TWI657278B - 電漿界面及製造電漿界面的方法 - Google Patents
電漿界面及製造電漿界面的方法 Download PDFInfo
- Publication number
- TWI657278B TWI657278B TW103127087A TW103127087A TWI657278B TW I657278 B TWI657278 B TW I657278B TW 103127087 A TW103127087 A TW 103127087A TW 103127087 A TW103127087 A TW 103127087A TW I657278 B TWI657278 B TW I657278B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- optical waveguide
- plasma
- metal component
- stack
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 206
- 230000003287 optical effect Effects 0.000 claims abstract description 78
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000007743 anodising Methods 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims description 182
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 238000002048 anodisation reaction Methods 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 63
- 238000006243 chemical reaction Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 238000013500 data storage Methods 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/26—Anodisation of refractory metals or alloys based thereon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/243—Coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
- B32B2255/205—Metallic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/28—Multiple coating on one surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2551/00—Optical elements
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/970,852 US9465160B2 (en) | 2013-08-20 | 2013-08-20 | Plasmonic interface and method of manufacturing thereof |
| US13/970,852 | 2013-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201520621A TW201520621A (zh) | 2015-06-01 |
| TWI657278B true TWI657278B (zh) | 2019-04-21 |
Family
ID=51298566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103127087A TWI657278B (zh) | 2013-08-20 | 2014-08-07 | 電漿界面及製造電漿界面的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9465160B2 (https=) |
| EP (1) | EP2840422A3 (https=) |
| JP (1) | JP6636238B2 (https=) |
| KR (1) | KR20150021477A (https=) |
| CA (1) | CA2859421A1 (https=) |
| TW (1) | TWI657278B (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10026421B1 (en) * | 2016-02-18 | 2018-07-17 | Seagate Technology Llc | Hyperbolic metamaterial-based near-field transducer for heat assisted magnetic recording head |
| RU2689479C1 (ru) * | 2017-12-28 | 2019-05-28 | Общество с ограниченной ответственностью "СУАЛ-ПМ" | Способ получения плазмонной пленочной структуры из аддитивных порошков на основе алюминия |
| KR102732518B1 (ko) * | 2019-01-03 | 2024-11-20 | 삼성전자주식회사 | Sers 패치 및 이를 적용한 라만 분광 시스템 |
| CN111766661A (zh) * | 2020-06-28 | 2020-10-13 | 武汉邮电科学研究院有限公司 | 一种等离激元波导的制备方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207667A (ja) * | 2002-01-17 | 2003-07-25 | National Institute Of Advanced Industrial & Technology | 極微小光導波路およびその製造方法 |
| WO2010056306A1 (en) * | 2008-11-12 | 2010-05-20 | Eastman Kodak Company | Polymeric conductive donor and transfer method |
| US20100329085A1 (en) * | 2009-06-24 | 2010-12-30 | Tdk Corporation | Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween |
| TWI354782B (https=) * | 2007-09-14 | 2011-12-21 | Council Of Agriculture Executive Yuan | |
| US20130120752A1 (en) * | 2011-11-11 | 2013-05-16 | Kyeong Seok Lee | Fiber-optic surface plasmon resonance sensor and sensing method using the same |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2194785A (en) | 1986-09-08 | 1988-03-16 | Gen Electric Plc | Compounds which produce non-linear optical LB films |
| JP3837508B2 (ja) | 2002-06-14 | 2006-10-25 | 独立行政法人産業技術総合研究所 | 表面プラズモン励起性貴金属微粒子状薄膜 |
| US7265845B2 (en) | 2003-01-27 | 2007-09-04 | Lake Shore Cryotronics, Inc. | Surface corrugation enhanced magneto-optical indicator film |
| JP2005010025A (ja) | 2003-06-19 | 2005-01-13 | Tama Tlo Kk | 光ファイバセンサおよびこれを用いた測定方法 |
| KR100546773B1 (ko) | 2003-09-18 | 2006-01-26 | 한국전자통신연구원 | 누설 플라즈몬 모드 커플러 및 이를 이용한 광자기 픽업헤드용 편광 측정 모듈 |
| US20060169592A1 (en) * | 2005-01-31 | 2006-08-03 | Hewlett-Packard Development Company, L.P. | Periodic layered structures and methods therefor |
| JP2008059691A (ja) * | 2006-08-31 | 2008-03-13 | Tdk Corp | 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置 |
| KR100783365B1 (ko) | 2006-09-29 | 2007-12-07 | 한국전자통신연구원 | 광도파로 소자 |
| US20080093744A1 (en) * | 2006-10-23 | 2008-04-24 | Wang Lorraine C | Anodization |
| JP2008176209A (ja) | 2007-01-22 | 2008-07-31 | Fdk Corp | 表面プラズモンによる光結合デバイス |
| JP2008275972A (ja) * | 2007-05-01 | 2008-11-13 | Fujifilm Corp | プラズモン導波路とその製造方法 |
| JP2009076166A (ja) | 2007-09-21 | 2009-04-09 | Sony Corp | 光アシスト型磁気ヘッド装置、光アシスト型磁気記録装置及び光アシスト磁気記録方法 |
| US20110250402A1 (en) * | 2008-06-02 | 2011-10-13 | Applied Biosystems, Llc | Localization of near-field resonances in bowtie antennae: influence of adhesion layers |
| JP5183541B2 (ja) | 2009-03-23 | 2013-04-17 | 愛三工業株式会社 | 燃料性状判定装置 |
| US8054147B2 (en) | 2009-04-01 | 2011-11-08 | General Electric Company | High voltage switch and method of making |
| US20100259826A1 (en) | 2009-04-10 | 2010-10-14 | Lightwave Power, Inc. | Planar plasmonic device for light reflection, diffusion and guiding |
| JP5452140B2 (ja) | 2009-09-03 | 2014-03-26 | 日本航空電子工業株式会社 | 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法 |
| US8385021B2 (en) * | 2010-03-12 | 2013-02-26 | Tdk Corporation | Temperature assisted magnetic recording element having grounded near field light generator |
| US8077558B1 (en) | 2010-05-24 | 2011-12-13 | Tdk Corporation | Thermally-assisted magnetic recording head including plasmon generator |
| US8349198B2 (en) | 2010-06-14 | 2013-01-08 | Headway Technologies, Inc. | Method of manufacturing near-field light generator including waveguide and plasmon generator |
-
2013
- 2013-08-20 US US13/970,852 patent/US9465160B2/en active Active
-
2014
- 2014-08-05 EP EP14179835.5A patent/EP2840422A3/en not_active Ceased
- 2014-08-07 TW TW103127087A patent/TWI657278B/zh active
- 2014-08-13 JP JP2014164626A patent/JP6636238B2/ja active Active
- 2014-08-14 CA CA2859421A patent/CA2859421A1/en not_active Abandoned
- 2014-08-19 KR KR20140107958A patent/KR20150021477A/ko not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207667A (ja) * | 2002-01-17 | 2003-07-25 | National Institute Of Advanced Industrial & Technology | 極微小光導波路およびその製造方法 |
| TWI354782B (https=) * | 2007-09-14 | 2011-12-21 | Council Of Agriculture Executive Yuan | |
| WO2010056306A1 (en) * | 2008-11-12 | 2010-05-20 | Eastman Kodak Company | Polymeric conductive donor and transfer method |
| US20100329085A1 (en) * | 2009-06-24 | 2010-12-30 | Tdk Corporation | Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween |
| US20130120752A1 (en) * | 2011-11-11 | 2013-05-16 | Kyeong Seok Lee | Fiber-optic surface plasmon resonance sensor and sensing method using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| US9465160B2 (en) | 2016-10-11 |
| EP2840422A2 (en) | 2015-02-25 |
| JP2015041107A (ja) | 2015-03-02 |
| US20150055924A1 (en) | 2015-02-26 |
| CA2859421A1 (en) | 2015-02-20 |
| TW201520621A (zh) | 2015-06-01 |
| JP6636238B2 (ja) | 2020-01-29 |
| EP2840422A3 (en) | 2015-06-03 |
| KR20150021477A (ko) | 2015-03-02 |
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