JP6597430B2 - 強誘電体膜及びその製造方法 - Google Patents

強誘電体膜及びその製造方法 Download PDF

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Publication number
JP6597430B2
JP6597430B2 JP2016054836A JP2016054836A JP6597430B2 JP 6597430 B2 JP6597430 B2 JP 6597430B2 JP 2016054836 A JP2016054836 A JP 2016054836A JP 2016054836 A JP2016054836 A JP 2016054836A JP 6597430 B2 JP6597430 B2 JP 6597430B2
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film
fired
ferroelectric film
ferroelectric
total content
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Japanese (ja)
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JP2016184728A (ja
Inventor
英章 桜井
順 藤井
信幸 曽山
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Priority to KR1020160034731A priority Critical patent/KR102242304B1/ko
Priority to CN201610173372.3A priority patent/CN106007710B/zh
Priority to EP16162247.7A priority patent/EP3078763B1/en
Priority to TW105109240A priority patent/TWI676611B/zh
Priority to US15/080,728 priority patent/US10195827B2/en
Publication of JP2016184728A publication Critical patent/JP2016184728A/ja
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  • Formation Of Insulating Films (AREA)
  • Semiconductor Memories (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)
JP2016054836A 2015-03-26 2016-03-18 強誘電体膜及びその製造方法 Active JP6597430B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020160034731A KR102242304B1 (ko) 2015-03-26 2016-03-23 강유전체막 및 그 제조 방법
CN201610173372.3A CN106007710B (zh) 2015-03-26 2016-03-24 铁电膜及其制造方法
EP16162247.7A EP3078763B1 (en) 2015-03-26 2016-03-24 Ferroelectric film and method of producing same
TW105109240A TWI676611B (zh) 2015-03-26 2016-03-24 強介電體薄膜以及其製造方法
US15/080,728 US10195827B2 (en) 2015-03-26 2016-03-25 Ferroelectric film and method of producing same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015064152 2015-03-26
JP2015064152 2015-03-26

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JP2016184728A JP2016184728A (ja) 2016-10-20
JP6597430B2 true JP6597430B2 (ja) 2019-10-30

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TW (1) TWI676611B (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6607993B2 (ja) * 2018-05-07 2019-11-20 株式会社サイオクス 圧電膜を有する積層基板、圧電膜を有する素子および圧電膜を有する積層基板の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2891304B2 (ja) * 1990-11-16 1999-05-17 三菱マテリアル株式会社 超高純度強誘電体薄膜
US5272341A (en) * 1991-07-18 1993-12-21 General Motors Corporation Transpacitor
DE10326041B4 (de) * 2003-06-10 2014-03-27 Robert Bosch Gmbh Verfahren zur Herstellung von PZT-basierten Keramiken mit niedriger Sintertemperatur und deren Verwendung

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TWI676611B (zh) 2019-11-11
TW201700436A (zh) 2017-01-01
JP2016184728A (ja) 2016-10-20

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