JP6590634B2 - 形状測定方法および形状測定装置 - Google Patents

形状測定方法および形状測定装置 Download PDF

Info

Publication number
JP6590634B2
JP6590634B2 JP2015206694A JP2015206694A JP6590634B2 JP 6590634 B2 JP6590634 B2 JP 6590634B2 JP 2015206694 A JP2015206694 A JP 2015206694A JP 2015206694 A JP2015206694 A JP 2015206694A JP 6590634 B2 JP6590634 B2 JP 6590634B2
Authority
JP
Japan
Prior art keywords
data
frequency
probe
shape
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015206694A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017078641A (ja
JP2017078641A5 (enExample
Inventor
健一 宮里
健一 宮里
明徳 宮田
明徳 宮田
健悟 小川
健悟 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015206694A priority Critical patent/JP6590634B2/ja
Publication of JP2017078641A publication Critical patent/JP2017078641A/ja
Publication of JP2017078641A5 publication Critical patent/JP2017078641A5/ja
Application granted granted Critical
Publication of JP6590634B2 publication Critical patent/JP6590634B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
JP2015206694A 2015-10-20 2015-10-20 形状測定方法および形状測定装置 Expired - Fee Related JP6590634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015206694A JP6590634B2 (ja) 2015-10-20 2015-10-20 形状測定方法および形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015206694A JP6590634B2 (ja) 2015-10-20 2015-10-20 形状測定方法および形状測定装置

Publications (3)

Publication Number Publication Date
JP2017078641A JP2017078641A (ja) 2017-04-27
JP2017078641A5 JP2017078641A5 (enExample) 2018-11-29
JP6590634B2 true JP6590634B2 (ja) 2019-10-16

Family

ID=58665550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015206694A Expired - Fee Related JP6590634B2 (ja) 2015-10-20 2015-10-20 形状測定方法および形状測定装置

Country Status (1)

Country Link
JP (1) JP6590634B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102270942B1 (ko) * 2019-10-30 2021-06-30 가톨릭관동대학교산학협력단 수술용 내비게이션 장치 및 방법
JP2024119480A (ja) * 2023-02-22 2024-09-03 株式会社オービック 異常検知システム、異常検知方法、及び異常検知プログラム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147807A (ja) * 1991-07-18 1994-05-27 Toshiro Higuchi 形状測定方法及び装置
JPH11173836A (ja) * 1997-12-11 1999-07-02 Ricoh Co Ltd 形状測定方法および形状測定装置
JP2001066123A (ja) * 1999-08-27 2001-03-16 Ricoh Co Ltd 3次元形状の形状測定装置及び形状測定方法
JP5301778B2 (ja) * 2007-01-04 2013-09-25 オリンパス株式会社 表面形状測定装置
GB2478303B (en) * 2010-03-02 2018-03-07 Taylor Hobson Ltd Surface measurement instrument and calibration thereof

Also Published As

Publication number Publication date
JP2017078641A (ja) 2017-04-27

Similar Documents

Publication Publication Date Title
JP5758406B2 (ja) 基板トポグラフィならびにそのリソグラフィ・デフォーカスおよびオーバーレイとの関係についてのサイトに基づく定量化
JP6066592B2 (ja) 露光装置及びデバイス製造方法
JP5572387B2 (ja) 多数の測定点の空間座標を判定するための方法および装置
JP5984406B2 (ja) 測定装置
JP6448242B2 (ja) 形状測定装置の測定誤差の補正方法及び形状測定装置
JP6590634B2 (ja) 形状測定方法および形状測定装置
JP6199205B2 (ja) 真直形状測定方法及び真直形状測定装置
JP5089166B2 (ja) プローブカードアナライザにおける部品のたわみの影響を軽減する方法
JP5124249B2 (ja) 表面形状測定用触針式段差計を用いた段差測定方法及び装置
US9921059B2 (en) Measurement value correction method, computer-readable recording medium, and measurement device
JP2019032290A (ja) 走査型プローブ顕微鏡のドリフト補正方法及びドリフト補正機能を備えた走査型プローブ顕微鏡
JP2012112780A (ja) 接触式形状測定装置
WO2019053773A1 (ja) 状態判定装置、状態判定方法、及びコンピュータ読み取り可能な記録媒体
US20200249178A1 (en) Phase contrast x-ray imaging system
JP4427272B2 (ja) 信号処理装置、信号処理方法、信号処理プログラム、信号処理プログラムを記録した記録媒体および測定機
JP6624287B2 (ja) 走査型プローブ顕微鏡用データ処理装置
JP6405195B2 (ja) 測定値補正方法、測定値補正プログラム及び測定装置
JPH11173836A (ja) 形状測定方法および形状測定装置
JP7730512B2 (ja) 光てこ感度の決定方法
JP5301778B2 (ja) 表面形状測定装置
JP3595775B2 (ja) 光学機器の振動解析方法および装置
JP2006138655A (ja) 走査型プローブ顕微鏡
JP2005205450A (ja) 成形型の型面形状修正方法およびそのプログラム
JPH11230735A (ja) 座標測定装置のデータ処理方法
JP2006194604A (ja) 機械的特性算出プログラムおよび機械的特性計測装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20181016

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20181016

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190808

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190820

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190917

R151 Written notification of patent or utility model registration

Ref document number: 6590634

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees