁気記録装置及び光アシスト磁気記録方法 |
| US20110250402A1 (en) * | 2008-06-02 | 2011-10-13 | Applied Biosystems, Llc | Localization of near-field resonances in bowtie antennae: influence of adhesion layers |
| US20100118243A1 (en) * | 2008-11-12 | 2010-05-13 | Debasis Majumdar | Polymeric conductive donor and transfer method |
| JP5183541B2 (ja) | 2009-03-23 | 2013-04-17 | 愛三工業株式会社 | 燃料性状判定装置 |
| US8054147B2 (en) | 2009-04-01 | 2011-11-08 | General Electric Company | High voltage switch and method of making |
| US20100259826A1 (en) | 2009-04-10 | 2010-10-14 | Lightwave Power, Inc. | Planar plasmonic device for light reflection, diffusion and guiding |
| US8040761B2 (en) * | 2009-06-24 | 2011-10-18 | Tdk Corporation | Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween |
| JP5452140B2 (ja) | 2009-09-03 | 2014-03-26 | 日本航空電子工業株式会社 | 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法 |
| US8385021B2 (en) * | 2010-03-12 | 2013-02-26 | Tdk Corporation | Temperature assisted magnetic recording element having grounded near field light generator |
| US8077558B1 (en) | 2010-05-24 | 2011-12-13 | Tdk Corporation | Thermally-assisted magnetic recording head including plasmon generator |
| US8349198B2 (en) | 2010-06-14 | 2013-01-08 | Headway Technologies, Inc. | Method of manufacturing near-field light generator including waveguide and plasmon generator |
| KR101257309B1 (ko) * | 2011-11-11 | 2013-04-23 | 한국과학기술연구원 | 광섬유 표면 플라즈몬 공진 센서 및 이를 이용한 센싱 방법 |
-
2013
- 2013-08-20 US US13/970,852 patent/US9465160B2/en active Active
-
2014
- 2014-08-05 EP EP14179835.5A patent/EP2840422A3/en not_active Ceased
- 2014-08-07 TW TW103127087A patent/TWI657278B/zh active
- 2014-08-13 JP JP2014164626A patent/JP6636238B2/ja active Active
- 2014-08-14 CA CA2859421A patent/CA2859421A1/en not_active Abandoned
- 2014-08-19 KR KR20140107958A patent/KR20150021477A/ko not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE525205T1 (de) | Dreischichtiger film für eine photovoltaische zelle | |
| JP2011039218A5 (ja) | 光学物品の製造方法および光学物品 | |
| JP2015041107A5 (https=) | ||
| JP2014032960A5 (ja) | 表示装置の作製方法 | |
| JP2014507307A5 (https=) | ||
| EA201491363A1 (ru) | Дистанционная рамка для изоляционных стеклопакетов | |
| US8911581B2 (en) | Composite light guide plate manufacturing method | |
| JP2015193214A5 (ja) | 繊維強化積層体及びシャッタ装置並びにカメラ | |
| DE602008005000D1 (de) | Verfahren zur Herstellung einer stabilen durchsichtigen Elektrode | |
| MX2015008470A (es) | Lentes oftalmicas laminadas en pelicula con rendimiento de biselado con muela mejorado. | |
| JP2010198018A5 (https=) | ||
| JP2013097160A5 (https=) | ||
| JP2009052066A5 (https=) | ||
| JP2014534480A5 (https=) | ||
| JP6636238B2 (ja) | プラズモン界面とその製造方法 | |
| JP2016195185A5 (https=) | ||
| JP2015114599A5 (https=) | ||
| CN103709948B (zh) | 一种a/b胶双面胶及制作方法 | |
| CN201825878U (zh) | 安全单向透视玻璃 | |
| JP2012244119A5 (https=) | ||
| CN105659114A (zh) | 一种保护片、保护片的制作方法及电子设备 | |
| JPWO2022201613A5 (ja) | 構成体の製造方法 | |
| CN101948252A (zh) | 安全单向透视玻璃 | |
| JP2012238812A5 (https=) | ||
| CN205493339U (zh) | 一种新型工艺镜子 |