JP6609425B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP6609425B2 JP6609425B2 JP2015121634A JP2015121634A JP6609425B2 JP 6609425 B2 JP6609425 B2 JP 6609425B2 JP 2015121634 A JP2015121634 A JP 2015121634A JP 2015121634 A JP2015121634 A JP 2015121634A JP 6609425 B2 JP6609425 B2 JP 6609425B2
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- 238000012545 processing Methods 0.000 title claims description 254
- 238000012546 transfer Methods 0.000 claims description 47
- 239000007789 gas Substances 0.000 description 53
- 235000012431 wafers Nutrition 0.000 description 49
- 238000012423 maintenance Methods 0.000 description 39
- 239000007795 chemical reaction product Substances 0.000 description 16
- 230000002093 peripheral effect Effects 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 10
- 238000007689 inspection Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 5
- 230000003993 interaction Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- -1 plasma Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/3288—Maintenance
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32807—Construction (includes replacing parts of the apparatus)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Epidemiology (AREA)
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- Public Health (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Plasma Technology (AREA)
Description
101…大気ブロック、
102…真空ブロック、
104、104−1、104−2…真空搬送室、
105…ロック室、
106…大気搬送室、
107…カセット台、
108…搬送中間室、
109…大気搬送ロボット、
110、110−1、110−2…真空搬送ロボット、
111…第1のゲートバルブ、
112…第2のゲートバルブ、
115…バルブボックス、
200,200−1,200−2,200−3,200−4…真空処理ユニット、
201…第1の高周波電源、
202…蓋部材、
203…シャワープレート、
204…ガス導入リング、
205…石英内筒、
206…ソレノイドコイル、
207…Oリング、
210…旋回リフター、
211…上下軸、
212,212−1,212−2…旋回軸、
213…トラベリングナット
214…旋回ベース(放電ブロックユニット用)
215…旋回ベース(試料台ユニット用)
220…放電ブロックユニット、
221…放電ブロックベース、
222…ヒータ、
223…第1の温度コントローラ、
224…放電ブロック、
225…アースリング、
230…上部容器、
240…試料台ユニット、
241…試料台、
242…試料台ベース、
243…第2の高周波電源、
244…第2の温度コントローラ、
245…試料台底部蓋、
246…支持梁、
250…下部容器、
260…ベースプレート、
261…排気部蓋、
262…アクチュエータ、
270…排気ポンプ、
280…支柱、
290…中心軸、
300…ウエハ、
310…放電ブロックユニットの動く方向、
320…試料台ユニットの動く方向、
400…作業者。
Claims (6)
- 減圧された内側に配置されたウエハがプラズマを用いて処理される処理室を有した真空容器と、この真空容器が載せられて当該真空容器内部の処理室からのガスが排出される開口を有したベースプレートとを有し、前記真空容器を構成する少なくとも1つの部材が前記ベースプレートに対して水平方向に移動して取り外し可能に構成されたプラズマ処理装置であって、
前記ベースプレートの前記真空容器を挟んで当該真空容器の側方に配置され減圧された内部を前記ウエハが搬送される真空搬送室の反対の側の端部にこれと連結されて取り付けられ、上下方向に延在する軸を有して前記取り外し可能な部材を上下方向に移動させるリフターを備え、
このリフターの前記上下方向の軸に連結されて配置され当該軸に沿って上下方向に移動する連結部と、この連結部に配置され前記取り外し可能な部材が連結された関節部であって前記リフターの軸に並列に配置されて当該取外し可能な部材がその周りで水平方向に旋回する旋回軸を有する関節部とを備えたプラズマ処理装置。
- 請求項1に記載のプラズマ処理装置であって、
前記真空容器を構成する取り外し可能な部材がシール部材を挟んでこの真空容器に取り付けられるものであって、当該真空容器に取り付けられた状態で前記シール部材に上下方向に荷重が加えられて前記真空容器の内外を気密に封止するプラズマ処理装置。
- 請求項1または2に記載のプラズマ処理装置であって、
前記真空容器を構成する上下に重ねられて配置された複数の部材が前記ベースプレートに対して水平方向に移動して取り外し可能に構成され、
前記リフターが、前記取り外し可能な複数の部材の各々と前記上下方向の軸とに連結された複数の前記連結部の各々と連結されて前記上下方向の軸に沿って移動して前記複数の部材を同時に上下方向に移動させる部材を備えたプラズマ処理装置。
- 請求項1乃至3の何れかに記載のプラズマ処理装置であって、
前記旋回軸が前記リフターの前記上下方向の軸を挟んで前記真空搬送室の反対の側に配置されたプラズマ処理装置。
- 請求項1乃至4の何れかに記載のプラズマ処理装置であって、
前記真空容器を構成する取り外し可能な部材が前記リフターの前記上下方向の軸に沿って移動した後に前記旋回軸周りに回転して移動されるプラズマ処理装置。
- 請求項1乃至5の何れかに記載のプラズマ処理装置であって、
前記真空容器を構成する取り外し可能な部材が前記ウエハをその上面に載せて支持する試料台を含むユニットであるプラズマ処理装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015121634A JP6609425B2 (ja) | 2015-06-17 | 2015-06-17 | プラズマ処理装置 |
KR1020160020600A KR101892024B1 (ko) | 2015-06-17 | 2016-02-22 | 플라즈마 처리 장치 |
US15/050,685 US10665436B2 (en) | 2015-06-17 | 2016-02-23 | Plasma processing apparatus |
TW106122900A TWI653685B (zh) | 2015-06-17 | 2016-02-26 | 電漿處理裝置 |
TW105105935A TWI600082B (zh) | 2015-06-17 | 2016-02-26 | 電漿處理裝置 |
KR1020180097193A KR101990333B1 (ko) | 2015-06-17 | 2018-08-21 | 플라즈마 처리 장치 |
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JP2015121634A JP6609425B2 (ja) | 2015-06-17 | 2015-06-17 | プラズマ処理装置 |
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JP2019194884A Division JP6797994B2 (ja) | 2019-10-28 | 2019-10-28 | プラズマ処理装置 |
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JP2017010624A JP2017010624A (ja) | 2017-01-12 |
JP6609425B2 true JP6609425B2 (ja) | 2019-11-20 |
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US (1) | US10665436B2 (ja) |
JP (1) | JP6609425B2 (ja) |
KR (2) | KR101892024B1 (ja) |
TW (2) | TWI600082B (ja) |
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JP6293499B2 (ja) * | 2014-01-27 | 2018-03-14 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
JP6960737B2 (ja) * | 2017-01-23 | 2021-11-05 | 株式会社日立ハイテク | 真空処理装置 |
US10927449B2 (en) * | 2017-01-25 | 2021-02-23 | Applied Materials, Inc. | Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment |
JP6960830B2 (ja) | 2017-11-17 | 2021-11-05 | 株式会社日立ハイテク | 真空処理装置および真空処理装置の運転方法 |
JP7083463B2 (ja) * | 2018-02-23 | 2022-06-13 | 株式会社日立ハイテク | 真空処理装置 |
US11004720B2 (en) * | 2018-05-23 | 2021-05-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method for ring frame cleaning and inspection |
KR102563925B1 (ko) * | 2018-08-31 | 2023-08-04 | 삼성전자 주식회사 | 반도체 제조 장치 |
KR102225956B1 (ko) * | 2018-10-19 | 2021-03-12 | 세메스 주식회사 | 다이 본딩 장치, 기판 본딩 장치, 다이 본딩 방법 및 기판 본딩 방법 |
CN115643817A (zh) | 2021-05-17 | 2023-01-24 | 株式会社日立高新技术 | 等离子体处理装置 |
CN113467199B (zh) * | 2021-09-06 | 2021-11-12 | 宁波润华全芯微电子设备有限公司 | 一种便于拆卸的防止反溅液体污染晶圆的装置 |
CN116913848B (zh) * | 2023-05-31 | 2024-03-29 | 江苏亚电科技股份有限公司 | 一种晶圆翻转装置 |
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US9328417B2 (en) * | 2008-11-01 | 2016-05-03 | Ultratech, Inc. | System and method for thin film deposition |
JP6293499B2 (ja) * | 2014-01-27 | 2018-03-14 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
JP6491891B2 (ja) * | 2015-01-23 | 2019-03-27 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
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KR20160149137A (ko) | 2016-12-27 |
US20160372305A1 (en) | 2016-12-22 |
TW201701351A (zh) | 2017-01-01 |
TWI600082B (zh) | 2017-09-21 |
US10665436B2 (en) | 2020-05-26 |
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