JP6625562B2 - 先進的金属パターニングを有する高密度スタティックランダムアクセスメモリアレイ - Google Patents

先進的金属パターニングを有する高密度スタティックランダムアクセスメモリアレイ Download PDF

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JP6625562B2
JP6625562B2 JP2016567790A JP2016567790A JP6625562B2 JP 6625562 B2 JP6625562 B2 JP 6625562B2 JP 2016567790 A JP2016567790 A JP 2016567790A JP 2016567790 A JP2016567790 A JP 2016567790A JP 6625562 B2 JP6625562 B2 JP 6625562B2
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metal
islands
metal lines
random access
access memory
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JP2017516313A5 (enExample
JP2017516313A (ja
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ニラドリ・モジュムダー
スタンリー・スンチュル・ソン
ジョンゼ・ワン
チョー・フェイ・イェプ
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クアルコム，インコーポレイテッド
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10—Integrated device layouts

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
JP2016567790A 2014-05-19 2015-04-20 先進的金属パターニングを有する高密度スタティックランダムアクセスメモリアレイ Active JP6625562B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/281,710 2014-05-19
US14/281,710 US9318564B2 (en) 2014-05-19 2014-05-19 High density static random access memory array having advanced metal patterning
PCT/US2015/026588 WO2015179050A1 (en) 2014-05-19 2015-04-20 High density static random access memory array having advanced metal patterning

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JP2017516313A JP2017516313A (ja) 2017-06-15
JP2017516313A5 JP2017516313A5 (enExample) 2018-05-24
JP6625562B2 true JP6625562B2 (ja) 2019-12-25

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US (1) US9318564B2 (enExample)
EP (1) EP3146564B1 (enExample)
JP (1) JP6625562B2 (enExample)
KR (1) KR102231182B1 (enExample)
CN (1) CN106463502B (enExample)
ES (1) ES2875037T3 (enExample)
WO (1) WO2015179050A1 (enExample)

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US10944052B2 (en) 2018-08-14 2021-03-09 Newport Fab, Llc Phase-change material (PCM) radio frequency (RF) switch using a chemically protective and thermally conductive layer
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US10686130B2 (en) 2018-08-14 2020-06-16 Newport Fab, Llc Phase-change material (PCM) contact configurations for improving performance in PCM RF switches
US10707125B2 (en) 2018-08-14 2020-07-07 Newport Fab, Llc Fabrication of contacts in an RF switch having a phase-change material (PCM) and a heating element
US10693061B2 (en) 2018-08-14 2020-06-23 Newport Fab, Llc Semiconductor devices having phase-change material (PCM) radio frequency (RF) switches and integrated active devices
US10615338B2 (en) 2018-08-14 2020-04-07 Newport Fab, Llc Phase-change material (PCM) contacts with slot lower portions and contact dielectric for reducing parasitic capacitance and improving manufacturability in PCM RF switches
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Publication number Publication date
ES2875037T3 (es) 2021-11-08
EP3146564B1 (en) 2021-05-26
WO2015179050A1 (en) 2015-11-26
KR102231182B1 (ko) 2021-03-22
EP3146564A1 (en) 2017-03-29
CN106463502B (zh) 2019-12-20
CN106463502A (zh) 2017-02-22
KR20170005005A (ko) 2017-01-11
JP2017516313A (ja) 2017-06-15
US9318564B2 (en) 2016-04-19
US20150333131A1 (en) 2015-11-19

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