JP6580689B2 - 集積回路センサおよびセンサ基板 - Google Patents
集積回路センサおよびセンサ基板 Download PDFInfo
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Description
以下、本発明の一実施形態について、図1〜図3に基づいて説明する。
図1は、集積回路センサ4を備えたセンサ基板1の概略構成を示す図である。
図2は、センサ基板1に備えられた集積回路センサ4の概略構成を示す図である。
図3は、集積回路センサ4に備えられた発振器6の回路図である。
次に、図4に基づいて、本発明の実施の形態2について説明する。本実施の形態におけるセンサ基板21においては、集積回路センサ4と親基板としてのプリント基板24との間に、子基板としてのプリント基板22が挿入されている点において、実施の形態1とは異なり、その他については実施の形態1において説明したとおりである。説明の便宜上、実施の形態1の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。
次に、図5から図8に基づいて、本発明の実施の形態3について説明する。本実施の形態のセンサ基板31・41・51・61には、被検査体20が集積回路センサ4の表面と接触する圧力を調整するスペーサ32・33が備えられている点において実施の形態1および2とは異なり、その他については実施の形態1および2において説明したとおりである。説明の便宜上、実施の形態1および2の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。
次に、図9に基づいて、本発明の実施の形態4について説明する。本実施の形態のセンサ基板71においては、集積回路センサ4が搭載される基板がフレキシブル基板72(柔軟性基板ともいう)である点において実施の形態1から3とは異なり、その他については実施の形態1から3において説明したとおりである。説明の便宜上、実施の形態1から3の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。
次に、図10に基づいて、本発明の実施の形態5について説明する。本実施の形態のセンサ基板81には、集積回路センサ4の周囲を覆い、かつ、集積回路センサ4と接する一端部が、集積回路センサ4の表面の高さと同じであるとともに、最大高さである樹脂層82が形成されている点において実施の形態1から4とは異なり、その他については実施の形態1から4において説明したとおりである。説明の便宜上、実施の形態1から4の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。
次に、図11に基づいて、本発明の実施の形態6について説明する。本実施の形態は、センサ基板1と、弾性体としてのバネ93が固定されているケース92(筐体)とを備えたセンサ装置91に関するという点において実施の形態1から5とは異なり、その他については実施の形態1から5において説明したとおりである。説明の便宜上、実施の形態1から5の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。
本発明の態様1における集積回路センサは、被検査体を表面に接触または、上記被検査体を上記表面の近傍に置いて、上記被検査体の物性を検知する集積回路センサであって、上記集積回路センサの内部と上記集積回路センサの外部とを電気的に接続する接続部は、上記集積回路センサの内部において、上記表面と対向する上記集積回路センサの裏面に到るように形成されていることを特徴としている。
2 プリント基板(第1基板)
3 プリント基板電極(電極)
4 集積回路センサ
5 シリコン基板(半導体基板)
6 発振器(発振部)
7 回路素子
8 インダクタ
9 保護層
10 メタル配線
11 シリコン貫通電極(接続部)
12 バンプ(接続固定部材)
13 周波数読出し回路(検出部)
14 電流源
15 キャパシタ
16 共振器(共振回路)
17 差動回路
20 被検査体
21 センサ基板
22 プリント基板(第1基板)
23 プリント基板電極(電極)
24 プリント基板(第2基板)
25 ワイヤ
26 樹脂(固定部材)
31 センサ基板
32 スペーサ
33 スペーサ
41 センサ基板
51 センサ基板
61 センサ基板
71 センサ基板
72 フレキシブル基板(柔軟性基板)
73 フレキシブル基板電極
80 被検査体
81 センサ基板
82 樹脂層
91 センサ装置
92 ケース(筐体)
92a 凸部
93 バネ(弾性体)
94 ワイヤ
M1 トランジスタ
M2 トランジスタ
Claims (5)
- 被検査体を表面に接触または、上記被検査体を上記表面の近傍に置いて、上記被検査体の物性を検知する集積回路センサであって、
上記集積回路センサはその内部に上記被検査体の物性を検知するための回路を有し、
上記回路と上記集積回路センサの外部とを電気的に接続する接続部は、上記集積回路センサの内部において、上記表面と対向する上記集積回路センサの裏面に到るように形成されていることを特徴とする集積回路センサ。 - 上記回路は、共振器を用いた発振回路により上記被検査体の物性を検知することを特徴とする請求項1に記載の集積回路センサ。
- 請求項1に記載の集積回路センサと、電極または配線を備えた第1基板とを備えており、
上記第1基板の電極または配線と上記接続部とは、接続固定部材を介して電気的に接続されており、
上記第1基板上の上記集積回路センサの周囲には、上記被検査体を上記第1基板に押し付けた時に、上記被検査体が上記集積回路センサと接触する圧力を調整するスペーサが備えられていることを特徴とするセンサ基板。 - 請求項1に記載の集積回路センサと、電極または配線を備えた第1基板とを備えており、
上記第1基板の電極または配線と上記接続部とは、接続固定部材を介して電気的に接続されており、
上記第1基板はフレキシブル基板であることを特徴とするセンサ基板。 - 請求項1に記載の集積回路センサと、電極または配線を備えた第1基板とを備えており、
上記第1基板の電極または配線と上記接続部とは、接続固定部材を介して電気的に接続されており、
上記第1基板上には、上記集積回路センサの周囲を覆い、かつ、上記集積回路センサと接する一端部が、上記集積回路センサの表面の高さと同じであるとともに、最大高さである樹脂層が形成されていることを特徴とするセンサ基板。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015175092 | 2015-09-04 | ||
JP2015175092 | 2015-09-04 | ||
PCT/JP2016/067316 WO2017038196A1 (ja) | 2015-09-04 | 2016-06-10 | 集積回路センサおよびセンサ基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017038196A1 JPWO2017038196A1 (ja) | 2018-05-10 |
JP6580689B2 true JP6580689B2 (ja) | 2019-09-25 |
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JP3326791B2 (ja) * | 1999-08-10 | 2002-09-24 | 花王株式会社 | 皮膚性状測定プローブ |
NO315017B1 (no) * | 2000-06-09 | 2003-06-23 | Idex Asa | Sensorbrikke, s¶rlig for måling av strukturer i en fingeroverflate |
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JP2005338980A (ja) * | 2004-05-25 | 2005-12-08 | Sony Corp | 指紋センサ装置および指紋センサ装置の製造方法 |
JP2009080091A (ja) * | 2007-09-04 | 2009-04-16 | Moritex Corp | 静電容量式水分センサ |
JP2010101864A (ja) * | 2008-10-27 | 2010-05-06 | Toyohashi Univ Of Technology | センサチップ、センサチップ装着ヘッド及び検出装置 |
KR101805676B1 (ko) * | 2009-03-23 | 2017-12-07 | 소나베이션, 인크. | 압전 세라믹 식별 장치용의 개량된 멀티플렉서 |
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WO2015009762A1 (en) * | 2013-07-15 | 2015-01-22 | Qualcomm Incorporated | Sensor array with receiver bias electrode |
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US10055631B1 (en) * | 2015-11-03 | 2018-08-21 | Synaptics Incorporated | Semiconductor package for sensor applications |
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