JP6588278B2 - 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法 - Google Patents

走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法 Download PDF

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JP6588278B2
JP6588278B2 JP2015171866A JP2015171866A JP6588278B2 JP 6588278 B2 JP6588278 B2 JP 6588278B2 JP 2015171866 A JP2015171866 A JP 2015171866A JP 2015171866 A JP2015171866 A JP 2015171866A JP 6588278 B2 JP6588278 B2 JP 6588278B2
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cantilever
spot
light
scanning probe
probe microscope
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JP2017049087A (ja
JP2017049087A5 (enExample
Inventor
将史 渡邉
将史 渡邉
利浩 上野
利浩 上野
伊藤　晋
伊藤　　晋
晶一 長谷川
晶一 長谷川
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Hitachi High Tech Science Corp
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Hitachi High Tech Science Corp
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Priority to JP2015171866A priority Critical patent/JP6588278B2/ja
Priority to US15/249,474 priority patent/US10466271B2/en
Priority to CN201610773686.7A priority patent/CN106483337B/zh
Publication of JP2017049087A publication Critical patent/JP2017049087A/ja
Publication of JP2017049087A5 publication Critical patent/JP2017049087A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2015171866A 2015-09-01 2015-09-01 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法 Active JP6588278B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015171866A JP6588278B2 (ja) 2015-09-01 2015-09-01 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法
US15/249,474 US10466271B2 (en) 2015-09-01 2016-08-29 Scanning probe microscope and optical axis adjustment method for scanning probe microscope
CN201610773686.7A CN106483337B (zh) 2015-09-01 2016-08-31 扫描探针显微镜和扫描探针显微镜的光轴调整方法

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JP2015171866A JP6588278B2 (ja) 2015-09-01 2015-09-01 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法

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JP2017049087A JP2017049087A (ja) 2017-03-09
JP2017049087A5 JP2017049087A5 (enExample) 2018-08-16
JP6588278B2 true JP6588278B2 (ja) 2019-10-09

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US (1) US10466271B2 (enExample)
JP (1) JP6588278B2 (enExample)
CN (1) CN106483337B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
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JP2018151187A (ja) * 2017-03-10 2018-09-27 株式会社島津製作所 走査型プローブ顕微鏡
GB201705613D0 (en) 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
JP2019128302A (ja) * 2018-01-26 2019-08-01 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡
CN108318709A (zh) * 2018-04-24 2018-07-24 苏州飞时曼精密仪器有限公司 一种原子力显微镜超短距离激光检测装置
KR102103579B1 (ko) * 2018-05-23 2020-04-23 엠에스테크에스아이 주식회사 마이크로 광소자 검사장치
CN112470010B (zh) * 2018-07-27 2024-06-11 株式会社岛津制作所 扫描探针显微镜以及扫描探针显微镜的控制装置
JP6627953B1 (ja) * 2018-11-20 2020-01-08 株式会社島津製作所 走査型プローブ顕微鏡の光軸調整方法
JP7255521B2 (ja) * 2020-02-26 2023-04-11 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法
JP7665291B2 (ja) * 2020-03-30 2025-04-21 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法
KR102414946B1 (ko) * 2020-06-02 2022-07-04 파크시스템스 주식회사 광원의 빔스팟을 검출하기 위한 방법 및 장치
CN112557701A (zh) * 2020-12-24 2021-03-26 中国计量科学研究院 一种基于参考梁法的微纳力值标准测量装置及其溯源方法
EP4040169A1 (en) 2021-02-03 2022-08-10 Oxford Instruments Asylum Research, Inc. Automated optimization of afm light source positioning
JP2024059249A (ja) * 2022-10-18 2024-05-01 株式会社日立製作所 走査型プローブ顕微鏡

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JP4416171B2 (ja) * 1999-03-17 2010-02-17 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
JP4209709B2 (ja) * 2003-03-20 2009-01-14 株式会社キーエンス 変位計
KR100841031B1 (ko) * 2003-07-23 2008-06-24 히다치 겡키 파인테크 가부시키가이샤 주사형 프로브 현미경의 탐침 교환방법
US7089787B2 (en) * 2004-07-08 2006-08-15 Board Of Trustees Of The Leland Stanford Junior University Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
CN1249419C (zh) * 2004-08-04 2006-04-05 中国科学院上海光学精密机械研究所 原子力显微镜的光点跟踪装置
DE112006000419T5 (de) * 2005-02-24 2008-01-17 Sii Nano Technology Inc. Abtastsondenmikroskop-Versatzerfassungsmechanismus und Abtastsondenmikroskop, welches dergleichen verwendet
US7247827B1 (en) * 2006-05-31 2007-07-24 Academia Sinica System for measurement of the height, angle and their variations of the surface of an object
KR100825985B1 (ko) * 2006-12-21 2008-04-28 파크시스템스 주식회사 자동으로 탐침 교환이 가능한 주사 탐침 현미경
KR100941980B1 (ko) * 2007-11-14 2010-02-11 한국표준과학연구원 고속 대면적 정밀측정 장치 및 방법
JP4873081B2 (ja) * 2008-01-24 2012-02-08 株式会社島津製作所 走査型プローブ顕微鏡
JP5527274B2 (ja) * 2011-04-19 2014-06-18 株式会社島津製作所 走査型プローブ顕微鏡
JP5832374B2 (ja) * 2011-10-13 2015-12-16 株式会社日立ハイテクノロジーズ 走査プローブ顕微鏡のカンチレバー及びその製造方法、並びに熱アシスト磁気ヘッド素子の検査方法及びその装置
JP6009862B2 (ja) * 2012-08-24 2016-10-19 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡
JP5924191B2 (ja) * 2012-08-28 2016-05-25 株式会社島津製作所 走査型プローブ顕微鏡
US8887311B1 (en) * 2013-11-08 2014-11-11 Shimadzu Corporation Scanning probe microscope
CN104634997B (zh) * 2015-02-27 2017-09-19 天津大学 一种适用于高速扫描的原子力显微镜系统

Also Published As

Publication number Publication date
JP2017049087A (ja) 2017-03-09
CN106483337A (zh) 2017-03-08
CN106483337B (zh) 2021-03-23
US20170059609A1 (en) 2017-03-02
US10466271B2 (en) 2019-11-05

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